Gain on Sale of Dry Strip Assets and Intellectual Property (Details) (USD $)	12 Months Ended
	Dec. 31, 2012	Dec. 03, 2012
Sale of assets
Gain on sale	$ 7,904,000
Proceeds	8,716,000
Dry strip product line, intellectual property rights and certain assets
Sale of assets
Purchase price		10,700,000
Contingent purchase price		2,000,000
Gain on sale	7,900,000
Proceeds	8,700,000
Offset against proceeds, product and material costs relating to assets sold	$ 800,000
Dry strip product line, intellectual property rights and certain assets | Period through September 2013
Sale of assets
Size of dry strip wafer equipment and products, Company license to make and sell (in millimeters)	300
Dry strip product line, intellectual property rights and certain assets | Period through December 2015
Sale of assets
Size of dry strip wafer equipment and products, Company license to make and sell (in millimeters)	200