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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001104659-11-026844
Filing Date
2011-05-06
Accepted
2011-05-06 16:12:29
Documents
6
Period of Report
2011-03-31

Document Format Files

Seq Description Document Type Size
1 10-Q a11-8805_110q.htm 10-Q 416516
2 EX-10.1 a11-8805_1ex10d1.htm EX-10.1 544081
3 EX-31.1 a11-8805_1ex31d1.htm EX-31.1 13875
4 EX-31.2 a11-8805_1ex31d2.htm EX-31.2 13870
5 EX-32.1 a11-8805_1ex32d1.htm EX-32.1 5508
6 EX-32.2 a11-8805_1ex32d2.htm EX-32.2 5509
  Complete submission text file 0001104659-11-026844.txt   1000448
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 11819501
SIC: 3559 Special Industry Machinery, NEC