Subsequent Events (Details) (Subsequent event, Dry strip product line, intellectual property rights and certain assets, USD $) In Millions, unless otherwise specified	1 Months Ended
Apr. 30, 2013
Subsequent event \| Dry strip product line, intellectual property rights and certain assets
Subsequent events
Consideration for achieving a milestone	$ 0.8

Represents the contingent consideration received relating to the sale of assets on achievement of milestone under agreement.

No definition available.

Name:	acls_DispositionOfAssetsContingentConsiderationReceivedOnAchievementOfMilestone
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration