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Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0001047469-13-003375
Filing Date
2013-03-26
Accepted
2013-03-26 08:36:16
Documents
5
Period of Report
2013-05-14
Effectiveness Date
2013-03-26

Document Format Files

Seq Description Document Type Size
1 DEF 14A a2213537zdef14a.htm DEF 14A 573268
2 G471830.JPG g471830.jpg GRAPHIC 13748
3 G613348.JPG g613348.jpg GRAPHIC 5621
4 G15712BII001.GIF g15712bii001.gif GRAPHIC 110832
5 G15712BII002.GIF g15712bii002.gif GRAPHIC 66529
  Complete submission text file 0001047469-13-003375.txt   846037
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: DEF 14A | Act: 34 | File No.: 000-30941 | Film No.: 13715496
SIC: 3559 Special Industry Machinery, NEC