The carrying amount as of the balance sheet date of the combined total of loss contingency liabilities.

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 450

-SubTopic 20

-Section 50

-Paragraph 1

-URI http://asc.fasb.org/extlink&oid=6952336&loc=d3e14326-108349

Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Statement of Financial Accounting Standard (FAS)

-Number 5

-Paragraph 9, 10, 11, 12

-LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009. This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.

Name:	us-gaap_LossContingencyAccrualAtCarryingValue
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

Commitments and Contingencies (Details) (USD $) In Millions, unless otherwise specified			3 Months Ended
	Mar. 31, 2013 Legal	Dec. 31, 2012 Legal	Mar. 31, 2013 Lawsuit related to acquisition of Veeco Metrology item	Mar. 31, 2013 Lines of Credit	Dec. 31, 2012 Lines of Credit
Commitments and Contingencies
Bank guarantees for customer advances				$ 144.1	$ 143.2
Accruals for potential contingencies	$ 0	$ 0
Legal
Number of current employees involved in a legal action			1
Number of former employees involved in a legal action			1