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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001104659-07-037632
Filing Date
2007-05-09
Accepted
2007-05-09 17:06:01
Documents
5
Period of Report
2007-03-31

Document Format Files

Seq Description Document Type Size
1 10-Q a07-10809_110q.htm 10-Q 487244
2 EX-31.1 a07-10809_1ex31d1.htm EX-31.1 11126
3 EX-31.2 a07-10809_1ex31d2.htm EX-31.2 11136
4 EX-32.1 a07-10809_1ex32d1.htm EX-32.1 5293
5 EX-32.2 a07-10809_1ex32d2.htm EX-32.2 5548
  Complete submission text file 0001104659-07-037632.txt   521850
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 07833338
SIC: 3559 Special Industry Machinery, NEC