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Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0001104659-22-039803
Filing Date
2022-03-30
Accepted
2022-03-30 09:14:27
Documents
10
Period of Report
2022-05-10

Document Format Files

Seq Description Document Type Size
1 DEF 14A tm223427-1_def14a.htm DEF 14A 916544
2 GRAPHIC lg_axcelis-4c.jpg GRAPHIC 23950
3 GRAPHIC tm223427d1-bc_ceo4c.jpg GRAPHIC 79220
4 GRAPHIC tm223427d1-bc_neo4c.jpg GRAPHIC 61003
5 GRAPHIC tm223427d1-bc_relevant4c.jpg GRAPHIC 86746
6 GRAPHIC tm223427d1-fc_boardcomm4c.jpg GRAPHIC 160439
7 GRAPHIC tm223427d1-pc_boardind4c.jpg GRAPHIC 59465
8 GRAPHIC tm223427d1-pc_nominees4c.jpg GRAPHIC 31999
9 GRAPHIC tm223427d1-px_01page4c.jpg GRAPHIC 1007051
10 GRAPHIC tm223427d1-px_02page4c.jpg GRAPHIC 310305
  Complete submission text file 0001104659-22-039803.txt   3415798
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: DEF 14A | Act: 34 | File No.: 000-30941 | Film No.: 22783473
SIC: 3559 Special Industry Machinery, NEC