Subsequent Events (Details) $ in Millions	Jan. 24, 2017 USD ($)
Subsequent Event \| Hysitron, Inc
Subsequent Event
Purchase price	$ 28.5

Amount of consideration transferred, consisting of acquisition-date fair value of assets transferred by the acquirer, liabilities incurred by the acquirer, and equity interest issued by the acquirer.

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 805
-SubTopic 30
-Section 30
-Paragraph 7
-URI http://asc.fasb.org/extlink&oid=6911251&loc=d3e6578-128477

Reference 2: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 805
-SubTopic 30
-Section 50
-Paragraph 1
-Subparagraph (b)
-URI http://asc.fasb.org/extlink&oid=35744584&loc=d3e6927-128479

Reference 3: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 805
-SubTopic 30
-Section 30
-Paragraph 8
-URI http://asc.fasb.org/extlink&oid=6911251&loc=d3e6613-128477

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