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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001047469-09-005327
Filing Date
2009-05-11
Accepted
2009-05-11 09:57:23
Documents
5
Period of Report
2009-03-31

Document Format Files

Seq Description Document Type Size
1 10-Q a2192866z10-q.htm 10-Q 261461
2 EX-31.1 a2192866zex-31_1.htm EX-31.1 8289
3 EX-31.2 a2192866zex-31_2.htm EX-31.2 8311
4 EX-32.1 a2192866zex-32_1.htm EX-32.1 4186
5 EX-32.2 a2192866zex-32_2.htm EX-32.2 4203
  Complete submission text file 0001047469-09-005327.txt   287951
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 09812982
SIC: 3559 Special Industry Machinery, NEC