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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001104659-06-072484
Filing Date
2006-11-08
Accepted
2006-11-08 09:02:22
Documents
5
Period of Report
2006-09-30

Document Format Files

Seq Description Document Type Size
1 QUARTERLY REPORT PURSUANT TO SECTIONS 13 OR 15(D) a06-21666_110q.htm 10-Q 692245
2 EX-31 a06-21666_1ex31d1.htm EX-31.1 11812
3 EX-31 a06-21666_1ex31d2.htm EX-31.2 11229
4 EX-32 a06-21666_1ex32d1.htm EX-32.1 7291
5 EX-32 a06-21666_1ex32d2.htm EX-32.2 6473
  Complete submission text file 0001104659-06-072484.txt   730556
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 061195656
SIC: 3559 Special Industry Machinery, NEC