EDGAR Filing Documents for 0001047469-10-002204

Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:

SEC Accession No. 0001047469-10-002204

Filing Date

2010-03-15

Accepted

2010-03-15 15:58:35

Documents

Period of Report

2009-12-31

Document Format Files

Seq	Description	Document	Type	Size
1	10-K	a2197155z10-k.htm	10-K	943863
2	EXHIBIT 10.2	a2197155zex-10_2.htm	EX-10.2	14847
3	EXHIBIT 10.9	a2197155zex-10_9.htm	EX-10.9	10242
4	EXHIBIT 10.10	a2197155zex-10_10.htm	EX-10.10	10950
5	EXHIBIT 21.1	a2197155zex-21_1.htm	EX-21.1	5289
6	EXHIBIT 23.1	a2197155zex-23_1.htm	EX-23.1	3365
7	EXHIBIT 31.1	a2197155zex-31_1.htm	EX-31.1	7742
8	EXHIBIT 31.2	a2197155zex-31_2.htm	EX-31.2	7813
9	EXHIBIT 32.1	a2197155zex-32_1.htm	EX-32.1	4044
10	EXHIBIT 32.2	a2197155zex-32_2.htm	EX-32.2	4066
	Complete submission text file	0001047469-10-002204.txt		1013723

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915

Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001

AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)