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Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0001047469-05-008735
Filing Date
2005-04-01
Accepted
2005-04-01 10:31:27
Documents
5
Period of Report
2005-05-12
Effectiveness Date
2005-04-01

Document Format Files

Seq Description Document Type Size
1 DEF 14A a2154279zdef14a.htm DEF 14A 175915
2 G363733.JPG g363733.jpg GRAPHIC 6646
3 G217356.JPG g217356.jpg GRAPHIC 3646
4 G448588.JPG g448588.jpg GRAPHIC 27462
5 G325153.JPG g325153.jpg GRAPHIC 6468
  Complete submission text file 0001047469-05-008735.txt   222131
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: DEF 14A | Act: 34 | File No.: 000-30941 | Film No.: 05723302
SIC: 3559 Special Industry Machinery, NEC