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Filing Detail
Form S-8 - Securities to be offered to employees in employee benefit plans:
SEC Accession No. 0001104659-12-040602
Filing Date
2012-05-30
Accepted
2012-05-30 10:33:39
Documents
4
Effectiveness Date
2012-05-30

Document Format Files

Seq Description Document Type Size
1 S-8 a12-12723_1s8.htm S-8 94998
2 EX-5.1 a12-12723_1ex5d1.htm EX-5.1 5851
3 EX-23.1 a12-12723_1ex23d1.htm EX-23.1 2631
4 EX-99 a12-12723_1ex99.htm EX-99 70719
  Complete submission text file 0001104659-12-040602.txt   175280
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: S-8 | Act: 33 | File No.: 333-181750 | Film No.: 12876105
SIC: 3559 Special Industry Machinery, NEC