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Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0001047469-06-004329
Filing Date
2006-03-31
Accepted
2006-03-31 11:26:55
Documents
5
Period of Report
2006-05-03
Effectiveness Date
2006-03-31

Document Format Files

Seq Description Document Type Size
1 DEF 14A a2168328zdef14a.htm DEF 14A 183835
2 G363733.JPG g363733.jpg GRAPHIC 4803
3 G217356.JPG g217356.jpg GRAPHIC 2625
4 G823947.JPG g823947.jpg GRAPHIC 22099
5 G115786.JPG g115786.jpg GRAPHIC 4110
  Complete submission text file 0001047469-06-004329.txt   232280
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: DEF 14A | Act: 34 | File No.: 000-30941 | Film No.: 06726207
SIC: 3559 Special Industry Machinery, NEC