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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001104659-11-061003
Filing Date
2011-11-04
Accepted
2011-11-04 12:57:08
Documents
11
Period of Report
2011-09-30

Document Format Files

Seq Description Document Type Size
1 10-Q a11-25105_110q.htm 10-Q 516225
2 EX-31.1 a11-25105_1ex31d1.htm EX-31.1 11518
3 EX-31.2 a11-25105_1ex31d2.htm EX-31.2 11782
4 EX-32.1 a11-25105_1ex32d1.htm EX-32.1 4758
5 EX-32.2 a11-25105_1ex32d2.htm EX-32.2 4744
  Complete submission text file 0001104659-11-061003.txt   1995307

Data Files

Seq Description Document Type Size
6 XBRL INSTANCE DOCUMENT acls-20110930.xml EX-101.INS 186184
7 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT acls-20110930.xsd EX-101.SCH 12350
8 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT acls-20110930_cal.xml EX-101.CAL 38148
9 XBRL TAXONOMY EXTENSION LABELS LINKBASE DOCUMENT acls-20110930_lab.xml EX-101.LAB 220391
10 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT acls-20110930_pre.xml EX-101.PRE 98048
11 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT acls-20110930_def.xml EX-101.DEF 66993
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 111180274
SIC: 3559 Special Industry Machinery, NEC