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Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0001047469-12-003171
Filing Date
2012-03-23
Accepted
2012-03-23 08:19:22
Documents
7
Period of Report
2012-05-02
Effectiveness Date
2012-03-23

Document Format Files

Seq Description Document Type Size
1 DEF 14A a2208159zdef14a.htm DEF 14A 596559
3 G471830.JPG g471830.jpg GRAPHIC 13748
4 G613348.JPG g613348.jpg GRAPHIC 5621
5 G379746.JPG g379746.jpg GRAPHIC 34953
6 G15132BCI001.GIF g15132bci001.gif GRAPHIC 104625
7 G15132BCI002.GIF g15132bci002.gif GRAPHIC 71197
8 G15132BEI001.GIF g15132bei001.gif GRAPHIC 2265
  Complete submission text file 0001047469-12-003171.txt   918781
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: DEF 14A | Act: 34 | File No.: 000-30941 | Film No.: 12710484
SIC: 3559 Special Industry Machinery, NEC