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Acquisitions - SCI Instruments (Details) - USD ($)
$ in Millions
Aug. 24, 2021
Sep. 30, 2021
Dec. 31, 2020
Allocation of Consideration Transferred:      
Goodwill   $ 324.2 $ 320.4
SCI Instruments      
Consideration Transferred:      
Contingent consideration $ 1.0    
Allocation of Consideration Transferred:      
Purchase price 28.0    
Potential additional consideration $ 4.0    
Amortization period for intangible assets acquired 10 years    
SCI Instruments | Technology      
Allocation of Consideration Transferred:      
Amortization period for intangible assets acquired 10 years    
SCI Instruments | Customer relationships      
Allocation of Consideration Transferred:      
Amortization period for intangible assets acquired 9 years    
SCI Instruments | BSI NANO      
Consideration Transferred:      
Cash paid $ 28.0    
Fair value of contingent consideration 1.0    
Working capital adjustment (1.0)    
Cash acquired 28.0    
Allocation of Consideration Transferred:      
Inventories 1.0    
Other current and non-current assets 1.0    
Goodwill 12.6    
Liabilities assumed (1.7)    
Total consideration transferred 28.0    
SCI Instruments | BSI NANO | Technology      
Allocation of Consideration Transferred:      
Intangible assets 7.1    
SCI Instruments | BSI NANO | Customer relationships      
Allocation of Consideration Transferred:      
Intangible assets 6.4    
SCI Instruments | BSI NANO | Backlog      
Allocation of Consideration Transferred:      
Intangible assets 1.2    
SCI Instruments | BSI NANO | Trade name      
Allocation of Consideration Transferred:      
Intangible assets $ 0.4