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Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0001047469-11-002577
Filing Date
2011-03-24
Accepted
2011-03-24 08:47:21
Documents
5
Period of Report
2011-04-26
Effectiveness Date
2011-03-24

Document Format Files

Seq Description Document Type Size
1 DEF 14A a2202448zdef14a.htm DEF 14A 511608
2 G471830.JPG g471830.jpg GRAPHIC 13748
3 G613348.JPG g613348.jpg GRAPHIC 5621
4 G25602BCI001.GIF g25602bci001.gif GRAPHIC 110229
5 G25602BCI002.GIF g25602bci002.gif GRAPHIC 71922
  Complete submission text file 0001047469-11-002577.txt   790975
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: DEF 14A | Act: 34 | File No.: 000-30941 | Film No.: 11707900
SIC: 3559 Special Industry Machinery, NEC