1


                                                                  Exhibit 23.1
                        Consent of Independent Auditors


We consent to the reference to our firm under the captions "Summary Historical
Financial Data," "Selected Historical Combined Financial Data," and "Experts,"
and to the use of our report dated May 3, 2000, in Amendment No. 1 to the
Registration Statement (Form S-1 No. 333-36330) and related Prospectus of
Axcelis Technologies, Inc. for the registration of shares of its common stock.



Cleveland, Ohio
June 12, 2000                                              /s/ Ernst & Young LLP