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Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0001104659-06-016419
Filing Date
2006-03-14
Accepted
2006-03-14 13:17:05
Documents
10
Period of Report
2005-12-31

Document Format Files

Seq Description Document Type Size
1 ANNUAL REPORT PURSUANT TO SECTION 13 AND 15(D) a06-2557_110k.htm 10-K 1883993
2 MATERIAL CONTRACTS a06-2557_1ex10d12.htm EX-10.12 33121
3 MATERIAL CONTRACTS a06-2557_1ex10d13.htm EX-10.13 5887
4 SUBSIDIARIES OF THE REGISTRANT a06-2557_1ex21d1.htm EX-21.1 10953
5 CONSENTS OF EXPERTS AND COUNSEL a06-2557_1ex23d1.htm EX-23.1 3204
6 302 CERTIFICATION a06-2557_1ex31d1.htm EX-31.1 12144
7 302 CERTIFICATION a06-2557_1ex31d2.htm EX-31.2 11967
8 906 CERTIFICATION a06-2557_1ex32d1.htm EX-32.1 5535
9 906 CERTIFICATION a06-2557_1ex32d2.htm EX-32.2 5587
10 EXHIBIT 99 a06-2557_1ex99d2.htm EX-99.2 20957
  Complete submission text file 0001104659-06-016419.txt   1994850
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 000-30941 | Film No.: 06684294
SIC: 3559 Special Industry Machinery, NEC