Consolidated Statements Of Cash Flows (USD $) In Thousands, unless otherwise specified	12 Months Ended
Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Operating activities:
Net income	$ 7,887us-gaap_ProfitLoss	$ 74,526us-gaap_ProfitLoss	$ 68,825us-gaap_ProfitLoss
Adjustments to reconcile net income to net cash provided by operating activities:
Depreciation	46,637us-gaap_Depreciation	29,468us-gaap_Depreciation	28,013us-gaap_Depreciation
Amortization	37,067us-gaap_AmortizationOfIntangibleAssets	9,347us-gaap_AmortizationOfIntangibleAssets	9,594us-gaap_AmortizationOfIntangibleAssets
Share-based compensation expense	8,887us-gaap_ShareBasedCompensation	7,928us-gaap_ShareBasedCompensation	9,881us-gaap_ShareBasedCompensation
Charge for fair value write-up of acquired inventory sold	48,586entg_AmortizationofInventoryStepup	0entg_AmortizationofInventoryStepup	0entg_AmortizationofInventoryStepup
Provision for deferred income taxes	(44,716)us-gaap_DeferredIncomeTaxExpenseBenefit	8,232us-gaap_DeferredIncomeTaxExpenseBenefit	11,940us-gaap_DeferredIncomeTaxExpenseBenefit
Charge for excess and obsolete inventory	4,513us-gaap_InventoryWriteDown	3,963us-gaap_InventoryWriteDown	4,007us-gaap_InventoryWriteDown
Excess tax benefit from share-based compensation plans	(842)	(3,914)	(3,805)
Amortization of debt issuance costs	5,848us-gaap_AmortizationOfFinancingCosts	0us-gaap_AmortizationOfFinancingCosts	0us-gaap_AmortizationOfFinancingCosts
Other	2,209us-gaap_OtherNoncashIncomeExpense	(765)us-gaap_OtherNoncashIncomeExpense	1,701us-gaap_OtherNoncashIncomeExpense
Changes in operating assets and liabilities, net of effects of acquisitions:
Trade accounts receivable and notes receivable	(4,845)	(13,363)	10,626
Inventories	(11,608)us-gaap_IncreaseDecreaseInInventories	(441)us-gaap_IncreaseDecreaseInInventories	(6,118)us-gaap_IncreaseDecreaseInInventories
Accounts payable and other accrued liabilities	14,348	(4,408)	6,265
Other current assets	(1,699)	(414)	(2,985)
Income taxes payable and refundable income taxes	10,975	2,731	(11,015)
Other	3,176	(3,488)	(11,767)
Net cash provided by operating activities	126,423	109,402	115,162
Investing activities:
Acquisition of property and equipment	(57,733)	(60,360)	(49,929)
Acquisition of business, net of cash acquired	(809,390)	(13,358)	(2,961)
Purchase of short-term investments	0	0	(27,990)
Proceeds from sale or maturities of short-term investments	13,778	20,000	8,000
Proceeds from sale of assets held for sale	0us-gaap_ProceedsFromSaleOfBuildings	6,500us-gaap_ProceedsFromSaleOfBuildings	0us-gaap_ProceedsFromSaleOfBuildings
Payments for non-compete agreements	(7,517)	0	0
Other	567	189	413
Net cash used in investing activities	(860,295)	(47,029)	(72,467)
Financing activities:
Proceeds from long-term debt	855,200	0	0
Payments of long-term debt	(88,650)us-gaap_RepaymentsOfLongTermDebt	0us-gaap_RepaymentsOfLongTermDebt	0us-gaap_RepaymentsOfLongTermDebt
Payments for debt issuance costs	(20,747)us-gaap_PaymentsOfDebtIssuanceCosts	0us-gaap_PaymentsOfDebtIssuanceCosts	0us-gaap_PaymentsOfDebtIssuanceCosts
Issuance of common stock from employee stock plans	3,559	7,685	7,431
Taxes paid related to net share settlement of equity awards	(2,479)	0	0
Repurchase and retirement of common stock	0	(15,494)	(427)
Other	765	3,914	3,886
Net cash provided by (used in) financing activities	747,648	(3,895)	10,890
Effect of exchange rate changes on cash and cash equivalents	(8,503)	(4,471)	3,241
Increase in cash and cash equivalents	5,273	54,007	56,826
Cash and cash equivalents at beginning of year	384,426	330,419	273,593
Cash and cash equivalents at end of year	389,699	384,426	330,419
Supplemental Cash Flow Information
Equipment purchases in accounts payable	3,702	6,950	3,429
Schedule of interest and income taxes paid:
Interest paid	21,919us-gaap_InterestPaid	72us-gaap_InterestPaid	271us-gaap_InterestPaid
Income taxes, net of refunds received	$ 12,274us-gaap_IncomeTaxesPaidNet	$ 10,208us-gaap_IncomeTaxesPaidNet	$ 29,697us-gaap_IncomeTaxesPaidNet

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- Definition

The cash outflow paid to third parties in connection with debt origination, which will be amortized over the remaining maturity period of the associated long-term debt.

+ References

+ Details

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- Definition

Amount of cash outflow to satisfy an employee's income tax withholding obligation as part of a net-share settlement of a share-based award.

+ References

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- Definition

The cash outflow to acquire debt and equity securities not classified as either held-to-maturity securities or trading securities which would be classified as available-for-sale securities and reported at fair value, with unrealized gains and losses excluded from earnings and reported in a separate component of shareholders' equity.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Glossary Investing Activities

-URI http://asc.fasb.org/extlink&oid=6516133

Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 320

-SubTopic 10

-Section 45

-Paragraph 11

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-Name Accounting Standards Codification

-Topic 230

-SubTopic 10

-Section 45

-Paragraph 13

-Subparagraph (a),(b)

-URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3213-108585

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- Definition

The cash outflow associated with the acquisition of a business, net of the cash acquired from the purchase.

+ References

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Data Type:	xbrli:monetaryItemType
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Period Type:	duration

- Definition

The cash outflow to acquire asset without physical form usually arising from contractual or other legal rights, excluding goodwill.

+ References

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Data Type:	xbrli:monetaryItemType
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- Definition

The cash outflow associated with the acquisition of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale; includes cash outflows to pay for construction of self-constructed assets.

+ References

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- Definition

The cash inflow from a debt initially having maturity due after one year or beyond the operating cycle, if longer.

+ References

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Period Type:	duration

- Definition

The total cash inflow associated with the amount received from holders to acquire the entity's shares under incentive and share awards, including stock option exercises. This item inherently excludes any excess tax benefit, which the entity may have realized and reported separately.

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- Definition

The net cash inflow or outflow from other financing activities. This element is used when there is not a more specific and appropriate element in the taxonomy.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Glossary Financing Activities

-URI http://asc.fasb.org/extlink&oid=6513228

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-SubTopic 10

-Section 45

-Paragraph 9

-URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3098-108585

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- Definition

The cash inflow associated with the sale of debt and equity securities classified as available-for-sale securities.

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Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Glossary Investing Activities

-URI http://asc.fasb.org/extlink&oid=6516133

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-SubTopic 10

-Section 45

-Paragraph 12

-Subparagraph (a),(b)

-URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3179-108585

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- Definition

The cash inflow from sale of buildings.

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Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Definition

The consolidated profit or loss for the period, net of income taxes, including the portion attributable to the noncontrolling interest.

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Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 810

-SubTopic 10

-Section 55

-Paragraph 4K

-URI http://asc.fasb.org/extlink&oid=35736750&loc=SL4591552-111686

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-SubTopic 10

-Section 55

-Paragraph 4J

-URI http://asc.fasb.org/extlink&oid=35736750&loc=SL4591551-111686

+ Details

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- Definition

The cash outflow for debt initially having maturity due after one year or beyond the normal operating cycle, if longer.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 230

-SubTopic 10

-Section 45

-Paragraph 15

-Subparagraph (b)

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-Publisher FASB

-Name Accounting Standards Codification

-Glossary Financing Activities

-URI http://asc.fasb.org/extlink&oid=6513228

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- Definition

The aggregate amount of noncash, equity-based employee remuneration. This may include the value of stock or unit options, amortization of restricted stock or units, and adjustment for officers' compensation. As noncash, this element is an add back when calculating net cash generated by operating activities using the indirect method.

+ References

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- Details

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