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Filing Detail
Form S-8 - Securities to be offered to employees in employee benefit plans:
SEC Accession No. 0001104659-13-046009
Filing Date
2013-05-31
Accepted
2013-05-31 10:51:49
Documents
4
Effectiveness Date
2013-05-31

Document Format Files

Seq Description Document Type Size
1 S-8 a13-12912_1s8.htm S-8 88454
2 EX-5.1 a13-12912_1ex5d1.htm EX-5.1 7115
3 EX-10.1 a13-12912_1ex10d1.htm EX-10.1 72310
4 EX-23.2 a13-12912_1ex23d2.htm EX-23.2 3846
  Complete submission text file 0001104659-13-046009.txt   172806
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: S-8 | Act: 33 | File No.: 333-188967 | Film No.: 13883873
SIC: 3559 Special Industry Machinery, NEC