EX-21.1 3 ex21_1.htm EXHIBIT 21.1 Exhibit 21.1

EXHIBIT 21.1


SUBSIDIARIES OF CABOT MICROELECTRONICS CORPORATION

Cabot Microelectronics Global Corporation (Delaware, U.S.)
Cabot Microelectronics Polishing Corporation (Delaware, U.S.)
Cabot Microelectronics Japan K.K. (Japan)
Nihon Cabot Microelectronics K.K. (Japan)
Cabot Microelectronics Singapore Pte. Ltd (Singapore)