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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001104659-04-034732
Filing Date
2004-11-09
Accepted
2004-11-09 16:08:46
Documents
7
Period of Report
2004-09-30

Document Format Files

Seq Description Document Type Size
1 10-Q a04-12973_110q.htm 10-Q 636665
2 EX-10.1 a04-12973_1ex10d1.htm EX-10.1 36354
3 EX-10.2 a04-12973_1ex10d2.htm EX-10.2 31279
4 EX-31.1 a04-12973_1ex31d1.htm EX-31.1 11039
5 EX-31.2 a04-12973_1ex31d2.htm EX-31.2 11598
6 EX-32.1 a04-12973_1ex32d1.htm EX-32.1 6357
7 EX-32.2 a04-12973_1ex32d2.htm EX-32.2 6220
  Complete submission text file 0001104659-04-034732.txt   741722
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 041129747
SIC: 3559 Special Industry Machinery, NEC