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Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0001101302-22-000010
Filing Date
2022-02-04
Accepted
2022-02-04 17:03:05
Documents
130
Period of Report
2021-12-31

Document Format Files

Seq Description Document Type Size
1 10-K entg-20211231.htm   iXBRL 10-K 3138067
2 EX-10.1 exhibit101-performanceshar.htm EX-10.1 55974
3 EX-10.2 exhibit102-rsuawardagreeme.htm EX-10.2 44813
4 EX-10.3 exhibit103-stockoptiongran.htm EX-10.3 44629
5 EX-10.4 exhibit104.htm EX-10.4 36887
6 EX-21 entg-12312021xex21.htm EX-21 22359
7 EX-23 entg-12312021xex23.htm EX-23 2335
8 EX-24 entg-12312021xex24.htm EX-24 12439
9 EX-31.1 entg-12312021xex311.htm EX-31.1 9290
10 EX-31.2 entg-12312021xex312.htm EX-31.2 9282
11 EX-32.1 entg-12312021xex321.htm EX-32.1 4845
12 EX-32.2 entg-12312021xex322.htm EX-32.2 4860
18 entg-20211231_g1.jpg GRAPHIC 42851
19 entg-20211231_g2.jpg GRAPHIC 137487
  Complete submission text file 0001101302-22-000010.txt   14380661

Data Files

Seq Description Document Type Size
13 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT entg-20211231.xsd EX-101.SCH 66132
14 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT entg-20211231_cal.xml EX-101.CAL 114156
15 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT entg-20211231_def.xml EX-101.DEF 364245
16 XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT entg-20211231_lab.xml EX-101.LAB 883399
17 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT entg-20211231_pre.xml EX-101.PRE 641936
124 EXTRACTED XBRL INSTANCE DOCUMENT entg-20211231_htm.xml XML 2842998
Mailing Address 129 CONCORD ROAD BILLERICA MA 01821
Business Address 129 CONCORD ROAD BILLERICA MA 01821 9784366500
ENTEGRIS INC (Filer) CIK: 0001101302 (see all company filings)

IRS No.: 411941551 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 001-32598 | Film No.: 22594378
SIC: 3089 Plastics Products, NEC