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Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0001047469-09-003537
Filing Date
2009-03-31
Accepted
2009-03-31 16:53:26
Documents
9
Period of Report
2008-12-31

Document Format Files

Seq Description Document Type Size
1 10-K a2191974z10-k.htm 10-K 959272
2 EXHIBIT 10.9 a2191974zex-10_9.htm EX-10.9 8812
3 EXHIBIT 10.10 a2191974zex-10_10.htm EX-10.10 9873
4 EXHIBIT 21.1 a2191974zex-21_1.htm EX-21.1 5663
5 EXHIBIT 23.1 a2191974zex-23_1.htm EX-23.1 4098
6 EXHIBIT 31.1 a2191974zex-31_1.htm EX-31.1 7532
7 EXHIBIT 31.2 a2191974zex-31_2.htm EX-31.2 7555
8 EXHIBIT 32.1 a2191974zex-32_1.htm EX-32.1 3828
9 EXHIBIT 32.2 a2191974zex-32_2.htm EX-32.2 3845
  Complete submission text file 0001047469-09-003537.txt   1011979
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 000-30941 | Film No.: 09719735
SIC: 3559 Special Industry Machinery, NEC