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Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0001047469-12-001874
Filing Date
2012-02-29
Accepted
2012-02-29 14:01:23
Documents
18
Period of Report
2011-12-31

Document Format Files

Seq Description Document Type Size
1 10-K a2207604z10-k.htm 10-K 831119
2 EX-10.4 a2207604zex-10_4.htm EX-10.4 123906
3 EX-10.10 a2207604zex-10_10.htm EX-10.10 14717
4 EX-10.11 a2207604zex-10_11.htm EX-10.11 17868
5 EX-10.14 a2207604zex-10_14.htm EX-10.14 10976
6 EX-10.16 a2207604zex-10_16.htm EX-10.16 103906
7 EX-21.1 a2207604zex-21_1.htm EX-21.1 11720
8 EX-23.1 a2207604zex-23_1.htm EX-23.1 5560
9 EX-31.1 a2207604zex-31_1.htm EX-31.1 12682
10 EX-31.2 a2207604zex-31_2.htm EX-31.2 11411
11 EX-32.1 a2207604zex-32_1.htm EX-32.1 5256
12 EX-32.2 a2207604zex-32_2.htm EX-32.2 4828
  Complete submission text file 0001047469-12-001874.txt   3968614

Data Files

Seq Description Document Type Size
13 EX-101.INS acls-20111231.xml EX-101.INS 489933
14 EX-101.SCH acls-20111231.xsd EX-101.SCH 21385
15 EX-101.CAL acls-20111231_cal.xml EX-101.CAL 57885
16 EX-101.LAB acls-20111231_lab.xml EX-101.LAB 306706
17 EX-101.PRE acls-20111231_pre.xml EX-101.PRE 147225
18 EX-101.DEF acls-20111231_def.xml EX-101.DEF 92603
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 000-30941 | Film No.: 12651593
SIC: 3559 Special Industry Machinery, NEC