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Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0001104659-07-019614
Filing Date
2007-03-15
Accepted
2007-03-15 17:10:02
Documents
9
Period of Report
2006-12-31

Document Format Files

Seq Description Document Type Size
1 10-K a07-5787_110k.htm 10-K 1976724
2 EX-10.10 a07-5787_1ex10d10.htm EX-10.10 13186
3 EX-10.11 a07-5787_1ex10d11.htm EX-10.11 19305
4 EX-21.1 a07-5787_1ex21d1.htm EX-21.1 6416
5 EX-23.1 a07-5787_1ex23d1.htm EX-23.1 2787
6 EX-31.1 a07-5787_1ex31d1.htm EX-31.1 9072
7 EX-31.2 a07-5787_1ex31d2.htm EX-31.2 9129
8 EX-32.1 a07-5787_1ex32d1.htm EX-32.1 4610
9 EX-32.2 a07-5787_1ex32d2.htm EX-32.2 4496
  Complete submission text file 0001104659-07-019614.txt   2047226
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 000-30941 | Film No.: 07697222
SIC: 3559 Special Industry Machinery, NEC