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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001104659-06-052549
Filing Date
2006-08-08
Accepted
2006-08-08 16:43:38
Documents
5
Period of Report
2006-06-30

Document Format Files

Seq Description Document Type Size
1 QUARTERLY REPORT PURSUANT TO SECTIONS 13 OR 15(D) a06-15324_110q.htm 10-Q 699118
2 EX-31 a06-15324_1ex31d1.htm EX-31.1 15420
3 EX-31 a06-15324_1ex31d2.htm EX-31.2 15439
4 EX-32 a06-15324_1ex32d1.htm EX-32.1 4660
5 EX-32 a06-15324_1ex32d2.htm EX-32.2 4668
  Complete submission text file 0001104659-06-052549.txt   740809
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 061013689
SIC: 3559 Special Industry Machinery, NEC