Exhibit 107

CALCULATION OF FILING FEE TABLE

FORM S-8

(Form Type)

Entegris, Inc.

(Exact Name of Registrant as Specified in its Charter)

Table 1: Newly Registered Securities

Security Type	Security Class Title	Fee Calculation Rule	Amount Registered (1)		Proposed Maximum Offering Price Per Unit (2)		Maximum Aggregate Offering Price		Fee Rate		Amount of Registration Fee
Equity	Common Stock, par value $0.01 per share (“Common Stock”)	Other		2,598,676	$	126.00	$	327,433,176.00		0.0001476	$	48,329.14
Total Offering Amounts							$	327,433,176.00			$	48,329.14
Total Fee Offsets											$	0.00
Net Fee Due											$	48,329.14

(1) This Registration Statement on Form S-8 covers shares of Common Stock that may be issued under the Entegris, Inc. 2024 Employee Stock Purchase Plan (the “Plan”). Pursuant to Rule 416(a) under the Securities Act of 1933, as amended (the “Securities Act”), this Registration Statement also covers such additional indeterminable number of shares of Common Stock as may be required to be issued pursuant to the Plan in the event of a stock dividend, stock split, recapitalization or other similar change in the Common Stock.

(2) Estimated solely for the purpose of determining the registration fee pursuant to Rules 457(c) and (h), solely for the purpose of calculating the registration fee, based on the average of the high and low prices of the Common Stock on The Nasdaq Global Select Market on April 25, 2024.