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Form DEFA14A - Additional definitive proxy soliciting materials and Rule 14(a)(12) material:
SEC Accession No. 0001104659-13-037473
Filing Date
2013-05-06
Accepted
2013-05-06 11:10:55
Documents
1
Effectiveness Date
2013-05-06

Document Format Files

Seq Description Document Type Size
1 DEFA14A a13-8326_5defa14a.htm DEFA14A 34925
  Complete submission text file 0001104659-13-037473.txt   36013
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: DEFA14A | Act: 34 | File No.: 000-30941 | Film No.: 13814898
SIC: 3559 Special Industry Machinery, NEC