QuickLinks -- Click here to rapidly navigate through this document

Exhibit 10.11

Axcelis Technologies, Inc.
Non-Employee Director Cash Compensation at March 1, 2008

        This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the "Company") and each of its non-employee directors. Axcelis provides both cash retainers and meeting fees to its non-employee directors, as follows:

Annual Retainers (paid quarterly in advance)
Board Member Position	Amount
Lead Director	$	50,000
Non-Employee Board Member (not Lead Director)	$	30,000
Audit Committee Chair*	$	15,000
Compensation Committee Chair*	$	10,000
Nominating Committee Chair*	$	7,500

*

Retainers for Committee Chairs are in addition to the retainer payable to all non-employee Board members.

Meeting Fees (payable quarterly in arrears)
Meeting Type	Amount Per Meeting
In Person Board Meetings	$	2,000
Telephone Board Meetings	$	1,000
In Person or Telephone Committee Meetings**	$	1,000

**

Committee meeting fees are paid only to committee members, and not to other Board me members, attending committee meetings.

        Non-employee directors also receive reimbursement of out-of-pocket expenses incurred in attending Board and committee meetings. Non-employee directors do not receive any Company-paid perquisites.

QuickLinks

Exhibit 10.11

Axcelis Technologies, Inc. Non-Employee Director Cash Compensation at March 1, 2008