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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001104659-05-022140
Filing Date
2005-05-10
Accepted
2005-05-10 15:31:16
Documents
6
Period of Report
2005-03-31

Document Format Files

Seq Description Document Type Size
1 10-Q a05-8126_110q.htm 10-Q 610148
2 EX-31.1 a05-8126_1ex31d1.htm EX-31.1 21664
3 EX-31.2 a05-8126_1ex31d2.htm EX-31.2 22364
4 EX-32.1 a05-8126_1ex32d1.htm EX-32.1 5621
5 EX-32.2 a05-8126_1ex32d2.htm EX-32.2 5619
6 EX-99.1 a05-8126_1ex99d1.htm EX-99.1 57434
  Complete submission text file 0001104659-05-022140.txt   724249
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 05816314
SIC: 3559 Special Industry Machinery, NEC