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Filing Detail
Form S-3 - Registration statement under Securities Act of 1933:
SEC Accession No. 0001047469-13-010846
Filing Date
2013-11-25
Accepted
2013-11-25 16:23:31
Documents
9

Document Format Files

Seq Description Document Type Size
1 S-3 a2217466zs-3.htm S-3 208910
2 EX-4.1 a2217466zex-4_1.htm EX-4.1 539761
3 EX-5.1 a2217466zex-5_1.htm EX-5.1 29069
4 EX-12.1 a2217466zex-12_1.htm EX-12.1 44628
5 EX-23.1 a2217466zex-23_1.htm EX-23.1 3285
6 G120561.JPG g120561.jpg GRAPHIC 9342
7 G246862KII001.JPG g246862kii001.jpg GRAPHIC 4103
8 G246862KII002.JPG g246862kii002.jpg GRAPHIC 3172
9 G246862KII003.JPG g246862kii003.jpg GRAPHIC 5082
  Complete submission text file 0001047469-13-010846.txt   857219
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: S-3 | Act: 33 | File No.: 333-192533 | Film No.: 131241296
SIC: 3559 Special Industry Machinery, NEC