SEC Seal
SEC Banner
Search the Next-Generation EDGAR System
Filing Detail
Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0001047469-04-008392
Filing Date
2004-03-18
Accepted
2004-03-18 07:31:56
Documents
3
Period of Report
2004-04-29
Effectiveness Date
2004-03-18

Document Format Files

Seq Description Document Type Size
1 DEF 14A a2130942zdef14a.htm DEF 14A 171341
3 G325153.JPG g325153.jpg GRAPHIC 5701
4 G451054.JPG g451054.jpg GRAPHIC 33081
  Complete submission text file 0001047469-04-008392.txt   211866
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: DEF 14A | Act: 34 | File No.: 000-30941 | Film No.: 04676672
SIC: 3559 Special Industry Machinery, NEC