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Filing Detail
Form 10-K/A - Annual report [Section 13 and 15(d), not S-K Item 405]: [Amend]
SEC Accession No. 0001104659-04-018418
Filing Date
2004-06-29
Accepted
2004-06-29 13:57:15
Documents
6
Period of Report
2003-12-31

Document Format Files

Seq Description Document Type Size
1 10-K/A a04-7347_110ka.htm 10-K/A 796203
2 EX-23.2 a04-7347_1ex23d2.htm EX-23.2 4768
3 EX-31.1 a04-7347_1ex31d1.htm EX-31.1 9975
4 EX-31.2 a04-7347_1ex31d2.htm EX-31.2 10348
5 EX-32.1 a04-7347_1ex32d1.htm EX-32.1 4827
6 EX-32.2 a04-7347_1ex32d2.htm EX-32.2 4866
  Complete submission text file 0001104659-04-018418.txt   833053
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K/A | Act: 34 | File No.: 000-30941 | Film No.: 04888003
SIC: 3559 Special Industry Machinery, NEC