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Filing Detail
Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0001047469-11-002119
Filing Date
2011-03-14
Accepted
2011-03-14 17:01:10
Documents
9
Period of Report
2010-12-31

Document Format Files

Seq Description Document Type Size
1 10-K a2202563z10-k.htm 10-K 881140
2 EX-10.9 a2202563zex-10_9.htm EX-10.9 9431
3 EX-10.10 a2202563zex-10_10.htm EX-10.10 10893
4 EX-21.1 a2202563zex-21_1.htm EX-21.1 5435
5 EX-23.1 a2202563zex-23_1.htm EX-23.1 3371
6 EX-31.1 a2202563zex-31_1.htm EX-31.1 7743
7 EX-31.2 a2202563zex-31_2.htm EX-31.2 7733
8 EX-32.1 a2202563zex-32_1.htm EX-32.1 4045
9 EX-32.2 a2202563zex-32_2.htm EX-32.2 4049
  Complete submission text file 0001047469-11-002119.txt   934929
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 000-30941 | Film No.: 11686152
SIC: 3559 Special Industry Machinery, NEC