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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001104659-13-059171
Filing Date
2013-08-02
Accepted
2013-08-02 08:28:00
Documents
13
Period of Report
2013-06-30

Document Format Files

Seq Description Document Type Size
1 10-Q a13-12901_110q.htm 10-Q 915458
2 EX-10.1 a13-12901_1ex10d1.htm EX-10.1 114697
3 EX-10.2 a13-12901_1ex10d2.htm EX-10.2 120557
4 EX-31.1 a13-12901_1ex31d1.htm EX-31.1 12976
5 EX-31.2 a13-12901_1ex31d2.htm EX-31.2 12850
6 EX-32.1 a13-12901_1ex32d1.htm EX-32.1 5202
7 EX-32.2 a13-12901_1ex32d2.htm EX-32.2 5221
  Complete submission text file 0001104659-13-059171.txt   7182769

Data Files

Seq Description Document Type Size
8 XBRL INSTANCE DOCUMENT acls-20130630.xml EX-101.INS 432245
9 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT acls-20130630.xsd EX-101.SCH 76908
10 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT acls-20130630_cal.xml EX-101.CAL 50947
11 XBRL TAXONOMY EXTENSION LABELS LINKBASE DOCUMENT acls-20130630_lab.xml EX-101.LAB 1212992
12 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT acls-20130630_pre.xml EX-101.PRE 570509
13 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT acls-20130630_def.xml EX-101.DEF 280216
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 131004688
SIC: 3559 Special Industry Machinery, NEC