POWER OF ATTORNEY

     We, the undersigned directors and officers of Axcelis  Technologies,  Inc.,
do hereby  constitute  and appoint Brian R.  Bachman,  Mary G. Puma and Kevin M.
Bisson,  or any of them, our true and lawful attorneys and agents, to do any and
all acts and things in our name and on our behalf in our capacities as directors
and officers and to execute any and all  instruments  for us and in our names in
the capacities indicated below, which said attorneys and agents, or any of them,
may deem  necessary or advisable to enable said  corporation  to comply with the
Securities Act of 1933, as amended, and any rules,  regulations and requirements
of the Securities and Exchange  Commission,  in connection with the registration
of securities to be issued under the Axcelis  Technologies,  Inc. Employee Stock
Purchase  Plan and  under  the  Axcelis  Technologies,  Inc.  2000  Stock  Plan,
including specifically,  but without limitation, power and authority to sign for
us or any of us in our  names in the  capacities  indicated  below,  any and all
registration  statements and amendments  (including  post-effective  amendments)
thereto, and we do hereby ratify and confirm all that said attorneys and agents,
or any of them, shall do or cause to be done by virtue hereof.

     This power of attorney  shall not apply to any  registration  statement  or
amendment filed after July 31, 2001.

     IN WITNESS WHEREOF, this Power of Attorney has been signed as  of  the 15th
day of October, 2000.

     SIGNATURE                         CAPACITY                       DATE
     ---------                         --------                       ----

/s/ Brian R. Bachman
--------------------------      Vice Chairman and Chief        October 15, 2000
Brian R. Bachman                Executive Officer
                                (Principal Executive Officer)


/s/ Mary G. Puma
--------------------------      President, Chief Operating     October 15, 2000
Mary G. Puma                    Officer and Director


/s/ Cornelius F. Moses, III
---------------------------     Executive Vice President and   October 15, 2000
Cornelius F. Moses, III         Chief Financial Officer
                                (Principal Financial and
                                Accounting Officer)


 /s/ Stephen R. Hardis
--------------------------      Chairman of the Board          October 15, 2000
Stephen R. Hardis


/s/ Alexander M. Cutler
--------------------------      Director                       October 15, 2000
Alexander M. Cutler



--------------------------      Director
Ned C. Lautenbach


/s/ Philip S. Paul
--------------------------      Director                       October 15, 2000
Philip S. Paul


/s/ Naoki Takahashi
--------------------------      Director                       October 15, 2000
Naoki Takahashi


/s/ Gary L. Tooker
--------------------------      Director                       October 15, 2000
Gary L. Tooker