10-K

UNITED STATES

SECURITIES AND EXCHANGE COMMISSION

WASHINGTON, D.C. 20549

________________________________________

FORM 10-K

________________________________________ 

(Mark One)

x ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934

For the fiscal year ended December 31, 2014

or

o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934

For the transition period from to

Commission file number: 001-32598

 _______________________________________

Entegris, Inc.

(Exact name of registrant as specified in its charter)

 _______________________________________

Delaware	41-1941551
(State or Other Jurisdiction of Incorporation or Organization)	(I.R.S. Employer Identification No.)

129 Concord Road, Billerica, Massachusetts 01821

(Address of principal executive offices and zip code)

(978) 436-6500

(Registrant’s telephone number, including area code)

Securities registered pursuant to Section 12(b) of the Act:

Title of Class	Name of Exchange on which Registered
Common Stock, $0.01 Par Value	The Nasdaq Global Select Market

Securities registered pursuant to Section 12(g) of the Act: None

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Indicate by check mark if the registrant is a well known seasoned issuer, as defined in Rule 405 of the Securities Act.    x Yes    o  No

Indicate by check mark if the registrant is not required to file reports pursuant to Section 13 or 15(d) of the Act.    o  Yes    x  No

Indicate by check mark whether the registrant: (1) has filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or for such shorter period that the registrant was required to file such reports), and (2) has been subject to such filing requirements for the past 90 days.    Yes  x    No  o

Indicate by check mark whether the registrant has submitted electronically and posted on its corporate Web site, if any, every Interactive Data File required to be submitted and posted pursuant to Rule 405 of Regulation S-T (§232.405 of this chapter) during the preceding 12 months (or for such shorter period that the registrant was required to submit and post such files).    Yes  x    No  o

Indicate by check mark if disclosure of delinquent filers pursuant to Item 405 of Regulation S-K (§229.405) is not contained herein and will not be contained, to the best of registrant’s knowledge, in definitive proxy or information statements incorporated by reference in Part III of Form 10-K or any amendment to this Form 10-K.  o

Indicate by check mark whether the registrant is a large accelerated filer, an accelerated filer, a non-accelerated filer or a smaller reporting company. (Check one):

Large Accelerated Filer	x	Accelerated Filer	o
Non-Accelerated Filer	o  (Do not check if a smaller reporting company)	Smaller reporting company	o

Indicate by check mark whether the registrant is a shell company (as defined in Rule 12b-2 of the Exchange Act).    Yes  ¨    No  ý

The aggregate market value of voting stock held by non-affiliates of the registrant, based on the last sale price of the Common Stock on June 28, 2014, the last business day of registrant’s most recently completed second fiscal quarter, was $1,683,447,163. Shares held by each officer and director of the registrant and by each person who owned 10 percent or more of the outstanding Common Stock have been excluded from this computation in that such persons may be deemed to be affiliates of the registrant. This determination of affiliate status for this purpose is not necessarily a conclusive determination for other purposes.

As of February 18, 2015, 139,792,583 shares of the registrant’s Common Stock were outstanding.

DOCUMENTS INCORPORATED BY REFERENCE

Portions of the registrant’s Definitive Proxy Statement for its 2015 Annual Meeting of Stockholders scheduled to be held on April 30, 2015, or the 2015 Proxy Statement, which will be filed with the Securities and Exchange Commission, or SEC, not later than 120 days after December 31, 2014, are incorporated by reference into Part III of this Annual Report on Form 10-K. With the exception of the portions of the 2015 Proxy Statement expressly incorporated into this Annual Report on Form 10-K by reference, such document shall not be deemed filed as part of this Annual Report on Form 10-K.

ENTEGRIS, INC.

INDEX TO ANNUAL REPORT ON FORM 10-K

FOR THE FISCAL YEAR ENDED DECEMBER 31, 2014

	Caption	Page
PART I
Item 1.	Business	1
Item 1A.	Risk Factors	15
Item 1B.	Unresolved Staff Comments	28
Item 2.	Properties	28
Item 3.	Legal Proceedings	29
Item 4.	Mine Safety Disclosures	30
PART II
Item 5.	Market for Registrant’s Common Equity, Related Stockholder Matters and Issuer Purchases of Equity Securities	31
Item 6.	Selected Financial Data	32
Item 7.	Management’s Discussion and Analysis of Financial Condition and Results of Operations	33
Item 7A.	Quantitative and Qualitative Disclosures About Market Risk	52
Item 8.	Financial Statements and Supplementary Data	52
Item 9.	Changes in and Disagreements with Accountants on Accounting and Financial Disclosure	52
Item 9A.	Controls and Procedures	53
Item 9B.	Other Information	55
PART III
Item 10.	Directors, Executive Officers and Corporate Governance	56
Item 11.	Executive Compensation	56
Item 12.	Security Ownership of Certain Beneficial Owners and Management and Related Stockholder Matters	56
Item 13.	Certain Relationships and Related Transactions, and Director Independence	56
Item 14.	Principal Accountant Fees and Services	56
PART IV
Item 15.	Exhibits and Financial Statement Schedules	57
	Signatures	60
	Exhibit Index	61
	Index to Financial Statements	F-1

PART I

Item 1. Business.

THE COMPANY

Entegris, Inc., referred in this report as Entegris or the Company, is a worldwide developer, manufacturer and supplier of yield-enhancing materials and solutions for advanced manufacturing processes in the semiconductor and other high-technology industries. Our products and materials are used to manufacture semiconductors, micro-electromechanical systems or MEMS, flat panel displays, light emitting diodes or “LEDs”, high-purity chemicals, such as photoresists, solar cells, gas lasers, optical and magnetic storage devices, and critical components for aerospace, glass manufacturing and biomedical applications. We sell our products worldwide through a direct sales force and through selected distributors.

The Company was incorporated in Delaware in March 2005 in connection with a strategic merger of equals transaction between Entegris, Inc., a Minnesota corporation, and Mykrolis Corporation, a Delaware corporation. On April 30, 2014, the Company acquired ATMI, Inc., a Delaware Corporation based in Danbury, CT, referred to throughout this report as ATMI. This transaction is referred to alternatively as the Merger or the ATMI acquisition in this report. See OUR HISTORY below.

We offer a diverse product portfolio that includes approximately 19,000 standard and customized products which include both unit driven and capital expense driven products. As a result of the Merger, unit-driven products now comprise approximately 80% of our combined sales, with the balance being capital driven products. Our unit-driven products are consumed or exhausted during the customer’s manufacturing process and rely on the level of semiconductor and other manufacturing activity to drive growth. Our unit-driven product class includes membrane-based liquid filters, resin-based gas purifiers, wafer shippers, disk-shipping containers and test assembly and packaging products, implant gas storage and delivery systems, copper electroplating materials, advanced precursor materials for thin film deposition and photoresist strip and post chemical mechanical planarization (CMP) or CMP cleaning materials and consumable graphite and silicon carbide components. Capital expense driven products, which generally have a lifetime of 18 months or more, rely on the expansion of manufacturing capacity to drive growth and include our fluid management components, systems and subsystems that transfer, monitor, and control process liquids used in the semiconductor manufacturing processes, gas filtration and purification components, systems and subsystems that remove contaminants at equipment and factory level for manufacturing, our process carriers that protect the integrity of in-process wafers and graphite, silicon carbide and specialty coated components for manufacturing equipment. Unit-driven products accounted for approximately74%, 66%, and 66% of our net sales for fiscal years 2014, 2013 and 2012, respectively, while capital expense-driven products accounted for approximately 26%, 34% and 34% of our net sales for the fiscal years 2014, 2013 and 2012, respectively.

Our Internet address is www.entegris.com. On this web site, under the “Investors-Financial Information-SEC Filings” section, we post the following filings as soon as reasonably practicable after they are electronically filed with, or furnished to, the U.S. Securities and Exchange Commission (SEC): our annual, quarterly, and current reports on Forms 10-K, 10-Q, and 8-K; our proxy statements; any amendments to those reports or statements, and Form SD. All such filings are available on our web site free of charge. The SEC also maintains a web site (www.sec.gov) that contains reports, proxy and information statements, and other information regarding issuers that file electronically with the SEC. The content on our website, and any other website, as referred to in this Form 10-K is not incorporated by reference into this Form 10-K unless expressly noted.

SEMICONDUCTOR INDUSTRY BACKGROUND

Semiconductors, or integrated circuits, are the building blocks of today’s electronics and the backbone of the information age. The market for semiconductors has grown significantly over past decades. This trend is expected to continue as the advanced connectivity of devices to the internet or the “internet of things”, gathers increasing momentum. We believe that the connected devices, ranging from every day devices, such as light bulbs and home heating thermostats interconnected through wireless technology to the internet and the cloud to permit remote monitoring and control of the device, to connected automobiles that offer a new level of safety and comfort to vehicle operators will drive growth in the demand for semiconductors and create significant opportunities for our products. This new trend will supplement existing demand driven by applications in data processing, wireless communications, broadband infrastructure, personal computers, handheld electronic devices and other consumer electronics.

The manufacture of semiconductors is a highly complex process that consists of numerous and repeated process operations. The process starts with the delivery of raw silicon wafers from wafer manufacturers to semiconductor manufacturers and requires hundreds of highly complex and sensitive manufacturing steps, during which a variety of materials are repeatedly applied to the silicon wafer to build the integrated circuits on the wafer surface. We offer a broad range of products to purify, transport and monitor these critical process materials during the manufacturing process. We provide advanced chemical materials used in many of these process steps and offer a broad range of products to purify, transport and monitor these critical process materials during

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the manufacturing process. The process operations that rely most heavily on our products and chemical materials are described below.

Deposition. Deposition refers to placing layers of insulating or conductive materials on a wafer surface in thin films that make up the circuit elements of semiconductor devices. The two main deposition processes are physical vapor deposition, where a thin film is deposited on a wafer surface in a low-pressure gas environment, and chemical vapor deposition, where a thin film is deposited on a wafer surface using a gas medium and a chemical bonding process. In addition, electro-plating technology is used for the deposition of low resistance conductive materials such as copper. The control of uniformity and thickness of these films through our advanced precursor materials and electro-plating chemicals used during the process as well as our filtration and purification products, which remove defects and contaminants from materials are critical to the performance of the semiconductor circuit and, consequently, the manufacturing yield.

Chemical Mechanical Planarization (CMP). CMP flattens, or planarizes, the topography of the surface of the wafer after deposition by use of CMP polishing pads and slurries containing abrasive particles in a chemical mixture. The purpose of CMP is to permit the patterning of small features on the resulting smooth surface by the photolithography process. We offer a broad range of products used by semiconductor manufacturers during and immediately following the CMP process. Our Planarclean®, ESC-784 and TitanKlean™ formulated chemical materials remove defects from wafer surfaces after the CMP process. We also offer high pH formulations that provide passivation of copper surfaces on the wafer after the post CMP cleaning. Our filtration and purification systems are used to filter the liquid slurries and to remove oversized particles and contaminants that can cause defects on a wafer’s surface, while not affecting the functioning of the abrasive particles in the liquid slurries. Our consumable polyvinyl alcohol (PVA) roller brushes are used to clean the wafer after completion of the CMP process to prepare the wafer for subsequent operations and our pad conditioners are used to prepare the surface of the CMP polishing pad.

Photolithography. Photolithography is the process step that defines the patterns of the circuits to be built on the chip. Before photolithography, a wafer is pre-coated with photoresist, a light-sensitive film composed of ultra-high purity chemicals in liquid form. The photoresist is exposed to specific forms of radiation, such as ultraviolet light, electrons or x-rays, to form patterns that eventually become the circuitry on the chip. This process is repeated many times, using different patterns and interconnects between layers to form the complex, multi-layer circuitry in a semiconductor chip. As device geometries decrease and wafer sizes increase, it is even more critical that these photoresists are dispensed onto the wafer with accurate thickness and uniformity, as well as with extremely low levels of contamination, so that manufacturers can achieve acceptable yields in the manufacturing process. Our liquid filtration and liquid dispense systems play a critical role in assuring the pure, accurate and uniform dispense of photoresists onto the wafer. In addition, ST and AP photoresist strip cleaning materials are proprietary chemistries used for negative resist removal, and our gas micro-contamination systems eliminate airborne amine contaminants that can disrupt effective photolithography processes.

Etch and Resist Strip. Etch is the process of selectively removing precise areas of thin films that have been deposited on the surface of a wafer. The hardened photoresist protects the remaining material that makes up the circuits. During etch, specific areas of the film not covered by photoresist are removed to leave a desired circuit pattern. Similarly, resist strip is a process of removing the photoresist material from the wafer after the desired pattern has been etched on the wafer. Emerging advanced etch and resist strip applications require our ST-250™ and TitanKlean™ formulated solutions to remove photo resists and post-etch residues, and our gas filters and purifiers to help assure the purity of the process gas streams used in the etch process.

Ion Implant. Ion implantation provides a means for introducing impurities into the silicon crystal, typically into selected areas defined by the photolithographic process. This selective implanting of ions into defined areas creates electrically conductive areas that form the transistors of the integrated circuits. Ion implanters have the ability to implant selected elements into the silicon wafers at precise locations and depths by bombarding the silicon surface with a precisely controlled beam of electrically charged ions of specific atomic mass and energy. These ions are embedded into the silicon crystal structure, changing the electrical properties of the silicon. The precision of ion implantation techniques permits customers to achieve the necessary control of this doping process to construct up to 500 billion transistors of uniform characteristics on a 300mm wafer. Since these transistors are the starting point of all subsequent process steps, repeatability, uniformity and yield are extremely important. Our SDS® and VAC® gas delivery systems assure the safe, effective and efficient delivery of the toxic gases necessary for the implant process. In addition, our proprietary low temperature plasma coating process for core components are critical elements of ion implantation equipment.

Wet Cleaning. Ultra-high purity chemicals and photoresists of precise composition are used to clean the wafers, to pattern circuit images and to remove photoresists after etch. Before processes such as photoresist coating, thin film deposition, ion implantation, diffusion and oxidation, and after processes such as ion implantation and etch, the photoresists must be stripped off, and the wafer cleaned in multiple steps using chemical processes. To maintain manufacturing yields and avoid defective products, the cleaning chemicals must be maintained at very high purity levels without the presence of foreign material such as particles, ions or organic

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contaminants. As described above, our proprietary formulated cleaning chemistries are used in these wet cleaning processes and our liquid filters and purifiers are used to assure the purity of these chemicals.

Our wafer and reticle carriers are high-purity “micro-environments” which carry wafers between each of the above process steps, protecting them from damage and contamination during these transport operations. Our fluid handling components assure the delivery of pure liquid chemicals to each of these process steps. Front-end wafer processing can involve hundreds of steps and take several weeks. As a result, a batch of 25 fully processed wafers, the standard number of wafers that can be transported in one of our 200 mm and 300 mm products, can be worth several million dollars. Since significant value is added to the wafer during each successive manufacturing step, it is essential that the wafer be well protected to minimize the risk of any damage. Thus, in the case of wafer carriers, precise wafer positioning, highly reliable and predictable cassette interface dimensions and advanced materials are crucial. The failure to prevent damage to wafers can severely impact integrated circuit performance, render an integrated circuit inoperable or disrupt manufacturing operations. Our products enable semiconductor manufacturers to: minimize contamination (semiconductor processing is now so sensitive that ionic contamination in certain processing chemicals is measured in parts per trillion); protect semiconductor devices from electrostatic discharge and shock; avoid process interruptions; prevent damage or abrasion to wafers and materials during automated processing caused by contact with other materials or equipment; prevent damage due to abrasion or vibration of work-in-process and finished goods during transportation to and from customer and supplier facilities; and eliminate the dangers associated with handling toxic chemicals.

Future Trends. Semiconductor manufacturing has become increasingly complex in recent years as new materials and new process technologies have been introduced to enhance device performance and achieve productivity gains. We expect this trend to accelerate in future years. This increasing complexity of semiconductor devices has substantially increased the cost of semiconductor plant infrastructure and equipment and has made achieving target yields more difficult for semiconductor manufacturers adopting advanced processes. Fabrication of wafers at the advanced technology nodes requires larger diameter wafers and finer line widths that are more costly and more complex to manufacture than smaller wafer sizes and larger line widths. In addition, these advanced processes create new contamination and material compatibility risks, rendering larger wafers more vulnerable to damage or contamination. All of these difficulties increase the need and demand for our advanced materials and contamination control products. In response to the challenges faced by our semiconductor customers, we have been moving aggressively to collaborate with semiconductor equipment companies and device manufacturers to synthesize new materials, to develop enhanced methods of filtration and purification and to introduce advanced materials packaging and materials monitoring capabilities to address the challenges of the advanced technology nodes. These collaborations often include the outsourcing of the design and manufacture of innovative materials management and liquid delivery, measurement, control and purification systems to Entegris. Also our semiconductor customers have become increasingly focused on materials management solutions that enable them to safely store, handle, process and transport critical materials throughout the manufacturing process to minimize the potential for damage or degradation to their materials and to protect their investment in processed wafers. We believe that these trends provide opportunities for our advanced chemical, materials management and polymer engineering expertise and our advanced tool design capabilities to enable us to provide our semiconductor customers with innovative materials, materials management, purification, wafer transport, and process solutions enabling them to successfully manage this growing complexity.

Many of the processes used to manufacture semiconductors are also used to manufacture photovoltaic cells, LEDs, flat panel displays and magnetic storage devices resulting in the need for similar filtration, purification, control and measurement capabilities. We seek to leverage our products, technologies and expertise in serving semiconductor applications to address these important market opportunities.

OUR BUSINESS STRATEGY

Our objective is to be a leading global provider of advanced materials and solutions used in processing and manufacturing in high-technology industries. We intend to benefit from our market leading position and strengthen our core business in the semiconductor industry. We will also build upon our position as a worldwide developer, manufacturer and supplier of advanced specialty materials, filtration and purification solutions, delivery systems, and materials packaging solutions used by semiconductor device manufacturers to grow our business in other high value-added manufacturing process markets. Our strategy includes the following key elements:

Technology Leadership. With the emergence of smaller and more powerful semiconductor devices, and the deployment of new materials and processes to produce them, we believe there is a need for greater materials management within the semiconductor fabrication process. We seek to extend our technology by developing advanced products that address more stringent requirements for greater purification, protection and transport of high value-added materials and for contamination control, fluid delivery and monitoring, and system integration. We also support our customers’ operations by developing advanced chemical materials for use in their critical fabrication processes. We continuously improve our products as our customers’ needs evolve. For example, we have introduced sub 10 nanometer filtration products, advanced deposition materials for next generation transistor and

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interconnect technologies, advanced reticle pods for extreme ultra violet or EUV photolithography applications, advanced 300mm wafer carriers and advanced e-chucks for implant equipment to meet the rigorous demands of the advanced technology nodes faced by our customers.

Global Presence. We have established a global infrastructure of design, manufacturing, distribution, service and technical support facilities to meet the needs of our customers. As semiconductor and other electronic device manufacturers have become increasingly global, they have required that suppliers offer comprehensive local repair, customer and technical support services. In response to this trend, we have, for example, expanded our operations in Taiwan and South Korea to provide manufacturing capabilities to support our important customers in these regions, we have established sales and service offices in China in anticipation of a growing semiconductor manufacturing base in that region and we have transferred customer support and logistics activities to local regions, including our expanded presence in Singapore, to enhance our global and regional management of supply chain and manufacturing processes, and we maintain advanced technology centers in Taiwan and South Korea. We maintain our customer relationships through a combination of direct sales and support personnel and selected independent sales representatives and distributors in Asia, Europe and the Middle East.

Operational Excellence. We have also established leading edge manufacturing plants located in the United States, Malaysia, Japan, South Korea and Taiwan that possess the advanced manufacturing capabilities described under Manufacturing below. We have consolidated management of these plants under a single global operations organization with a charter to drive these plants to achieve world class manufacturing and quality standards. Our strategy is to develop our advanced manufacturing capabilities into a competitive advantage with our customers through implementation of the following priorities:

• use of manufacturing equipment and facilities incorporating leading edge technology including advanced clean room and cleaning procedures;

• implementation of standardized manufacturing systems stressing optimization of overall equipment operational effectiveness, predictive maintenance, and direct labor productivity;

• implementation of automated quality systems that provide both process monitoring and process control throughout the manufacturing process as well as predictive quality data allowing us to predict and remediate potential quality excursions before they occur;

• excellence of supply chain management systems that assure a supply of high quality raw materials that is reliable and responsive to the changing requirements for our products;

• conduct of manufacturing operations so as to assure the safety of our employees and of the individuals using our products;

• a streamlined manufacturing organization well-aligned internally as well as with our customers that is capable of rapid design and development of prototypes of new and derivative products; rapid response to customer feedback concerning prototypes and ability to quickly commercialize and ramp production of prototypes accepted by our customers.

Strong Customer Base. We have established solid ongoing relationships with many of the world's leading semiconductor manufacturers, original equipment manufacturers (OEMs), and semiconductor materials suppliers. We intend to continue to leverage these relationships to participate in significant collaborations with our customers at the product design stage, which to facilitate our ability to introduce new products and applications that meet our customers’ needs. For example, we work with our key customers at the pre-design and design stages to identify and respond to their requests for current and future generations of products for emerging applications requiring cleaner materials as well as systems that maintain the integrity and stability of materials during transport through the manufacturing process. To respond to these opportunities we have developed advanced filtration and purification solutions as well a new packaging solutions based on process challenges identified by our customers. We believe that our large customer base will continue to be an important source of new product development opportunities that we intend to emphasize.

Comprehensive and Diverse Product Offerings. The semiconductor manufacturing industry is characterized by rapid technological changes and intense competition, especially at the current time when the imperative of increased productivity is driving the move to the advanced technology nodes with the technological challenges inherent in these advances. We believe that semiconductor manufacturers are seeking suppliers who can provide a broad range of reliable, flexible and cost-effective products and materials, as well as the technological and application design expertise necessary to deliver other effective solutions. Our comprehensive offering of materials and components enables us to meet a broad range of customer needs and provide a single source of flexible product offerings for semiconductor device and capital equipment manufacturers as they seek to consolidate their supplier relationships to a smaller select group with comprehensive capabilities. We believe our offering of consumable products and materials, creates a competitive advantage because we offer a comprehensive array of solutions to these challenges at the advanced technology nodes.

Adjacent Markets. We leverage our accumulated expertise in the semiconductor industry by developing products for applications that employ similar production processes that utilize materials integrity management, high-purity fluids and integrated dispense

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system technologies. Outside of the semiconductor industry, our products are used in other manufacturing processes, including the manufacturing of flat panel displays, fuel cell components, high-purity chemicals, solar cells, optical magnetic storage devices and products for life sciences. We plan to continue to identify and develop products that address materials management and advanced materials processing applications where fluid management plays a critical role. We believe that by utilizing our technology to provide manufacturing solutions across multiple industries, we are able to increase the total available market for our products and reduce, to an extent, our exposure to the cyclicality of any particular market.

Strategic Acquisitions, Partnerships and Related Transactions. We will continue to pursue strategic acquisitions and business partnerships that enable us to address gaps in our product offerings, secure new customers, diversify into complementary product markets and broaden our technological capabilities and product offerings. Our acquisition of ATMI, Inc. in April 2014 and of Jetalon Solutions, Inc. in April 2013 are examples of this strategy. ATMI brings a whole new portfolio of technologies and materials products to serve our semiconductor customers while Jetalon Solutions reinforces our presence in the semiconductor industry by providing new and complementary sensing and control technologies. Further, as the dynamics of the markets that we serve shift, we will reevaluate the ability of our existing businesses to provide value-added solutions to those markets in a manner that contributes to achieving our objectives; in the event that we conclude that a business is not able to do this, we expect to restructure or replace that business. The sale of our cleaning equipment business in 2008 is an example of this strategy. Finally, we are continuously evaluating opportunities for strategic alliances and joint development efforts with key customers and other industry leaders.

OUR SEGMENTS

We design, manufacture and market our products through two business segments: (i) our critical materials handling segment, which offers a wide range of products that purify, monitor and deliver critical liquids and gases to the semiconductor manufacturing process and similar manufacturing processes as well as microenvironment products to preserve the integrity of wafers, reticles and electronic components at various stages of transport, processing and storage and materials, components and services to a wide range of customers in the semiconductor industry and in adjacent and unrelated industries; and (ii) our electronic materials segment which offers a wide range of materials and materials delivery systems to support the advanced semiconductor manufacturing processes. Each segment has dedicated manufacturing resources managed by our global operations organization, and is composed of product-focused business units. Each business segment has its own dedicated marketing and engineering, research and development resources. There follows a detailed description of our two segments:

CRITICAL MATERIALS HANDLING SEGMENT

Liquid Microcontamination Products. Liquid processing occurs during multiple manufacturing steps including photolithography, deposition, planarization and surface etching and cleaning. The fluids that are used include various mixtures of acids, bases, solvents, slurries and photochemicals, which in turn are used over a broad range of operating conditions. The design and performance of our liquid filtration and purification products are critical to the semiconductor manufacturing process because they directly reduce defects and improve the manufacturing yield. Specially designed proprietary filters remove nanometer-sized particles and bubbles from the different fluid streams that are used in the manufacturing process. Some of our filters are constructed with ultra-high molecular weight polyethylene flat sheet membranes that offer improved bubble clearance and gel removal to prevent defects in the wafers that occur if these elements are not removed. Our low hold-up volume disposable filters, with flat sheet membranes, use our Connectology™ technology to allow filter changes in less than a minute, significantly faster than conventional filters, to reduce the amount of expensive chemicals lost each time a filter is changed and to minimize operator exposure to hazardous solvents and vapors during change out. In addition to the filtration of particles from fluids, we have also expanded our offerings for chemical purification, which targets the removal of specific molecules from a process chemical, to improve yield in processes such as wet cleaning.

Microenvironment Products. Our microenvironment products fall into three sub-categories, wafer and reticle handling products, wafer shipping products and data storage products. We are a global producer of wafer and reticle handling products. We offer a wide variety of products that hold and position wafers as they travel between each piece of equipment used in the automated semiconductor manufacturing process. These specialized carriers provide precise wafer positioning, wafer protection and highly reliable and predictable cassette interfaces in automated fabs. Semiconductor manufacturers rely on our products to improve yields by protecting wafers from abrasion, degradation and contamination during the manufacturing process. We provide standard and customized products that meet a spectrum of industry standards and customers’ wafer handling needs including front opening unified pods or “FOUPs”, wafer transport and process carriers, standard mechanical interface or “SMIF” pods and work-in-process boxes. To meet our customers’ varying wafer processing and transport needs, we offer wafer process carriers in a variety of materials, including advanced polymeric materials, and in sizes ranging from 100 mm through 300 mm. In addition, we offer FOUPs for developmental 450 mm wafers. We also provide mask and reticle handling products, including reticle SMIF pods for the protection of extremely valuable and contamination-sensitive lithography reticles. We are also a global provider of critical

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shipping products that preserve the integrity of raw silicon wafers as they are transported from wafer manufacturers to semiconductor manufacturers or finished wafers shipped to back end processors. We lead the market with our extensive, high-volume line of Ultrapak ^® and Crystalpak ^® products which are supplied to wafer manufacturers in a full range of sizes covering 100, 125, 150 and 200 mm wafers. We also offer a full-pitch, front-opening shipping box, or FOSB, for the transportation and automated interface of 300 mm wafers. For developmental 450 mm wafers, we offer a Single Wafer Shipper, a Multi-Application Carrier, or MAC, and a front-opening unified pod, or FOUP.

For the data storage market we offer products and solutions for magnetic disks and the read/write heads used to read and write today’s higher density disks.Finally, we offer chip and matrix trays as well as carriers for bare die handling and integrated circuits that are compatible with industry standards, are available in a wide range of sizes with various feature sets and that offer dimensional stability and permanent electrostatic discharge protection.

Fluid Management and Control Products. We offer chemical management and distribution systems that assure the consistent, clean and safe delivery of sophisticated chemicals to the point-of-use in the semiconductor fab. Most of these products are made from perfluoroalkoxy or PFA, a fluoropolymer resin widely used in the semiconductor industry because of its high purity and inertness to chemicals. The innovative design and reliable performance of our products under the most stringent of process conditions has made us a leader in high-purity fluid transfer products. Both semiconductor manufacturers and semiconductor OEMs use our chemical management and distribution products. Our comprehensive product line provides our customers with a single-source provider for their process chemical management needs throughout the manufacturing process. Our chemical management and distribution products include valves, fittings, tubing, pipe, custom fabricated products and associated connection systems for high-purity chemical applications.

Our proprietary photochemical filtration and dispense systems integrate our patented two-stage, filter device and valve control technologies. Our two-stage technology permits the filtering and dispense functions to operate independently so that filtering and dispensing of photochemicals can occur at different rates, reducing the differential pressure across the filter, conserving expensive photochemicals and resulting in reduced defects in wafers. As described above, we offer a line of proprietary filters specifically designed to efficiently connect with these systems. Our patented digital valve control technology improves chemical uniformity on wafers and improves ease of optimized system operation. In addition, our integrated high-precision liquid dispense systems enable uniform application of photoresists for the spin-coating process, where uniformity is measured in units of Angstroms, a tiny fraction of the thickness of a human hair.

We offer a wide variety of measurement and control products for high-purity and corrosive applications. For electronic measurement and control of liquids, we provide a complete line of pressure and flow measurement and control products as well as all-plastic capacitance sensors for leak detection, valve position, chemical level and other measurements. We also offer mechanical gauge pressure measurement products. The acquisition of Jetalon Solutions added metrology and sensor products that use refractive index technology to achieve greater precision in real-time chemical blending, which is increasingly critical in applications where minute variations of process fluid concentration levels can adversely impact manufacturing yields. In semiconductor manufacturing, Jetalon Solutions products monitor and control liquid concentrations in all wet processing areas including wafer surface preparation and cleaning, photolithography, CMP, post-CMP cleaning, and copper electroplating. In the biopharmaceutical market, these solutions are used in both upstream and downstream processing in applications such as real-time in-line concentration monitoring of media and buffer preparations. This is an area of increasing interest for biopharmaceutical applications given the growing trend from batch manufacturing to real-time or continuous manufacturing processes.

Liquid Packaging Products. Semiconductor process chemicals spend most of their time in contact with fluid storage containers, so it is critical for these containers to resist degradation by these process chemicals and avoid contributing contaminants to the chemicals. We offer rigid wall HPDE blow molded drums and rotationally molded composite containers and associated connection systems for semiconductor process chemicals in sizes ranging from 20 to 2,000 liters. We also offer container liners and container assemblies, such as NOWPak^® and BrightPak™, in sizes ranging from 1 to 200 liters, for high-purity liquid materials packaging and dispensing systems for advanced photolithography applications as well as for flat-panel display and liquid containment and delivery systems.

Specialty Materials Products. These products are made from specialized graphite or silicon carbide. Our Poco Graphite products sold to the semiconductor industry are used for critical components for semiconductor manufacturing equipment at various stages of the semiconductor manufacturing process including chemical vapor deposition or CVD, where our expendable graphite chamber liners and shower heads are critical components used in the CVD chamber; dry or plasma etch, where our consumable graphite components deliver, baffle and confine the process gases during the etch process; and ion implant, where our consumable graphite components are critical elements of ion implantation equipment. In addition, our POCO^® high-quality graphite is used to make precision consumable electrodes for electrical discharge machining, a non-contact precision thermoelectric machining process for hard and exotic metals and other materials. Poco Graphite also manufactures a number of graphite hot glass contact materials for

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use in the manufacture of glass containers. Finally, Poco Graphite manufactures a number of graphite consumable products for various industrial applications including bushings and thrust washers for aerospace applications, substrates for industrial print heads, components for scan heads in industrial optical applications, cathodes for fuel cells and materials for manufacturers of artificial heart valves for human implantation.

We also offer a variety of high-performance specialty coatings for critical components used in semiconductor and other high-technology manufacturing operations. These components, often in highly complex geometries, are coated by means of a proprietary low-temperature, plasma-assisted CVD process to provide corrosion and abrasion resistance and desired conductivity and hydrophobicity properties. We also provide complex assemblies such as electrostatic chucks for ion implant equipment, where our coatings prevent contamination of the process. Our coatings are also used in other high-technology applications such as aerospace optical components.

ELECTRONIC MATERIALS SEGMENT

Specialty Gases Products. Among the primary issues for semiconductor manufacturers are production throughput, cost, and safety because of the hazardous properties of the gases used in the ion implant processes. Our patented Safe Delivery Source^® ("SDS^®") solutions use a standard gas cylinder containing a carbon-based adsorbent material. The cylinder is filled with gas under conditions such that the gas is adsorbed onto the adsorbent material at sub-atmospheric pressure. Sub-atmospheric storage of hazardous gases minimizes potential leaks of gas during transportation and use, thus providing significant safety and environmental improvements over traditional high-pressure and mechanical cylinders. In addition, SDS products allow more process gas to be stored in the cylinder, providing significantly higher rates of productivity than traditional methods of gas delivery used in ion implantation manufacturing processes. These advantages have led the majority of significant semiconductor manufacturers to adopt this technology as the industry standard for dopant gas delivery. Materials packaged in SDS systems include primarily arsine, phosphine, germanium and boron trifluoride. The third generation of SDS products, called SDS3, maintains all the inherent safety features of previous generation SDS products, but dramatically increases the gas storage capacity by using a new adsorbent. The two to three times capacity improvement over the previous SDS products allows ion implanter users to reduce tool down time, resulting in significant cost savings for our customers. We also offer Vacuum Actuated Cylinders (“VAC^®”), a complementary technology to SDS where select implant gases are stored under high pressure but delivered sub-atmospherically.

Deposition Products. Several processes for depositing thin films such as CVD and atomic layer deposition (“ALD”) processes are enabled by advanced liquid, gaseous and solid precursors. We believe that we are well-positioned for the incorporation of ALD processes by the semiconductor industry with our ProE-Vap^® ampoule. This proprietary container allows for reliable delivery of low volatility solid precursors required for processes that demand ALD, like high-k gates. We have also successfully adapted the carbon adsorption technology used in SDS and incorporated it into products for semiconductor deposition processes marketed under the SAGE^® brand. These applications include: low-k plasma-enhanced deposition, or “PE-CVD”, processes using low-k materials, pre-metal dielectric high-density plasma, or “HDP-CVD”, and films using phosphine gases and thermal deposition processes using germane gases. Given the increasing need for new materials used in leading edge semiconductor processes, we are also developing a portfolio of new deposition products to meet the future needs of our customers.

Surface Preparation and Copper Integration Products. We believe that we are a market leader in copper electroplating materials and processes in semiconductor development and manufacturing with our Viaform^® product, which includes inorganic and proprietary organic molecules that provide the wiring for copper interconnects allowing manufacturers to eliminate processing steps. We also focus on the total copper integration scheme with post-chemical mechanical planarization (“CMP”) cleaning solutions. ATMI’s ST and AP photoresist strip and post-CMP cleaning materials are proprietary chemistries used for applications such as semiconductor post-etch residue removal, wafer etching, organics removal, negative resist removal, edge bead removal, and corrosion prevention. In addition to filters for the purification of CMP liquid chemical slurries, we offer a line of consumable PVA roller brush products to clean the wafer following the CMP process. Our unique Planarcore™ PVA roller brush is molded on the core to allow easy installation that reduces tool downtime and a dimensionally stable product that provides consistent wafer-to-wafer cleaning performance. In addition, our CMP pad conditioners, based on our silicon carbide capabilities, offer unique preparation solutions for each distinct CMP pad application, with significant improvement in CMP pad life.

Gas Microcontamination Products. Our Wafergard^®, Chambergard^® and Waferpure^® particle and molecular filtration products purify the gas entering the process chamber in order to eliminate system and wafer problems due to particulate, atmospheric and chemical contaminants. These filters are able to retain all particles 0.003 microns and larger. Our metal filters, such as stainless steel and nickel filters, reduce out gassing and improve corrosion resistance. Our Waferpure ^® and Aeronex Gatekeeper^® purifiers chemically react with and absorb contaminants, such as oxygen and water, to prevent contamination, and our ChamberGard™ vent diffusers reduce particle contamination and processing cycle times. We offer a wide variety of gas purification products to meet the stringent requirements of semiconductor processing. Our Aeronex Gas Purification Systems contain dual-resin beds, providing a continuous supply of purified gas without process interruption. These gas purification systems are capable of handling

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higher flow rates and longer duty cycles than cartridge purifiers. Our product line also includes filter housings and hybrid media chemical air filters which purify air entering tool enclosures and remove airborne molecular contaminants.

Other Entegris products.We also offer our eVOLV™ wet chemical process to recycle electronic waste and recover precious metals and other high value materials from components and printed circuit boards and our BrightBlack® precision engineered carbon materials with high purity, high capacity, small tunable pores and excellent mechanical durability for gas capture, storage and release.

WORLDWIDE APPLICATIONS DEVELOPMENT AND FIELD SUPPORT CAPABILITIES

We provide strong technical support to our customers through local service groups and engineers consisting of field applications engineers, technical service groups, applications development groups and training capabilities. Our field applications engineers, located in the United States and approximately ten other countries, work directly with our customers on product qualification and process improvements in their facilities. In addition, in response to customer needs for local technical service and fast turnaround time, we maintain regional applications laboratories and technology centers. Our applications laboratories maintain process equipment that simulate customers’ applications and industry test standards and provide product evaluation and technical support for our customers; our regional technology centers collaborate with our customers to develop materials to meet their most advanced semiconductor manufacturing challenges.

OUR CUSTOMERS AND MARKETS

Within the semiconductor market, our major customer groups include semiconductor device manufacturers, OEMs that provide equipment to semiconductor device manufacturers, gas and chemical manufacturing companies and manufacturers of high-precision electronics.

Our most significant customers based on sales in 2014 include virtually all of the leading semiconductor device makers and equipment makers and leading wafer grower companies. We also sell our products to flat panel display OEMs, materials suppliers and manufacturers. The major manufacturers for flat panel displays and flat panel display equipment are concentrated in Japan, Korea and other parts of Asia.

In our other high-technology markets, our customers include manufacturers and suppliers in the solar and life science industries and, for our Poco Graphite products, electrical discharge machining customers, glass container manufacturers, aerospace manufacturers and manufacturers of biomedical implantation devices.

In 2014, 2013 and 2012, net sales to our top ten customers accounted for approximately 42%, 34% and 36%, respectively, of combined net sales. In 2014, one individual customer accounted for approximately 14% of our net sales. In 2013 and 2012, no single customer accounted for ten percent or more of net sales. International net sales represented 75%, 71% and 69%, respectively, of net sales in 2014, 2013 and 2012. Approximately 2,400 customers purchased products from us during 2014.

We may enter into supply agreements with our customers to govern the conduct of our business with our customers, including the manufacture of our products. These agreements generally have a term of one to three years, but do not contain any long-term purchase commitments. Instead, we work closely with our customers to develop non-binding forecasts of the future volume of orders. However, customers may cancel their orders, change production quantities from forecasted volumes or delay production for a number of reasons beyond our control.

SALES AND MARKETING

We sell our products worldwide, primarily through our direct sales force and strategic independent distributors located in offices in all major semiconductor markets, as well as through independent distributors elsewhere. As of December 31, 2014, our sales and marketing force consisted of 485 employees worldwide. Our direct sales force is also supplemented by independent distributors, sales representatives and agents, which are directed to specific market segments.

Our unique capabilities and long-standing industry relationships have provided us with the opportunity for significant collaboration with our customers at the product design stage, which has facilitated our ability to introduce new materials and new solutions that meet our customers’ needs. We are constantly identifying for our customers the variety of materials, purification and process control challenges that may be addressed by our products. Our sales representatives provide our customers with worldwide support and information about our products and materials.

We believe that our technical support services are important to our marketing efforts. These services include assisting in defining a customer’s needs, evaluating alternative products and materials, designing a specific system to perform the desired separation

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or operation, training users and assisting customers in compliance with relevant government regulations. In addition, we maintain a network of service centers and technology centers located in all key markets internationally and in the United States to support our products and our customers with their advanced development needs.

COMPETITION

The market for our products is highly competitive. While price is an important factor, we compete primarily on the basis of the following factors:

historical customer relationships;	breadth of product line;
technical expertise;	breadth of geographic presence;
product quality and performance;	advanced manufacturing capabilities; and
total cost of ownership;	after-sales service.
customer service and support;

We believe that we compete favorably with respect to all of the factors listed above, but we cannot assure you that we will continue to do so. We believe that our key competitive strengths include our broad product line, our strong research and development infrastructure and investment, our manufacturing excellence, our advanced quality control systems, the low total cost of ownership of our products, our ability to provide our customers with quick order fulfillment and our technical applications expertise. However, our competitive position varies depending on the market segment and specific product areas within these segments. While we have longstanding relationships with a number of semiconductor and other electronic device manufacturers, we also face significant competition from companies that also have longstanding relationships with other semiconductor and electronic device manufacturers and, as a result, have been able to have their products specified by those customers for use in manufacturers’ fabrication facilities. In the markets for our consumable products, we believe that our differentiated membrane and materials management technologies, our materials and materials delivery systems, our strong supply chain capabilities that allow us to provide our customers with quick order fulfillment, and our technical expertise, which enables us to develop membranes to meet specific customer needs and assist our customers in improving the functionality of our membranes for particular applications, allow us to compete favorably. In these markets our competitors compete against us on the basis of price, as well as alternative membrane technology having different functionality, manufacturing capabilities and breadth of geographic presence.

The market for our products is highly fragmented, and we compete with a number of different companies. Our liquid filtration and other contamination control products compete with product offerings from a wide range of companies including both large companies, such as Pall Corporation, as well as small Asian filter manufacturers. Our microenvironment product lines face competition largely on a product-by-product basis. We face competition from mid-size Japanese companies such as Miraial Co. Ltd.and Shin-Etsu Polymer Co., Ltd. and from small regional suppliers such as Gudeng Precision Industrial Co., Ltd. and e.PAK Resources Pte. Ltd. These companies compete with us primarily in 200 mm and below, and 300 mm applications. Our fluid management and control products also face worldwide competition from companies such as Gemu Valves, Inc., Integrated Automation, Inc. (CKD) and Tokyo Keiso Co., Ltd. Our materials packaging products primarily compete with glass and plastic bottle manufacturers. Our Poco Graphite products compete with products manufactured by companies such as Mersen (France), Tokai Carbon Co., Ltd. (Japan) and Toyo Tanso Co., Ltd. (Japan). There are numerous domestic and foreign companies that offer products that compete with our Electronic Materials products including Air Products and Chemicals (Electronics Division), DuPont Electronic Technologies, Dow Chemical Company (including Rohm and Haas), BASF and Air Liquide as well as several smaller companies that specialize in niche markets. Our SDS adsorbent based sub-atmospheric implant gas delivery systems face competition from Praxair, Inc. as well as from a number of companies that compete with high-pressure gas cylinders and solid sources. Our gas filtration products compete with companies such as SAES Pure Gas, Inc., Donaldson Company, Inc. and Mott Corporation. Some of our competitors are larger and have greater resources than we do. In some cases, our competitors are smaller than us, but well-established in specific product niches. We believe that none of our competitors competes with us across all of our product offerings and that, within the markets that we serve, we offer a broader line of products, make use of a wider range of process control technologies and address a broader range of applications than any single competitor.

ENGINEERING, RESEARCH AND DEVELOPMENT

Our aggregate engineering, research and development expenses in 2014, 2013 and 2012 were $87.7 million, $55.3 million and $50.9 million, respectively. As of December 31, 2014, we had 386 employees in engineering, research and development. In addition, we have followed a practice of supplementing our internal research and development efforts by licensing technology from unaffiliated third parties and/or acquiring distribution rights with respect to products incorporating externally owned technologies when we believe it is in our long-term interests to do so. These R&D expenses consist of personnel and other direct and indirect costs for internally funded project development, including the use of outside service providers. We also participate in joint

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development efforts with several key semiconductor manufacturers, advanced technology developers, and semiconductor equipment manufacturers.

To meet the global needs of our customers, we have engineering, research and development capabilities in California, Connecticut, Minnesota, Massachusetts, Colorado, Texas, Japan, Korea, Taiwan, France, China and Malaysia. Our engineering, research and development efforts are directed toward developing and improving our technology platforms for semiconductor and advanced processing applications and identifying and developing products for new applications for which fluid management plays a critical role.

We use sophisticated methodologies to research, develop and characterize our materials and products. Our materials technology laboratories are equipped to analyze the physical, rheological, thermal, chemical and compositional nature of the polymers we use. Our materials lab includes standard and advanced polymer analysis equipment such as inductively coupled plasma mass spectrometry (ICP/MS), inductively coupled plasma atomic emission spectrometry (ICP/AES), fourier transform infrared spectroscopy (FTIR) and automated thermal desorption gas chromatography/mass spectrometry (ATD-GC/MS). This advanced analysis equipment allows us to detect contaminants in materials that could harm the semiconductor manufacturing process to levels as low as parts per billion, and in many cases parts per trillion.

Our capabilities to test and characterize our materials and products are focused on continuously reducing risks and threats to the integrity of the critical materials that our customers use in their manufacturing processes. We expect that technology and product engineering, research and development will continue to represent an important element in our ability to develop and characterize our materials and products.

Key elements of our engineering, research and development expenditures over the past three years have included the development of new product platforms to meet the manufacturing needs for 28 and 20 nanometer and smaller semiconductor devices. Driven by the proliferation of new materials and chemicals in the manufacturing processes and more demanding platforms for contamination control for 300 mm wafers, investments were made for new contamination control products in the area of copper interconnects, deep ultra-violet (DUV) and EUV photolithography, and chemical and gas management technologies for advanced wafer cleans, deposition and etch equipment. We made additional investments in the area of advanced process control, monitoring and diagnostics capabilities for future generations of semiconductor manufacturing processes, including the development of a manufacturing capability for the production of Single Wafer Carriers, Multi Application Carriers and FOUPs for the next generation 450 mm wafers. Our employees also work closely with our customers’ development personnel. These relationships help us identify and define future technical needs on which to focus our engineering, research and development efforts. In addition, we participate in Semiconductor Equipment and Materials International (SEMI), an association of semiconductor equipment suppliers, and leading industry consortia, such as the Interuniversity Microelectronics Centre (IMEC) and Semiconductor Manufacturing Technology (SEMATECH), including its Global 450 Consortium (G450C). For example, we have participated with Semiconductor Equipment and Materials International, SEMI, to develop specifications for the next generation wafer shipping and handling products and with a major customer to develop specific wafer handling products for 450 mm wafers. We also support research at academic and other institutions targeted at advances in materials science and semiconductor process development.

We also form strategic alliances, including joint development programs and collaborative marketing efforts, to develop new products and to accelerate the introduction of our products. These programs have led to significant technological advances, including the development of proprietary advanced materials and semiconductor manufacturing processes. We have a strategic alliance with Enthone, Inc. (“Enthone”), a subsidiary of Alent plc, pursuant to which we hold the exclusive worldwide marketing and distribution rights to Enthone’s copper ECD products, including its ViaForm products. Under the terms of the agreement, Enthone continues to manufacture the ViaForm products for us. We also have smaller alliances and programs in Asia to enhance our core technology base and promote the introduction of new and innovative products.

MANUFACTURING

Our customers rely on our products and materials to assure the integrity of the critical materials used in their manufacturing processes by providing dimensional precision and stability, purity, cleanliness and consistent performance. Our ability to meet our customers’ expectations, combined with our substantial investments in worldwide manufacturing capacity, position us to respond to the increasing demands of the semiconductor industry and other industries that require yield enhancing materials and solutions.

To meet our customer needs worldwide, we have established an extensive global manufacturing network with manufacturing and coating facilities in the United States, Japan, Taiwan, France, Malaysia and South Korea. Because we work in an industry where contamination control is paramount, we maintain Class 100 to Class 10,000 clean rooms for manufacturing and assembly. We believe that our worldwide manufacturing operations and our advanced manufacturing capabilities are important competitive advantages. Our advanced manufacturing capabilities include:

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• Injection Molding. Our manufacturing expertise is based on our long experience with injection molding. Using molds produced from computer-aided processes, our manufacturing technicians utilize specialized injection molding equipment and operate within specific protocols and procedures established to consistently produce precision products.

• Extrusion. Extrusion is accomplished through the use of heat and force from a screw to melt solid polymer pellets in a cylinder and then forcing the resulting melt through a die to produce tubing and pipe. We have established contamination-free on-line laser marking and measurement techniques to properly identify products during the extrusion process and ensure consistency in overall dimension and wall thickness. In addition, we use extrusion technology to extrude a polymer mix into flat sheet and hollow fiber membranes.

• Blow Molding. Blow molding consists of the use of heat and force from a screw to melt solid polymer pellets in a cylinder and then forcing the resulting melt through a die to create a hollow tube. The molten tube is clamped in a mold and expanded with pressurized gas until it takes the shape of the mold. We utilize advanced three-layer processing to manufacture premium grade 55 gallon drums, leading to cost savings while simultaneously assuring durability, strength and purity.

• Rotational Molding. Rotational molding is accomplished by the placing of a solid polymer powder in a mold, placing the mold in an oven and rotating the mold on two axes so that the melting polymer coats the entire surface of the mold. This forms a part in the shape of the mold upon cooling. We use rotational molding in manufacturing containers up to 5,000 liters.

• Compression Molding. In compression molding, thermoset polymers are processed. Today, we use this manufacturing process primarily for manufacturing integrated flow controllers and valves market. We use the same expertise as in injection molding to assure a consistently produced precision product.

• Membrane Casting. We cast membrane by extruding a polymer into flat sheet or hollow fiber format that is passed through a chamber with controlled atmospheric conditions to control the development of voids or pores in the membrane. Once cast, the membrane is subjected to solvent extraction and annealing steps. The various properties of the membranes that we offer are developed during subsequent process steps.

• Cartridge Manufacturing. We fabricate the membrane we manufacture as well as membranes manufactured by others into finished filtration cartridges in a variety of configurations. The fabrication process involves membrane processing into pleated and other configurations around a central core and enclosing it in a framework of end caps and protective screening for use in fabricated cartridge housings. We also manufacture filter cartridges that are integrated into their own housings and incorporate our patented Connectology^™ quick connect technology.

• Specialty Coating Capabilities. We fabricate high performance electrostatic chucks by using highly engineered materials and advance vacuum coatings. We have proprietary low-temperature, plasma-assisted CVD and physical vapor deposition (PVD) processes that deposit coatings on a variety of vacuum compatible materials, including metals, alloys, ceramics, semiconductors and polymers, with superior density, purity and uniformity.

• Graphite Synthesis. We have a differentiated proprietary graphite synthesis process that produces premium graphite with superior strength, uniformity and performance. This synthesis process consists of blending and forming petroleum cokes into “green” billets, baking over an extended period between 800 to 1,100°C, followed by a graphitization process at temperatures between 2,000 to 3,000°C. The graphite produced by this process is sold in bulk, machined into specific components or converted into silicon carbide through controlled exposure to silicon monoxide gas.

• Machining. Machining consists of the use of computer-controlled equipment to create shapes, such as valve bodies and other specific components, out of solid polymer blocks or rods, premium graphite and silicon carbide. Our computerized machining capabilities enable speed and repeatability in volume manufacturing of our machined products, particularly products utilized in chemical delivery applications.

• Assembly. We have established protocols, flow charts, work instructions and quality assurance procedures to assure proper assembly of component parts. The extensive use of robotics throughout our facilities reduces labor costs, diminishes the possibility of contamination and assures process consistency.

• Tool Making. We employ tool development staff in the United States and Malaysia and have tool-making capabilities in Malaysia. Our toolmakers produce the majority of the tools we use throughout the world.

• High-Purity Materials Packaging. We have established protocols, flow charts, work instructions and quality assurance procedures to assure proper and ultraclean assembly of materials packaging products in reliable, consistent and repeatable processes.

• Gas Delivery Systems. We use state of the art, secure gas cabinets with advanced leak monitoring capabilities and established protocols, flow charts, work instructions and quality and safety assurance procedures to assure the safe, efficient and cost effective filling of gas cylinders.

We have made significant investments in systems and equipment to create innovative products and tool designs Including metrology and 3D printing capabilities for rapid analysis and production prototype of products.

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In addition we use contract manufacturers for certain of our gas microcontamination and other electronic materials products both in the U.S. and Asia.

PATENTS AND OTHER INTELLECTUAL PROPERTY RIGHTS

We rely on a combination of patent, copyright, trademark and trade secret laws and license agreements to establish and protect our proprietary rights. As of December 31, 2014 our combined patent portfolio included 641 current U.S. patents, 1,266 current foreign patents, including counterparts to U.S. filings, 277 pending U.S. patent applications, 67 pending filings under the Patent Cooperation Treaty not yet nationalized and 974 pending foreign patent applications. While we believe that patents may be important for aspects of our business, we believe that our success also depends upon close customer contact, innovation, technological expertise, responsiveness and worldwide distribution. Additionally, while our patented technology may delay or deter a competitor in offering a competing product, we do not believe that our patent portfolio functions as a barrier to entry for any of our competitors. In addition, while we license and will continue to license technology used in the manufacture and distribution of products from third parties, we do not consider any particular license to be material to our business. We also license our technology to third parties from time to time and, in particular, as required for our patented technology to be designated as the standard by SEMI or other standard setting organizations within the semiconductor industry.

We require each of our employees, including our executive officers, to enter into standard agreements pursuant to which the employee agrees to keep confidential all of our proprietary information and to assign to us all inventions made while employed by us. We also require all outside scientific collaborators, sponsored researchers, and other advisors and consultants who are provided confidential information to execute confidentiality agreements upon the commencement of the consulting or collaboration relationship in question. These agreements generally provide that all confidential information developed or made known to the entity or individual during the course of the entity’s or individual’s relationship with the Company is to be kept confidential and not disclosed to third parties except in specific limited circumstances.

The patent position of any manufacturer, including us, is subject to uncertainties and may involve complex legal and factual issues. Litigation has in the past and may in the future be necessary to enforce our patents and other intellectual property rights or to defend ourselves against claims of infringement or invalidity. The steps that we have taken in seeking patents and other intellectual property protections may prove inadequate to deter misappropriation of our technology and information. In addition, our competitors may independently develop technologies that are substantially equivalent or superior to our technology.

GOVERNMENTAL REGULATION

Our operations are subject to federal, state and local regulatory requirements relating to environmental, waste management and health and safety matters, including measures relating to the release, use, storage, treatment, transportation, discharge, disposal and remediation of contaminants, hazardous substances and wastes, as well as practices and procedures applicable to the construction and operation of our plants. There can be no assurance that we will not incur material costs and liabilities or that our past or future operations will not result in exposure to injury or claims of injury by employees or the public. Although some risk of costs and liabilities related to these matters is inherent in our business, as with many similar businesses, we believe that our business is operated in substantial compliance with applicable regulations. However, new, modified or more stringent requirements or enforcement policies could be adopted, which could adversely affect us. While we expect that capital expenditures will be necessary to assure that any new manufacturing facility is in compliance with environmental and health and safety laws, we do not expect these expenditures to be material.

EMPLOYEES

As of December 31, 2014, we had 3,348, full-time employees, as well as approximately 180 temporary and part-time employees. 386 of our full-time employees work in engineering, research and development and 485 work in sales and marketing. Given the variability of business cycles in the semiconductor industry and the quick response time required by our customers, it is critical that we be able to quickly adjust the size of our production staff to maximize efficiency. Therefore, we use skilled temporary labor as required.

None of our employees are represented by a labor union or covered by a collective bargaining agreement other than statutorily mandated programs in certain European countries.

INFORMATION ABOUT OUR OPERATING SEGMENTS

Our financial reporting segments are Critical Materials Handling (CMH), and Electronic Materials (EM). See Item 7. Management’s Discussion and Analysis of Financial Condition and Results of Operations - Segment Analysis below for a

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discussion of revenue and segment profitability with respect to each of these reporting segments, which discussion is incorporated herein by reference. See also note 15 to our consolidated financial statements. Further, in 2014, 2013 and 2012 approximately 75%, 71% and 69%, respectively, of our net sales were made to customers outside North America. Industry and geographic segment information is also discussed in note 15 to the Entegris, Inc. consolidated financial statements (the “Financial Statements”) included in response to Item 8 below, which note is incorporated herein by reference.

OTHER INFORMATION

On July 27, 2005, our Board of Directors adopted a shareholder rights plan (the “Rights Plan”) pursuant to which Entegris declared a dividend on August 8, 2005 to its shareholders of record on that date of one preferred share purchase right (a “Right”) for each share of Entegris common stock owned on August 8, 2005 and authorized the issuance of Rights in connection with future issuances of Entegris common stock. Each Right entitles the holder to purchase one-hundredth of a share of a series of preferred stock at an exercise price of $50, subject to adjustment as provided in the Rights Plan. The Rights Plan is designed to protect Entegris’ shareholders from attempts by others to acquire Entegris on terms or by using tactics that could deny all shareholders the opportunity to realize the full value of their investment. The Rights are attached to the shares of our common stock until certain triggering events specified in the Rights Agreement occur, including, unless approved by our board of directors, an acquisition by a person or group of specified levels of beneficial ownership of our common stock or a tender offer for our common stock. Upon the occurrence of any of these triggering events, the Rights authorize the holders to purchase at the then-current exercise price for the Rights that number of shares of our common stock having a market value equal to twice the exercise price. The Rights are redeemable by us for $0.01 and will expire on August 8, 2015. One of the events that would trigger the Rights is the acquisition, or commencement of a tender offer, by a person (an Acquiring Person, as defined in the shareholder rights plan), other than Entegris or any of our subsidiaries or employee benefit plans, of 15% or more of the outstanding shares of our common stock. An Acquiring Person may not exercise a Right.

Entegris’ products are made from a wide variety of raw materials that are generally available in quantity from alternate sources of supply. However, certain materials included in the Company’s products, such as certain filtration membranes, polymer resins and petroleum coke used by our Critical Materials Handling segment are obtained from a single source or a limited group of suppliers. Our Electronic Materials segment uses a broad range of specialty and commodity chemicals and polymers in the development of its products, including parts and sub-assemblies that are obtained from outside suppliers. We seek, where possible, to have several sources of supply for all of these materials. Likewise, we may, in some instances, rely on a single or a limited number of suppliers, or upon suppliers in a single country, for some of the materials used by our Electronic Materials segment, however, we have not experienced any sustained interruption in production or the supply of materials to our Electronic Materials segment, and we do not anticipate any significant difficulties in obtaining the materials necessary to manufacture these products. Although the Company seeks to reduce dependence on these sole and limited source suppliers, the partial or complete loss of these sources could interrupt our manufacturing operations and result in an adverse effect on the Company’s results of operations. Furthermore, a significant increase in the price of one or more of these components could also adversely affect the Company’s results of operations.

OUR HISTORY

Effective April 30, 2014, the Company completed the acquisition of ATMI, Inc., a Delaware corporation based in Danbury, CT, for a cash purchase price of $34.00 per ATMI share pursuant to a merger transaction in which ATMI, Inc. became a wholly owned subsidiary of the Company. ATMI, Inc. was incorporated under the laws of Delaware in 1997, and its predecessor company was incorporated under the laws of Delaware in 1987.

Effective August 6, 2005 Entegris, Inc., a Minnesota corporation, and Mykrolis Corporation, a Delaware corporation, completed a strategic merger of equals transaction, pursuant to which they were each merged into the Company to carry on the combined businesses. Entegris Minnesota was incorporated in June 1999 to effect the business combination of Fluoroware, Inc., which began operating in 1966, and EMPAK, Inc., which began operating in 1980.

Mykrolis was organized as a Delaware corporation on October 16, 2000 under the name Millipore MicroElectronics, Inc. in connection with the spin-off by Millipore Corporation of its microelectronics business unit which was completed on February 27, 2002.

EXECUTIVE OFFICERS OF THE REGISTRANT

The following is a list, as of January 31, 2015, of our Executive Officers. All of the Corporate Officers listed below were elected to serve until the first Directors Meeting following the 2015 Annual Stockholders Meeting.

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Name	Age	Office	First Appointed To Office*
CORPORATE OFFICERS
Bertrand Loy	49	President & Chief Executive Officer	2001
Gregory B. Graves	54	Executive Vice President, Chief FinancialOfficer & Treasurer	2002
Peter W. Walcott	68	Senior Vice President, Secretary & General Counsel	2001
John J. Murphy	62	Senior Vice President, Human Resources	2005
Todd Edlund	52	Senior Vice President, Chief Operating Officer	2007
Christian F. Kramer	52	Senior Vice President, Chief Commercial Officer	2014
William Shaner	47	Senior Vice President, Global Operations	2007
Corey Rucci	55	Vice President, Business Development	2014
Gregory Marshall	58	Vice President, Quality and EH&S	2011
Michael D. Sauer	49	Vice President, Controller & Chief Accounting Officer	2011

* With either the Company or a predecessor company

Bertrand Loy has served as our Chief Executive Officer, President and a director since November 2012. Prior to his promotion, Mr. Loy served as our Executive Vice President and Chief Operating Officer since 2008. From August 2005 until July 2008, he served as our Executive Vice President and Chief Administrative Officer in charge of our global supply chain and manufacturing operations. He served as the Vice President and Chief Financial Officer of Mykrolis from January 2001 until August 2005. Prior to that, Mr. Loy served as the Chief Information Officer of Millipore Corporation during 1999 and 2000. From 1995 until 1999, he served as the Division Controller for Millipore’s Laboratory Water Division. From 1989 until 1995, Mr. Loy served Sandoz Pharmaceuticals (now Novartis) in a variety of financial, audit and controller positions located in Europe, Central America and Japan. Mr. Loy served as a director of BTU International, Inc., (supplier of advanced thermal processing equipment) until its acquisition in January of 2015. He also serves as a director of Harvard Bioscience, Inc. (scientific equipment) since November of 2014.

Gregory B. Graves has served as our Executive Vice President and Chief Financial Officer since July 2008. Prior to that he served as Senior Vice President and Chief Financial Officer since April 2007. Prior to April 2007, he served as Senior Vice President, Strategic Planning & Business Development since the effectiveness of the merger with Mykrolis. Mr. Graves served as the Chief Business Development Officer of Entegris Minnesota since September 2002 and from September 2003 until August 2004 he also served as Senior Vice President of Finance. Prior to joining Entegris Minnesota, Mr. Graves held positions in investment banking and corporate development, including at U.S. Bancorp Piper Jaffray from June 1998 to August 2002 and at Dain Rauscher from October 1996 to May 1998.

Peter W. Walcott has been our Senior Vice President, Secretary and General Counsel since the effectiveness of the merger with Mykrolis. He served as the Vice President, Secretary and General Counsel of Mykrolis since October 2000. Mr. Walcott served as the Assistant General Counsel of Millipore Corporation from 1981 until March 2001.

John J. Murphy joined us as our Senior Vice President, Human Resources in October 2005. He served as the Senior Vice President Human Resources of HNTB, an engineering and architectural services firm, from February 2004 until October 2005 and as Corporate Vice President, Human Resources of Cadence Design Systems, Inc. from May 2000 through October 2003. Prior to that Mr. Murphy held senior human resources positions with Williams Companies L.M. Ericsson Telephone Company and General Electric Company.

Todd Edlund has been our Senior Vice President and Chief Operating Officer since November 2014. Prior to that he was Senior Vice President and General Manager of our Critical Materials Handling business and prior to the merger with ATMI, Inc. he was the Vice President and General Manager of our Contamination Control Solutions Division since December 2007. He served as the Vice President and General Manager of our Liquid Systems Business Unit from 2005 to 2007, and prior to that as Entegris Minnesota’s Vice President of Sales for semiconductor markets from 2003 to 2005. Prior to 2003, Mr. Edlund held a variety of positions with our predecessor companies since 1995.

Christian F. Kramer has been our Senior Vice President and Chief Commercial Officer since November of 2014; prior to that he served as Senior Vice President , General Manager, of our Electronic Materials businesses since our merger with ATMI, Inc. Prior to that Mr. Kramer served ATMI, Inc as Senior Vice President and General Manager, Microelectronics, since February 2013. Mr. Kramer joined ATMI in 2010 and, through 2012, served as Senior Vice President of ATMI Material Solutions. Prior to joining ATMI, Mr. Kramer was Vice President, Global Strategic Account Management for Tokyo Electron America, a global manufacturer

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of capital equipment used in the semiconductor industry, from 1998 through 2010. Prior to that, Mr. Kramer held various commercial leadership positions in the semiconductor industry.

William Shaner has been our Senior Vice President Global Operations since February 2014. Previously he served as our Vice President and General Manager, Microenvironments Division since 2007. He has served in a variety of sales, marketing, business development and engineering roles since joining Entegris in 1995.

Gregory Marshallhas been our Vice President of Quality and EH&S since March of 2010. Prior to that he served as our Global Director of Quality since the merger with Mykrolis Corporation, prior to which he served as the Director of Quality for Mykrolis. Prior to joining Mykrolis Mr. Marshall served and the Director of US Quality for Kokusai Semiconductor Equipment Corporation.

Corey Rucciassumed his current position of Vice President Business Development in February 2014. Prior to that he served as Vice President and General Manager of our Specialty Materials Division since 2011 and as General Manager of Poco Graphite, Inc. (Poco) since 2008 when we acquired Poco. Prior to joining Entegris, Mr. Rucci served Poco as the President and Chief Operating Officer since 2007, Chief Operating Officer since 2005, Chief Financial Officer since 2001 and Vice President of Business Development since 1998. Prior to that he worked at UNOCAL Corp. for 17 years in a variety of accounting, marketing and business development roles.

Michael D. Sauer has been our Vice President, Controller and Chief Accounting Officer since June 2012. Prior to that, he served as the Corporate Controller since 2008. From the time of the merger with Mykrolis until April 2008, Mr. Sauer served as Director of Treasury and Risk Management. Mr. Sauer joined Fluoroware, Inc., a predecessor to Entegris Minnesota in 1988 and held a variety of finance and accounting positions until 2001 when he became the Director of Business Development for Entegris Minnesota, the successor to Fluoroware, serving in that position until the merger with Mykrolis.

Table of Contents

Item 1A. Risk Factors.

Risks Relating to our Business and Industry

The semiconductor industry has historically been highly cyclical, and industry downturns reduce net sales and profits. Our business depends on the purchasing patterns of semiconductor manufacturers, which, in turn, depend on the current and anticipated demand for semiconductors and products utilizing semiconductors. The semiconductor industry has historically been highly cyclical with periodic significant downturns, which often have resulted in significantly decreased expenditures by semiconductor manufacturers. Even moderate cyclicality can cause our operating results to fluctuate significantly from one period to the next. We have in the past experienced significant revenue deterioration and incurred significant operating losses due to a severe downturn in both the capital and unit-driven segments of the semiconductor industry. We are unable to predict the ultimate duration and severity of future downturns for the semiconductor industry.

Furthermore, in periods of reduced demand, we must continue to maintain a satisfactory level of engineering, research and development expenditures and continue to invest in our infrastructure. At the same time, we have to manage our operations to be able to respond to any significant increases in demand, if they occur. In addition, because we typically do not have significant backlog, changes in order patterns have a more immediate impact on our revenues. We expect the semiconductor industry to continue to be cyclical. During downturns our revenue is reduced, and there is likely to be an increase in pricing pressure and shifts in product and customer mix, all of which may affect gross margin and net income. Such fluctuations in our results could cause our stock price to decline significantly. We believe that period-to-period comparisons of our results of operations may not be meaningful, and you should not rely upon them as indicators of our future performance.

The semiconductor industry is subject to rapid demand shifts, which are difficult to predict. As a result, our inability to meet demand in response to these rapid shifts may cause a reduction in our market share. Our ability to increase sales of our products, particularly our capital equipment products, depends in part upon our ability to ramp up the use of our manufacturing capacity for such products in a timely manner and to quickly mobilize our supply chain. In order to meet the demands of our customers, we may be required to ramp up our manufacturing capacity in as little as a few months. If we are unable to expand our manufacturing capacity on a timely basis or manage such expansion effectively, our customers could seek such products from other suppliers, and our market share could be reduced. Because demand shifts in the semiconductor industry are rapid and difficult to foresee, we may not be able to increase capacity quickly enough to respond to any such increase in demand.

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We may not be able to accurately forecast demand for our products. We typically operate our business on a just-in-time shipment basis with a modest level of backlog and we order supplies and plan production based on internal forecasts of demand. Due to these factors, we have, in the past, and may again in the future, fail to accurately forecast demand for our products, in terms of both volume and specific products for which there will be demand. This has led to, and may in the future lead to, delays in product shipments, disappointment of customer expectations, or, alternatively, an increased risk of excess inventory and of inventory obsolescence. If we fail to accurately forecast demand for our products, our business, financial condition and operating results could be materially and adversely affected.

Semiconductor industry up-cycles may not reach historic levels and instead may reflect a lower rate of long-term growth. There may not be new high-opportunity applications to drive growth in the semiconductor industry, as was the case in earlier market cycles. Accordingly, the semiconductor industry may experience lower growth rates during any recovery cycle than has historically been the case and its longer-term performance may reflect this lower growth rate. We are unable to predict the duration or ultimate severity of any downturn or the growth rate of any recovery cycle that may follow.

If we are unable to maintain our technological expertise in design and manufacturing processes, we will not be able to successfully compete. The semiconductor industry is subject to rapid technological change, changing customer requirements and frequent new product introductions. Because of this, the life cycle of our products is difficult to determine. We believe that our future success will depend upon our ability to develop and provide products that meet the changing needs of our customers, including the shrinking of integrated circuit line-widths and the use of new classes of materials, such as copper, titanium nitride and organic and inorganic dielectric materials, which are materials that have either a low or high resistance to the flow of electricity. This requires that we successfully anticipate and respond to technological changes in manufacturing processes in a cost-effective and timely manner. Any inability to develop the technical specifications for any of our new products or enhancements to our existing products or to manufacture and ship these products or enhancements in volume in a timely manner could harm our business prospects and significantly reduce our sales. In addition, if new products have reliability or quality problems, we may experience reduced orders, higher manufacturing costs, delays in acceptance and payment, additional service and warranty expense, and damage to our reputation.

Our sales are somewhat concentrated on a small number of key customers and, therefore, our net sales and profitability may materially decline if one or more of our key customers does not continue to purchase our existing and new products in significant quantities. We depend and expect to continue to depend on a limited number of customers for a large portion of our business, and changes in several customers’ orders could have a significant impact on our operating results. Our top ten customers accounted for 42%, 34% and 36% of our net sales in 2014, 2013 and 2012, respectively. If any one of our key customers decides to purchase significantly less from us or to terminate its relationship with us, our net sales and profitability may decline significantly. We could also lose our key customers or significant sales to our key customers because of factors beyond our control, such as a significant disruption in our customers’ businesses generally or in a specific product line. These customers may stop incorporating our products into their products with limited notice to us and suffer little or no penalty for doing so. The semiconductor industry is currently undergoing consolidation with a number of major firms merging or being acquired. If any of our customers merge or are acquired, we may experience lower overall sales from the merged or surviving companies. Because one of our strategies has been to develop long-term relationships with key customers in the product areas in which we focus, and because we have a long product design and development cycle for most of our products and prospective customers typically require lengthy product qualification periods prior to placing volume orders, we may be unable to replace these customers quickly or at all.

We are subject to order and shipment uncertainties and many of our costs are fixed, and, therefore, any significant changes, cancellations or deferrals of orders or shipments could cause our net sales and profitability to decline or fluctuate. We do not usually obtain long-term purchase orders or commitments from our customers. Instead, we work closely with our customers to develop non-binding forecasts of the future volume of orders. Customers may cancel their orders, change production quantities from forecasted volumes or delay production for reasons beyond our control. Order cancellations or deferrals could cause us to hold inventory for longer than anticipated, which could reduce our profitability, restrict our ability to fund our operations and cause us to incur unanticipated reductions or delays in our revenue. Our customers often change their orders multiple times between initial order and delivery. Such changes usually relate to quantities or delivery dates, but sometimes relate to the specifications of the products we are supplying. If a customer does not pay for these products, we could incur significant charges against our income. In addition, our profitability may be affected by the generally fixed nature of our costs. Because a substantial portion of our costs is fixed, we may experience deterioration in gross margins when volumes decline.

Competition from existing or new companies in the microelectronics industry could cause us to experience downward pressure on prices, fewer customer orders, reduced margins, the inability to take advantage of new business opportunities and the loss of market share. We operate in a highly competitive industry. We compete against many domestic and foreign companies that have substantially greater manufacturing, financial, research and development and marketing resources than we do. In addition, some of our competitors may have more developed relationships with our existing customers than we do, which may enable them

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to have their products specified for use more frequently by these customers. We also face competition from the manufacturing operations of our current and potential customers, who continually evaluate the benefits of internal manufacturing versus outsourcing. As more OEMs dispose of their manufacturing operations and increase the outsourcing of their products to liquid and gas delivery system and other component companies, we may face increasing competitive pressures to grow our business in order to maintain our market share. If we are unable to maintain our competitive position, we could experience downward pressure on prices, fewer customer orders, reduced margins, the inability to take advantage of new business opportunities and a loss of market share. Further, we expect that existing and new competitors will improve the design of their existing products and will introduce new products with enhanced performance characteristics. The introduction of new products or more efficient production of existing products by our competitors could diminish our market share and increase pricing pressure on our products. Further, customers continue to demand lower prices, shorter delivery times and enhanced product capability. If we do not respond adequately to such pressures, we could lose customers or orders. If we are unable to compete successfully, we could experience pricing pressures, reduced gross margins and order cancellation, which could have a material adverse effect on our results of operations.

The limited market acceptance of our 300 mm shipper products as well as our other products could continue to harm our operating results. The broad adoption of 300 mm wafers has contributed to the increasing complexity of the semiconductor manufacturing process. The greater diameter of these wafers requires higher tooling costs and presents more complex handling, storage and transportation challenges. We have made and continue to make substantial investments in our 300 mm wafer shipping products, but there is no guarantee that a sufficient number of our customers will adopt our 300 mm wafer shipping product lines. Sales of our shipping products for these applications has, to date been, and could continue in the future to be modest, and we might not recover our development costs.

Semiconductor and other electronic device manufacturers may direct semiconductor capital equipment manufacturers to use a specified supplier’s product in their equipment. Accordingly, our success depends in part on our ability to have semiconductor and other electronic device manufacturers specify that our products be used at their fabrication facilities. Some of our competitors may have more developed relationships with semiconductor and other electronic device manufacturers, which enable them to have their products specified for use in manufacturers’ fabrication facilities.

From time to time, we make capital investments in anticipation of future business opportunities; if we are unable to obtain the anticipated business, our revenue and profitability may decline. In the semiconductor market, the first company to introduce an innovative product meeting an identified customer need often will have a significant advantage over offerings of competitive products. For this reason, we may make significant capital investments in technology and manufacturing capacity in advance of future business developing and without any commitment from our customers to purchase products manufactured as a result of these investments. For example, we have made significant capital investments to develop the capability to manufacture shippers and FOUPs for 450 mm wafers, however, the size and timing of the development of the market for 450 mm wafer shippers and FOUPs remains uncertain. Major semiconductor manufacturers have delayed the implementation of 450 mm manufacturing while others have announced that they would not initiate 450 mm manufacturing until after 2020, so we cannot assure you that we will be able to successfully sell significant quantities of our 450 mm shipper and FOUP products or realize a return on our investment in the near term or ever. If we are unable to achieve broad market acceptance for these products or if a competitive product is preferred by our customers, we may not be able to recoup our investment, we may lose market share and our revenue and profitability may decline.

We may acquire other businesses, form joint ventures or divest businesses that could negatively affect our profitability, require us to incur debt and dilute your ownership of the Company. As part of our business strategy, we have, and we expect to continue to address gaps in our product offerings, diversify into complementary product markets or pursue additional technology and customers through acquisitions, joint ventures or other types of collaborations. We also expect to adjust our portfolio of businesses to meet our ongoing strategic objectives. As a result, we may enter markets in which we have no or limited prior experience and may encounter difficulties in divesting businesses that no longer meet our objectives. Competition for acquiring attractive businesses in our industry is substantial. In executing this part of our business strategy, we may experience difficulty in identifying suitable acquisition candidates or in completing selected transactions at appropriate valuations. Alternatively, we may be required to undertake multiple transactions at the same time in order to take advantage of acquisition opportunities that do arise; this could strain our ability to effectively execute and integrate these transactions. We would consider a variety of financing alternatives for each acquisition which could include borrowing funds, reducing our cash balances or issuing additional shares of our common stock to complete an acquisition. This could impair our liquidity and dilute your ownership of the Company. Further, we may not be able to successfully integrate any acquisitions that we do make into our existing business operations, and we could assume unknown or contingent liabilities or experience negative effects on our reported results of operations from dilutive results from operations and/or from future potential impairment of acquired assets, including goodwill, related to future acquisitions. We may experience difficulties in operating in foreign countries or over significant geographical distances and in retaining key employees or customers of an acquired business, and our management’s attention could be diverted from other business issues. We may not

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identify or complete these transactions in a timely manner, on a cost-effective basis or at all, and we may not realize the benefits of any acquisition or joint venture.

We may not effectively penetrate new markets. Part of our business strategy is to leverage our expertise in our core competencies for growth in new and adjacent markets, such as photovoltaic cells, LEDs, flat panel displays, lithium ion batteries and magnetic storage devices. Our ability to grow our business could be limited if we are unable to execute on this strategy.

Additional Risks Related to Our Business

The loss or significant curtailment of purchases by any of the largest customers of our Electronic Materials (EM) business could adversely affect our results of operations. While our EM business generates revenue from hundreds of customers worldwide, a significant percent of its revenues are generated by its top ten customers. The loss of or significant curtailment of purchases by one or more of these top customers, including curtailments due to a change in the design or manufacturing sourcing policies or practices of these customers or the timing of customer inventory adjustments may adversely affect our results of operations. Our EM customers’ and their customers’ aggressive management of inventory has already adversely affected EM’s results of operations in the past and may continue to adversely affect future results of operations.

We may have difficulty obtaining the resources or products we need for manufacturing or assembling our EM products or operating other aspects of our EM business, which could adversely affect our ability to meet demand for our EM products and may increase our costs. We have hundreds of suppliers providing various materials that we use in the production of our EM products and other aspects of our business, and we seek, where possible, to have several sources of supply for all of these materials. However, we may rely on a single or a limited number of suppliers, or upon suppliers in a single country, for certain of these materials. The inability of such suppliers to deliver adequate supplies of reasonable quality production materials or other supplies could disrupt our production process for EM products. In addition, production could be disrupted by the unavailability of the resources used in production, such as electricity, chemicals, and gases. The unavailability or reducedavailability of the materials or resources we use for our EM products may require us to reduce production of EM products or may require us to incur additional costs in order to obtain an adequate supply of these materials or resources. The occurrence of any of these events could adversely affect our business and results of operations.

Certain of our EM products are used to transport toxic gases used in the semiconductor manufacturing process. Our patented SDS systems use a standard gas cylinder containing a carbon-based adsorbent material. The cylinder is filled with gas under conditions such that the gas is adsorbed onto the adsorbent material at sub-atmospheric pressure to minimize potential leaks of gas during transportation and use. Likewise our VAC systems use a complementary technology where select implant gases are stored under high pressure but delivered sub-atmospherically. While we believe that these delivery systems are the safest available in the industry, as with any products involved in the transport and storage of toxic gases, if a leak should occur during transport or during storage at our customers’ location serious damage could result including injury or death to any person exposed to those toxic gases creating significant product liability for us. While we believe we maintain adequate levels of product liability insurance, there can be no assurance that our insurance will be adequate to satisfy any such liabilities and our financial results or financial condition could be adversely affected.

Our results of operations could be adversely affected by climate change or natural catastrophes, such as the March 2011 earthquake and tsunami in Japan and the June 2012 wildfires in Colorado Springs, Colorado, in the locations in which we, our customers or our suppliers operate. We have manufacturing and other operations in locations subject to natural events such as severe weather and earthquakes that could disrupt operations. In addition, our suppliers and customers also have operations in such locations. A natural disaster that results in a prolonged disruption to our operations, or our customers’ or suppliers’ operations, may adversely affect our results of operations and financial condition. Also, climate change poses both regulatory and physical risks that could harm our results of operations or affect the way we conduct our businesses. While the March 2011 earthquake and tsunami in Japan did not materially impair manufacturing operations at our Yonezawa, Japan plant and while the June 2012 wildfires did not materially impair manufacturing operations at our Colorado Springs plant, there can be no assurance that future such catastrophes will not impact our manufacturing operations or those of our supply chain partners by disrupting our ability to manufacture and deliver products to our customers, resulting in an adverse impact on our business and results of operations.

We may be subject to information technology system failures, network disruptions and breaches in data security. Information technology system failures, network disruptions and breaches of data security from cyber attacks, employee social media use on our computers or through failure of our internet service providers and other cloud computing service providers to successfully secure their own systems could disrupt our operations, causing customer communication and order management issues, unintentional disclosure of customer, employee and proprietary information, and disruption in transaction processing, which could affect our reputation and reporting of financial results. While our management has taken steps to address these concerns by

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implementing network security, hiring personnel and establishing internal control measures, there can be no assurance that a system failure or data security breach will not have a material adverse effect on our financial condition and operating results.

The integration of ATMI’s operations into ours following the Merger could create additional risks for our internal controls over financial reporting. We intend to integrate ATMI into our control environment and subject it to internal control testing during calendar year 2015, which means that deficiencies in our internal control over financial reporting as a combined company may not be identified until then. Any such undiscovered deficiencies, if material, could result in misstatements of our results of operations, restatements of our financial statements, declines in the trading price of our common stock or otherwise have a material adverse effect on our business, reputation, results of operations, financial condition or cash flows.

Risks Related to Our Indebtedness

We will have a substantial amount of indebtedness, which could adversely affect our financial health and our ability to obtain financing in the future, react to changes in our business and to make payments on the indebtedness. As of December 31, 2014, we have an aggregate principal amount of approximately $767 million of outstanding total indebtedness, comprised of our 6% senior unsecured notes due April 1, 2022 (“Notes”) and our senior secured term loan facility due 2021 (“Term Loan”). In addition we have approximately $75 million of unutilized capacity under a senior secured asset-based revolving credit facility (“ABL Facility”), which is subject to a borrowing base.

Subject to the limits contained in the credit agreements governing our Term Loan, the ABL Facility and the indenture that governs the Notes, we may be able to incur substantial additional debt from time to time to finance working capital, capital expenditures, investments or acquisitions, or for other purposes. If we do so, the risks related to our high level of debt could intensify. Specifically, our high level of debt could have important consequences to investors, including:

• making it more difficult for us to satisfy our obligations with respect to the Notes, the Term Loan and the ABL Facility;

• limiting our ability to obtain additional financing to fund future working capital, capital expenditures, acquisitions or other general corporate requirements;

• requiring a substantial portion of our cash flow to be dedicated to debt service payments instead of other purposes, thereby reducing the amount of cash flow available for working capital, capital expenditures, acquisitions and other general corporate purposes;

• increasing our vulnerability to adverse changes in general economic, industry and competitive conditions;

• exposing us to the risk of increased interest rates as certain of our borrowings, including borrowings under the Notes, the Term Loan and the ABL Facility;

• limiting our flexibility in planning for and reacting to changes in the industry in which we compete;

• preventing us from raising funds necessary to repurchase all Notes tendered to us upon the occurrence of certain changes of control, which could constitute a default under the indenture governing the Notes;

• placing us at a disadvantage compared to other, less leveraged competitors or competitors with comparable debt at more favorable interest rates; and

• increasing our cost of borrowing.

In addition, the indenture that governs the Notes and the credit agreements governing our Term Loan and the ABL Facility contain restrictive covenants that will limit our ability to engage in activities that may be in our long-term best interest. Our failure to comply with those covenants could result in an event of default which, if not cured or waived, could result in the acceleration of substantially all of our debt.

Despite our current level of indebtedness, we and our subsidiaries may still be able to incur substantially more debt. This could further exacerbate the risks to our financial condition described above and prevent us from fulfilling our obligations under our existing indebtedness. We and our subsidiaries may be able to incur significant additional indebtedness in the future. Although the indenture that will govern the Notes and the credit agreements governing our Term Loan contain restrictions on the incurrence of additional indebtedness, these restrictions are subject to a number of qualifications and exceptions, and the additional indebtedness incurred in compliance with these restrictions could be substantial. If we incur any additional indebtedness that ranks equally with the Notes, subject to collateral arrangements, the holders of that debt will be entitled to share ratably with the holders of the Notes and the lenders under the Term Loan and the ABL Facility in any proceeds distributed in connection with any insolvency, liquidation, reorganization, dissolution or other winding up of our Company. These restrictions also will not prevent us from incurring obligations that do not constitute indebtedness. Our Term Loan also provides that we will have the right at any time to request additional loans and commitments, and to the extent that the aggregate amount of such additional loans and commitments exceeds $225 million, the incurrence thereof will be subject

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to our secured net leverage ratio being less than a specified ratio, or in the case of unsecured loans or other unsecured debt, or loans or other debt secured by junior liens, our total net leverage ratio being less than a specified ratio. The lenders under these facilities will not be under any obligation to provide any such additional term loans or commitments, and any additional term loans or increase in commitments will be subject to several conditions precedent and limitations. If new debt is added to our current debt levels, the related risks that the Company now faces could intensify.

We may not be able to generate sufficient cash to service all of our indebtedness and may be forced to take other actions to satisfy our obligations under our indebtedness, which may not be successful. Our ability to make scheduled payments on or refinance our debt obligations depends on our financial condition and operating performance, which are subject to prevailing economic, industry and competitive conditions and to certain financial, business, legislative, regulatory and other factors beyond our control. We may be unable to maintain a level of cash flow from operating activities sufficient to permit us to pay the principal, premium, if any, and interest on our indebtedness.

If our cash flow and capital resources are insufficient to fund our debt service obligations, we could face substantial liquidity problems and could be forced to reduce or delay investments and capital expenditures or to dispose of material assets or operations, seek additional debt or equity capital or restructure or refinance our indebtedness. Our ability to restructure or refinance our debt will depend on the condition of the capital markets and our financial condition at such time. Any refinancing of our debt could be at higher interest rates and may require us to comply with more onerous covenants, which could further restrict our business operations. We may not be able to effect any such alternative measures on commercially reasonable terms or at all and, even if successful, those alternative actions may not allow us to meet our scheduled debt service obligations. The credit agreements governing the Term Loan, the ABL Facility and the indenture that governs the Notes restrict our ability to dispose of assets and use the proceeds from those dispositions and may also restrict our ability to raise debt or equity capital to be used to repay other indebtedness when it becomes due. We may not be able to consummate those dispositions or to obtain proceeds in an amount sufficient to meet any debt service obligations then due.

Our inability to generate sufficient cash flow to satisfy our debt obligations, or to refinance our indebtedness on commercially reasonable terms or at all, would materially and adversely affect our financial position and results of operations and our ability to satisfy our obligations under our indebtedness.

If we cannot make scheduled payments on our debt, we will be in default and holders of the Notes could declare all outstanding principal and interest to be due and payable, the lenders under the Term Loan and the ABL Facility could terminate their commitments to loan money, our secured lenders could foreclose against the assets securing their borrowings and we could be forced into bankruptcy or liquidation.

The terms of our credit agreements governing our Term Loan, our ABL Facility and the indenture governing the Notes restrict our current and future operations, particularly our ability to respond to changes or to take certain actions. The indenture that governs the Notes and the credit agreements governing our Term Loan contain a number of restrictive covenants that impose significant operating and financial restrictions on us and may limit our ability to engage in acts that may be in our long-term best interest, including restrictions on our ability to:

•incur certain liens;

•incur additional indebtedness and guarantee indebtedness;

•pay dividends or make other distributions in respect of, or repurchase or redeem, capital stock;

•prepay, redeem or repurchase certain debt;

•make investments, loans, advances and acquisitions;

•sell or otherwise dispose of assets, including capital stock of our subsidiaries;

•enter into transactions with affiliates;

•alter the businesses we conduct;

•enter into agreements restricting our subsidiaries’ ability to pay dividends; and

•consolidate, merge or sell all or substantially all of our assets.

In addition, the restrictive covenants in the credit agreement governing our ABL Facility may, at certain times, require us to maintain a fixed charge coverage ratio. Our ability to meet this financial ratio can be affected by events beyond our control.

A breach of the covenants under the indenture that governs the Notes or under the credit agreements governing our Term Loan and the ABL Facility could result in an event of default under the applicable indebtedness. Such a default may allow the creditors to accelerate the related debt and may result in the acceleration of any other debt to which a cross-acceleration or cross-default provision applies. In addition, an event of default under the credit agreement governing our ABL Facility would permit the lenders under our ABL Facility to terminate all commitments to extend further credit under that facility. Furthermore, if we were unable

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to repay the amounts due and payable under our Term Loan and ABL Facility, those lenders could proceed against the collateral granted to them to secure that indebtedness, which could force us into bankruptcy or liquidation. In the event our lenders or note holders accelerate the repayment of our borrowings, we and our subsidiaries may not have sufficient assets to repay that indebtedness.

If our operating performance declines, we may in the future need to obtain waivers from the required lenders under our Term Loan and ABL Facility to avoid being in default. If we breach our covenants under our Term Loan and ABL Facility and seek a waiver, we may not be able to obtain a waiver from the required lenders. If this occurs we would be in default under the applicable facility, the lenders could exercise their rights, as described above, and we could be forced into bankruptcy or liquidation.

The restrictions contained in the credit agreements governing our Term Loan, the ABL Facility and the indenture that governs the Notes could adversely affect our ability to:

•finance our operations;

•make needed capital expenditures;

•make strategic acquisitions or investments or enter into joint ventures;

•withstand a future downturn in our business, the industry or the economy in general;

• compete effectively and engage in business activities, including future opportunities, that may be in our best interest; and

• plan for or react to market conditions or otherwise execute our business strategies.

These restrictions may affect our ability to grow in accordance with our plans.

A lowering or withdrawal of the ratings assigned to our debt securities by rating agencies may increase our future borrowing costs and reduce our access to capital. The Notes have been rated by Standard & Poor’s and Moody’s. There is no assurance that such credit ratings will remain in effect for any given period of time. Rating agencies also may lower, suspend or withdraw ratings on the Notes or our other debt in the future. Any lowering, suspension or withdrawal of such ratings may have an adverse effect on the market prices or marketability of our indebtedness.

Any future lowering of our ratings likely would make it more difficult or more expensive for us to obtain additional debt financing. If any credit rating initially assigned to our indebtedness is lowered or withdrawn for any reason, the value of that indebtedness could deteriorate.

Manufacturing Risks

Our dependence on single and limited source suppliers could affect our ability to manufacture our products.We rely on single or limited source suppliers for some plastic polymers, filtration membranes and petroleum coke that are critical to the manufacturing of our products. At times, we have experienced a limited supply of certain polymers as well as the need to substitute polymers, resulting in delays, increased costs and the risks associated with qualifying new polymers with our customers. An industry-wide increase in demand for these polymers could affect the ability of our suppliers to provide sufficient quantities to us. If we are unable to obtain an adequate quantity of such supplies, our manufacturing operations may be interrupted.

In addition, suppliers may discontinue production of polymers specified in certain of our products, requiring us in some instances to certify an alternative source with our customers. If we are unable to obtain an adequate quantity of such supplies for any reason, our manufacturing operations may be adversely affected. Obtaining alternative sources would likely result in increased costs and shipping delays, which could decrease profitability and damage our relationships with current and potential customers.

Prices for polymers can vary widely. In a volatile oil price environment, some suppliers have added and may in the future add surcharges to the prices of the polymers we purchase. While we have long-term arrangements with certain key suppliers of polymers that fix our price for purchases up to specified quantities, if our polymer requirements exceed the quantities specified, we could be exposed to higher material costs. If the cost of polymers increases and we are unable to correspondingly increase the sales price of our products, our profit margins will decline.

Our filtration products incorporate a wide variety of filter membranes designed to meet specific customer filtration needs, not all of which are produced internally. In the event that a manufacturer of outsourced membrane discontinues supply or production, we may be required to identify and qualify an alternative filter membrane for that application to incorporate into our products. This could require extensive lead times and increased costs which may cause us to lose sales and cause our profit margins to decline.

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Our graphite synthesis process requires petroleum coke that meets specified criteria. While there are multiple suppliers for this petroleum coke, the sources are limited and our required criteria may cause the price of this petroleum coke to increase.

Our production processes are becoming increasingly complex, and our production could be disrupted if we are unable to avoid manufacturing difficulties. Our manufacturing processes are complex and require the use of expensive and technologically sophisticated equipment and materials. These processes are frequently modified to improve manufacturing yields and product quality. We have, on occasion, experienced manufacturing difficulties, such as temporary shortages of raw materials and occasional critical equipment breakdowns that have delayed deliveries to customers. A number of our product lines are manufactured at only one or two facilities, and any disruption could impact our sales until another facility could commence or expand production of such products.

Our manufacturing operations are subject to numerous risks, including the introduction of impurities in the manufacturing process and other manufacturing difficulties that may not be well understood for an extended period of time and that could lower manufacturing yields and make our products unmarketable; the costs and demands of managing and coordinating geographically diverse manufacturing facilities; and the disruption of production in one or more facilities as a result of a slowdown or shutdown in another facility. We could experience these or other manufacturing difficulties, which might result in a loss of customers and exposure to warranty and product liability claims.

Third-party membrane suppliers may disrupt our ability to manufacture products to meet our customer needs. Certain of our membrane products rely on membranes manufactured by third parties. In the event that these membranes are no longer available or cost-effective and we are unable to acquire an alternative source, our ability to manufacture these products may be disrupted and our profits may decline.

Our membrane manufacturing operations may be disrupted if we are unable to successfully transition manufacturing to our own facility. The Membrane Manufacturing and Supply Transition Agreement (the Membrane Agreement) between us and EMD Millipore Corporation, dated November 22, 2013, provides that our lease of space in Millipore’s Bedford, Massachusetts facility and our right to use certain manufacturing equipment owned by Millipore expires on June 30, 2015. While we have opened a new membrane manufacturing plant in Bedford, MA to house these membrane manufacturing operations, qualification of this new membrane manufacturing plant is still under way and will require significant lead time to complete. In addition, the transition of membrane manufacturing operations to this new facility, which will also consolidate certain other existing operations in Massachusetts, will be complex and time consuming. In addition, our current membrane manufacturing is operating at capacity. Consequently, delays in completion of the qualification of our new membrane manufacturing facility or a failure to execute the transition of our membrane manufacturing operations effectively and expeditiously might disrupt our manufacture of membrane, exacerbate our capacity constraints and result in a loss of customers or exposure to warranty, product liability claims and breach of contract claims.

We may lose sales if we are unable to timely procure, repair or replace capital equipment necessary to manufacture many of our products. If our existing equipment fails, or we are unable to obtain new equipment quickly enough to satisfy any increased demand for our products, we may lose sales to competitors. In particular, we do not maintain duplicate tools or equipment for most of our important products. Fixing or replacing complex tools is time consuming, and we may not be able to replace a damaged tool in time to meet customer requirements. In addition, from time to time we may upgrade or add new manufacturing equipment that may require substantial lead times to build and qualify. Delays in building and qualifying new equipment could result in a disruption of our manufacturing processes and prevent us from meeting our customers’ requirements so that they would seek other suppliers.

We incur significant cash outlays over long-term periods in order to research, develop, manufacture and market new products that may never reach market or may have limited market acceptance. We make significant cash expenditures to engineer, research, develop and market new products. For example, we incurred $87.7 million, $55.3 million and $50.9 million for engineering, research and development expense in 2014, 2013 and 2012, respectively. The development period for a product can be very long. Following development, it may take a number of years for sales of that product to reach a substantial level, if ever. We cannot be certain of the success of a new product. A product concept may never progress beyond the development stage or may only achieve limited acceptance in the marketplace. If this occurs, we do not receive a direct return on our expenditures and may not even realize any indirect benefits. Additionally, capacity expansion may be necessary in order to manufacture a new product. If sales levels do not increase to offset the additional fixed operating expenses associated with any such expansion, our profitability could decline and our prospects could be harmed. For example, as noted above, while we have made significant capital investments to develop the capability to manufacture shippers and FOUPs for 450 mm wafers, the size and timing of the development of the market for 450 mm wafer shippers and FOUPs remains uncertain. Major semiconductor manufacturers have delayed the implementation of 450 mm manufacturing while others have announced that they would not initiate 450 mm manufacturing until

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after 2020, so we cannot assure you that we will be able to successfully sell significant quantities of our 450 mm shipper and FOUP products or realize a return on our investment in the near term or ever.

We are subject to a variety of environmental laws that could cause us to incur significant expenses. In addition to other regulatory requirements affecting our business, we are subject to a variety of federal, state, local and non-U.S. regulatory requirements relating to the use, disposal, clean-up of, and human exposure to, hazardous chemicals. We generate and handle materials that are considered hazardous waste under applicable law. Certain of our manufacturing operations require the discharge of substantial quantities of wastewater into publicly owned waste treatment works which require us to assure that our wastewater complies with volume and content limitations. If we fail to comply with any present or future regulations, we could be subject to future liabilities or the suspension of production. In addition, compliance with these or future laws could restrict our ability to expand our facilities or to build or acquire new facilities or may require us to acquire costly equipment, incur other significant expenses, such as remediation of contamination found on any site that we may acquire, or modify our manufacturing processes.

We are continually evaluating our manufacturing operations within our plants in order to achieve efficiencies and gross margin improvements. If we are unable to successfully manage transfers or realignments of our manufacturing operations, our ability to deliver products to our customers could be disrupted and our business, financial condition and results of operations could be adversely affected. In order to enhance the efficiency and cost effectiveness of our manufacturing operations, we have in the past and may in the future move several product lines from one of our plants to another and to consolidate manufacturing operations in certain of our plants. Our product lines involve technically complex manufacturing processes that require considerable expertise to operate. If we are unable to establish stable processes to efficiently and effectively produce high quality products in relocated manufacturing processes in the destination plant, production may be disrupted and we may not be able to deliver these products to meet customer orders in a timely manner, which may cause us to lose credibility with our customers and harm our business. There can be no assurance that these complex manufacturing processes can be stabilized and that the cost savings that we anticipate will be achieved.

Loss of our key personnel could harm our business because of their experience in the semiconductor industry and their technological expertise. Similarly, our inability to attract and retain new qualified personnel could inhibit our ability to operate and grow our business successfully. We depend on the services of our key senior executives and technological experts because of their experience in the semiconductor industry and their technical expertise. The loss of the services of one or several of our key employees or an inability to attract, train and retain qualified and skilled employees, specifically research and development and engineering personnel, could result in the loss of customers or otherwise inhibit our ability to operate and grow our business successfully. In the past and currently, during downturns in the semiconductor industry our predecessor companies have, and we have, had to impose salary reductions on senior employees and freeze or eliminate merit increases in an effort to maintain our financial position. These actions may have an adverse effect on employee loyalty and may make it more difficult for us to attract and retain key personnel.

We face the risk of product liability claims. The manufacture and sale of our products involve the risk of product liability claims. In addition, a failure of one of our products at a customer site could interrupt the business operations of the customer. Our existing insurance coverage limits may not be adequate to protect us from all liabilities that we might incur in connection with the manufacture and sale of our products if a successful product liability claim or series of product liability claims were brought against us.

If we are unable to protect our intellectual property rights, our business and prospects could be harmed. Our future success and competitive position depend in part upon our ability to obtain and maintain proprietary technology used in our principal product families. We rely, in part, on patent, trade secret and trademark law to protect that technology. We routinely enter into confidentiality agreements with our employees and with third parties. However, there can be no assurance that these agreements will not be breached, that we will have adequate remedies for any breach or that our confidential and proprietary information and technology will not be independently developed by or become otherwise known to third parties. We have obtained a number of patents relating to our products and have filed applications for additional patents. We cannot assure you that any of our pending patent applications will be approved, that we will develop additional proprietary technology that is patentable, that any patents owned by or issued to us will provide us with competitive advantages or that these patents will not be challenged by third parties. Patent filings by third parties, whether made before or after the date of our filings, could render our intellectual property less valuable. Competitors may misappropriate our intellectual property, and disputes as to ownership of intellectual property may arise. In addition, if we do not obtain sufficient international protection for our intellectual property, our competitiveness in international markets could be significantly impaired, which would limit our growth and future revenue. Furthermore, there can be no assurance that third parties will not design around our patents.

Protection of our intellectual property rights has in the past resulted and may continue to result in costly litigation. We may from time to time be required to institute litigation in order to enforce our patents, copyrights or other intellectual property rights, to protect our trade secrets, to determine the validity and scope of the proprietary rights of others or to defend against claims of

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infringement. Such litigation could result in substantial costs and diversion of resources and could negatively affect our sales, profitability and prospects regardless of whether we are able to successfully enforce our rights. For example, in January 2011 we settled multiple patent litigations with Pall Corporation. We prosecuted and defended these cases vigorously and incurred substantial costs in pursuing them. It may become necessary for us to initiate other costly patent litigation against this or other competitors in order to protect and/or perfect our intellectual property rights. We cannot predict how any existing or future litigation will be resolved or what their impact will be on us.

If we infringe on the proprietary technology of others, our business and prospects could be harmed. Our commercial success will depend, in part, on our ability to avoid infringing or misappropriating any patents or other proprietary rights owned by third parties. If we are found to infringe or misappropriate a third party’s patent or other proprietary rights, we could be required to pay damages to such third party, alter our products or processes, obtain a license from the third party or cease activities utilizing such proprietary rights, including making or selling products utilizing such proprietary rights. If we are required to obtain a license from a third party, there can be no assurance that we will be able to do so on commercially favorable terms, if at all.

International Risks

We conduct a significant amount of our sales activity and manufacturing efforts outside the United States, which subjects us to additional business risks and may cause our profitability to decline due to increased costs. Sales to customers outside the United States accounted for approximately 75%, 71% and 69%, respectively, of our net sales in 2014, 2013 and 2012, respectively. We anticipate that international sales will continue to account for a majority of our net sales. In addition, a number of our key domestic customers derive a significant portion of their revenues from sales in international markets. We also manufacture a significant portion of our products outside the United States and are dependent on international suppliers for many of our parts. We intend to continue to pursue opportunities in both sales and manufacturing internationally. Our international operations are subject to a number of risks and potential costs that could adversely affect our revenue and profitability, including:

• unexpected changes in regulatory requirements that could impose additional costs on our operations or limit our ability to operate our business;

• greater difficulty in collecting our accounts receivable and longer payment cycles than are typical in domestic operations;

• changes in labor conditions and difficulties in staffing and managing foreign operations;

• expense and complexity of complying with U.S. and foreign import and export regulations;

• liability for foreign taxes assessed at rates higher than those applicable to our domestic operations; and

• political and economic instability.

In the past, we have incurred costs or experienced disruptions due to the factors described above and expect to do so in the future. For example, our operations in Asia, and particularly South Korea, Taiwan and Japan, have been negatively impacted in the past as a result of regional economic instability. In addition, Taiwan and South Korea account for a growing portion of the world’s semiconductor manufacturing. There have historically been strained relations between China and Taiwan and there are continuing tensions between North Korea and other countries, including South Korea and the United States. Any adverse developments in those relations could significantly disrupt the worldwide production of semiconductors, which may lead to reduced sales of our products. Furthermore, we incur additional legal compliance costs associated with our international operations and could become subject to legal penalties in foreign countries if we do not comply with local laws and regulations, which may be substantially different from those in the United States. In a number of foreign countries, some companies engage in business practices that are prohibited by U.S. law applicable to us such as the Foreign Corrupt Practices Act. Although we implement policies and procedures designed to ensure compliance with these laws, there can be no assurance that all of our employees, contractors and agents, as well as those companies to which we outsource certain of our business operations, including those based in countries where practices that violate such U.S. laws may be customary or common, will not take actions in violation of our policies. Any such violation, even if prohibited by our policies, could have an adverse effect on our business and results of operations.

We will lose sales if we are unable to obtain government authorization to export certain of our products or to import certain of our products into foreign markets, and we would be subject to legal and regulatory consequences if we do not comply with applicable export and import control laws and regulations. Exports of certain of our products are subject to export controls imposed by the U.S. Government and administered by the U.S. Departments of State and Commerce. In certain instances, these regulations may require pre-shipment authorization from the administering department. For products subject to the Export Administration Regulations (EAR) administered by the Department of Commerce’s Bureau of Industry and Security, the requirement for a license is dependent on the type and end use of the product, the final destination, the identity of the end user and whether a license exception might apply. Virtually all exports of products subject to the International Traffic in Arms Regulations (ITAR) administered by the Department of State’s Directorate of Defense Trade Controls, require a license. Certain of our products are subject to EAR and ITAR. Products developed and manufactured in our foreign locations are subject to export controls of the applicable foreign nation.

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Given the current global political climate, obtaining export licenses can be difficult and time-consuming. Failure to obtain export licenses for these shipments could significantly reduce our revenue and materially and adversely affect our business, financial condition and results of operations. Compliance with U.S. Government regulations may also subject us to additional fees and costs. The absence of comparable restrictions on competitors in other countries may adversely affect our competitive position.

In addition, certain countries require import and other special licenses in order for certain of our products to be imported into or sold in that country. Our inability to satisfy these requirements in a timely manner has in the past, and may continue to, prevent us from meeting our customers’ expectations in these countries and to lose sales.

Our results of operations could be adversely affected by changes in taxation. We have facilities in foreign countries and, as a result, are subject to taxation and audit by a number of taxing authorities. Tax rates vary among the jurisdictions in which we operate. Our results of operations could be affected by market opportunities or decisions we make that cause us to increase or decrease operations in one or more countries, or by changes in applicable tax rates or audits by the taxing authorities in countries in which we operate. In addition, we are subject to laws and regulations in various locations that govern the determination of which is the appropriate jurisdiction to decide when and how much profit has been earned and is subject to taxation in that jurisdiction. Changes in these laws and regulations could affect the locations where we are deemed to earn income, which could in turn affect our results of operations. We have deferred tax assets on our balance sheet. Changes in applicable tax laws and regulations could affect our ability to realize those deferred tax assets, which could also affect our results of operations. Each quarter we forecast our tax liability based on our forecast of our performance for the year. If that performance forecast changes, our forecasted tax liability may change.

In connection with the Merger we have undertaken a complex internal reorganization of our foreign subsidiaries in order to rationalize and streamline our foreign operations, focus our management efforts on certain local opportunities and to take advantage of favorable business conditions in certain localities. While we have exercised diligence in undertaking this internal reorganization, there can be no assurance that this reorganization, or any future internal reorganization, will not result in adverse tax consequences in the United States or in foreign countries in which we have operations. This could adversely impact our profitability from foreign operations and result in a material reduction in our results of operations.

We may be subject to increased import duties as we seek to source more of the materials from which our products are made from foreign countries. In an effort to reduce the cost of our products or to obtain the highest quality materials, we expect that our purchases of raw materials and components from foreign countries will increase. Those of our products manufactured in the United States or other countries from these materials and components may consequently be burdened by import duties imposed by the United States or those other countries, and these additional costs may be substantial and may put our products at a competitive disadvantage.

Fluctuations in the value of the U.S. dollar in relation to other currencies may lead to lower net income and shareholders’ equity or may cause us to raise prices, which could result in reduced net sales. Foreign currency exchange rate fluctuations could have an adverse effect on our net sales, results of operations and shareholders’ equity. Foreign currency fluctuations against the U.S. dollar could require us to increase prices to foreign customers, which could result in lower net sales by us to such customers. Alternatively, if we do not adjust the prices for our products in response to foreign currency fluctuations, our profitability could decline. In addition, sales made by our foreign subsidiaries are generally denominated in the currency of the country in which these products are sold, and the currency we receive in payment for such sales could be less valuable at the time of receipt versus the time of sale as a result of foreign currency exchange rate fluctuations.

We are subject to restrictions on the transfer of currency from certain countries in which we conduct operations that could impair our ability to transfer our funds from one of our subsidiaries to another. These regulations are complex and may interfere with the conduct of our business operations in the ordinary course. In some jurisdictions even an unintentional violation of these regulations can result in criminal penalties.

Volatility in the global economy could adversely affect our results. Financial markets in the United States, Europe and Asia have been experiencing extreme disruption in recent years, including, among other things, volatility in securities prices, severely diminished liquidity and credit availability, rating downgrades of sovereign debt and declining valuation of certain investments, declines in consumer confidence, declines in economic growth, volatility in unemployment rates, and uncertainty about economic stability. In the past such conditions have had a significant adverse impact on our industry and financial condition and results of operations. There may be further changes in the global economy, which could lead to further challenges in our business and negatively impact our financial results. Tightness of credit in financial markets could adversely affect the ability of our customers and suppliers to obtain financing for significant purchases and operations and could result in a decrease in orders and spending for our products and services. We are unable to predict the likely duration and severity of any disruption in European or global

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financial markets and adverse economic conditions and the effects they may have on our business and financial condition. If uncertain economic conditions return or deteriorate, our business and results of operations could be further materially and adversely affected.

An increased concentration of wafer manufacturing in Japan could result in lower sales of our wafer shipper products. A large percentage of the world’s 300 mm raw silicon wafer manufacturing currently takes place in Japan. Our market share in Japan is currently lower than in other regions we serve. Further, we expect that a large percentage of 450 mm raw silicon wafer manufacturing will, in the future, take place in Japan. If we are unable to persuade these wafer suppliers to use our new 450 mm shippers, we may not be able to achieve a significant market share and may not be able to benefit from our investment in 450 mm shipper manufacturing capacity.

Terrorist attacks, such as the attacks that occurred in New York and Washington, D.C. on September 11, 2001, and other acts of violence or war may affect the markets in which we operate or our operations and hurt our ability to manufacture products and our profitability. Terrorist attacks may negatively affect our operations and any security we issue. There can be no assurance that there will not be future terrorist attacks against the United States or U.S. businesses. These attacks or other armed conflicts may directly impact our physical facilities or those of our suppliers or customers. Our primary facilities include headquarters, research and development and manufacturing facilities in the United States; sales, research and development and manufacturing facilities in Japan, South Korea, Taiwan and Malaysia; and sales and service facilities in Europe and Asia. Attacks may also disrupt the global insurance and reinsurance industries with the result that we may not be able to obtain insurance at historical terms and levels for our facilities. Furthermore, such attacks may make travel and the transportation of our supplies and products more difficult and more expensive and may ultimately affect the sales of our products in the United States and overseas. As a result of terrorism, the United States may enter into additional armed conflicts, which could have a further impact on our domestic and international sales, our supply chain, our production capacity and our ability to deliver products to our customers. The consequences of these armed conflicts and the associated instability are unpredictable, and we may not be able to foresee events that could have an adverse effect on our business and any security we issue.

Risks Related to Owning our Securities

The price of our common stock has been volatile in the past and may be volatile in the future. The price of our common stock has been volatile in the past and may be volatile in the future. While in 2014 the closing price of our stock on The NASDAQ Global Select Market (“NASDAQ”) ranged from a low of $10.28 to a high of $14.02, in past years the price of our common stock showed greater volatility.

The trading price of our common stock is subject to significant volatility in response to various factors, some of which are beyond our control, including the following: the failure to meet the published expectations of securities analysts; changes in financial estimates by securities analysts; press releases or announcements by, or changes in market values of, comparable companies; volatility in the markets for high-technology stocks, general stock market price and volume fluctuations, which are particularly common among securities of high-technology companies; stock market price and volume fluctuations attributable to inconsistent trading volume levels; the cyclicality of the semiconductor industry and current industry downturn; our performance; our ability to repay when due any debt obligations we may incur in the future; our ability to respond to rapid shifts in demand; our ability to compete effectively; loss of key customers or decline in order volumes for new and existing products; our high fixed costs; manufacturing difficulties; risks associated with our significant foreign operations; additions or departures of key personnel; involvement in or adverse results from litigation; and perceived dilution from stock issuances.

Furthermore, stock prices for many companies fluctuate widely for reasons that may be unrelated to their operating results. Those fluctuations and general economic, political and market conditions, such as recessions, terrorist or other military actions, or international currency fluctuations, as well as public perception of equity values of publicly traded companies may adversely affect the market price of our common stock. These market fluctuations may cause the trading price of our common stock to decrease. Future decreases in our stock price may adversely impact our ability to raise sufficient additional capital in the future, if needed.

If our common stock trades below book value or our business outlook erodes, we could be required to record material impairment losses for our long-lived assets, including property, plant and equipment and our identifiable intangibles. In accordance with U.S. generally accepted accounting principles, we review our long-lived assets whenever events or changes in circumstances indicate that the carrying amount of such assets may not be recoverable. If the carrying amount of an asset or group of assets exceeds its undiscounted cash flows, the asset will be written down to its fair value.

The evaluation of the recoverability of long-lived assets requires us to make significant estimates and assumptions. These estimates and assumptions primarily include, but are not limited to, the identification of the asset group at the lowest level of independent

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cash flows and the primary asset of the group; and long-range forecasts of revenue, reflecting management’s assessment of general economic and industry conditions, operating income, depreciation and amortization and working capital requirements.

Due to the inherent uncertainty involved in making these estimates, which are made in a particular economic environment, actual results could differ from those estimates. In addition, changes in the underlying assumptions would have a significant impact on the conclusion that an asset group’s carrying value is recoverable, or the determination of any impairment charge if it was determined that the asset values were indeed impaired.

Due to the uncertain economic environment within the semiconductor industry, we continually monitor circumstances and events to determine whether asset impairment testing is warranted.

It is possible that in the future we may no longer be able to conclude that there is no impairment of our long-lived assets, nor can we provide assurance that material impairment charges of long-lived assets will not occur in future periods.

Our annual and quarterly operating results are subject to fluctuations as a result of rapid demand shifts and our modest level of backlog, and if we fail to meet the expectations of securities analysts or investors, the market price of our common stock may decrease significantly. Our sales and profitability can vary significantly from quarter to quarter and year to year. Because our expense levels are relatively fixed in the short-term, an unanticipated decline in revenue in a particular quarter could significantly reduce our net income, or lead to a net loss, in that quarter. In addition, we make a substantial portion of our shipments shortly after we receive the order, and therefore we operate with a relatively modest level of backlog. As a consequence of the just-in-time nature of shipments and the modest level of backlog, our results of operations may decline quickly and significantly in response to changes in order patterns or rapid decreases in demand for our products. We anticipate that fluctuations in operating results will continue in the future. Such fluctuations in our results could cause us to fail to meet the expectations of securities analysts or investors, which could cause the market price of our common stock to decline substantially. We believe that period-to-period comparisons of our results of operations may not be meaningful, and you should not rely upon them as indicators of our future performance.

If we fail to maintain an effective system of internal controls, we may not be able to accurately report our financial results. As a result, current and potential stockholders could lose confidence in our financial reporting, which would harm our business and the trading price of our stock. Effective internal controls are necessary for us to provide reliable financial reports. If we cannot provide reliable financial reports, our business and operating results could be harmed. We have in the past discovered, and may in the future, identify material weaknesses in internal control over financial reporting. Each of these past material weaknesses represented a reasonable possibility that a material misstatement of our annual or interim financial statements would not have been prevented or detected.

Any failure to implement and maintain the improvements that we have made to our controls over our financial reporting, or difficulties encountered in the implementation of these improvements in our controls, could cause us to fail to meet our reporting obligations. Any failure in our internal controls that leads to a material weakness could also cause investors to lose confidence in our reported financial information, which could have a negative impact on the trading price of our stock.

Changes effected by the Sarbanes-Oxley Act of 2002 and the Dodd-Frank Wall Street Reform and Consumer Protection Act and related SEC regulations have in the past and are likely to continue to increase our costs. The Sarbanes-Oxley Act of 2002 and the Dodd-Frank Act required changes in some of our corporate governance, securities disclosure and compliance practices. In response to the requirements of those Acts, the Securities and Exchange Commission and the NASDAQ have promulgated new rules and listing standards covering a variety of subjects. Compliance with these rules and listing standards has increased our legal and financial and accounting costs, and we expect these increased costs to continue indefinitely. We also expect these developments may make it more difficult and more expensive for us to obtain director and officer liability insurance in the future, and we may be forced to accept reduced coverage or incur substantially higher costs to obtain coverage. Likewise, these developments may make it more difficult for us to attract and retain qualified members of our board of directors, particularly independent directors, or qualified executive officers.

Provisions in our charter documents, Delaware law and our shareholder rights plan may delay or prevent an acquisition of us, which could decrease the value of your shares. Our certificate of incorporation and by-laws, Delaware law and our shareholder rights plan contain provisions that could make it harder for a third party to acquire us without the consent of our board of directors. These provisions include limitations on actions by our stockholders by written consent. In addition, our board of directors has the right to issue preferred stock without stockholder approval, which could be used to dilute the stock ownership of a potential hostile acquirer.

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Our restated certificate of incorporation makes us subject to the anti-takeover provisions of Section 203 of the Delaware General Corporation Law. In general, Section 203 prohibits publicly held Delaware corporations to which it applies from engaging in a “business combination” with an “interested stockholder” for a period of three years after the date of the transaction in which the person became an interested stockholder, unless the business combination is approved in a prescribed manner. This provision could discourage others from bidding for our shares of common stock and could, as a result, reduce the likelihood of an increase in the price of our common stock that would otherwise occur if a bidder sought to buy our common stock.

Our shareholder rights plan will permit our stockholders to purchase shares of our common stock at a 50% discount upon the occurrence of specified events, including the acquisition by anyone of 15% or more of our common stock, unless such event is approved by our board of directors. Delaware law also imposes restrictions on mergers and other business combinations between us and any holder of 15% or more of our outstanding common stock. Although we believe these provisions provide for an opportunity to receive a higher bid by requiring potential acquirers to negotiate with our board of directors, these provisions apply even if the offer may be considered beneficial by stockholders. If a change of control or change in management is delayed or prevented, the market price of our common stock could decline.

Our certificate of incorporation authorizes the issuance of shares of blank check preferred stock. Our certificate of incorporation provides that our board of directors is authorized to issue from time to time, without further stockholder approval, up to 5,000,000 shares of preferred stock in one or more series and to fix and designate the rights, preferences, privileges and restrictions of the preferred stock, including dividend rights, conversion rights, voting rights, redemption rights and terms of redemption and liquidation preferences. Such shares of preferred stock could have preferences over our common stock with respect to dividends and liquidation rights. Our issuance of preferred stock may have the effect of delaying or preventing a change in control. Our issuance of preferred stock could decrease the amount of earnings and assets available for distribution to the holders of common stock or could adversely affect the rights and powers, including voting rights, of the holders of common stock. The issuance of preferred stock could have the effect of decreasing the market price of our common stock.

Your percentage ownership in us may be diluted by future issuances of capital stock, which could reduce your influence over matters on which stockholders vote. Subject to applicable NASDAQ standards, our board of directors has the authority, without action or vote of our stockholders, to issue all or any part of our authorized but unissued shares. Issuances of common stock or the exercise of employee and director stock options would dilute your percentage ownership interest, which will have the effect of reducing your influence over matters on which our stockholders vote. In addition, we may issue substantial quantities of our common stock in order to affect acquisitions which would also dilute your ownership interest. If the issuances are made at prices that reflect a discount from the then current trading price of our common stock, your interest in the book value of our common stock might be diluted.

Item 1B. Unresolved Staff Comments.

Not Applicable.

Item 1B. Unresolved Staff Comments.

Not Applicable.

Item 2. Properties.

Our principal executive offices are located in Billerica, Massachusetts. We also have manufacturing, research and equipment cleaning facilities in the United States, Japan, France, Taiwan, South Korea and Malaysia. Information about our principal facilities is set forth below:

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Location	Principal Function	Approximate Square Feet	Leased/ Owned
Bedford, Massachusetts(1)	Research &Manufacturing	80,000	Owned
Billerica, Massachusetts(1) (2)	Executive Offices, Research & Manufacturing	175,000	Leased
Bloomington, MN(1)	Research & Manufacturing	68,000	Leased
Burnet, TX(3)	Research & Manufacturing	77,000	Owned
Chaska, Minnesota(1)	Executive Offices, Research & Manufacturing	192,000	Owned
Colorado Springs, CO(1)	Manufacturing	82,000	Owned
Colorado Springs, CO(1)	Manufacturing	40,000	Leased
Danbury, CT(3)	Research & Manufacturing	73,000	Leased
Danbury, CT(3)	Executive Offices	31,000	Leased
Decatur, Texas(1)	Manufacturing	359,000	Owned
Hsin-chu, Taiwan(1) (3)	Executive Offices, Research &Manufacturing	50,000	Leased
JangAn, South Korea(3)	Manufacturing	127,000	Owned
Kulim, Malaysia(1)	Manufacturing	195,000	Owned
Montpellier, France(1)	Cleaning Services	53,000	Owned
Suwon, South Korea(1) (3)	Executive Offices & Research	16,000	Leased
Tokyo, Japan(1) (3)	Executive Offices & Research	27,000	Leased
Wonju City, South Korea(1)	Manufacturing	35,000	Owned
Yonezawa, Japan(1)	Manufacturing	196,000	Owned

1. Facility used by our Critical Materials Handling segment.

2. This lease has been extended through March 31, 2019 and is subject to one five-year renewal option.

3. Facility used by our Electronics Materials segment.

We lease approximately 4,200 square feet of manufacturing space in a facility located at 80 Ashby Road, Bedford, Massachusetts owned by EMD Millipore Corporation pursuant to a Membrane Manufacturing and Supply Transition Agreement that expires June 30, 2015. We also lease approximately 13,000 square feet of research and development and manufacturing office space located in San Diego, California, approximately 31,000 square feet of office, research and development and manufacturing space located in Franklin, Massachusetts, an aggregate of approximately 33,000 square feet of manufacturing space in Anseong, South Korea, approximately 15,000 square feet of office space in Round Rock, Texas, and approximately 10,000 square feet of office space in Tempe, Arizona.

We lease approximately 10,000 square feet for our Asia manufacturing management offices in Singapore. In addition, we maintain a worldwide network of sales, service, repair or cleaning centers in the United States, Germany, France, Israel, Japan, Malaysia, Taiwan, Singapore, China and South Korea. Leases for our facilities expire through December 2018. We currently expect to be able to extend the terms of expiring leases or to find suitable replacement facilities on reasonable terms.

We believe that our facilities are well-maintained and suitable for their respective operations. All of our facilities are generally utilized within a normal range of production volume.

Item 3. Legal Proceedings.

On or about February 7 and 28, 2014, two putative class action complaints challenging the Merger between the Company and ATMI, Inc. were filed in the Superior Court of the State of Connecticut, Judicial District of Danbury, captioned Andrew Pace v. ATMI, Inc., et al. and Dolores Carter v. ATMI, Inc., et al., respectively. The complaints were filed on behalf of the public shareholders of ATMI, Inc. and name as defendants ATMI, Inc., the members of the Board of Directors of ATMI, Inc., the Company and the Company’s subsidiary, Atomic Merger Corporation. The complaints generally alleged that ATMI, Inc.’s directors breached their fiduciary duties to ATMI, Inc.’s shareholders by agreeing to sell ATMI, Inc. for inadequate and unfair consideration and pursuant to an inadequate and unfair process, and that ATMI, Inc., the Company and Atomic Merger Corporation aided and abetted those alleged breaches. The complaint in the Carter action and the second amended complaint in the Pace action also allege purported disclosure deficiencies in the preliminary and definitive proxy statements for the merger that ATMI, Inc. filed with the SEC. The complaints sought, among other things, to enjoin the Merger. The Merger was approved by ATMI, Inc.’s shareholders on April 15, 2014 and was closed on April 30, 2014. The case captioned Dolores Carter v. ATMI, Inc., et al. was subsequently dismissed by the plaintiff. The case captioned Andrew Pace v. ATMI, Inc., et al. was transferred to the Complex Litigation Docket of the Superior Court of the State of Connecticut, Judicial District of Waterbury. On July 21, 2014, ATMI, Inc. and the Company each

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filed a motion to strike the plaintiff’s second amended complaint. On December 29, 2014, the court granted the defendant’s motion to strike and on January 27, 2015, the case was dismissed by agreement of the parties.

As of December 31, 2014, we were not involved in any legal proceedings that we believe will have a material impact on our consolidated financial position, results of operations or cash flows. From time to time the Company may be a party to litigation involving claims against the Company arising in the ordinary course of our business. We are not aware of any material potential litigation or claims against us which would have a material adverse effect upon our financial statements.

Item 4. Mine Safety Disclosures.

Not applicable.

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PART II

Item 5. Market for Registrant’s Common Equity, Related Stockholder Matters and Issuer Purchases of Equity Securities.

Market Information and Holders:

Entegris’ Common Stock, $0.01 par value, trades on the NASDAQ Global Select Market under the symbol “ENTG”. The following table sets forth the high and low sales prices of the Company shares for each full quarterly period during 2014 and 2013. As of February 18, 2015 there were 1,252 shareholders of record. On February 18, 2015, the last sale price reported on the Nasdaq Global Select Market for our common stock was $13.51 per share.

	2014				2013
	Low		High		Low		High
First quarter	$	10.20	$	12.50	$	8.96	$	10.18
Second quarter	$	10.69	$	13.86	$	8.89	$	10.52
Third quarter	$	11.43	$	14.05	$	8.97	$	10.64
Fourth quarter	$	10.67	$	13.96	$	9.87	$	11.65

Dividend Policy:

The Company has never declared or paid any cash dividends on its capital stock. The Company currently intends to retain all available earnings for use in its business operations and does not anticipate paying any cash dividends in the foreseeable future. Furthermore, our Restated Credit Agreement contains restrictions that limit our ability to pay dividends. On July 27, 2005 the Entegris Board of Directors declared a dividend of one common stock purchase right for each share of Entegris Common Stock outstanding to shareholders of record on August 8, 2005, payable on August 8, 2005. For a description of the Common Stock Rights Plan see “Other Information” in Item 1 above. Each right generally entitles the holder to purchase one one-hundredth of a share of a series of preferred stock of Entegris at a price of $50.

Issuer Sales of Unregistered Securities During the Past Three Years:

None

Comparative Stock Performance

The following graph compares the cumulative total shareholder return on the common stock of Entegris, Inc. from December 31, 2009 through December 31, 2014 with cumulative total return of (1) The NASDAQ Composite Index (NASDAQ), and (2) The Philadelphia Semiconductor Index, assuming $100 was invested at the close of trading December 31, 2009 in Entegris, Inc. common stock, the NASDAQ Composite Index and the Philadelphia Semiconductor Index and that all dividends are reinvested.

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	December 31, 2009	December 31, 2010	December 31, 2011	December 31, 2012	December 31, 2013	December 31, 2014
Entegris, Inc.	$100.00	$141.48	$165.34	$173.86	$219.51	$250.19
NASDAQ Composite	100.00	118.02	117.04	137.47	192.62	221.02
Philadelphia Semiconductor Index	100.00	141.76	127.06	136.21	193.20	253.96

Issuer Purchases of Equity Securities:

On December 12, 2012, the Board of Directors authorized a repurchase program covering up to an aggregate of $50.0 million of the Company’s common stock in open market transactions and in accordance with one or more pre-arranged stock trading plans established in accordance with Rule 10b5-1 under the Securities Exchange Act of 1934, as amended. The repurchase program and the pre-arranged stock trading plan expired February 7, 2014 and covered the repurchase of up to $36.2 million of the registrant’s common stock. The Company repurchased none of its common stock in 2014.

Item 6. Selected Financial Data.

The table that follows presents selected financial data for each of the last five years from the Company’s consolidated financial statements and should be read in conjunction with the Company’s Consolidated Financial Statements and the related Notes and with “Management’s Discussion and Analysis of Financial Condition and Results of Operations” included elsewhere in this Annual Report on Form 10-K. The selected financial data set forth below as of December 31, 2014 and 2013 and for the years ended December 31, 2014, 2013 and 2012 are derived from our audited financial statements included in this Annual Report on Form 10-K. All other selected financial data set forth below is derived from our audited financial statements not included in this Annual Report on Form 10-K. The selected financial data set forth below as of December 31, 2014 and for the year ended December 31, 2014 includes the results of operations of ATMI, Inc. since April 30, 2014. Our historical results are not necessarily indicative of our results of operations to be expected in the future.

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(In thousands, except per share amounts)	Year ended December 31, 2014			Year ended December 31, 2013			Year ended December 31, 2012			Year ended December 31, 2011			Year ended December 31, 2010
Operating Results
Net sales	$	962,069		$	693,459		$	715,903		$	749,259		$	688,416
Gross profit	376,683			294,214			307,383			325,930			310,643
Selling, general and administrative expenses	231,833			137,123			147,405			140,847			147,051
Engineering, research and development expenses	87,711			55,320			50,940			47,980			43,934
Amortization of intangible assets	37,067			9,347			9,594			10,225			13,231
Contingent consideration fair value adjustment	(1,282		)	(1,813		)	—			—			—
Operating income	21,354			94,237			99,444			126,878			106,427
Income (loss) before income taxes and equity in affiliate net income (loss)	(13,392		)	96,195			99,703			127,964			101,481
Income tax (benefit) expense	(21,572		)	21,669			30,881			4,217			15,006
Net income	7,887			74,526			68,825			124,246			85,122
Net income attributable to Entegris, Inc.	7,887			74,526			68,825			123,846			84,356
Earnings Per Share Data
Diluted earnings per share	$	0.06		$	0.53		$	0.50		$	0.91		$	0.63
Weighted average shares outstanding – diluted	140,062			139,618			138,412			136,223			133,174
Operating Ratios – % of net sales
Gross profit	39.2		%	42.4		%	42.9		%	43.5		%	45.1		%
Selling, general and administrative expenses	24.1			19.8			20.6			18.8			21.4
Engineering, research and development expenses	9.1			8.0			7.1			6.4			6.4
Amortization of intangible assets	3.9			1.3			1.3			1.4			1.9
Contingent consideration fair value adjustment	(0.1		)	(0.3		)	—			—			—
Operating income	2.2			13.6			13.9			16.9			15.5
Income (loss) before income taxes and equity in affiliate net income (loss)	(1.4		)	13.9			13.9			17.1			14.7
Effective tax rate	161.1			22.5			31.0			3.3			14.8
Net income attributable to Entegris, Inc.	0.8			10.7			9.6			16.5			12.3
Cash Flow Statement Data
Depreciation and amortization	$	83,704		$	38,815		$	37,607		$	37,064		$	41,198
Capital expenditures	57,733			60,360			49,929			30,267			16,794
Net cash provided by operating activities	126,423			109,402			115,162			157,286			140,898
Net cash used in investing activities	(860,295		)	(47,029		)	(72,467		)	(28,431		)	(11,985		)
Net cash provided by (used in) financing activities	747,648			(3,895		)	10,890			10,864			(65,709		)
Balance Sheet and Other Data
Current assets	$	765,655		$	612,305		$	579,324		$	502,999		$	387,091
Current liabilities	262,520			97,585			93,263			92,594			107,634
Working capital	503,135			514,720			486,061			410,405			279,457
Current ratio	2.92			6.27			6.21			5.43			3.60
Long-term debt, including current maturities	766,796			—			—			—			—
Shareholders’ equity	748,441			756,843			694,799			608,238			459,619
Total assets	1,762,091			875,294			811,544			724,663			601,385
Return on average shareholders’ equity – %	1.0		%	10.3		%	10.6		%	23.2		%	20.9		%
Shares outstanding at end of period	139,793			138,734			138,458			135,821			132,901

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Item 7. Management’s Discussion and Analysis of Financial Condition and Results of Operations.

The following discussion and analysis of the Company’s consolidated financial condition and results of operations should be read along with the consolidated financial statements and the accompanying notes to the consolidated financial information included elsewhere in this Annual Report on Form 10-K. This discussion contains forward-looking statements that involve numerous risks and uncertainties, including, but not limited to, those described in the “Cautionary Statements” sections of this Item 7 below. The Company’s actual results may differ materially from those contained in any forward-looking statements. You should review the Item 1A “Risk Factors” of this Annual Report on Form 10-K for a discussion of important factors that could cause actual results to differ materially from the results described in or implied by the forward-looking statements contained in the following discussion and analysis.

Cautionary Statements

This Annual Report on Form 10-K and the documents incorporated by reference in this Annual Report on Form 10-K contain “forward-looking statements” within the meaning of the Private Securities Litigation Reform Act of 1995. The information in this Management’s Discussion and Analysis of Financial Condition and Results of Operations, except for the historical information, contains forward-looking statements. These forward-looking statements reflect the Company’s current views with respect to future events and financial performance. The words “believe,” “expect,” “anticipate,” “intend,” “estimate,” “forecast,” “project,” “may,” will,” “would,” “could,” “should” and similar expressions are intended to identify these “forward-looking statements.” You should read statements that contain these words carefully because they discuss future expectations, contain projections of future results of operations or of financial position or state other “forward-looking” information. All forecasts and projections in this report are “forward-looking statements,” and are based on management’s current expectations of the Company’s near-term results, based on current information available pertaining to the Company. The important factors listed below, as well as any cautionary language elsewhere in this Annual Report on Form 10-K, provide examples of risks, uncertainties and events that may cause our actual results to differ materially from the expectations described in these forward-looking statements. The risks which could cause actual results to differ from those contained in such “forward looking statements” include, without limitation, the risks described under Item 1A of this Annual Report on Form 10-K for the year ended December 31, 2014 under the headings “Risks Relating to our Business and Industry,” “Additional Risks Related to our Business”, Risks Related to our Indebtedness”, “Manufacturing Risks,” “International Risks” and “Risks Related to Owning Our Securities” as well as in the Company’s quarterly reports on Form 10-Q and current reports on Form 8-K as filed with the Securities and Exchange Commission. Any forward-looking statements in this Annual Report on Form 10-K are not guarantees of future performance, and actual results, developments and business decisions may differ from those envisaged by such forward-looking statements, possibly materially. We disclaim any duty to update any forward-looking statements.

Overview

This overview is not a complete discussion of the Company’s financial condition, changes in financial condition and results of operations; it is intended merely to facilitate an understanding of the most salient aspects of its financial condition and operating performance and to provide a context for the detailed discussion and analysis that follows and must be read in its entirety in order to fully understand the Company’s financial condition and results of operations.

Entegris, Inc. is a leading provider of a wide range of products and services for purifying, protecting and transporting the critical materials used in processing and manufacturing in the microelectronics and other high-technology industries. Entegris derives most of its revenue from the sale of products and services to the semiconductor and related industries. The Company’s customers consist primarily of semiconductor manufacturers, semiconductor equipment and materials suppliers as well as thin film transistor-liquid crystal display (TFT-LCD) and hard disk manufacturers, which are served through direct sales efforts, as well as sales and distribution relationships, in the United States, Asia, Europe and the Middle East.

The Company offers a diverse product portfolio which includes more than 19,000 standard and customized products that it believes provide the most comprehensive offering of contamination control solutions and microenvironment products and services to maintain the purity and integrity of critical materials used by the semiconductor and other high-technology industries. Certain of these products are unit-driven and consumable products that rely on the level of semiconductor manufacturing activity to drive growth, while others are capital-expenditure driven and rely on expansion of manufacturing capacity to drive growth. The Company’s unit-driven and consumable products includes membrane-based liquid filters and housings, metal-based gas filters, resin-based gas purifiers, wafer shippers, disk-shipping containers and test assembly and packaging products and consumable graphite and silicon carbide components used in plasma etch, ion implant and chemical vapor deposition processes in semiconductor manufacturing. The Company’s capital expense-driven products include components, systems and subsystems that use electro-mechanical, pressure differential and related technologies to permit

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semiconductor and other electronics manufacturers to monitor and control the flow and condition of process liquids used in these manufacturing processes, and process carriers that protect the integrity of in-process wafers.

Key operating factors Key factors, which management believes have the largest impact on the overall results of operations of Entegris, Inc., include:

• Level of sales Since a significant portion of the Company’s product costs (except for raw materials, purchased components and direct labor) are largely fixed in the short-to-medium term, an increase or decrease in sales affects gross profits and overall profitability significantly. Also, increases or decreases in sales and operating profitability affect certain costs such as incentive compensation and commissions, which are highly variable in nature. The Company’s sales are subject to the effects of industry cyclicality, technological change, substantial competition, pricing pressures and foreign currency fluctuation.

• Variable margin on sales The Company’s variable margin on sales is determined by selling prices and the costs of manufacturing and raw materials. This is affected by a number of factors, which include the Company’s sales mix, purchase prices of raw material (especially polymers, membranes, stainless steel and purchased components), competition, both domestic and international, direct labor costs, and the efficiency of the Company’s production operations, among others.

• Fixed cost structure. The Company’s operations include a number of large fixed or semi-fixed cost components, which include salaries, indirect labor and benefits, facility costs, lease expense, and depreciation and amortization. It is not possible to vary these costs easily in the short-term as volumes fluctuate. Accordingly, increases or decreases in sales volume can have a large effect on the usage and productivity of these cost components, resulting in a large impact on the Company’s profitability.

Overall Summary of Financial Results for the Year Ended December 31, 2014

On April 30, 2014, the Company acquired ATMI, Inc., a Delaware corporation (ATMI), for approximately $1.1 billion in cash, or $809.4 million net of cash acquired, as described in note 2 to the Company’s consolidated financial statements. ATMI is a leading supplier of high-performance materials, materials packaging and materials delivery systems used worldwide in the manufacture of microelectronics devices. The acquisition of ATMI (the Merger) was funded with the issuance of $820 million in debt, described in note 7 to the consolidated financial statements.

Total net sales for the year ended December 31, 2014 were $962 million, up $269 million, or 39%, from sales of $693 million for the year ended December 31, 2013. This sales improvement was principally driven by the inclusion of sales of $245 million from ATMI. Exclusive of the effect of the added ATMI sales and unfavorable foreign currency translation effects of $8 million, the Company's sales increased 4%. Overall demand from the semiconductor industry reflected improved demand from device makers, as wafer starts and semiconductor unit production increased, higher industry fab utilization rates and increased capital spending levels. Based on the information available, the Company believes sales of its products trailed industry growth measures for 2014.

Despite the significant net sales increase, the Company's gross profit rose by only $82 million for the year ended December 31, 2014, to $377 million, up from $294 million for the year ended December 31, 2013. Accordingly, the Company reported a 39.2% gross margin rate compared to 42.4% in 2013. The gross profit and gross margin figures reflect a $49 million charge for fair value write-up of acquired ATMI inventory sold during the year. Excluding that charge, the Company's gross margin for the year was 44.2%.

The Company also incurred significantly higher selling, general and administrative (SG&A) expenses and engineering, research and development (ER&D) expenses for 2014, mainly due to the inclusion in SG&A and ER&D expenses of ATMI's infrastructure, merger-related expenditures and the cost of integration activities.

The Company incurred interest expense of $33 million for the year ended December 31, 2014 compared to a nominal amount a year ago, the increase related to the debt issued in connection with the funding of the ATMI Merger.

The Company’s effective tax benefit rate was 161% in 2014 compared to 23% in 2013. The change in the effective tax rate is primarily due to a change in the Company's geographic composition of income toward jurisdictions with lower tax rates, the nondeductibility of certain acquisition-related expenditures incurred in connection with the ATMI acquisition and the benefit of a foreign dividend.

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As a result of the aforementioned factors, net income for 2014 was $8 million, or $0.06 per diluted share, compared to net income of $75 million, or $0.53 per diluted share, in 2013.

During 2014, the Company’s operating activities provided cash flow of $126 million. Cash used for the ATMI Merger, net of cash acquired, was $809 million, while capital expenditures were $58 million. Cash, cash equivalents and short-term investments were $394 million at December 31, 2014 compared with $384 million at December 31, 2013. The Company had long-term borrowings, including current maturities, of $767 million at December 31, 2014 and none at December 31, 2013.

Critical Accounting Policies

Management’s discussion and analysis of financial condition and results of operations are based upon the Company’s consolidated financial statements, which have been prepared in accordance with accounting principles generally accepted in the United States. The preparation of these consolidated financial statements requires the Company to make estimates, assumptions and judgments that affect the reported amounts of assets, liabilities, revenues and expenses and related disclosure of contingent assets and liabilities. At each balance sheet date, management evaluates its estimates, including, but not limited to, those related to inventories, long-lived assets (property, plant and equipment, goodwill and identified intangibles), income taxes and business combinations. The Company bases its estimates on historical experience and various other assumptions that are believed to be reasonable under the circumstances. If management made different judgments or utilized different estimates, this could result in material differences in the amount and timing of the Company’s results of operations for any period. In addition, actual results could be different from the Company’s current estimates, possibly resulting in increased future charges to earnings.

The critical accounting policies affected most significantly by estimates, assumptions and judgments used in the preparation of the Company’s consolidated financial statements are discussed below.

Inventory Valuation The Company uses certain estimates and judgments to properly value its inventory. The Company’s inventories are recorded at the lower of cost or market. The Company evaluates its ending inventories for obsolescence and excess quantities each quarter. This evaluation includes analyses of inventory levels, historical write-off trends, expected product lives, and historical and projected sales levels by product. Inventories that are considered obsolete are written off or a full allowance is recorded. In addition, allowances are established for inventory quantities in excess of forecasted demand. Inventory allowances were $11.9 million and $6.6 million at December 31, 2014 and 2013, respectively.

The Company’s inventories include materials and products subject to technological obsolescence, which are sold in highly competitive industries. If future demand or market conditions are less favorable than current conditions or the Company’s projected outlook for sales, inventory write-downs or additional allowances may be required and would be reflected in cost of sales in the period the revision is made.

Impairment of Long-Lived Assets As of December 31, 2014, the Company had $313.6 million of net property, plant and equipment and $308.6 million of net intangible assets. The Company routinely considers whether indicators of impairment of the value of its long-lived assets, particularly its manufacturing equipment, and its intangible assets, are present. A long-lived asset (asset group) shall be tested for recoverability whenever events or changes in circumstances (triggering events) indicate that its carrying amount may not be recoverable. The following are examples of such events or changes in circumstances:

a. A significant decrease in the market price of a long-lived asset (asset group)

b. A significant adverse change in the extent or manner in which a long-lived asset (asset group) is being used or in its physical condition

c. A significant adverse change in legal factors or in the business climate that could affect the value of a long-lived asset (asset group), including an adverse action or assessment by a regulator

d. An accumulation of costs significantly in excess of the amount originally expected for the acquisition or construction of a long-lived asset (asset group)

e. A current-period operating or cash flow loss combined with a history of operating or cash flow losses or a projection or forecast that demonstrates continuing losses associated with the use of a long-lived asset (asset group)

f. A current expectation that, more likely than not, a long-lived asset (asset group) will be sold or otherwise disposed of significantly before the end of its previously estimated useful life.

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If such indicators are present, it is determined whether the sum of the estimated undiscounted cash flows attributable to the asset group in question is less than its carrying value. If less, an impairment loss is recognized based on the excess of the carrying amount of the assets in the group over its respective fair value. Fair value is determined by discounting estimated future cash flows, appraisals or other methods deemed appropriate. If the asset groups determined to be impaired are to be held and used, the Company recognizes an impairment charge to the extent the fair value attributable to the asset group is less than the assets’ carrying value. The fair value of the assets then becomes the assets’ new carrying value, which is depreciated or amortized over the remaining estimated useful life of the assets.

The Company’s long-lived assets are grouped with other assets and liabilities at the lowest level (asset groups) for which the identifiable cash flows are largely independent of the cash flows of other assets and liabilities. As described above, the evaluation of the recoverability of long-lived assets requires the Company to make significant estimates and assumptions. These estimates and assumptions primarily include, but are not limited to, the identification of the asset group at the lowest level of independent cash flows, the primary asset of the group and long-range forecasts of revenue and costs, reflecting management’s assessment of general economic and industry conditions, operating income, depreciation and amortization and working capital requirements.

Due to the inherent uncertainty involved in making estimates, actual results could differ from those estimates. In addition, changes in the underlying assumptions would have a significant impact on the conclusion that an asset group’s carrying value is recoverable, or the determination of any impairment charge if it was determined that the asset values were indeed impaired.

Based on current general economic conditions and trends within the semiconductor industry and the absence of any other triggering events, the Company has not been required to perform impairment testing for any of its asset groups. The Company will continue to monitor circumstances and events to determine whether asset impairment testing is warranted. It is possible that in the future the Company may no longer be able to conclude that there is no impairment of its long-lived assets, nor can the Company provide assurance that material impairment charges of long-lived assets will not occur in future periods.

Goodwill The Company tests goodwill at least annually for impairment. Goodwill is also tested for impairment as changes in circumstances occur indicating that the carrying value may not be recoverable. Goodwill impairment testing requires a comparison of the fair value of each reporting unit to the carrying value. If the carrying value of the reporting unit exceeds fair value, goodwill is considered impaired. At December 31, 2014, the Company had nine reporting units, five of which are assigned goodwill.

As of August 31, 2014, the Company’s annual testing date, the Company had five reporting units assigned goodwill. At that date, the estimated fair value of the two reporting units assigned goodwill in prior years was in excess of their respective carrying values. The fair value of the four reporting units to which goodwill was assigned in connection with the ATMI acquisition (see note 2 to the consolidated financial statements) approximates its purchase price, reflecting the recent acquisition thereof. While the Company believes the estimates and assumptions used in determining the fair value of its reporting units are reasonable, significant changes in estimates of future cash flows, such as those caused by unforeseen events or changes in market conditions, could materially impact the fair value of a reporting unit which could result in the recognition of a goodwill impairment charge.

Income Taxes In the preparation of the Company’s financial statements, the income tax expense, deferred tax assets and liabilities, and reserves for unrecognized tax benefits reflect management’s best assessment of estimated current and future taxes to be paid. The Company is subject to income taxes in both the United States and numerous foreign jurisdictions. Significant judgments and estimates are required in determining consolidated income tax expense.

Deferred income taxes arise from temporary differences between the tax basis of assets and liabilities and their reported amounts in the financial statements, which will result in taxable or deductible amounts in the future. In evaluating the Company’s ability to recover its deferred tax assets within the jurisdiction from which they arise, management considers all available positive and negative evidence, including scheduled reversals of deferred tax liabilities, projected future taxable income, tax-planning strategies, and results of recent operations. In projecting future taxable income, the Company begins with historical results adjusted for the results of discontinued operations and incorporates assumptions about the amount of future state, federal and foreign pretax operating income adjusted for items that do not have tax consequences. The assumptions about future taxable income require significant judgment and are consistent with the plans and estimates management is using to manage the underlying business. In evaluating the objective evidence that historical results provide, the Company considers three years of cumulative operating income.

The Company has deferred tax assets related to certain federal and state credit carryforwards, and certain state and foreign net operating loss carryforwards of $15.3 million and $6.8 million as of December 31, 2014 and 2013, respectively. Management believes it is more likely than not that the benefit from a portion of these carryforwards will not be realized. In recognition of this risk, the Company provided a valuation allowance of $11.1 million and $5.4 million as of December 31, 2014 and 2013,

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respectively, relating to these carryforwards. If the Company’s assumptions change and it determines it will be able to realize these carryforwards, the tax benefits relating to any reversal of the valuation allowance on the deferred tax assets will be recognized as a reduction of income tax expense.

The calculation of tax liabilities involves dealing with uncertainties in the application of complex tax laws and regulations in a multitude of jurisdictions across our global operations. A tax benefit from an uncertain tax position may be recognized when it is more likely than not that the position will be sustained upon examination, including resolutions of any related appeals or litigation processes, on the basis of the technical merits. Resolution of these uncertainties in a manner inconsistent with management’s expectations could have a material impact on the Company’s financial condition and operating results.

Business Acquisitions

The Company accounts for acquired businesses using the acquisition method of accounting which requires that the assets acquired and liabilities assumed be recorded at the date of acquisition at their respective fair values. The judgments made in determining the estimated fair value assigned to each class of assets acquired and liabilities assumed, as well as asset lives, can materially impact net income. Accordingly, for significant items, the Company typically obtains assistance from a third-party valuation firm.

There are several methods that can be used to determine the fair value of assets acquired and liabilities assumed in a business combination. For intangible assets, the Company normally utilizes the “income method.” This method starts with a forecast of all of the expected future net cash flows attributable to the subject intangible asset. These cash flows are then adjusted to present value by applying an appropriate discount rate that reflects the risk factors associated with the cash flow streams. Some of the more significant estimates and assumptions inherent in the income method (or other methods) include the projected future cash flows (including timing) and the discount rate reflecting the risks inherent in the future cash flows.

Estimating the useful life of an intangible asset also requires judgment. For example, different types of intangible assets will have different useful lives, influenced by the nature of the asset, competitive environment, and rate of change in the industry. Certain assets may even be considered to have indefinite useful lives. All of these judgments and estimates can significantly impact the determination of the amortization period of the intangible asset, and thus net income.

In connection with the ATMI acquisition consummated in 2014, the final valuation of assets acquired and liabilities assumed is expected to be completed as soon as possible, but no later than one year from the acquisition date. Given the size and complexity of the acquisition, the valuation of certain assets and liabilities, is still being completed, and is subject to final review. Specifically, certain property, plant and equipment and tax accounts are provisional pending the completion and review of such assets and liabilities. To the extent that the Company's estimates require adjustment, the Company will modify the values.

Results of Operations

Year ended December 31, 2014 compared to year ended December 31, 2013

The following table sets forth the results of operations and the relationship between various components of operations, stated as a percent of net sales, for the years ended December 31, 2014 and 2013. The Company’s historical financial data was derived from its consolidated financial statements and related notes included elsewhere in this annual report.

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(Dollars in thousands)	2014					2013
				% of net sales					% of net sales
Net sales	$	962,069		100.0	%	$	693,459		100.0	%
Cost of sales	585,386			60.8		399,245			57.6
Gross profit	376,683			39.2		294,214			42.4
Selling, general and administrative expenses	231,833			24.1		137,123			19.8
Engineering, research and development expenses	87,711			9.1		55,320			8.0
Amortization of intangible assets	37,067			3.9		9,347			1.3
Contingent consideration fair value adjustment	(1,282		)	(0.1	)	(1,813		)	(0.3	)
Operating income	21,354			2.2		94,237			13.6
Interest expense	33,355			3.5		153			—
Interest income	(1,336		)	(0.1	)	(317		)	—
Other income, net	2,727			0.3		(1,794		)	(0.3	)
Income (loss) before income taxes and equity in net loss of affiliates	(13,392		)	(1.4	)	96,195			13.9
Income tax (benefit) expense	(21,572		)	(2.2	)	21,669			3.1
Equity in net income of affiliates	293			—		—			—
Net income	$	7,887		0.8		$	74,526		10.7

Net sales For the year ended December 31, 2014, net sales were $962.1 million, up $268.6 million, or 39%, from sales for the year ended December 31, 2013. An analysis of the factors underlying the increase in net sales is presented in the following table:

(In thousands)	2014
Net sales in previous year	$	693,459
Increase associated with legacy Entegris volume and pricing	30,733
Decrease associated with effect of foreign currency translation	(7.516		)
Increase associated with acquisition of ATMI, Inc	245,393
	$	962,069

The unfavorable foreign currency translation effects of $7.5 million related to the year-over-year weakening of most international currencies versus the U.S. dollar, most notably the Japanese yen and Taiwanese dollar, offset partly by a stronger Korean won.

Excluding the net sales of ATMI for the eight months subsequent to the ATMI merger and the unfavorable foreign currency translation effects, net sales rose approximately 4% in 2014 when compared to 2013. The Company believes this sales increase was primarily volume driven and that the effect of selling price erosion was nominal. Overall demand from the semiconductor industry reflected improved demand from device makers, as wafer starts and semiconductor unit production increased, higher industry fab utilization rates and increased capital spending levels. Based on the information available, the Company believes sales of its products trailed industry growth measures for 2014.

On a geographic basis, total sales to North America were 25%, Asia Pacific 51%, Europe 11% and Japan 13% in 2014. Total sales to North America were 29%, Asia Pacific 43%, Europe 13% and Japan 15% in 2013. When comparing 2014 to 2013, all regions experienced year-over-year sales increases, primarily reflecting the ATMI sales. Net sales to customers in North America, Japan, Asia Pacific and Europe increased 18%, 19%, 66% and 17%, respectively, from 2013 to 2014, generally due to the the inclusion of sales from ATMI. Net sales for Japan were affected by unfavorable foreign currency translation effects of $7.8 million.

Demand drivers for the Company’s business primarily consist of semiconductor fab utilization and production (unit-driven) as well as capital spending for new or upgraded semiconductor fabrication equipment and facilities (capital-driven). The Company analyzes sales of its products by these two key drivers. Sales of unit-driven products represented 74% of total sales and sales of capital-driven products represented 26% of total sales in 2014. This compares to a unit-driven to capital-driven ratio of 66%:34% for 2013. The shift toward unit-driven products reflects the inclusion of sales from ATMI, which are primarily unit-driven.

39

Gross profit Gross profit for 2014 increased by $82.5 million, to $376.7 million, an increase of 28% from $294.2 million for 2013. The gross margin rate for 2014 was 39.2% versus 42.4% for 2013. An analysis of the factors underlying the increase in gross profit is presented in the following table:

(In thousands)	2014
Gross profit in previous year (legacy Entegris only)	$	294,214
Incremental cost of sales associated with fair value step-up related to sale of inventory acquired in ATMI acquisition	(48,586		)
Increase associated with ATMI, Inc. net sales	118,431
Increase associated with legacy Entegris volume and pricing	12,624
	$	376,683

The increase in gross profit reflects the improvement in legacy Entegris sales and the inclusion of sales from ATMI. Despite the improvement in gross profit, the Company experienced a 39.2% gross margin rate compared to 42.4% in the comparable year-ago period. The gross margin percentage for 2014 was below the comparable year-ago figures primarily due to incremental cost of sales charge of $48.6 million associated with the sale of inventory acquired in the acquisition with ATMI. An inventory write-up of $48.6 million was recorded as part of the purchase price allocation and was amortized over the expected inventory turn of the acquired finished goods inventory. Excluding that charge, the Company's gross margin for the year ended December 31, 2014 was 44.2%. The adjusted gross margin rates exceeded the comparable year-ago figures mainly due to the increase in Company sales levels and, on average, higher margins for ATMI products.

Selling, general and administrative expenses

Selling, general and administrative expense (SG&A) consists primarily of payroll and related expenses for the sales and administrative staff, professional fees (including accounting, legal and technology costs and expenses), and sales and marketing costs. Selling, general and administrative (SG&A) expenses for 2014 increased $94.7 million, or 69%, to $231.8 million from $137.1 million in 2013. An analysis of the factors underlying the increase in SG&A is presented in the following table:

(In thousands)	2014
Selling, general and administrative expenses in previous year (legacy Entegris only)	$	137,123
Increase associated with ATMI, Inc. infrastructure	35,714
Increase in professional fees and other related to ATMI acquisition	8,152
Transaction-related expenses, including share-based compensation expense and related taxes associated with the unvested portion of ATMI share-based awards settled in cash	26,776
Integration expenditures	19,652
Other increases, net	4,416
	$	231,833

SG&A expenses, as a percent of net sales, increased to 24.1% from 19.8% a year earlier, reflecting the significant increase in SG&A expenditure levels primarily related ATMI merger and subsequent integration expenditures.

Expenses associated with ATMI, including certain merger-related expenses, amounted to $66.2 million, or about 70% of the increase. Included in these expenses were costs of $30.5 million related to the ATMI acquisition, specifically $21.3 million for share-based compensation expense and related taxes associated with the unvested portion of ATMI share-based awards settled in cash on the date of the acquisition, as well as integration costs of $9.2 million, consisting primarily of severance and retention costs. In addition, legacy Entegris incurred SG&A expenses of $24.5 million in merger-related expenses, including deal costs, severance and termination costs, and other costs associated with the integration of the two operations.

In addition to the increase in SG&A costs associated with ATMI's infrastructure, the Company expects SG&A costs to be higher than normal during the first half of 2015 as integration costs and related severance and retention costs will continue during this period. The Company expects overall SG&A costs will decline to normalized levels by the third quarter of 2015. Savings associated with integration efforts, primarily resulting from the combination of corporate staff functions, are expected to be realized in 2015.

Engineering, research and development expenses

Engineering, research and development (ER&D) expenses related to the support of current product lines and the development of new products and manufacturing technologies increased by $32.4 million, or 59%, to $87.7 million in 2014 compared to $55.3 million in 2013. ER&D expenses as a percent of net sales were 9.1% compared to 8.0% a year ago, reflecting the increase in ER&D expenditure levels, offset by the increase in net sales. In 2014, the Company continued to invest in its core

40

membrane and coatings technologies to create differentiated and high-value, unit-driven products for the most advanced and demanding semiconductor applications.

ER&D expenses recorded by ATMI and included in the Company's consolidated financial statements amounted to $23.3 million, accounting for approximately 70% of the increase. The increase also reflect higher legacy Entegris ER&D activity levels, including increased employee costs, and customer samples and supplies expense of $6.0 million and $2.7 million for the year December 31, 2014.

The Company expects ER&D costs will increase in 2015 due to the addition of ATMI's ER&D infrastructure. However, these costs are expected to stay relatively stable as a percentage of net sales. The Company’s overall ER&D efforts will continue to focus on the support or extension of current product lines, and the development of new products and manufacturing technologies.

Contingent consideration fair value adjustment In the years ended December 31, 2014 and 2013, the Company recognized an acquisition-related contingent consideration adjustments of $1.3 million and $1.8 million, respectively, reflecting changes in the fair value of contingent consideration liability associated with the Jetalon acquisition described in note 2 in the Company’s consolidated financial statements. These adjustments to the contingent consideration liability reflect changes in Jetalon's revenue and gross profit forecasts for the three years ending December 31, 2015 and the estimated probability of achieving those projections.

Amortization of intangible assets Amortization of intangible assets was $37.1 million in 2014 compared to $9.3 million for 2013. The increase reflected the additional amortization associated with the identifiable intangible assets acquired in the ATMI merger.

Interest expense Interest expense was $33.4 million and $0.2 million in the years ended December 31, 2014 and 2013. The significant increase reflects the interest associated with the borrowings made by the Company in connection with the acquisition of ATMI as described in notes 2 and 7 to the Company's consolidated financial statements. Interest expense included interest on outstanding borrowings, the amortization of debt issuance costs associated with such borrowings and bridge financing costs of $4.0 million recorded in the second quarter.

Other expense (income), net Other expense, net, was $2.7 million in 2014 compared to other income, net, of $1.8 million in 2013. In 2014, other expense includes foreign currency transaction losses of $1.1 million and an $1.9 million impairment loss recorded in connection with an equity investment, partially offset by $0.2 million in net realized gains on the sale of equity investments.

In 2013, other income includes foreign currency transaction gains of $2.3 million, partially offset by charges of $0.8 million associated with the realization of translation losses recorded upon the liquidation of certain of the Company's subsidiaries.

Income tax expense The Company recorded an income tax benefit of $21.6 million in 2014 compared to an income tax expense of $21.7 million in 2013. The Company’s effective tax benefit rate was 161.1% in 2014, compared to an effective tax rate of 22.5% in 2013. The increase in the effective tax rate in 2014 from 2013 was primarily due to a change in the Company's geographic composition of income toward jurisdictions with lower tax rates and the benefit of a foreign dividend, reduced by the nondeductibility of certain acquisition-related expenditures incurred in connection with the ATMI acquisition.

In 2013, the Company’s effective tax rate was lower than the U.S. statutory rate of 35% primarily due to lower rates in various foreign jurisdictions compared to the U.S. statutory rate. The effective tax rate in 2013 included a $1.7 million benefit associated with the reinstatement of the U.S. federal credit for increasing research expenditures, as retroactively signed into law and recorded by the Company in the first quarter of 2013.

Net income Net income was $7.9 million, or $0.06 per diluted share, in 2014 compared to net income of $74.5 million, or $0.53 per diluted share, in 2013. The significant decrease reflects the Company’s aforementioned operating results described in greater detail above, mainly reflecting the effect of the significant costs associated with the ATMI acquisition.

Non-GAAP Measures Information The Company’s consolidated financial statements are prepared in conformity with accounting principles generally accepted in the United States (GAAP). The Company also utilizes certain non-GAAP financial measures as a complement to financial measures provided in accordance with GAAP in order to better assess and reflect trends affecting the Company’s business and results of operations. See “Non-GAAP Information” included below in this section for additional detail, including the reconciliation of GAAP measures to the Company’s non-GAAP measures.

The Company’s non-GAAP financial measures are Adjusted EBITDA and Adjusted Operating Income, together with related measures thereof, and non-GAAP Earnings Per Share (EPS).

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Adjusted EBITDA increased 57% to $207.9 million in 2014, compared to $132.2 million in 2013. Adjusted EBITDA, as a percent of net sales, increased to 21.6% from 19.1% a year earlier. Adjusted Operating Income increased 57% to $161.3 million in 2014, compared to $102.7 million in 2013. Adjusted Operating Income, as a percent of net sales, increased to 16.8% from 14.8% a year earlier. Non-GAAP Earnings Per Share increased 19% to $0.69 in 2014, compared to $0.58 in 2013. The improvement in the Adjusted EBITDA and Adjusted Operating Income measures reflect the increase in net sales and related increase in gross profit. In addition, Non-GAAP Earnings Per Share was positively affected by a lower adjusted effective tax rate.

Segment Analysis

In 2014 the Company changed its financial segment reporting to reflect management and organizational changes made by the Company. Under the new structure, the manager of two segments is accountable for results at the segment profit level and reports directly to the Company’s Chief Executive Officer, who is responsible for evaluating companywide performance and resource allocation decisions between the segments. Beginning in the second quarter, the Company reported its financial performance based on two reportable segments: Critical Materials Handling (CMH) and Electronic Materials (EM). See note 16 to the consolidated financial statements for additional information on the Company’s two segments.

The following table and discussion concern the results of operations of the Company’s two reportable segments for the years ended December 31, 2014 and 2013. See note 15 to the consolidated financial statements for additional information on the Company’s two segments.

(In thousands)	2014		2013
Critical Materials Handling
Net sales	$	653,964	$	609,826
Segment profit	138,379		128,910
Electronic Materials
Net sales	$	308,105	$	83,633
Segment profit	90,121		20,034

Critical Materials Handling (CMH)

For the year ended December 31, 2014, CMH net sales increased 7% to $654.0 million, from $609.8 million in 2013, and primarily reflects the inclusion of sales of $30.4 million from ATMI. CMH reported a segment profit of $138.4 million in 2014, up 7% from $128.9 million in 2013 also due to higher sales and a slightly favorable sales mix, partly offset by a 7% increase in operating expenses, mainly consisting of higher ER&D expenditures and costs associated with the ATMI infrastructure.

Electronic Materials (EM)

For the year ended December 31, 2014, EM net sales increased to $308.1 million, up 268%, from $83.6 million in the comparable period last year. The sales increase also reflects the inclusion of sales of $214.4 million from ATMI, while the remainder reflected improved sales of gas microcontamination control systems products. EM reported a segment profit of $90.1 million for the year ended December 31, 2014 compared to a $20.0 million segment profit in the year-ago period. The increase in the segment's profit is primarily associated with higher sales levels reflecting the sales of ATMI products and improved margins related to a more favorable sales mix, offset partly by costs associated with the ATMI infrastructure.

Unallocated general and administrative expenses

Unallocated general and administrative expenses for the year ended December 31, 2014 totaled $122.8 million compared to $47.2 million for the year ended December 31, 2013. The inclusion of unallocated general and administrative expenses of $45.7 million recorded by ATMI accounted for approximately 60% of the increase. Included in the ATMI expenses was $21.3 million for share-based compensation expense and related taxes associated with the unvested portion of ATMI share-based awards settled in cash on the date of the Merger and integration costs of $9.2 million, consisting primarily of severance and retention costs.

In addition, the Company incurred expenses of $9.1 million in connection with the completion of the ATMI merger, as well as the costs of integration of $19.7 million incurred since the date of the ATMI Merger.

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Results of Operations

Year ended December 31, 2013 compared to year ended December 31, 2012

The following table sets forth the results of operations and the relationship between various components of operations, stated as a percent of net sales, for the years ended December 31, 2013 and 2012. The Company’s historical financial data was derived from its consolidated financial statements and related notes included elsewhere in this annual report.

(Dollars in thousands)	2013					2012
				% of net sales					% of net sales
Net sales	$	693,459		100.0	%	$	715,903		100.0	%
Cost of sales	399,245			57.6		408,520			57.1
Gross profit	294,214			42.4		307,383			42.9
Selling, general and administrative expenses	137,123			19.8		147,405			20.6
Engineering, research and development expenses	55,320			8.0		50,940			7.1
Amortization of intangible assets	9,347			1.3		9,594			1.3
Contingent consideration fair value adjustment	(1,813		)	(0.3	)	—			—
Operating income	94,237			13.6		99,444			13.9
Other income, net	(1,958		)	(0.3	)	(259		)	—
Income before income taxes and equity in net loss of affiliates	96,195			13.9		99,703			13.9
Income tax expense	21,669			3.1		30,881			4.3
Equity in net income of affiliates	—			—		(3		)	—
Net income	$	74,526		10.7		$	68,825		9.6

Net sales For the year ended December 31, 2013, net sales were $693.5 million, down $22.4 million, or 3%, from sales for the year ended December 31, 2012. The year-over-year declines in net sales primarily reflected continued softness in semiconductor industry spending, though the Company experienced growth and signs of stabilization in the fourth quarter, and changes in foreign currency rates. In line with industry data, overall demand from the Company's semiconductor industry customers for 2013 reflected lower demand from leading edge fabs, aggregate fab utilization rates remained well below peak levels and semiconductor industry capital spending remained restrained. The Company’s operating segments experienced mixed sales results. See the “Segment analysis” included below in this section for additional detail.

The sales decrease in 2013 included unfavorable foreign currency translation effects of $18.6 million related to the year-over-year weakening of most international currencies versus the U.S. dollar, most notably the Japanese yen. Excluding this factor, net sales fell approximately 1% in 2013 when compared to 2012.

On a geographic basis, total sales to North America were 29%, Asia Pacific 43%, Europe 13% and Japan 15% in 2013. Total sales to North America were 31%, Asia Pacific 38%, Europe 12% and Japan 19% in 2012. When comparing 2013 to 2012, North America and Japan experienced year-over-year sales decreases, while Europe and Asia Pacific experience year-over-year sales increases. Net sales to customers in North America and Japan decreased 8% and 23%, respectively, while net sales to customers in Asia Pacific and Europe increased 8% and 5%, respectively, from 2012 to 2013. Net sales for Japan were affected by unfavorable foreign currency translation effects of $22.7 million. Net sales to Europe were favorably affected by foreign currency translation effects of $3.6 million. Net of those effects, sales decreased 5% for Japan and increased 1% for Europe.

Demand drivers for the Company’s business primarily consist of semiconductor fab utilization and production (unit-driven) as well as capital spending for new or upgraded semiconductor fabrication equipment and facilities (capital-driven). The Company analyzes sales of its products by these two key drivers. Sales of unit-driven products represented 66% of total sales and sales of capital-driven products represented 34% of total sales in 2013. This compares to a unit-driven to capital-driven ratio of 66%:34% for 2012.

Sales of unit-driven products decreased 3% in 2013. Unit-driven products generally have average lives of less than 18 months or need to be replaced based on usage levels. These products include liquid filters used in the photolithography, CMP and wet etch and clean processes, specialized graphite components, and wafer shippers used to ship raw wafers, particularly at wafer sizes of 200mm and below.

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Year-over-year sales of capital-driven products decreased 3% in 2013. Capital-driven products include wafer process carriers, gas microcontamination control systems used in the deployment of advanced photolithography processes, fluid handling systems, including dispense pumps used in the photolithography process, and integrated liquid flow controllers used in various processes around the fab.

The Company believes the sales decreases noted above are primarily volume driven. Based on the information available, the Company believes it improved or maintained market share for its products and that the effect of selling price erosion was nominal. Additionally, given that no single customer accounts for more than 10% of the Company’s annual revenue, the decrease in sales has not been driven by any one particular customer or group of customers, but rather by the decline in semiconductor and other high-technology sectors as a whole.

Gross profit Gross profit for 2013 decreased by $13.2 million, to $294.2 million, a decrease of 4% from $307.4 million for 2012. The gross margin rate for 2013 was 42.4% versus 42.9% for 2012.

The year-over-year sales decrease, including a $3.7 million reduction in royalty revenue, primarily accounted for the Company’s lower gross profit and gross margin in 2013.

Selling, general and administrative expenses Selling, general and administrative (SG&A) expenses for 2013 decreased $10.3 million, or 7%, to $137.1 million from $147.4 million in 2012. SG&A expenses, as a percent of net sales, decreased to 19.8% from 20.6% a year earlier, reflecting a decrease in SG&A expenditure levels.

Employee costs, which make up approximately two-thirds of SG&A expenses, decreased by $2.4 million for 2013. The decrease also reflected a decline in consulting and professional fees of $1.9 million as well as the $3.9 million reduction in SG&A expense related to the 2012 CEO succession and transition plan. Also included in the decrease in SG&A expenses for 2013 compared to the year-ago period is a $0.7 million reduction in SG&A expense during the second quarter of 2013 related to the sale of a building classified as an asset held for sale, consisting of the gain on sale thereof and an adjustment to the real estate tax accrual for the building and the favorable settlement of value-added tax matters in Europe ($1.2 million). In addition, the decrease in SG&A costs reflected favorable foreign currency translation effects of $2.9 million.

Engineering, research and development expenses Engineering, research and development (ER&D) expenses related to the support of current product lines and the development of new products and manufacturing technologies increased by $4.4 million, or 9%, to $55.3 million in 2013 compared to $50.9 million in 2012. ER&D expenses as a percent of net sales were 8.0% compared to 7.1% a year ago, reflecting both the increase in ER&D expenditure levels and decrease in net sales.

The increase in ER&D expense mainly reflects higher employee costs of $1.8 million and a general increase in overall ER&D expense levels related to the support of current product lines and the development of new products and manufacturing technologies to support the Company's customers' next-generation processes.

Contingent consideration fair value adjustment In the year ended December 31, 2013, the Company recognized an acquisition-related contingent consideration adjustment of $1.8 million reflecting changes in the fair value of contingent consideration associated with the Jetalon acquisition described in note 2 in the Company’s consolidated financial statements. This adjustment reflects changes in the revenue and gross profit forecasts for the three years ending December 31, 2015 and the estimated probability of achieving those projections.

Amortization of intangible assets Amortization of intangible assets was $9.3 million in 2013 compared to $9.6 million for 2012.

Other income, net Other income was $2.0 million in 2013 compared to other income of $0.3 million in 2012. In 2013, other income includes foreign currency transaction gains of $2.3 million, partially offset by charges of $0.8 million associated with the realization of translation losses recorded upon the liquidation of certain of the Company's subsidiaries.

In 2012, other income includes a $1.5 million gain recorded in the second quarter related to the remeasurement of the previously held 50% equity investment in a Taiwan joint venture entity in which the Company acquired a 100% interest in April 2012. The other income was partially offset by $1.4 million of foreign currency transaction losses related to the remeasurement of yen-denominated assets and liabilities held by the Company.

Income tax expense The Company recorded income tax expense of $21.7 million in 2013 compared to an income tax expense of $30.9 million in 2012. The Company’s effective tax rate was 22.5% in 2013, compared to 31.0% in 2012.

The lower rate in 2013 reflects changes in the Company's geographic composition of income toward jurisdictions with lower tax rates. The effective tax rate in 2013 also included a $1.7 million associated with the reinstatement of the U.S. federal credit

44

for increasing research expenditures, as retroactively signed into law in 2013 and recorded by the Company in the first quarter of 2013.

In 2012, the Company’s effective tax rate was lower than the U.S. statutory rate of 35% primarily due to lower rates in various foreign jurisdictions compared to the U.S. statutory rate.

Net income Net income was $74.5 million, or $0.53 per diluted share, in 2013 compared to net income of $68.8 million, or $0.50 per diluted share, in 2012. The increase reflects the Company’s aforementioned operating results described in greater detail above.

Non-GAAP Measures Information The Company’s consolidated financial statements are prepared in conformity with accounting principles generally accepted in the United States (GAAP). The Company also utilizes certain non-GAAP financial measures as a complement to financial measures provided in accordance with GAAP in order to better assess and reflect trends affecting the Company’s business and results of operations. See “Non-GAAP Information” included below in this section for additional detail, including the reconciliation of GAAP measures to the Company’s non-GAAP measures.

The Company’s non-GAAP financial measures are Adjusted EBITDA and Adjusted Operating Income, together with related measures thereof, and non-GAAP Earnings Per Share (EPS).

Adjusted EBITDA decreased 6% to $132.2 million in 2013, compared to $141.0 million in 2012. Adjusted EBITDA, as a percent of net sales, decreased to 19.1% from 19.7% a year earlier. Adjusted Operating Income decreased 9% to $102.7 million in 2013, compared to $113.0 million in 2012. Adjusted Operating Income, as a percent of net sales, decreased to 14.8% from 15.8% a year earlier. Non-GAAP Earnings Per Share increased 5% to $0.58 in 2013, compared to $0.55 in 2012. The decline in the Adjusted EBITDA and Adjusted Operating Income measures reflect the reduction in net sales and related decrease in gross profit. In addition, Non-GAAP Earnings Per Share was positively affected by a lower effective tax rate.

Segment Analysis

The following table and discussion concern the results of operations of the Company’s two business segments for the years ended December 31, 2013 and 2012. See note 15 to the consolidated financial statements for additional information on the Company’s two segments.

(In thousands)	2013		2012
Critical Materials Handling
Net sales	$	609,826	$	630,929
Segment profit	128,910		144,758
Electronic Materials
Net sales	$	83,633	$	84,974
Segment profit	20,034		21,051

Critical Materials Handling (CMH)

For the year ended December 31, 2013, CMH net sales decreased 3%, to $609.8 million, from $630.9 million in the comparable period last year. Net of unfavorable foreign currency effects of $16.4 million, primarily related to weakness in the Japanese yen, CMH net sales decreased 1%. CMH sales decrease primarily reflected lower sales of liquid filtration products, fluid components and systems and decrease in royalty revenue. Gas filtration products were flat.

CMH reported a segment profit of $128.9 million for the year ended December 31, 2013 compared to $144.8 million in the comparable period last year, a decrease of $15.8 million, or 11%. The decrease in sales volume and a slightly unfavorable sales mix combined to reduce gross profit, which along with a 2% increase in operating expenses accounted for the decline in segment profit.

Electronic Materials (EM)

For the year ended December 31, 2013, EM net sales decreased 2%, to $83.6 million, versus $85.0 million in the comparable period last year. Net of unfavorable foreign currency effects of approximately $2.2 million, EM net sales increased 1%.

EM reported a segment profit of $20.0 million for the year ended December 31, 2013 compared to $21.1 million in the comparable period last year, a decrease of 5%. The decrease in the segment's gross profit associated with lower sales levels and a 5% increase of operating expenses, accounted for the decrease in segment profit.

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Unallocated general and administrative expenses

Unallocated general and administrative expenses totaled $47.2 million for the year ended December 31, 2013 compared to $56.8 million for the year ended December 31, 2012. The decrease primarily reflected lower employee costs ($4.4 million) and professional fees ($1.4 million). Included in the employee cost decline is a $3.9 million charge recorded in 2012 associated with compensation to which the Company’s current chief executive officer was entitled in connection with the succession and transition plan. Figures for 2013 included reductions in unallocated general and administrative expenses related to the sale of a building classified as assets held for sale, consisting of the gain on sale thereof, and an adjustment to the real estate tax accrual for the building ($0.7 million) and the favorable settlement of value-added tax matters in Europe ($1.2 million).

Quarterly Results of Operations

The following table presents selected data from the Company’s consolidated statements of operations for the eight quarters ended December 31, 2014. This unaudited information has been prepared on the same basis as the audited consolidated financial statements appearing elsewhere in this annual report. All adjustments that management considers necessary for the fair presentation of the unaudited information have been included in the quarters presented.

QUARTERLY STATEMENTS OF OPERATIONS DATA (UNAUDITED)

	2013												2014
	Q1			Q2			Q3			Q4			Q1			Q2			Q3			Q4
(In thousands)
Net sales	$	165,070		$	177,544		$	164,585		$	186,260		$	165,804		$	251,578		$	273,054		$	271,633
Gross profit	67,128			77,570			70,132			79,384			71,352			88,668			98,743			117,920
Selling, general and administrative expenses	32,421			35,397			31,746			37,559			34,787			82,347			55,820			58,879
Engineering, research and development expenses	12,173			13,427			13,947			15,773			15,690			21,581			24,427			26,013
Amortization of intangible assets	2,287			2,359			2,343			2,358			2,336			9,390			13,128			12,213
Contingent consideration fair value adjustment	—			—			(1,813		)	—			—			(1,282		)	—			—
Operating income	20,247			26,387			23,909			23,694			18,539			(23,368		)	5,368			20,815
Net income	16,397			19,781			17,807			20,541			14,312			(14,669		)	(1,068		)	9,312
	Q1			Q2			Q3			Q4			Q1			Q2			Q3			Q4
(Percent of net sales)
Net sales	100.0		%	100.0		%	100.0		%	100.0		%	100.0		%	100.0		%	100.0		%	100.0		%
Gross profit	40.7			43.7			42.6			42.6			43.0			35.2			36.2			43.4
Selling, general and administrative expenses	19.6			19.9			19.3			20.2			21.0			32.7			20.4			21.7
Engineering, research and development expenses	7.4			7.6			8.5			8.5			9.5			8.6			8.9			9.6
Amortization of intangibles	1.4			1.3			1.4			1.3			1.4			3.7			4.8			4.5
Contingent consideration fair value adjustment	—			—			(1.1		)	—			—			(0.5		)	—			—
Operating income	12.3			14.9			14.5			12.7			11.2			(9.3		)	2.0			7.7
Net income	9.9			11.1			10.8			11.0			8.6			(5.8		)	(0.4		)	3.4

The Company’s quarterly results of operations have been, and will likely continue to be, subject to significant fluctuations due to a myriad of factors, many of which are beyond the Company’s control. The variability in sales, and its corresponding effect on gross profit, is the single most important factor underlying the changes in the Company’s operating income and net income over the past eight quarters.

Liquidity and Capital Resources

The Company has historically financed its operations and capital requirements through cash flow from its operating activities, long-term loans, lease financing and borrowings under domestic and international short-term lines of credit. In fiscal 2000 and 2009, the Company raised capital via public offerings of its common stock.

Operating activities

Net cash flow provided by operating activities totaled $126.4 million for the year ended December 31, 2014. Cash generated by the Company’s operations included net income of $7.9 million, as adjusted for the impact of various non-cash charges,

46

primarily depreciation and amortization of $83.7 million, charge for the fair value write-up of acquired inventory sold of $48.6 million and share-based compensation expense of $8.9 million. The net impact on cash flow from operations from changes in operating assets reduced cash otherwise generated by the Company’s operations.

Working capital was $503.1 million at December 31, 2014, which included $389.7 million in cash and cash equivalents, a decrease from $514.7 million as of December 31, 2013, which included $384.4 million in cash and cash equivalents.

Accounts receivable increased by $52.1 million during 2014, or $4.8 million after accounting for the effect of the ATMI acquisition and foreign currency translation. The net increase reflects the year-over-year improvement in fourth quarter sales of the Company’s products. The Company’s days sales outstanding measure (DSO) stood at 52 days at December 31, 2014 compared to 50 days at the beginning of the year.

Inventories at December 31, 2014 increased by $69.1 million from a year earlier, or $11.6 million after accounting for the effect of the ATMI acquisition, foreign currency translation and the provision for excess and obsolete inventory. The increase primarily reflects increases in the Company's finished goods inventories.

Accounts payable and accrued expenses were $61.8 million higher than a year ago, or $14.3 million higher after accounting for the effect of the ATMI acquisition and foreign currency translation. In part, the increase reflects a $5.6 million increase in accrued interest payable related to the long-term debt. The Company made income tax payments, net of refunds, of $12.3 million in 2014.

Investing activities Cash flow used in investing activities totaled $860.3 million in 2014.

As noted above and described in note 2 to the Company's consolidated financial statements, on April 30, 2014, the Company acquired ATMI for approximately $1.1 billion in cash pursuant to an Agreement and Plan of Merger with ATMI. The acquisition is reflected in the Company's consolidated statements of cash flows net of cash of $321.1 million acquired from ATMI, or $809.4 million.

Acquisition of property and equipment totaled $57.7 million, which primarily reflected significant investments in equipment and tooling to manufacture 450mm wafer handling products and to establish an advanced membrane manufacturing and development center for critical filtration applications. As of December 31, 2014, the Company expects its capital expenditures in 2015 to be approximately $60 million, as the Company's capital expenditure plans will generally reflect more normalized capital spending levels.

Financing activities Cash flow provided by financing activities totaled $747.6 million during 2014.

On April 1, 2014, the Company issued $360 million aggregate principal amount of 6% senior unsecured notes due April 1, 2022. In addition the Company entered into the senior secured term loan facility on April 30, 2014 in an aggregate principal amount of $460 million, receiving $457.7 million net of original issue discount of $2.3 million. The senior secured term loan is due April 30, 2021. During the year ended December 31, 2014, the Company made a payment of $51.2 million on the senior secured term loan facility.

The Company also entered into a senior secured asset-based revolving credit facility maturing April 30, 2019 that provides financing of $75 million, subject to a borrowing base.  The senior secured asset-based revolving credit facility is due April 30, 2019. As of December 31, 2014, the Company had no outstanding borrowings and $0.3 million undrawn on outstanding letters of credit under the senior secured asset-based revolving credit facility. The Company's prior revolving credit facility was terminated upon consummation of the ATMI acquisition.

Further information concerning these items can be found in note 7 to the consolidated financial statements.

The Company incurred debt issuance costs of $20.7 million in connection with the above debt instruments.

Through December 31, 2014, the Company was in compliance with all applicable financial covenants included in the terms of the senior unsecured notes, its senior secured term loan facility and its senior secured asset-based revolving credit facility.

The Company also has a line of credit with two banks that provide for borrowings of Japanese yen for the Company’s Japanese subsidiary equivalent to an aggregate of approximately $10.0 million. There were no outstanding borrowings under these lines of credit at December 31, 2014.

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The Company received proceeds of $3.6 million in connection with common shares issued under the Company’s stock plans less $2.5 million paid for taxes related to the net share settlement of equity awards. Cash flow provided by financing activities also included $0.8 million related to excess tax benefits associated with such employee stock plan activity.

At December 31, 2014, the Company’s shareholders’ equity stood at $748.4 million, down 1% from $756.8 million at the beginning of the year. The decrease reflected unfavorable foreign currency translation effects of $26.9 million, which primarily reflect the effect of the stronger U.S. dollar versus most currencies in 2014, which were offset by net income of $7.9 million, additional paid-in capital of $8.9 million associated with the Company’s share-based compensation expense, $1.1 million received in connection with common shares issued under the Company’s stock option and employee stock purchase plans, and a tax benefit associated with employee stock plan activity of $0.8 million.

As of December 31, 2014, the Company’s sources of available funds were its cash and cash equivalents of $389.7 million, funds available under its senior secured asset-based revolving credit facility and international credit facilities and cash flow generated from operations. As of December 31, 2014, the amount of cash and cash equivalents associated with indefinitely reinvested foreign earnings was $301 million. These amounts held by foreign subsidiaries are generally subject to U.S. income taxation on repatriation to the United States. The Company does not anticipate the need to repatriate funds to the United States to satisfy domestic liquidity needs arising in the ordinary course of business and believes its existing balances of domestic cash and cash equivalents and operating cash flows will be sufficient to meet the Company’s domestic cash needs arising in the ordinary course of business for the next twelve months.

If available liquidity is not sufficient to meet the Company’s operating and debt service obligations as they come due, management would need to pursue alternative arrangements through additional equity or debt financing in order to meet the Company’s cash requirements. There can be no assurance that any such financing would be available on commercially acceptable terms.

New Accounting Pronouncements

In May 2014, the FASB issued Accounting Standards Update No. 2014-09, Revenue from Contracts with Customers (Topic 606)(ASU 2014-09). ASU 2014-09 outlines a new, single comprehensive model for entities to use in accounting for revenue arising from contracts with customers and supersedes most current revenue recognition guidance, including industry-specific guidance. This new revenue recognition model provides a five-step analysis in determining when and how revenue is recognized. The new model will require revenue recognition to depict the transfer of promised goods or services to customers in an amount that reflects the consideration a company expects to receive in exchange for those goods or services. ASU 2014-09 is effective beginning January 1, 2017. The Company is currently assessing the impact that adopting this new accounting guidance will have on its consolidated financial statements and disclosures.

Refer to Note 1 to the Company’s consolidated financial statements for a discussion of accounting pronouncements implemented in 2014.

Contractual Obligations

The following table summarizes the maturities of the Company’s significant financial obligations as of December 31, 2014:

(In thousands)	Total		2015		2016		2017		2018		2019		Thereafter
Long-term debt	$	766,796	$	26,597	$	—	$	—	$	—	$	—	$	740,199
Pension obligations	8,102		195		129		239		264		216		7,059
Capital purchase obligations1	12,836		12,836		—		—		—		—		—
Operating leases	27,092		10,708		6,810		4,596		3,738		948		292
Total	$	814,826	$	50,336	$	6,939	$	4,835	$	4,002	$	1,164	$	747,550
Unrecognized tax benefits2

1. Capital purchase obligations represent commitments for the construction or purchase of property, plant and equipment. They were not recorded as liabilities on the Company’s consolidated balance sheet as of December 31, 2014, as the Company had not yet received the related goods or taken title to the property.

2. The Company had $6.0 million of total gross unrecognized tax benefits at December 31, 2014. The timing of any payments associated with these unrecognized tax benefits will depend on a number of factors. Accordingly, the

48

Company cannot make reasonably reliable estimates of the amount and period of potential cash settlements, if any, with taxing authorities and are not included in the table above.

Non-GAAP Information The Company’s consolidated financial statements are prepared in conformity with accounting principles generally accepted in the United States (GAAP).

The Company also provides certain non-GAAP financial measures as a complement to financial measures provided in accordance with GAAP in order to better assess and reflect trends affecting the Company’s business and results of operations. Regulation G, “Conditions for Use of Non-GAAP Financial Measures,” and other regulations under the Securities Exchange Act of 1934, as amended, define and prescribe the conditions for use of certain non-GAAP financial information. The Company provides non-GAAP financial measures of Adjusted EBITDA and Adjusted Operating Income together with related measures thereof, and non-GAAP Earnings Per Share (EPS).

Adjusted EBITDA, a non-GAAP term, is defined by the Company as net income before (1) equity in net loss (income) of affiliates, (2) income tax (benefit) expense, (3) interest expense (4) interest income (5) other expense (income), net, (6) charge for the fair value write-up of acquired inventory sold, (7) transaction-related costs, (8) deal costs, (9) integration costs, (10) contingent consideration fair value adjustment, (11) charge associated with CEO succession and transition plan, (12) amortization of intangible assets and (13) depreciation. Adjusted Operating Income, another non-GAAP term, is defined by the Company as Adjusted EBITDA exclusive of the depreciation addback noted above. The Company also utilizes non-GAAP measures whereby Adjusted EBITDA and Adjusted Operating Income are each divided by the Company’s net sales to derive Adjusted EBITDA Margin and Adjusted Operating Margin, respectively.

Non-GAAP EPS, a non-GAAP term, is defined by the Company as net (loss) income before (1) charge for fair value write-up of acquired inventory sold, (2) transaction-related costs, (3) deal costs, (4) integration costs, (5) contingent consideration fair value adjustment, (6) reclassification of cumulative translation adjustment associated with liquidated subsidiary (7) charge associated with CEO succession and transition plan, (8) loss (gain) on impairment/sale of short-term and equity investments, (9) amortization of intangible assets and (10) the tax effect of those adjustments to net (loss) income.

The charge for fair value write-up of acquired inventory sold, transaction-related costs, deal costs and integration costs

adjustments underlying Adjusted EBITDA and Non-GAAP EPS relate specifically to the ATMI acquisition.

The Company provides supplemental non-GAAP financial measures to better understand and manage its business and believes these measures provide investors and analysts additional and meaningful information for the assessment of the Company’s ongoing results. Management also uses these non-GAAP measures to assist in the evaluation of the performance of its business segments and to make operating decisions.

Management believes the Company’s non-GAAP measures help indicate the Company’s baseline performance before certain gains, losses or other charges that may not be indicative of the Company’s business or future outlook and offer a useful view of business performance in that the measures provide a more consistent means of comparing performance. The Company believes the non-GAAP measures aid investors’ overall understanding of the Company’s results by providing a higher degree of transparency for such items and providing a level of disclosure that will help investors understand how management plans, measures and evaluates the Company’s business performance. Management believes that the inclusion of non-GAAP measures provides consistency in its financial reporting and facilitates investors’ understanding of the Company’s historical operating trends by providing an additional basis for comparisons to prior periods.

Management uses Adjusted EBITDA and Adjusted Operating Income to assist it in evaluations of the Company’s operating performance by excluding items that management does not consider as relevant in the results of its ongoing operations. Internally, these non-GAAP measures are used by management for planning and forecasting purposes, including the preparation of internal budgets; for allocating resources to enhance financial performance; for evaluating the effectiveness of operational strategies; and for evaluating the Company’s capacity to fund capital expenditures, secure financing and expand its business.

In addition, and as a consequence of the importance of these non-GAAP financial measures in managing its business, the Company’s Board of Directors uses non-GAAP financial measures in the evaluation process to determine management compensation.

The Company believes that certain analysts and investors use Adjusted EBITDA, Adjusted Operating Income and non-GAAP EPS as supplemental measures to evaluate the overall operating performance of firms in the Company’s industry. Additionally, lenders or potential lenders use Adjusted EBITDA measures to evaluate the Company’s creditworthiness.

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The presentation of non-GAAP financial measures is not meant to be considered in isolation, as a substitute for, or superior to, financial measures or information provided in accordance with GAAP. Management strongly encourages investors to review the Company’s consolidated financial statements in their entirety and to not rely on any single financial measure.

Management notes that the use of non-GAAP measures has limitations:

First, non-GAAP financial measures are not standardized. Accordingly, the methodology used to produce the Company’s non-GAAP financial measures is not computed under GAAP and may differ notably from the methodology used by other companies. For example, the Company’s non-GAAP measure of Adjusted EBITDA may not be directly comparable to EBITDA or an adjusted EBITDA measure reported by other companies.

Second, the Company’s non-GAAP financial measures exclude items such as amortization and depreciation that are recurring. Amortization of intangibles and depreciation have been, and will continue to be for the foreseeable future, a significant recurring expense with an impact upon the Company’s results of operations, notwithstanding the lack of immediate impact upon cash flows.

Third, there is no assurance the Company will not have future restructuring activities, gains or losses on sale of equity investments, contingent consideration fair value adjustments or similar items and, therefore, may need to record additional charges (or credits) associated with such items, including the tax effects thereon. The exclusion of these items from the Company’s non-GAAP measures should not be construed as an implication that these costs are unusual, infrequent or non-recurring.

Management considers these limitations by providing specific information regarding the GAAP amounts excluded from these non-GAAP financial measures and evaluating these non-GAAP financial measures together with their most directly comparable financial measures calculated in accordance with GAAP. The calculations of Adjusted EBITDA, Adjusted operating income, and non-GAAP EPS, and reconciliations between these financial measures and their most directly comparable GAAP equivalents are presented below in the accompanying tables.

The reconciliation of GAAP measures to Adjusted Operating Income and Adjusted EBITDA for the years ended December 31, 2014, 2013 and 2012 are presented below:

(Dollars in thousands)	2014			2013			2012
Net sales	$	962,069		$	693,459		$	715,903
Net income	$	7,887		$	74,526		$	68,825
Adjustments to net income
Equity in net loss (income) of affiliates	293			—			(3		)
Income tax (benefit) expense	(21,572		)	21,669			30,881
Interest expense	33,355			153			271
Interest income	(1,336		)	(317		)	(281		)
Other expense (income), net	2,727			(1,794		)	(249		)
GAAP – Operating income	21,354			94,237			99,444
Charge for fair value write-up of acquired inventory sold	48,586			—			—
Transaction-related costs	26,776			—			—
Deal costs	9,125			973			—
Integration costs	19,652			—			—
Contingent consideration fair value adjustment	(1,282		)	(1,813		)	—
Charge associated with CEO succession and transition plan	—			—			3,928
Amortization of intangible assets	37,067			9,347			9,594
Adjusted operating income	161,278			102,744			112,966
Depreciation	46,637			29,468			28,013
Adjusted EBITDA	$	207,915		$	132,212		$	140,979
Adjusted operating margin	16.8		%	14.8		%	15.8		%
Adjusted EBITDA – as a % of net sales	21.6		%	19.1		%	19.7		%

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The reconciliation of GAAP measures to Non-GAAP Earnings per Share for the years ended December 31, 2014, 2013 and 2012 are presented below:

(Dollars in thousands)	2014			2013			2012
GAAP net income attributable to Entegris, Inc.	$	7,887		$	74,526		$	68,825
Adjustments to net income:
Charge for fair value write-up of acquired inventory sold	48,586			—			—
Transaction-related costs	26,776			—			—
Deal costs	13,288			973			—
Integration costs	19,510			—			—
Contingent consideration fair value adjustment	(1,282		)	(1,813		)	—
Reclassification of cumulative translation adjustments adjustments associated with liquidated subsidiaries	—			787			—
Charge associated with CEO succession and transition plan	—			—			3,928
Net loss (gain) on impairment/sale of short-term investment or equity investments	1,710			—			(1,522		)
Amortization of intangible assets	37,067			9,347			9,594
Tax effect of adjustments to net income attributable to Entegris, Inc.	(56,819		)	(3,044		)	(4,643		)
Non-GAAP net income attributable to Entegris, Inc.	$	96,723		$	80,776		$	76,182
Diluted earnings per common share attributable to Entegris, Inc.	$	0.06		$	0.53		$	0.50
Effect of adjustments to net income attributable to Entegris, Inc.	$	0.63		$	0.04		$	0.05
Diluted non-GAAP earnings per common share attributable to Entegris, Inc.	$	0.69		$	0.58		$	0.55

Quantitative and Qualitative Disclosure About Market Risks

Entegris’ principal financial market risks are sensitivities to interest rates and foreign currency exchange rates. The Company’s interest-bearing cash equivalents and short-term investments are subject to interest rate fluctuations. The Company’s cash equivalents are instruments with maturities of three months or less. A 100 basis point change in interest rates would potentially increase or decrease annual net income by approximately $0.1 million annually.

The cash flows and results of operations of the Company’s foreign-based operations are subject to fluctuations in foreign exchange rates. The Company occasionally uses derivative financial instruments to manage the foreign currency exchange rate risks associated with its foreign-based operations. At December 31, 2014, the Company had no net exposure to any foreign currency forward contracts.

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Item 7a. Quantitative and Qualitative Disclosures about Market Risk.

The information required by this item can be found under the subcaption “Quantitative and Qualitative Disclosure About Market Risks” of “Management’s Discussion and Analysis of Financial Condition and Results of Operations” in Item 7.

Item 8. Financial Statements and Supplementary Data.

The information called for by this item is set forth in the Consolidated Financial Statements covered by the Report of Independent Registered Public Accounting Firm at the end of this report.

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Item 9. Changes in and Disagreements With Accountants on Accounting and Financial Disclosure.

This item is not applicable.

Item 9A. Controls and Procedures.

DISCLOSURE CONTROLS AND PROCEDURES

Management evaluated the effectiveness of our disclosure controls and procedures (as defined in Rules 13a-15(e) and 15d-15(e) under the Securities Exchange Act of 1934, as amended, (the Exchange Act)), as of December 31, 2014, the end of the fiscal period covered by this report on Form 10-K. The Securities and Exchange Commission, or SEC, rules define the term “disclosure controls and procedures” to mean a company’s controls and other procedures that are designed to ensure that information required to be disclosed in the reports it files or submits under the Exchange Act is recorded, processed, summarized and reported within the time period specified in the SEC’s rules and forms. Disclosure controls and procedures include, without limitation, controls and procedures designed to ensure that information required to be disclosed by a company in its reports filed under the Exchange Act is accumulated and communicated to the company’s management, including its principal executive and principal financial officers, or persons performing similar functions, as appropriate to allow timely decisions regarding required disclosure.

Based on the evaluation of the effectiveness of our disclosure controls and procedures by our management team with the participation of the Chief Executive Officer and the Chief Financial Officer, our Chief Executive Officer and our Chief Financial Officer have concluded that, as of the end of the period covered by this report, our disclosure controls and procedures were effective to provide reasonable assurance that information required to be disclosed in the reports that we file or submit under the Exchange Act is recorded, processed, summarized and reported, within the time periods specified in the SEC rules and forms and is accumulated and communicated to management, including the principal executive officer and principal financial officer, as appropriate, to allow timely decisions regarding required disclosure.

MANAGEMENT’S ANNUAL REPORT ON INTERNAL CONTROL OVER FINANCIAL REPORTING

Management is responsible for establishing and maintaining an adequate system of internal control over financial reporting of the Company. This system of internal financial reporting controls is designed to provide reasonable assurance that assets are safeguarded and transactions are properly recorded and executed in accordance with management’s authorization. The design, monitoring and revision of the system of internal financial reporting controls involves, among other things, management’s judgments with respect to the relative cost and expected benefits of specific control measures. The effectiveness of the control system is supported by the selection, retention and training of qualified personnel and an organizational structure that provides an appropriate division of responsibility and formalized procedures. The system of internal accounting controls is periodically reviewed and modified in response to changing conditions. Designated Company employees regularly monitor the adequacy and effectiveness of internal accounting controls.

Because of its inherent limitations, a system of internal control over financial reporting can provide only reasonable assurance and may not prevent or detect misstatements. Further, because of changes in conditions, the effectiveness of internal controls over financial reporting may vary over time. Our system contains control-monitoring mechanisms, and actions are taken to correct deficiencies as they are identified.

Management conducted an evaluation of the effectiveness of the system of internal control over financial reporting based on the framework in Internal Control—Integrated Framework issued by the Committee of Sponsoring Organizations of the Treadway Commission (COSO 1992). Based on this evaluation, management concluded that the Company’s system of internal control over financial reporting was effective as of December 31, 2014.

The Company acquired ATMI, Inc. (ATMI) on April 30, 2014. In the conduct of its assessment of the effectiveness of the Company’s internal control over financial reporting for the year ended December 31, 2014, management has excluded total assets of approximately $1.0 billion (of which $602 million represents goodwill and intangibles included within the scope of the assessment) and net sales of approximately $245 million related to ATMI that are included in the consolidated financial statements of Entegris and its subsidiaries as of and for the year ended December 31, 2014. Management must include ATMI in the conduct of its assessment of the effectiveness of the Company’s internal control over financial reporting no later than the second quarter of 2015.

KPMG LLP, the independent registered public accounting firm which audited the financial statements included in this annual report, has issued an attestation report on our internal control over financial reporting.

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Report of Independent Registered Public Accounting Firm

The Board of Directors and Stockholders

Entegris, Inc.:

We have audited Entegris, Inc.’s internal control over financial reporting as of December 31, 2014, based on criteria established in Internal Control - Integrated Framework (1992) issued by the Committee of Sponsoring Organizations of the Treadway Commission (COSO). Entegris, Inc.’s management is responsible for maintaining effective internal control over financial reporting and for its assessment of the effectiveness of internal control over financial reporting, included in the accompanying “Management’s Report on Internal Control over Financial Reporting”: appearing under Item 9A(a) of the Company’s December 31, 2014 Annual Report on Form 10-K. Our responsibility is to express an opinion on the Company’s internal control over financial reporting based on our audit.

We conducted our audit in accordance with the standards of the Public Company Accounting Oversight Board (United States). Those standards require that we plan and perform the audit to obtain reasonable assurance about whether effective internal control over financial reporting was maintained in all material respects. Our audit included obtaining an understanding of internal control over financial reporting, assessing the risk that a material weakness exists, and testing and evaluating the design and operating effectiveness of internal control based on the assessed risk. Our audit also included performing such other procedures as we considered necessary in the circumstances. We believe that our audit provides a reasonable basis for our opinion.

A company’s internal control over financial reporting is a process designed to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles. A company’s internal control over financial reporting includes those policies and procedures that (1) pertain to the maintenance of records that, in reasonable detail, accurately and fairly reflect the transactions and dispositions of the assets of the company; (2) provide reasonable assurance that transactions are recorded as necessary to permit preparation of financial statements in accordance with generally accepted accounting principles, and that receipts and expenditures of the company are being made only in accordance with authorizations of management and directors of the company; and (3) provide reasonable assurance regarding prevention or timely detection of unauthorized acquisition, use, or disposition of the company’s assets that could have a material effect on the financial statements.

Because of its inherent limitations, internal control over financial reporting may not prevent or detect misstatements. Also, projections of any evaluation of effectiveness to future periods are subject to the risk that controls may become inadequate because of changes in conditions, or that the degree of compliance with the policies or procedures may deteriorate.

In our opinion, Entegris, Inc. maintained, in all material respects, effective internal control over financial reporting as of December 31, 2014, based on criteria established in Internal Control - Integrated Framework (1992) issued by the Committee of Sponsoring Organizations of the Treadway Commission (COSO).

Entegris, Inc. acquired ATMI, Inc. during 2014, and management excluded from its assessment of the effectiveness of Entegris, Inc.’s internal control over financial reporting as of December 31, 2014, ATMI, Inc.’s internal control over financial reporting associated with total assets of $1 billion (of which $602 million represents goodwill and intangibles included within the scope of the assessment) and total revenues of $245 million included in the consolidated financial statements of Entegris, Inc. and subsidiaries as of and for the year ended December 31, 2014. Our audit of internal control over financial reporting of Entegris, Inc. also excluded an evaluation of the internal control over financial reporting of ATMI, Inc.

We also have audited, in accordance with the standards of the Public Company Accounting Oversight Board (United States), the consolidated balance sheets of Entegris, Inc. and subsidiaries as of December 31, 2014 and 2013, and the related consolidated statements of operations, comprehensive (loss) income, equity, and cash flows for each of the years in the three-year period ended December 31, 2014, and our report dated February 26, 2015 expressed an unqualified opinion on those consolidated financial statements.

/s/ KPMG LLP

Minneapolis, Minnesota

February 26, 2015

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(b) CHANGES IN INTERNAL CONTROL OVER FINANCIAL REPORTING

There was no change in the Company’s internal control over financial reporting during the most recently completed fiscal quarter that has materially affected, or is reasonably likely to materially affect, internal controls over financial reporting.

Item 9B. Other Information.

None.

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PART III

Item 10. Directors, Executive Officers and Corporate Governance.

Except as set forth below, the Information required by this Item 10 has been omitted from this report, and is incorporated by reference to the sections “Section 16(a) Beneficial Ownership Reporting Compliance,” “Election of Directors,” “Corporate Governance” in our definitive Proxy Statement for the Entegris, Inc. Annual Meeting of Stockholders to be held on April 30, 2015, and to be filed with the Securities and Exchange Commission pursuant to Regulation 14A within 120 days after the end of our 2014 fiscal year.

Information called for by this item with respect to registrant’s executive officers is set forth under “Executive Officers of the Registrant” in Item 1 of this report.

At their first meeting following the August 10, 2005 merger described under "Our History" in Part I above, our Board of Directors adopted a code of business ethics, The Entegris, Inc. Code of Business Ethics, applicable to all of our executives, directors and employees as well as a set of corporate governance guidelines. The Entegris, Inc. Code of Business Ethics was amended by the Entegris Board of Directors on July 30, 2014. The amended Entegris, Inc. Code of Business Ethics, the Corporate Governance Guidelines and the charters for our Audit & Finance Committee, Governance & Nominating Committee and our Management Development & Compensation Committee all appear on our website at http://www.Entegris.com under “Investors - Corporate Governance”. The Entegris Code of Business Ethics, Corporate Governance Guidelines and committee charters are also available in print to any shareholder that requests a copy. Copies may be obtained by contacting Peter W. Walcott, our Senior Vice President, Secretary and General Counsel through our corporate headquarters. The Company intends to comply with the requirements of Item 5.05 of Form 8-K with respect to any amendment to or waiver of the provisions of the Entegris, Inc. Code of Business Ethics applicable to the registrant’s Chief Executive Officer, Chief Financial Officer or Chief Accounting Officer by posting notice of any such amendment or waiver at the same location on our website.

Item 11. Executive Compensation.

The information required by this Item 11 has been omitted from this report, and is incorporated by reference to the sections entitled "Compensation of Executive Officers" and “Management Development & Compensation Committee Report”, respectively, in our definitive Proxy Statement for the Entegris, Inc. Annual Meeting of Stockholders to be held on April 30, 2015, and to be filed with the Securities and Exchange Commission pursuant to Regulation 14A within 120 days after the end of our 2014 fiscal year.

Item 12. Security Ownership of Certain Beneficial Owners and Management and Related Stockholder Matters.

The information called for by this Item 12 has been omitted from this report, and is incorporated by reference to the sections entitled “Ownership of Entegris Common Stock” and “ Proposal 5 -- To Approve the Performance Criteria and Limitations for Equity Awards under 2010 Stock Plan” in our definitive Proxy Statement for the Entegris, Inc. Annual Meeting of Stockholders to be held on April 30, 2015, and to be filed with the Securities and Exchange Commission pursuant to Regulation 14A within 120 days after the end of our 2014 fiscal year.

Item 13. Certain Relationships and Related Transactions, and Director Independence.

The information required by this Item 13 has been omitted from this report, and is incorporated by reference to the section entitled "Corporate Governance" in our definitive Proxy Statement for the Entegris, Inc. Annual Meeting of Stockholders to be held on April 30, 2015, and to be filed with the Securities and Exchange Commission pursuant to Regulation 14A within 120 days after the end of our 2014 fiscal year.

Item 14. Principal Accountant Fees and Services.

The information required by this Item 14 has been omitted from this report, and is incorporated by reference to the section entitled "Proposal 2 - Ratification of Selection of Independent Registered Public Accounting Firm for 2014" in our definitive Proxy Statement for the Entegris, Inc. Annual Meeting of Stockholders to be held on April 30, 2015, and to be filed with the Securities and Exchange Commission pursuant to Regulation 14A within 120 days after the end of our 2014 fiscal year.

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PART IV

Item 15. Exhibits and Financial Statement Schedules.

(a) The following documents are filed as a part of this report:

1. Financial Statements. The Consolidated Financial Statements listed under Item 8 of this report and in the Index to Consolidated Financial Statements on page F-1 of this report are incorporated by reference herein.

2. Exhibits.

A. The following exhibits are incorporated by reference:

Reg. S-K Item 601(b) Reference	Document Incorporated	Referenced Document on file with the Commission
(2)	Agreement and Plan of Merger, dated as of February 4, 2014, among Entegris, Inc., Atomic Merger Corporation and ATMI, Inc.	Exhibit 2.1 to Entegris, Inc Current Report on Form 8-K filed on February 4, 2014
(3)	By-Laws of Entegris, Inc., as amended December 17, 2008	Exhibit 3 to Entegris, Inc. Annual Report on Form 10-K for the fiscal year ended December 31, 2008
(3)	Amended and Restated Certificate of Incorporation of Entegris, Inc., as amended	Exhibit 3.1 to Entegris, Inc. Annual Report on Form 10-K for the fiscal year ended December 31, 2011
(4)	Form of certificate representing shares of Common Stock, $.01 par value per share	Exhibit 4.1 to Form S-4 Registration Statement of Entegris, Inc. and Eagle DE, Inc. (No. 333-124719)
(4)	Rights Agreement dated July 26, 2005 between Entegris and Wells Fargo Bank, N.A as rights agent	Exhibit 4.1 to Entegris, Inc. (Entegris Minnesota) Current Report on Form 8-K filed with the Securities and Exchange Commission on July 29, 2005
(4)	Indenture, dated as of April 1, 2014, between Entegris, Inc., as Issuer and Wells Fargo Bank National Association, as Trustee, with respect to $360,000,000 6% Senior Unsecured Notes Due 2022, including the form of note representing the 2022 Senior Unsecured Notes	Exhibit 4.1 to Entegris, Inc. Current Report on Form 8-K filed with the Securities and Exchange Commission on April 2, 2014
(10)	Entegris, Inc. – 2010 Stock Plan, as amended*	Exhibit 10.1 to Entegris, Inc. Quarterly Report on Form 10-Q for the period ended July 3, 2010
(10)	Entegris, Inc. Outside Directors’ Stock Option Plan*	Exhibit 10.2 to Entegris, Inc. Registration Statement on Form S-1 (No. 333-33668)
(10)	Entegris, Inc. 2000 Employee Stock Purchase Plan*	Exhibit 10.3 to Entegris, Inc. Registration Statement on Form S-1 (No. 333-33668)
(10)	Amended and Restated Entegris Incentive Plan*	Exhibit 10.1 to Entegris, Inc. Quarterly Report on Form 10-Q for the period ended June 28, 2008
(10)	Lease Agreement, dated April 1, 2002 between Nortel Networks HPOCS Inc. and Mykrolis Corporation, relating to Executive office, R&D and manufacturing facility located at 129 Concord Road Billerica, MA	Exhibit 10.1.3 to Mykrolis Corporation’s Quarterly Report on Form 10-Q for the quarter ended March 31, 2002
(10)	Amendment of Lease between Entegris, Inc. and KBS Rivertech, LLC dated April 1, 2012	Exhibit 10.1 to Entegris, Inc. Quarterly Report on Form 10-Q for the period ended June 30, 2012
(10)	Fluoropolymer Purchase and Sale Agreement, by and between E.I. Du Pont De Nemours and Company and the Registrant, dated January 1, 2011, as amended	Exhibit 10.2 to Entegris, Inc. Quarterly Report on Form 10-Q for the quarter ended April 2, 2011
(10)	Form of Indemnification Agreement between Entegris, Inc. and each of its executive officers and Directors	Exhibit 10.30 to Entegris, Inc. Annual Report on Form 10-K for the fiscal year ended August 27, 2005

57

(10)	Form of Executive Change of Control Termination Agreement between Entegris, Inc. and certain of its executive officers*	Exhibit 10.31 to Entegris, Inc. Annual Report on Form 10-K for the fiscal year ended August 27, 2005
(10)	Severance Protection Agreement, dated July 26, 2011 between Entegris, Inc. and Gregory B. Graves*	Exhibit 10.2 to Entegris, Inc. Quarterly Report on Form 10-Q for the period ended July 2, 2011
(10)	Trust Agreement between Entegris, Inc. Fidelity Management Trust Company and Entegris Inc. 401(k) Savings and Profit Sharing Plan Trust, dated December 29, 2007.	Exhibit 10.3 to Entegris, Inc. Annual Report on Form 10-K for the fiscal year ended December 31, 2007
(10)	Entegris, Inc. 2007 Deferred Compensation Plan*	Exhibit 10.2 to Entegris, Inc. Quarterly Report on Form10-Q for the fiscal period ended June 30, 2007
(10)	Entegris, Inc. – Form of 2010 RSU Unit Award Agreement*	Exhibit 10.1 to Entegris, Inc. Quarterly Report on Form 10-Q for the fiscal period ended April 3, 2010
(10)	Entegris, Inc. – Form of 2010 Stock Option Award Agreement*	Exhibit 10.1 to Entegris, Inc. Quarterly Report on Form 10-Q for the fiscal period ended April 3, 2010
(10)	Amended and Restated Supplemental Executive Retirement Plan for Key Salaried Employees*	Exhibit 10.2 to Entegris, Inc. Annual Report on Form 10-K for the fiscal year ended December 31, 2008
(10)	Amendment to Amended and Restated SERP*	Exhibit 10.15 to Entegris, Inc. Annual Report on Form 10-K for the fiscal year ended December 31, 2009.
(10)	Entegris, Inc. 2012 RSU Unit Award Agreement*	Exhibit 10.2 to Entegris, Inc. Quarterly Report on Form 10-Q for the fiscal period ended March 31, 2012
(10)	Entegris, Inc. 2012 Stock Option Grant Agreement*	Exhibit 10.3 to Entegris, Inc. Quarterly Report on Form 10-Q for the fiscal period ended March 31, 2012
(10)	Entegris, Inc. 401(k) Savings and Profit Sharing Plan (2012 Restatement)*	Exhibit 10.2 to Entegris, Inc. Quarterly Report on Form 10-Q for the fiscal period ended March 31, 2012
(10)	Executive Employment Agreement, effective November 28, 2012, between the Registrant and Bertrand Loy*	Exhibit 10.1 to Entegris, Inc. Annual Report on Form 10-K for the fiscal year ended December 31, 2012
(10)	2011 RSU Unit Award Agreement*	Exhibit 10.2 to Entegris, Inc. Annual Report on Form 10-K for the fiscal year ended December 31, 2012
(10)	2011 Stock Option Award Agreement*	Exhibit 10.3 to Entegris, Inc. Annual Report on Form 10-K for the fiscal year ended December 31, 2012
(10)	Amendment No. 1, dated April 26, 2013, to Executive Change in Control Termination Agreement, between Entegris, Inc. and Bertrand Loy*	Exhibit 99.1 to Entegris, Inc. Periodic Report on Form 8-K filed with the Securities and Exchange Commission on April 26, 2013
(10)	Membrane Manufacture and Supply Transition Agreement, dated as of November 22, 2013, between Entegris, inc. and EMD Millipore Corporation	Exhibit 10.1 to Entegris, Inc. Annual Report on Form 10-K filed with the Securities and Exchange Commission on February 20, 2014
(10)	ABL Credit and Guaranty Agreement, dated as of April 30, 2014, among the Company, certain subsidiaries of the Company as guarantors, the lenders party thereto and Goldman Sachs Bank USA as administrative agent and collateral agent	Exhibit 10.1 to Entegris, Inc. Current Report on Form 8-K filed with the Securities and Exchange Commission on May 1, 2014
(10)	Term Loan Credit and Guaranty Agreement, dated as of April 30, 2014, among the Company, certain subsidiaries of the Company as guarantors, the lenders party thereto and Goldman Sachs Bank USA as administrative agent and collateral agent	Exhibit 10.2 to Entegris, Inc. Current Report on Form 8-K filed with the Securities and Exchange Commission on May 1, 2014
(10)	ABL Pledge and Security Agreement, dated as of April 30, 2014, among the Company, certain subsidiaries of the Company as guarantors, the lenders party thereto and Goldman Sachs Bank USA as collateral agent	Exhibit 10.3 to Entegris, Inc. Current Report on Form 8-K filed with the Securities and Exchange Commission on May 1, 2014

58

(10)	Term Loan Pledge and Security Agreement, dated as of April 30, 2014, among the Company, certain subsidiaries of the Company as guarantors, the lenders party thereto and Goldman Sachs Bank USA as collateral agent	Exhibit 10.4 to Entegris, Inc. Current Report on Form 8-K filed with the Securities and Exchange Commission on May 1, 2014
(10)	ABL Intercreditor Agreement, dated as of April 30, 2014, among Goldman Sachs Bank USA, as ABL Collateral Agent, Goldman Sachs Bank USA, as Term Collateral Agent, and acknowledged by the Company and its wholly owned domestic subsidiaries	Exhibit 10.5 to Entegris, Inc. Current Report on Form 8-K filed with the Securities and Exchange Commission on May 1, 2014
(10)	2014 Performance Award Agreement	Exhibit 10.1 to Entegris, Inc. Quarterly Report on Form 10-Q filed with the Securities and Exchange Commission on October 31, 2014

 * A “management contract or compensatory plan”

B.The Company hereby files as exhibits to this Annual Report on Form 10-K the following documents:

Reg. S-K

Item 601(b)

Reference	Exhibit No.	Documents Filed Herewith
(10)	10.1	Entegris, Inc. 2013 RSU Unit Award Agreement*
(10)	10.2	Entegris, Inc. 2013 Stock Option Grant Agreement*
(10)	10.3	Entegris, Inc. 2014 RSU Unit Award Agreement*
(10)	10.4	Entegris, Inc. 2014 Stock Option Grant Agreement*
(10)	10.5	Letter Agreement, dated November 13, 2014, between Registrant and Gregory Morris*
(21)	21	Subsidiaries of Entegris, Inc.
(23)	23	Consent of Independent Registered Public Accounting Firm
(24)	24	Power of Attorney by the Directors of Entegris, Inc.
(31)	31.1	Certification required by Rule 13a-14(a) in accordance with Section 302 of the Sarbanes—Oxley Act of 2002.
(31)	31.2	Certification required by Rule 13a-14(a) in accordance with Section 302 of the Sarbanes—Oxley Act of 2002.
(32)	32.1	Certification required by Rule 13a-14(b) and 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002.
(32)	32.2	Certification required by Rule 13a-14(b) and 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002.
(101)	101.INS	XBRL Instance Document
(101)	101.SCH	XBRL Taxonomy Extension Schema Document
(101)	101.CAL	XBRL Taxonomy Extension Calculation Linkbase Document
(101)	101.DEF	XBRL Taxonomy Extension Definition Linkbase Document
(101)	101.LAB	XBRL Taxonomy Extension Label Linkbase Document
(101)	101.PRE	XBRL Taxonomy Extension Presentation Linkbase Document

*  A “management contract or compensatory plan”

59

SIGNATURES

Pursuant to the requirements of Section 13 or 15(d) of the Securities Exchange Act of 1934, the Registrant has duly caused this report to be signed on its behalf by the undersigned thereunto duly authorized.

	ENTEGRIS, INC.
Date: February 26, 2015	By	/s/ BERTRAND LOY
		Bertrand Loy
		President & Chief Executive Officer

Pursuant to the requirements of the Securities Exchange Act of 1934, this report has been signed below by the following persons on behalf of the Registrant and in the capacities and on the dates indicated.

SIGNATURE	TITLE	DATE
/s/ BERTRAND LOY	President, Chief Executive Officer and Director (Principal executive officer)	February 26, 2015
Bertrand Loy
/s/ GREGORY B. GRAVES	Executive Vice President, Chief Financial Officer & Treasurer (Principal financial officer)	February 26, 2015
Gregory B. Graves
/s/ MICHAEL D. SAUER	Vice President, Controller & Chief Accounting Officer (Principal accounting officer)	February 26, 2015
Michael D. Sauer
PAUL L.H. OLSON*	Director, Chairman of the Board	February 26, 2015
Paul L.H. Olson
MICHAEL A. BRADLEY*	Director	February 26, 2015
Michael A. Bradley
MARVIN D. BURKETT*	Director	February 26, 2015
Marvin D. Burkett
R. NICHOLAS BURNS*	Director	February 26, 2015
R. Nicholas Burns
DANIEL W. CHRISTMAN*	Director	February 26, 2015
Daniel W. Christman
JAMES F. GENTILCORE*	Director	February 26, 2015
James F. Gentilcore
BRIAN F. SULLIVAN*	Director	February 26, 2015
Brian F. Sullivan

*By	/s/ GREGORY B. GRAVES
GREGORY B. GRAVES, ATTORNEY-IN-FACT

60

EXHIBIT INDEX

Reg. S-K Item 601(b)

Reference	Exhibit No.	Documents Filed Herewith
(10)	10.1	Entegris, Inc. 2013 RSU Unit Award Agreement*
(10)	10.2	Entegris, Inc. 2013 Stock Option Grant Agreement*
(10)	10.3	Entegris, Inc. 2014 RSU Unit Award Agreement*
(10)	10.4	Entegris, Inc. 2014 Stock Option Grant Agreement*
(10)	10.5	Letter Agreement, dated November 13, 2014, between Registrant and Gregory Morris*
(21)	21	Subsidiaries of Entegris, Inc.
(23)	23	Consent of Independent Registered Public Accounting Firm
(24)	24	Power of Attorney by the Directors of Entegris, Inc.
(31)	31.1	Certification required by Rule 13a-14(a) in accordance with Section 302 of the Sarbanes—Oxley Act of 2002.
(31)	31.2	Certification required by Rule 13a-14(a) in accordance with Section 302 of the Sarbanes—Oxley Act of 2002.
(32)	32.1	Certification required by Rule 13a-14(b) and 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002.
(32)	32.2	Certification required by Rule 13a-14(b) and 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002.
(101)	101.INS	XBRL Instance Document
(101)	101.SCH	XBRL Taxonomy Extension Schema Document
(101)	101.CAL	XBRL Taxonomy Extension Calculation Linkbase Document
(101)	101.DEF	XBRL Taxonomy Extension Definition Linkbase Document
(101)	101.LAB	XBRL Taxonomy Extension Label Linkbase Document
(101)	101.PRE	XBRL Taxonomy Extension Presentation Linkbase Document

 * A “management contract or compensatory plan”

61

ENTEGRIS, INC.

INDEX TO FINANCIAL STATEMENTS

Report of Independent Registered Public Accounting Firm	F-2
Consolidated Balance Sheets at December 31, 2014 and 2013	F-3
Consolidated Statements of Operations for the years ended December 31, 2014, 2013 and 2012	F-4
Consolidated Statements of Comprehensive (Loss) Income for the years ended December 31, 2014, 2013 and 2012	F-5
Consolidated Statements of Equity for the years ended December 31, 2014, 2013 and 2012	F-6
Consolidated Statements of Cash Flows for the years ended December 31, 2014, 2013 and 2012	F-7
Notes to Consolidated Financial Statements	F-8

F-1

Report of Independent Registered Public Accounting Firm

The Board of Directors and Stockholders

Entegris, Inc.:

We have audited the accompanying consolidated balance sheets of Entegris, Inc. and subsidiaries as of December 31, 2014 and 2013, and the related consolidated statements of operations, comprehensive (loss) income, equity, and cash flows for each of the years in the three-year period ended December 31, 2014. These consolidated financial statements are the responsibility of the Company’s management. Our responsibility is to express an opinion on these consolidated financial statements based on our audits.

We conducted our audits in accordance with the standards of the Public Company Accounting Oversight Board (United States). Those standards require that we plan and perform the audit to obtain reasonable assurance about whether the financial statements are free of material misstatement. An audit includes examining, on a test basis, evidence supporting the amounts and disclosures in the financial statements. An audit also includes assessing the accounting principles used and significant estimates made by management, as well as evaluating the overall financial statement presentation. We believe that our audits provide a reasonable basis for our opinion.

In our opinion, the consolidated financial statements referred to above present fairly, in all material respects, the financial position of Entegris, Inc. and subsidiaries as of December 31, 2014 and 2013, and the results of their operations and their cash flows for each of the years in the three‑year period ended December 31, 2014, in conformity with U.S. generally accepted accounting principles.

We also have audited, in accordance with the standards of the Public Company Accounting Oversight Board (United States), Entegris, Inc.’s internal control over financial reporting as of December 31, 2014, based on criteria established in Internal Control - Integrated Framework (1992) issued by the Committee of Sponsoring Organizations of the Treadway Commission (COSO), and our report dated February 26, 2015 expressed an unqualified opinion on the effectiveness of the Company’s internal control over financial reporting.

Our report dated February 26, 2015 on internal control over financial reporting as of December 31, 2014, contains an explanatory paragraph that states management excluded from its assessment of the effectiveness of internal control over financial reporting as of December 31, 2014, ATMI, Inc.’s internal control over financial reporting associated with total assets of $1 billion (of which $602 million represents goodwill and intangibles included within the scope of the assessment) and total revenues of $245 million included in the consolidated financial statements of Entegris, Inc. and subsidiaries as of and for the year ended December 31, 2014. Our audit of internal control over financial reporting of Entegris, Inc. also excluded an evaluation of the internal control over financial reporting of ATMI, Inc.

/s/ KPMG LLP

Minneapolis, Minnesota

February 26, 2015

F-2

ENTEGRIS, INC. AND SUBSIDIARIES

CONSOLIDATED BALANCE SHEETS

(In thousands, except share and per share data)	December 31, 2014			December 31, 2013
ASSETS
Current assets:
Cash and cash equivalents	$	389,699		$	384,426
Short-term investments	4,601			—
Trade accounts and notes receivable, net	153,961			101,873
Inventories, net	163,125			94,074
Deferred tax assets, deferred tax charges and refundable income taxes	30,556			20,844
Other current assets	23,713			11,088
Total current assets	765,655			612,305
Property, plant and equipment, net	313,569			186,440
Other assets:
Goodwill	340,743			12,274
Intangible assets, net	308,554			43,509
Deferred tax assets and other noncurrent tax assets	5,068			12,039
Other	28,502			8,727
Total assets	$	1,762,091		$	875,294
LIABILITIES AND EQUITY
Current liabilities:
Long-term debt, current maturities	$	100,000		$	—
Accounts payable	57,417			38,396
Accrued payroll and related benefits	51,164			30,116
Other accrued liabilities	40,387			18,700
Deferred tax liabilities and income taxes payable	13,552			10,373
Total current liabilities	262,520			97,585
Long-term debt, excluding current maturities	666,796			—
Pension benefit obligations and other liabilities	25,373			15,411
Deferred tax liabilities and other noncurrent tax liabilities	58,961			5,455
Commitments and contingent liabilities	—			—
Equity:
Preferred stock, par value $.01; 5,000,000 shares authorized; none issued and outstanding as of December 31, 2014 and 2013	—			—
Common stock, par value $.01; 400,000,000 shares authorized; issued and outstanding shares: 139,792,583 and 138,734,442	1,398			1,387
Additional paid-in capital	830,430			819,632
Retained deficit	(80,712		)	(88,599		)
Accumulated other comprehensive (loss) income	(2,675		)	24,423
Total equity	748,441			756,843
Total liabilities and equity	$	1,762,091		$	875,294

See the accompanying notes to consolidated financial statements.

F-3

ENTEGRIS, INC. AND SUBSIDIARIES

CONSOLIDATED STATEMENTS OF OPERATIONS

(In thousands, except per share data)	Year ended December 31, 2014			Year ended December 31, 2013			Year ended December 31, 2012
Net sales	$	962,069		$	693,459		$	715,903
Cost of sales	585,386			399,245			408,520
Gross profit	376,683			294,214			307,383
Selling, general and administrative expenses	231,833			137,123			147,405
Engineering, research and development expenses	87,711			55,320			50,940
Amortization of intangible assets	37,067			9,347			9,594
Contingent consideration fair value adjustment	(1,282		)	(1,813		)	—
Operating income	21,354			94,237			99,444
Interest expense	33,355			153			271
Interest income	(1,336		)	(317		)	(281		)
Other expense (income), net	2,727			(1,794		)	(249		)
(Loss) income before income tax (benefit) expense and equity in net loss (income) of affiliates	(13,392		)	96,195			99,703
Income tax (benefit) expense	(21,572		)	21,669			30,881
Equity in net loss (income) of affiliates	293			—			(3		)
Net income	$	7,887		$	74,526		$	68,825
Basic net income per common share	$	0.06		$	0.54		$	0.50
Diluted net income per common share	$	0.06		$	0.53		$	0.50
Weighted shares outstanding
Basic	139,311			138,950			137,306
Diluted	140,062			139,618			138,412

See the accompanying notes to consolidated financial statements.

F-4

ENTEGRIS, INC. AND SUBSIDIARIES

CONSOLIDATED STATEMENTS OF COMPREHENSIVE (LOSS) INCOME

(In thousands)	Year ended December 31, 2014			Year ended December 31, 2013			Year ended December 31, 2012
Net income	$	7,887		$	74,526		$	68,825
Other comprehensive loss, net of tax
Foreign currency translation adjustments	(26,948		)	(17,504		)	(2,524		)
Reclassification of cumulative translation adjustment associated with liquidated subsidiaries	—			787			—
Reclassification of cumulative translation adjustment associated with acquisition of business	—			—			(216		)
Unrealized loss on available-for-sale investments	(1,884		)	—			—
Reclassification adjustment associated with unrealized loss realized upon the write-down of available-for-sale investments	1,884			—			—
Pension liability adjustments, net of income tax expense (benefit) of $71, $(37), and $74 for year ended December 31, 2014, 2013, and 2012	(150		)	202			(295		)
Other comprehensive loss	(27,098		)	(16,515		)	(3,035		)
Comprehensive (loss) income	$	(19,211	)	$	58,011		$	65,790

See the accompanying notes to consolidated financial statements

F-5

ENTEGRIS, INC. AND SUBSIDIARIES

CONSOLIDATED STATEMENTS OF EQUITY

(In thousands)	Common shares outstanding		Common stock			Additional paid-in capital			Retained deficit			Foreign currency translation adjustments			Defined benefit pension adjustments			Total
Balance at December 31, 2011	135,821		$	1,358		$	788,673		$	(225,766	)	$	44,737		$	(764	)	$	608,238
Shares issued under stock plans	2,694		28			7,403			—			—			—			7,431
Share-based compensation expense	—		—			9,881			—			—			—			9,881
Repurchase and retirement of common stock	(57	)	(1		)	(329		)	(97		)	—			—			(427		)
Tax benefit associated with stock plans	—		—			3,886			—			—			—			3,886
Pension liability adjustment	—		—			—			—			—			(295		)	(295		)
Reclassification of cumulative translation adjustment associated with acquisition of business	—		—			—			—			(216		)	—			(216		)
Foreign currency translation	—		—			—			—			(2,524		)	—			(2,524		)
Net income	—		—			—			68,825			—			—			68,825
Balance at December 31, 2012	138,458		1,385			809,514			(157,038		)	41,997			(1,059		)	694,799
Shares issued under stock plans	1,882		18			7,667			—			—			—			7,685
Share-based compensation expense	—		—			7,928			—			—			—			7,928
Repurchase and retirement of common stock	(1,606	)	(16		)	(9,391		)	(6,087		)	—			—			(15,494		)
Tax benefit associated with stock plans	—		—			3,914			—			—			—			3,914
Pension liability adjustment	—		—			—			—			—			202			202
Reclassification of cumulative translation adjustment associated with liquidated subsidiaries	—		—			—			—			787			—			787
Foreign currency translation	—		—			—			—			(17,504		)	—			(17,504		)
Net income	—		—			—			74,526			—			—			74,526
Balance at December 31, 2013	138,734		1,387			819,632			(88,599		)	25,280			(857		)	756,843
Shares issued under stock plans	1,059		11			1,069			—			—			—			1,080
Share-based compensation expense	—		—			8,887			—			—			—			8,887
Tax benefit associated with stock plans	—		—			842			—			—			—			842
Pension liability adjustment	—		—			—			—			—			(150		)	(150		)
Foreign currency translation	—		—			—			—			(26,948		)	—			(26,948		)
Net income	—		—			—			7,887			—			—			7,887
Balance at December 31, 2014	139,793		$	1,398		$	830,430		$	(80,712	)	$	(1,668	)	$	(1,007	)	$	748,441

F-6

ENTEGRIS, INC. AND SUBSIDIARIES

CONSOLIDATED STATEMENTS OF CASH FLOWS

F-7

(In thousands)	Year ended December 31, 2014			Year ended December 31, 2013			Year ended December 31, 2012
Operating activities:
Net income	$	7,887		$	74,526		$	68,825
Adjustments to reconcile net income to net cash provided by operating activities:
Depreciation	46,637			29,468			28,013
Amortization	37,067			9,347			9,594
Share-based compensation expense	8,887			7,928			9,881
Charge for fair value write-up of acquired inventory sold	48,586			—			—
Provision for deferred income taxes	(44,716		)	8,232			11,940
Charge for excess and obsolete inventory	4,513			3,963			4,007
Excess tax benefit from share-based compensation plans	(842		)	(3,914		)	(3,805		)
Amortization of debt issuance costs	5,848			—			—
Other	2,209			(765		)	1,701
Changes in operating assets and liabilities, net of effects of acquisitions:
Trade accounts receivable and notes receivable	(4,845		)	(13,363		)	10,626
Inventories	(11,608		)	(441		)	(6,118		)
Accounts payable and other accrued liabilities	14,348			(4,408		)	6,265
Other current assets	(1,699		)	(414		)	(2,985		)
Income taxes payable and refundable income taxes	10,975			2,731			(11,015		)
Other	3,176			(3,488		)	(11,767		)
Net cash provided by operating activities	126,423			109,402			115,162
Investing activities:
Acquisition of property and equipment	(57,733		)	(60,360		)	(49,929		)
Acquisition of business, net of cash acquired	(809,390		)	(13,358		)	(2,961		)
Purchase of short-term investments	—			—			(27,990		)
Proceeds from sale or maturities of short-term investments	13,778			20,000			8,000
Proceeds from sale of assets held for sale	—			6,500			—
Payments for non-compete agreements	(7,517		)	—			—
Other	567			189			413
Net cash used in investing activities	(860,295		)	(47,029		)	(72,467		)
Financing activities:
Proceeds from long-term debt	855,200			—			—
Payments of long-term debt	(88,650		)	—			—
Payments for debt issuance costs	(20,747		)	—			—
Issuance of common stock from employee stock plans	3,559			7,685			7,431
Taxes paid related to net share settlement of equity awards	(2,479		)	—			—
Repurchase and retirement of common stock	—			(15,494		)	(427		)
Other	765			3,914			3,886
Net cash provided by (used in) financing activities	747,648			(3,895		)	10,890
Effect of exchange rate changes on cash and cash equivalents	(8,503		)	(4,471		)	3,241
Increase in cash and cash equivalents	5,273			54,007			56,826
Cash and cash equivalents at beginning of year	384,426			330,419			273,593
Cash and cash equivalents at end of year	$	389,699		$	384,426		$	330,419

F-8

Supplemental Cash Flow Information

(In thousands)	Year ended December 31, 2014		Year ended December 31, 2013		Year ended December 31, 2012
Non-cash transactions:
Equipment purchases in accounts payable	$	3,702	$	6,950	$	3,429
Schedule of interest and income taxes paid:
Interest paid	$	21,919	$	72	$	271
Income taxes, net of refunds received	12,274		10,208		29,697

See accompanying notes to consolidated financial statements.

F-9

ENTEGRIS, INC.

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS

(1)    SUMMARY OF SIGNIFICANT ACCOUNTING POLICIES

Nature of Operations Entegris, Inc. (Entegris or the Company) is a leading provider of yield-enhancing materials and solutions for advanced manufacturing processes in the semiconductor and other high-technology industries.

Principles of Consolidation The consolidated financial statements include the accounts of the Company and its majority-owned subsidiaries. Intercompany profits, transactions and balances have been eliminated in consolidation.

Use of Estimatesand Basis of Presentation The preparation of consolidated financial statements in conformity with accounting principles generally accepted in the United States requires management to make judgments, estimates and assumptions that affect the amounts reported in the consolidated financial statements and accompanying notes. On an ongoing basis, Entegris evaluates its estimates, including those related to receivables, inventories, property, plant and equipment, intangible assets, accrued liabilities, income taxes and share-based compensation, among others. Actual results could differ from those estimates.

Concentrations of Suppliers Certain materials included in the Company’s products are obtained from a single source or a limited group of suppliers. Although the Company seeks to reduce dependence on those sole and limited source suppliers, the partial or complete loss of these sources could have at least a temporary adverse effect on the Company’s results of operations. Furthermore, a significant increase in the price of one or more of these components could adversely affect the Company’s results of operations.

Cash and Cash Equivalents Cash and cash equivalents include cash on hand and highly liquid debt securities with original maturities of three months or less, which are valued at cost and approximates fair value.

Allowance for Doubtful Accounts An allowance for uncollectible trade receivables is estimated based on a combination of write-off history, aging analysis and any specific, known troubled accounts. The Company maintains an allowance for doubtful accounts that management believes is adequate to cover expected losses on trade receivables.

Inventories Inventories are stated at the lower of cost or market. Cost is determined by the first-in, first-out (FIFO) method.

Property, Plant, and Equipment Property, plant and equipment are carried at cost and are depreciated on the straight-line method over the estimated useful lives of the assets. When assets are retired or disposed of, the cost and related accumulated depreciation are removed from the accounts, and gains or losses are recognized in the same period. Maintenance and repairs are expensed as incurred; with significant additions and improvements are capitalized. Long-lived assets, including property, plant and equipment, are reviewed for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset or group of asset(s) may not be recoverable based on estimated future undiscounted cash flows. The amount of impairment, if any, is measured as the difference between the net book value and the estimated fair value of the asset(s).

Investments The Company’s nonmarketable investments are accounted for under either the cost or equity method of accounting, as appropriate. All nonmarketable investments are periodically reviewed to determine whether declines, if any, in fair value below cost basis are other-than-temporary. If the decline in fair value is determined to be other-than-temporary, an impairment loss is recorded and the investment is written down to a new cost basis.

Fair Value of Financial Instruments The carrying value of cash equivalents, accounts receivable, accounts payable, accrued payroll and related benefits, and other accrued liabilities approximates fair value due to the short maturity of those instruments.

The fair value of long-term debt, including current maturities, based upon models utilizing market observable (Level 2) inputs and credit risk, was $764 million at December 31, 2014 compared to the carrying amount of long-term debt, including current maturities, of $767 million.

Goodwill and Intangible Assets Goodwill represents the excess of acquisition costs over the fair value of the net assets of businesses acquired. Goodwill is not amortized, but instead tested at least annually for impairment. Goodwill is also tested for impairment as changes in circumstances occur indicating that the carrying value may not be recoverable. At August 31, 2014, the Company's annual testing date, it was determined there was no impairment of its goodwill.

Amortizable intangible assets include, among other items, patented, unpatented and other developed technology and customer-based intangibles, and are amortized using the straight-line method over their respective estimated useful lives of 3 to 15 years. The Company reviews intangible assets, along with other long-lived assets - primarily property, plant and equipment - for

F-10

impairment if changes in circumstances or the occurrence of events suggest the remaining value may not be recoverable. At December 31, 2014, the Company concluded there was no impairment of its intangible assets.

Derivative Financial Instruments The Company records derivatives as assets or liabilities on the balance sheet and measures such instruments at fair value. Changes in fair value of derivatives are recorded each period in the Company’s consolidated statements of operations.

The Company periodically enters into forward foreign currency contracts to reduce exposures relating to rate changes in certain foreign currencies. Certain exposures to credit losses related to counterparty nonperformance exist. However, the Company does not anticipate nonperformance by the counterparties since they are large, well-established financial institutions. None of these derivatives is accounted for as a hedge transaction. Accordingly, changes in the fair value of forward foreign currency contracts are recorded as other expense (income), net, in the Company’s consolidated statements of operations. The fair values of the Company’s derivative financial instruments are based on prices quoted by financial institutions for these instruments.

Foreign Currency Translation Assets and liabilities of foreign subsidiaries are generally translated from foreign currencies into U.S. dollars at period-end exchange rates, and the resulting gains and losses arising from translation of net assets located outside the U.S. are recorded as a cumulative translation adjustment, a component of accumulated other comprehensive income in the consolidated balance sheets. Income statement amounts are translated at the weighted average exchange rates for the year. Translation adjustments are not adjusted for income taxes, as substantially all translation adjustments relate to permanent investments in non-U.S. subsidiaries. Gains and losses resulting from foreign currency transactions are included in other expense (income), net, in the Company's consolidated statements of operations.

Revenue Recognition Revenue and the related cost of sales are generally recognized upon shipment of the products. Revenue for product sales is recognized upon delivery, when persuasive evidence of an arrangement exists, when title and risk of loss have been transferred to the customer, collectability is reasonably assured, and pricing is fixed or determinable. Shipping and handling fees related to sales transactions are billed to customers and are recorded as revenue.

The Company sells its products throughout the world primarily to companies in the microelectronics industry. The Company performs continuing credit evaluations of its customers and generally does not require collateral. Letters of credit may be required from its customers in certain circumstances. The Company provides for estimated returns based on historical and current trends in both sales and product returns.

The Company collects various sales and value-added taxes on certain product and service sales that are accounted for on a net basis.

Shipping and Handling Costs Shipping and handling costs incurred are recorded in cost of sales in the Company's consolidated statements of operations.

Engineering, Research and Development Expenses Engineering, research and development costs are expensed as incurred.

Share-based Compensation The Company measures the cost of employee services received in exchange for the award of equity instruments based on the fair value of the award at the date of grant. The cost is recognized over the period during which an employee is required to provide services in exchange for the award. Compensation expense is based on the grant date fair value. Because share-based compensation expense recognized in the Company's consolidated statements of operations is based on awards ultimately expected to vest, it has been reduced for expected forfeitures, which are estimated at the time of grant with such estimates revised, if necessary, in subsequent periods if actual forfeitures differ from those estimates.

Income Taxes The Company accounts for income taxes under the asset and liability method, which requires the recognition of deferred tax assets and liabilities for the expected future tax consequences of events that have been included in the financial statements. Under this method, deferred tax assets and liabilities are determined on the basis of the differences between the financial statements and tax basis of assets and liabilities using enacted tax rates in effect for the year in which the differences are expected to reverse. The effect of a change in tax rates on deferred tax assets and liabilities is recognized in income tax expense in the period that includes the enactment date.

The Company recognizes deferred tax assets to the extent that it believes these assets are more likely than not to be realized. A valuation allowance is recorded to reduce deferred tax assets when it is more likely than not that the Company would not be able to realize all or part of its deferred tax assets. In making such a determination, the Company considers all available positive and negative evidence, including future reversals of existing temporary differences, projected future taxable income, tax-planning strategies, and results of recent operations. If the Company determines that it would be able to realize its deferred tax assets in the future in excess of their net recorded amount, the Company would make an adjustment to the deferred tax asset valuation allowance, which would reduce the provision for income taxes.

F-11

The Company’s policy for recording interest and penalties associated with audits and unrecognized tax benefits is to record such items as a component of income before taxes. Penalties and interest to be paid or received are recorded in other expense (income), net, in the statement of operations.

Comprehensive (Loss) Income Comprehensive income represents the change in equity resulting from items other than shareholder investments and distributions. The Company’s foreign currency translation adjustments, unrealized gains and losses on available-for-sale investments, and minimum pension liability adjustments are included in accumulated other comprehensive income. Comprehensive income and the components of accumulated other comprehensive income are presented in the accompanying consolidated statements of equity and comprehensive (loss) income.

Recent Accounting Pronouncements

Accounting Standards Updates issued but not effective for the Company until after December 31, 2014 are not expected to have a material effect on the Company’s consolidated financial statements.

(2)    ACQUISITIONS

ATMI

On April 30, 2014, the Company acquired ATMI, Inc. (the Merger), a Delaware corporation (ATMI), for approximately $1.1 billion in cash pursuant to an Agreement and Plan of Merger (the Merger Agreement), dated as of February 4, 2014. As a result of the Merger, ATMI became a wholly-owned subsidiary of the Company. The Merger was accounted for under the acquisition method of accounting and the results of operations of ATMI are included in the Company's consolidated financial statements as of and since April 30, 2014. Direct costs of $13.3 million associated with the acquisition of ATMI, consisting of professional and consulting fees, and bridge financing costs, were expensed as incurred in the year ended December 31, 2014. These costs are included in selling, general and administrative expense and interest expense, respectively, in the Company's consolidated statements of operations.

ATMI is a leading supplier of high-performance materials, materials packaging and materials delivery systems used worldwide in the manufacture of microelectronic devices. These products consist of “front-end” semiconductor performance materials, sub-atmospheric pressure gas delivery systems for safe handling and delivery of toxic and hazardous gases, and high-purity materials packaging and dispensing systems that allow for the reliable introduction of low volatility liquids and solids to microelectronics processes. The acquisition was executed to expand the Company’s product offering base and technological base, and enhance the leverage of its selling and administrative functions. ATMI’s sales for the year ended December 31, 2013 were approximately $361 million.

The purchase price of ATMI consisted of the following:

(In thousands):
Cash paid to ATMI shareholders	$	1,099,033
Cash paid in settlement of share-based compensation awards	31,451
Total purchase price	1,130,484
Less cash and cash equivalents acquired	321,094
Total purchase price, net of cash acquired	$	809,390

Under the terms of the Merger Agreement, the Company paid $34 per share for all outstanding common shares of ATMI (excluding treasury shares). In addition, the Company settled all outstanding share-based compensation awards held by ATMI employees at the same per share price. The acquisition method of accounting requires the Company to include the amount associated with pre-combination service as consideration in the acquisition, reflected in the table immediately above, while the fair value of the unvested portion of the awards in the amount of $21.3 million is recorded as expense, classified as selling, general and administrative expense, in the Company's consolidated statement of operations.

The Merger was funded with existing cash balances as well as funds raised by the Company through the issuance of debt in the form of a senior secured term loan in an aggregate principal amount of $460 million and senior unsecured notes in an aggregate principal amount of $360 million as described in note 7 to the consolidated financial statements.

The following table summarizes the allocation of the purchase price to the fair values assigned to the assets acquired and liabilities assumed at the date of the ATMI acquisition:

F-12

(In thousands):
Accounts receivable and other current assets	$	107,967
Inventory	115,507
Property, plant and equipment	126,302
Identifiable intangible assets	297,040
Other noncurrent assets	13,216
Current liabilities	(60,056		)
Deferred tax liabilities and other noncurrent liabilities	(122,710		)
Net assets acquired	477,266
Goodwill	332,124
Total purchase price, net of cash acquired	$	809,390

The fair value write-up of acquired finished goods inventory was $48.6 million. This amount was recorded as an incremental cost of sales charge, amortized over the expected turn of the acquired inventory, during the year ended December 31, 2014.

The fair value of acquired property, plant and equipment of $126.3 million is valued at its value-in-use and is provisional pending the Company's completion of its valuation of certain assets, and its final review thereof.

The fair value of the acquired intangible assets is $297.0 million. The acquired intangible assets, all of which are finite-lived, have a weighted average useful life of approximately 8.3 years and are being amortized on a straight-line basis. The intangible assets that comprise the amount include customer relationships of $165.1 million (10-year weighted average useful life), developed technology and related trade names of $120.8 million (6-year weighted average useful life), and other intangible assets of $11.1 million (7.4-year weighted average useful life).

The fair value of acquired identifiable intangible assets was determined using the “income approach” on an individual project basis. In performing these valuations, the key underlying probability-adjusted assumptions of the discounted cash flows were projected revenues, gross margin expectations and operating cost estimates. The valuations were based on the information that was available as of the acquisition date and the expectations and assumptions that have been deemed reasonable by the Company’s management. There are inherent uncertainties and management judgment required in these determinations. The fair value measurements of the assets acquired and liabilities assumed were based on valuations involving significant unobservable inputs, or Level 3 in the fair value hierarchy.

The purchase price of ATMI exceeded the net of the acquisition-date amounts of the identifiable assets acquired and the liabilities assumed by $332.1 million, which reflects adjustments made during the fourth quarter by the Company to its preliminary allocations of the purchase price to the fair values assigned to the assets acquired and liabilities assumed recorded in prior quarters, primarily related to ATMI's property, plant and equipment, intangible assets and tax accounts. Cash flows used to determine the purchase price included strategic and synergistic benefits (investment value) specific to the Company, which resulted in a purchase price in excess of the fair value of identifiable net assets. The purchase price also included the fair values of other assets that were not identifiable, not separately recognizable under accounting rules (e.g., assembled workforce) or of immaterial value in addition to a going-concern element that represents the Company's ability to earn a higher rate of return on the group of assets than would be expected on the separate assets as determined during the valuation process. This additional investment value resulted in goodwill. No amount of goodwill is expected to be deductible for income tax purposes.

The final valuation of assets acquired and liabilities assumed is expected to be completed as soon as possible, but no later than one year from the acquisition date. Given the size and complexity of the acquisition, the valuation of certain assets and liabilities, is still being completed, and is subject to final review. Specifically, certain property, plant and equipment, as noted above, and ATMI's tax accounts are provisional pending the completion of and review of such assets and liabilities. To the extent that the Company's estimates require adjustment, the Company will modify the values.

Subsequent to the Merger, the Company agreed to make severance payments of $7.5 million to ATMI executives. Under the terms of various agreements, the executives are unable to compete with the Company for specified periods. Based on the Company's analysis, the payments associated with these noncompete clauses were capitalized as finite-lived intangible assets to be amortized over periods averaging 1.6 years. The fair value of these noncompete clauses was determined using the “income approach” on an individual executive basis, following a methodology similar to the one described above for acquired identifiable intangible assets.

F-13

Pro Forma Results (Unaudited)

The following unaudited pro forma financial information presents the combined results of operations of the Company as if the acquisition of ATMI had occurred as of the beginning of the years presented. The unaudited pro forma financial information is not necessarily indicative of what the Company’s consolidated results of operations actually would have been had the acquisition occurred at the beginning of each year. In addition, the unaudited pro forma financial information does not attempt to project the future results of operations of the combined company.

	Year ended
(In thousands, except per share data) (Unaudited)	December 31, 2014		December 31, 2013
Net sales	$	1,076,334	$	1,051,175
Net income	68,279		60,324
Per share amounts:
Net income per common share - basic	$	0.49	$	0.43
Net income per common share - diluted	0.49		0.43

The unaudited pro forma financial information above gives effect to the following:

a. The elimination of transactions between Entegris and ATMI, which upon completion of the merger would be considered intercompany. This reflects the elimination of intercompany sales and associated intercompany accounts.

b. Incremental amortization and depreciation expense related to the estimated fair value of identifiable intangible assets and property, plant and equipment from the purchase price allocation.

c. Removal of the operating results of ATMI's discontinued operations.

The unaudited pro forma financial information above for the year ended December 31, 2014 excludes the purchase accounting impact of the incremental charge reported in cost of salesfor the sale of acquired inventory that was written-up to fair value of $48.6 million.

The pro forma data does not include data for Jetalon Solutions, Inc. for the period prior to its acquisition due to the immaterial impact on the pro forma financial information for the year ended December 31, 2014.

Jetalon

On April 1, 2013, the Company acquired substantially all the operating assets and liabilities of Jetalon Solutions, Inc. (Jetalon), a California-based supplier of fluid metrology products. The transaction was accounted for under the acquisition method of accounting and the results of operations of the entity are included in the Company's consolidated financial statements as of and since April 1, 2013. The acquisition of Jetalon’s assets and liabilities did not constitute a material business combination.

The purchase price for Jetalon included cash consideration of $13.4 million, funded from the Company's then-existing cash on hand, and earnout-based contingent consideration of up to $14.5 million based on the operating performance of Jetalon in 2013, 2014 and 2015. Costs associated with the acquisition of Jetalon were not significant and were expensed as incurred.

Upon acquisition, the Company recorded a contingent consideration obligation of $3.1 million representing the fair value of the earnout-based contingent consideration. This amount was estimated through a valuation model that incorporates probability-adjusted assumptions relating to the achievement of possible operating results and the likelihood of the Company making payments. This fair value measurement is based upon significant inputs not observable in the market and therefore represents a Level 3 measurement.

The purchase price of Jetalon consisted of the following:

(In thousands):
Cash paid at closing	$	13,358
Contingent consideration obligation	3,094
Total purchase price	$	16,452

F-14

The following table summarizes the allocation of the purchase price to the fair values assigned to the assets acquired and liabilities assumed at the date of the Jetalon acquisition:

(In thousands):
Accounts receivable, inventory and other assets	$	944
Identifiable intangible assets	5,634
Current liabilities	(216		)
Net assets acquired	6,362
Goodwill	10,090
Total purchase price	$	16,452

The purchase price of Jetalon, including the Company's valuation of contingent consideration, exceeded the net of the acquisition-date amounts of the identifiable assets acquired and the liabilities assumed by $10.1 million. Cash flows used to determine the purchase price included strategic and synergistic benefits (investment value) specific to the Company, which resulted in a purchase price in excess of the fair value of identifiable net assets. The purchase price also included the fair values of other assets that were not identifiable, not separately recognizable under accounting rules (e.g., assembled workforce) or of immaterial value in addition to a going-concern element that represents the Company's ability to earn a higher rate of return on the group of assets than would be expected on the separate assets as determined during the valuation process. This additional investment value resulted in goodwill, which is expected to be deductible for income tax purposes. The goodwill has been assigned to the Company's fluid management reporting unit.

The Company completed its fair value determinations for all elements of the Jetalon acquisition in 2013. Intangible assets, consisting mostly of technology-related intellectual property, are being amortized on a straight-line basis over an estimated useful life of approximately 10 years.

Subsequent changes in the fair value of this obligation have been recognized as adjustments to the contingent consideration obligation and reflected in the Company's consolidated statements of operations. During the years ended December 31, 2014 and 2013, the Company updated its assessment of the contingent consideration based on the valuation methodology described above and recorded gains of $1.3 million and $1.8 million in the Company's consolidated statements of operations, resulting in the reversal of the contingent consideration obligation.

Entegris Precision Technologies Corporation (EPT)

On April 2, 2012, the Company acquired the remaining 50% of its Entegris Precision Technologies Corporation (EPT) joint venture in Taiwan, an equity method investee in which it had previously owned a 50% equity interest accounted for under the equity method. The Company paid $3.4 million in cash for the additional 50% equity interest in the entity. The transaction was accounted for under the acquisition method of accounting and the results of operations of the entity are included in the Company's consolidated financial statements as of and since April 2, 2012. EPT's sales and operating results were not material to the Company's consolidated financial statements.

The Company remeasured its previously held equity interest in the entity at its April 2, 2012 fair value of $2.9 million. Based on the carrying value of the Company's equity interest in EPT before the business combination, the Company recognized a gain of $1.3 million. In addition, in prior reporting periods the Company recognized changes in the value of its equity interest in EPT related to translation adjustments in other comprehensive income. As required under the acquisition method of accounting, the $0.2 million recognized previously in other comprehensive income was reclassified and added in the calculation of the gain noted above.

The purchase price was allocated based on the fair values of all of the assets acquired and liabilities assumed. The sum of the purchase price of the additional 50% equity interest and the fair value of the equity interest in the investee held by the Company at the acquisition date exceeded the net of the acquisition-date amounts of the identifiable assets acquired and the liabilities assumed by $2.2 million, resulting in goodwill, which is not deductible for income tax purposes. EPT is part of the Company’s liquid packaging reporting unit.

As described above, the Company acquired businesses in 2014, 2013 and 2012. As part of the accounting for these transactions, the Company allocated the purchase price of the acquired entities based on the fair value of all the assets acquired and liabilities assumed. The valuation of the assets acquired and liabilities assumed, as well as the Company's contingent consideration obligation in the case of Jetalon and the Company's previously held equity interest in the case of EPT, was based on the

F-15

information that was available as of the acquisition date and the expectations and assumptions that have been deemed reasonable by the Company's management.

In performing these valuations, the Company used independent appraisals, discounted cash flows and other factors as the best evidence of fair value. The key underlying assumptions of the discounted cash flows were projected revenues, gross margin expectations and operating cost estimates. There are inherent uncertainties and management judgment required in these determinations. No assurance can be given that the underlying assumptions will occur as projected. The fair value measurements of the assets acquired and liabilities assumed were based on valuations involving significant unobservable inputs, or Level 3 in the fair value hierarchy.

(3)    TRADE ACCOUNTS AND NOTES RECEIVABLE

Trade accounts and notes receivable from customers at December 31, 2014 and 2013 consist of the following:

(In thousands)	2014		2013
Accounts receivable	$	151,082	$	94,613
Notes receivable	4,706		9,039
	155,788		103,652
Less allowance for doubtful accounts	1,827		1,779
	$	153,961	$	101,873

(4)    INVENTORIES

Inventories at December 31, 2014 and 2013 consist of the following:

(In thousands)	2014		2013
Raw materials	$	41,015	$	26,012
Work-in-process	14,190		10,512
Finished goods (a)	107,431		56,998
Supplies	489		552
	$	163,125	$	94,074

(a) Includes consignment inventories held by customers for $11.0 million and $5.1 million at December 31, 2014 and 2013, respectively.

(5)    PROPERTY, PLANT AND EQUIPMENT

Property, plant, and equipment at December 31, 2014 and 2013 consists of the following:

(In thousands)	2014		2013		Estimated useful lives in years
Land	$	15,064	$	12,866
Buildings and improvements	150,450		109,105		5-35
Manufacturing equipment	214,509		168,197		5-10
Canisters and cylinders	42,154		—		3-12
Molds	80,532		76,909		3-5
Office furniture and equipment	99,624		70,158		3-8
Construction in progress	27,185		33,021
	629,518		470,256
Less accumulated depreciation	315,949		283,816
	$	313,569	$	186,440

The table below sets forth the depreciation expense for the years ended December 31, 2014, 2013, and 2012:

F-16

(In thousands)	2014		2013		2012
Depreciation expense	$	46,637	$	29,468	$	28,013

(6)    GOODWILL AND INTANGIBLE ASSETS

Goodwill activity for each of the Company's two reportable segments, Critical Materials Handling (CMH) and Electronic Materials (EM), was as follows:

(In thousands)	CMH			EM			Total
December 31, 2012	$	2,209		$	—		$	2,209
Addition due to acquisition	10,090			—			10,090
Other, including foreign currency translation	(25		)	—			(25		)
December 31, 2013	12,274			—			12,274
Addition due to acquisition	35,329			296,795			332,124
Other, including foreign currency translation	(120		)	(3,535		)	(3,655		)
December 31, 2014	$	47,483		$	293,260		$	340,743

As of December 31, 2014, goodwill amounted to approximately $340.7 million, an increase of $328.5 million from the balance at December 31, 2013. The increase in goodwill relates to the acquisition of ATMI completed in April 2014 as described in note 2 and is provisional subject to the Company's final valuation of assets acquired and liabilities assumed. The increase was partially offset by the foreign currency translation adjustments.

Identifiable intangible assets at December 31, 2014 and 2013 consist of the following:

2014
(In thousands)	Gross  carrying Amount		Accumulated amortization		Net  carrying value		Weighted average life in years
Patents	$	1,347	$	779	$	568	9.8
Developed technology	199,402		78,785		120,617		6.6
Trademarks and trade names	17,152		8,883		8,269		9.8
Customer relationships	220,420		54,452		165,968		10.3
Other	16,768		3,636		13,132		6.6
	$	455,089	$	146,535	$	308,554	8.5

2013
(In thousands)	Gross  carrying amount		Accumulated amortization		Net  carrying value		Weighted average life in years
Patents	$	1,369	$	649	$	720	9.8
Developed technology	78,686		62,257		16,429		7.4
Trademarks and trade names	13,092		7,306		5,786		12.0
Customer relationships	57,617		39,146		18,471		11.0
Other	2,213		110		2,103		13.3
	$	152,977	$	109,468	$	43,509	9.3

The table below sets forth the amortization expense for the years ended December 31, 2014, 2013, and 2012:

(In thousands)	2014		2013		2012
Amortization expense	$	37,067	$	9,347	$	9,594

The amortization expense for each of the five succeeding years and thereafter relating to intangible assets currently recorded in the Company's consolidated balance sheets is estimated to be the following at December 31, 2014:

F-17

Fiscal year ending December 31	(In thousands)
2015	$	47,835
2016	45,401
2017	43,977
2018	42,725
2019	40,472
Thereafter	88,144
	$	308,554

7. DEBT

Long-term debt at December 31, 2014 consists of the following:

(In thousands)	December 31, 2014
Senior secured term loan facility due 2021	$	406,796
Senior unsecured notes due 2022	360,000
Total long-term debt	766,796
Less current maturities of long-term debt	100,000
Long-term debt less current maturities	$	666,796

Annual maturities of long-term debt contractually due as of December 31, 2014 are as follows:

Fiscal year ending	(In thousands)
2015	$	26,597
2016	—
2017	—
2018	—
2019	—
Thereafter	740,199
	$	766,796

Under the terms of the Term Loan Facility, the Company is obligated to remit payments of approximately $26.6 million on the Term Loan Facility in 2015. However, based on management's plans and intent, the Company reflects $100 million as the current maturity of long-term debt in its consolidated balance sheet as of December 31, 2014. During the year ended December 31, 2014, the Company made payments of $51.2 million on the Term Loan Facility, reducing the contractual principal payments otherwise due in 2015.

As described in note 2 to the consolidated financial statements, the Company issued debt with a principal amount of $820 million to supply the funding required to complete its acquisition of ATMI. Debt issuance costs of $2.3 million paid directly to lending institutions are recorded as a debt discount, while debt issuance costs of $20.7 million paid to third parties are capitalized as debt issuance costs, and reflected within other current and other noncurrent assets. These debt issuance costs are being amortized as interest expense over the term of the debt instrument using the effective-interest method for the senior secured term loan facility and senior unsecured notes, and the straight-line method for the senior secured asset-based revolving credit facility. In the year ended December 31, 2014, the Company expensed $5.8 million of the debt issuance costs, including $4.0 million for bridge financing fees paid for the availability of funding for the acquisition of ATMI. These amounts are included in interest expense in the Company's consolidated statements of operations.

Senior Secured Term Loan Facility and Security Agreement

On April 30, 2014, the Company entered into a term loan credit and guaranty agreement with Goldman Sachs Bank USA, as administrative agent, collateral agent, sole lead arranger, sole bookrunner and sole syndication agent (the Term Loan Facility), that provides senior secured financing of $460 million (which may be increased by up to $225 million in certain circumstances). Borrowings under the Term Loan Facility bear interest at a rate per annum equal to, at the Company’s option, a base rate (such as prime rate or LIBOR) plus, an applicable margin. The Company's interest rate is 3.5% at December 31, 2014.

F-18

In addition to paying interest on outstanding principal under the Term Loan Facility, the Company is required to pay customary agency fees.

During the year ended December 31, 2014, the Company made payments of $51.2 million on the Term Loan Facility.

The credit agreement governing the Term Loan Facility requires the Company to prepay outstanding term loans, subject to certain exceptions, with (a) up to 50% of the Company’s annual Excess Cash Flow (as defined in the credit agreement governing the Term Loan Facility) and (b) 100% of the net cash proceeds of (i) certain asset sales and casualty and condemnation events, subject to reinvestment rights and certain other exceptions; and (ii) any incurrence or issuance of certain debt, other than debt permitted under the Term Loan Facility.

The Company may voluntarily prepay outstanding loans under the Term Loan Facility at any time without premium or penalty other than customary “breakage” costs with respect to LIBOR loans.

All obligations under the Term Loan Facility are unconditionally guaranteed by certain of the Company’s existing wholly owned domestic subsidiaries, and are secured, subject to certain exceptions, by substantially all of the Company’s assets and the assets of the Company's subsidiary guarantors.

The Term Loan Facility contains a number of negative covenants that, subject to certain exceptions, restrict the Company’s ability and each of the Company’s subsidiaries ability to incur additional indebtedness; pay dividends on its capital stock or redeem, repurchase or retire its capital stock or its other indebtedness; make investments, loans and acquisitions; create restrictions on the payment of dividends or other amounts to the Company from the Company’s restricted subsidiaries; engage in transactions with its affiliates; sell assets, including capital stock of its subsidiaries; materially alter the business it conducts; consolidate or merge; incur liens; and engage in sale-leaseback transactions. The credit agreement governing the Term Loan Facility additionally contains certain customary representations and warranties, affirmative covenants and provisions relating to events of default. The Company is in compliance with all of the above covenants at December 31, 2014.

2022 Senior Unsecured Notes

On April 1, 2014, the Company issued $360 million aggregate principal amount of 6% senior unsecured notes due April 1, 2022 (the 2022 Senior Unsecured Notes). The 2022 Senior Unsecured Notes were issued under an indenture dated as of April 1, 2014 (the 2022 Senior Unsecured Notes Indenture) by and among the Company and Wells Fargo Bank, National Association, as trustee (the 2022 Senior Unsecured Notes Trustee). Interest on the 2022 Senior Unsecured Notes is payable semi-annually in arrears on April 1 and October 1, commencing October 1, 2014.

The 2022 Senior Unsecured Notes are guaranteed, jointly and severally, fully and unconditionally, on an unsecured senior basis, by each of the Company’s domestic subsidiaries (the Guarantors) that guarantee indebtedness under the Company’s senior secured term loan facility and senior secured asset-based revolving credit facility (Senior Secured Credit Facilities).

As provided in the Senior Unsecured Notes Indenture, the Company may at its option on one or more occasions redeem all or a part of the 2022 Senior Unsecured Notes at a redemption price equal to (a) 100% of the principal amount of the 2022 Senior Unsecured Notes redeemed plusa make-whole premium if redeemed prior to April 1, 2017, or (b) a percentage of principal amount between a percentage from 100% and 104.5% of the aggregate principal amount of notes to be redeemed depending on the period of redemption, if redeemed on or after April 1, 2017, plus, in each case, accrued and unpaid interest thereto.

Upon a change in control, the Company is required to offer to purchase all of the 2022 Senior Unsecured Notes at a price in cash equal to 101% of the aggregate principal amount thereof, plus accrued and unpaid interest, if any, to, but not including, the date of purchase.

If the Company or its subsidiaries engage in asset sales, the Company generally must either invest the net cash proceeds from such sales in its business within a period of time, prepay debt under the Senior Secured Credit Facilities or make an offer to purchase a principal amount of the 2022 Senior Unsecured Notes equal to the excess net cash proceeds, subject to certain exceptions. 

The 2022 Senior Unsecured Notes Indenture contains covenants that, among other things, limit the Company’s ability and the ability of the Company’s restricted subsidiaries to pay dividends or distributions or redeem or repurchase equity; prepay subordinated debt or make certain investments, loans, advances and acquisitions; incur or guarantee additional debt, or issue certain disqualified stock and preferred stock; create liens; engage in a consolidation or merger, or sell, transfer or otherwise dispose of all or substantially all of their assets; enter into transactions with affiliates; and create restrictions on the payment of dividends or other amounts to the Company from its restricted subsidiaries. The Company is in compliance with all of the above covenants at December 31, 2014.

F-19

The 2022 Senior Unsecured Notes Indenture also provides for events of default which, if certain of them occur, would permit the 2022 Senior Unsecured Notes Trustee or the holders of at least 25% in aggregate principal amount of the then total outstanding 2022 Senior Unsecured Notes to declare the principal, premium, if any, interest and any other monetary obligations on all the then-outstanding 2022 Senior Unsecured Notes to be due and payable immediately.

Senior Secured Asset-Based Revolving Credit Facility and Security Agreement

On April 30, 2014, the Company entered into an asset-based credit agreement with Goldman Sachs Bank USA, as administrative agent, collateral agent, sole lead arranger, sole bookrunner and sole syndication agent (the ABL Facility), that provides senior secured financing of $75 million (which may be increased by up to $35 million in certain circumstances), subject to a borrowing base limitation. The borrowing base for the ABL Facility at any time equals the sum of certain percentages of various accounts and inventories and stood at $64.6 million at December 31, 2014. The ABL Facility includes borrowing capacity in the form of letters of credit up to $35 million of the facility, and up to $20 million in U.S. dollars for borrowings on same-day notice, referred to as swingline loans.

Borrowings under the ABL Facility bear interest at a rate per annum equal to, at the Company’s option, a base rate (prime rate or LIBOR), plus an applicable margin. Swingline loans shall bear interest at a rate per annum equal to the base rate plus the applicable margin.

In addition to paying interest on outstanding principal under the ABL Facility, the Company is required to pay a commitment fee of 0.33% per annum in respect of the unutilized commitments thereunder. The Company must also pay customary letter of credit fees and agency fees.

The Company may voluntarily reduce the unutilized portion of the commitment amount and repay outstanding loans at any time. Prepayments of the loans may be made without premium or penalty other than customary “breakage” costs with respect to LIBOR loans.

During the year ended December 31, 2014, the Company borrowed and repaid $37.5 million in borrowings under the ABL Facility. There is no outstanding balance under the ABL Facility at December 31, 2014.

There is no scheduled amortization under the Company’s ABL Facility. The principal amount outstanding under the ABL Facility is due and payable in full on April 30, 2019.

All obligations under the ABL Facility are unconditionally guaranteed by certain of the Company’s existing wholly owned domestic subsidiaries and are secured, subject to certain exceptions, by substantially all of the Company’s assets and the assets of the Company's subsidiaries that have guaranteed the ABL Facility.

The ABL Facility contains a number of negative covenants that, among other things, subject to certain exceptions, restrict the Company’s ability and the ability of each of the Company’s subsidiaries to incur additional indebtedness; pay dividends on its capital stock or redeem, repurchase or retire its capital stock or its other indebtedness; make investments, loans and acquisitions; create restrictions on the payment of dividends or other amounts to the Company from the Company’s restricted subsidiaries; engage in transactions with its affiliates; sell assets, including capital stock of its subsidiaries; materially alter the business it conducts; consolidate or merge; incur liens; and engage in sale-leaseback transactions. The credit agreement governing the ABL Facility additionally contains certain customary representations and warranties, affirmative covenants and provisions relating to events of default. The Company is in compliance with all of the above covenants at December 31, 2014.

Intercreditor Agreement

In connection with the closing of the ABL Facility and Term Loan Facility, on April 30, 2014, Goldman Sachs Bank USA, as collateral agent for the ABL Facility and as collateral agent for the Term Loan Facility, entered into an intercreditor agreement (the Intercreditor Agreement), acknowledged by the Company, which governs the relative priorities (and certain other rights) of the ABL Facility lenders and Term Loan Facility lenders pursuant the respective security agreements that each entered into with the Company and the guarantors.

(8)    LEASE COMMITMENTS

As of December 31, 2014, the Company was obligated under noncancellable operating lease agreements for certain sales offices and manufacturing facilities, manufacturing equipment, vehicles, information technology equipment and warehouse space. Future minimum lease payments for noncancellable operating leases with initial or remaining terms in excess of one year are as follows:

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Fiscal year ending December 31	(In thousands)
2015	$	10,708
2016	6,810
2017	4,596
2018	3,738
2019	948
Thereafter	292
Total minimum lease payments	$	27,092

Total rental expense for all equipment and building operating leases for the years ended December 31, 2014, 2013, and 2012, were $13.3 million, $9.5 million, and $9.4 million, respectively.

9. ASSET RETIREMENT OBLIGATIONS

In connection with the acquisition of ATMI described in note 2, the Company assumed asset retirement obligations (AROs) related to environmental disposal obligations associated with cylinders used to supply customers with ATMI's products, and certain restoration obligations associated with its leased facilities. Prior to the acquisition, the Company also had AROs related certain restoration obligations associated with its leased facilities.

Changes in the carrying amounts of the Company’s AROs at December 31, 2014 are shown below:

(In thousands)
Balance at December 31, 2013	$	2,167
Liabilities assumed in ATMI acquisition	7,365
Liabilities settled	(128		)
Liabilities incurred	248
Accretion expense	195
Revision of estimate	103
Balance at December 31, 2014	$	9,950

The ARO liability is included in the consolidated balance sheets in other accrued liabilities, and pension benefit obligations and other liabilities.

(10)    INCOME TAXES

(Loss) income before income taxes for the years ended December 31, 2014, 2013 and 2012 was derived from the following sources:

(In thousands)	2014			2013		2012
Domestic	$	(118,917	)	$	29,066	$	49,056
Foreign	105,525			67,129		50,647
(Loss) income before income tax (benefit) expense and equity in net loss (income of affiliates	$	(13,392	)	$	96,195	$	99,703

Income tax (benefit) expense for the years ended December 31, 2014, 2013, and 2012 is summarized as follows:

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(In thousands)	2014			2013			2012
Current:
Federal	$	1,574		$	854		$	5,797
State	111			772			654
Foreign	21,459			12,937			11,183
	23,144			14,563			17,634
Deferred (net of valuation allowance):
Federal	(41,484		)	6,003			11,165
State	(1,545		)	(650		)	168
Foreign	(1,687		)	1,753			1,914
	(44,716		)	7,106			13,247
Income tax (benefit) expense	$	(21,572	)	$	21,669		$	30,881

Income tax (benefit) expense differs from the expected amounts based upon the statutory federal tax rates for the years ended December 31, 2014, 2013, and 2012 as follows:

(In thousands)	2014			2013			2012
Expected federal income tax at statutory rate	$	(4,687	)	$	33,668		$	34,896
State income taxes before valuation allowance, net of federal tax effect	(2,115		)	(357		)	440
Income (losses) without tax expense (benefit)	(72		)	22			(40		)
Effect of foreign source income	(19,996		)	(10,583		)	(5,314		)
Tax contingencies	1,379			1,383			1,374
Valuation allowance	2,106			445			358
Non-deductible acquisition costs	2,176			—			—
U.S. federal research credit	(2,085		)	(3,233		)	(790		)
Other items, net	1,722			324			(43		)
Income tax (benefit) expense	$	(21,572	)	$	21,669		$	30,881

As a result of commitments made by the Company related to investments in tangible property and equipment, the establishment of a research and development center in 2006 and certain employment commitments, income from certain manufacturing activities in Malaysia is exempt from tax for years up through 2015. The income tax benefits attributable to the tax status of this subsidiary are estimated to be $8 million ($0.06 cents per diluted share), $5.4 million ($0.04 cents per diluted share), and $2.4 million ($0.02 cents per diluted share) for the years ended December 31, 2014, 2013, and 2012, respectively. The 2014 effective tax rate reflects an additional benefit of $3.3 million due to a lower tax rate than the U.S.

In 2012, ATMI's Korea subsidiary made commitments to produce a certain line of products. In return for this commitment, the Company has a tax holiday on income earned on sales of these products for five years and a partial holiday for two additional years. The income tax benefit attributable to this tax holiday are $0.2 million ($0.0 cents per diluted share) for the year ended December 31, 2014. The 2014 effective tax rate reflects an additional benefit of $0.2 million due to a lower tax rate than the U.S.

The Company also made employment and spending commitments to Singapore. In return for those commitments, the Company has been granted a partial tax holiday for five years and an additional partial tax holiday for an additional two years if the requirements are met. The income tax benefits attributable to the tax status are estimated to be $1.2 million ($0.01 cents per diluted share), $0.5 million ($0.00 cents per diluted share), $0 million ($0.00 cents per diluted share) for the years ending December 31, 2014, 2013, and 2012 respectively. The 2014 effective tax rate reflects an additional benefit of $3.7 million due to a lower tax rate than the U.S.

The 2014 effective tax rate reflects a $2.6 million benefit related to foreign tax credits.

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The significant components of the Company’s deferred tax assets and deferred tax liabilities at December 31, 2014 and 2013 are as follows:

(In thousands)	2014			2013
Deferred tax assets attributable to:
Accounts receivable	$	243		$	269
Inventory	5,663			2,853
Accruals not currently deductible for tax purposes	9,915			8,844
Net operating loss and credit carryforwards	12,183			3,972
Capital loss carryforward	3,088			2,779
Depreciation	10,498			1,070
Equity compensation	3,662			3,157
Asset impairments	732			732
Purchased intangible assets	—			1,439
Other, net	5,549			2,976
Gross deferred tax assets	51,533			28,091
Valuation allowance	(11,104		)	(5,435		)
Total deferred tax assets	40,429			22,656
Deferred tax liabilities attributable to:
Depreciation	—			(3,245		)
Purchased intangible assets	(77,149		)	(601		)
Total deferred tax liabilities	(77,149		)	(3,846		)
Net deferred tax (liabilities) assets	$	(36,720	)	$	18,810

Deferred tax assets are generally required to be reduced by a valuation allowance if, based on the weight of available positive and negative evidence, it is more likely than not that some portion or all of the deferred tax assets will not be realized.

As of December 31, 2014 and 2013, the Company had a net U.S. deferred tax liability of $24.8 million and a net U.S. deferred tax asset of $16.0 million, respectively, which are composed of temporary differences and various tax credit carryforwards. Management believes that it is more likely than not that the benefit from certain state net operating loss carryforwards, state credits, and a federal capital loss carryforward will not be realized. In recognition of this risk, management has provided a valuation allowance of $10.6 million and $5.4 million as of December 31, 2014 and 2013, respectively, on the related deferred tax assets. If the assumptions change and management determines the assets will be realized, the tax benefits relating to any reversal of the valuation allowance on deferred tax assets at December 31, 2014 will be recognized as a reduction of income tax expense.

As of December 31, 2014 and 2013, the Company had a net non-U.S. deferred tax liability of $1.4 million and a net non-U.S. deferred tax asset of $8.2 million, respectively, for which management determined based upon the available evidence a valuation allowance of $0.5 million as of December 31, 2014 was required against the non-U.S. gross deferred tax assets. For other non-U.S. jurisdictions, management is relying upon projections of future taxable income to utilize deferred tax assets.

At December 31, 2014, there were approximately $618.0 million of accumulated undistributed earnings of subsidiaries outside the United States, all of which are considered to be reinvested indefinitely. Management has considered its future cash needs and affirms its intention to indefinitely invest such earnings overseas to be utilized for working capital purposes, expansion of existing operations, possible acquisitions and other international items. No U.S. tax has been provided on such earnings. If they were remitted to the Company, applicable U.S. federal and foreign withholding taxes may be partially offset by available foreign tax credits. Management has concluded that it is impracticable to compute the full actual tax impact, but it estimates that $12 million of withholding taxes would be incurred if the $618.0 million were distributed.

At December 31, 2014, the Company had state operating loss carryforwards of approximately $42.4 million, which begin to expire in 2015; foreign tax credit carryforwards of approximately $7.2 million, which begin to expire in 2019; federal research and development credit carryforwards of approximately $3.6 million, which begin to expire in 2033; and foreign operating loss carryforwards of $2.7 million, which begin to expire in 2023. The Company will need approximately $31.0 million of certain types of domestic income between 2015 and 2033 to fully utilize the credit carryforwards.

Benefits from tax positions should be recognized in the financial statements only when it is more likely than not that the tax positions will be sustained upon examination by the appropriate taxing authority that would have full knowledge of all relevant

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information. A tax position that meets the more-likely-than-not recognition threshold is measured at the largest amount of benefit that is greater than fifty percent likely of being realized upon ultimate settlement. Tax positions that fail to meet the more-likely-than-not recognition threshold should be recognized in the first subsequent financial reporting period in which that threshold is met. Previously recognized tax positions that no longer meet the more-likely-than-not recognition threshold should be derecognized in the first subsequent financial reporting period in which that threshold is no longer met. The provisions also provide guidance on the accounting for and disclosure of unrecognized tax benefits, interest and penalties.

Reconciliations of the beginning and ending balances of the total amounts of gross unrecognized tax benefits for the years ended December 31, 2014 and 2013 are as follows:

(In thousands)	2014			2013
Gross unrecognized tax benefits at beginning of year	$	4,277		$	5,419
Increase from acquisition	2,431			—
Increases in tax positions for prior years	—			28
Decreases in tax positions for prior years	(246		)	—
Increases in tax positions for current year	2,409			1,879
Settlements	(1,385		)	(2,298		)
Lapse in statute of limitations	(1,502		)	(751		)
Gross unrecognized tax benefits at end of year	$	5,984		$	4,277

The total amount of net unrecognized tax benefits that, if recognized, would affect the effective tax rate was $4.3 million at December 31, 2014.

Penalties and interest paid or received are recorded in other income, net, in the consolidated statements of operations. For the years ended December 31, 2014 and 2013, the Company has accrued interest and penalties related to unrecognized tax benefits of $0.5 million and $0.8 million, respectively. Benefits of $0.4 million, $0.1 million and $0.0 million were recognized as interest and penalties in the consolidated statements of operations for the years ended December 31, 2014, 2013 and 2012, respectively.

The Company files income tax returns in the U.S. and in various state, local and foreign jurisdictions. The statutes of limitations related to the consolidated Federal income tax return and state returns are closed for all years up to and including 2010 and 2010, respectively. With respect to foreign jurisdictions, the statute of limitations varies from country to country, with the earliest open year for the Company’s major foreign subsidiaries being 2008.

Due to the potential for resolution of a foreign examination and the expiration of various statutes of limitations, it is reasonably possible that the Company’s gross unrecognized tax benefit balance may decrease within the next twelve months by approximately $0.2 million.

(11)    EQUITY

Share Repurchase Program

On December 12, 2012, the Board of Directors authorized a repurchase program covering up to an aggregate of $50.0 million of the Company’s common stock in open market transactions and in accordance with one or more pre-arranged stock trading plans established in accordance with Rule 10b5-1 under the Securities Exchange Act of 1934, as amended. Under the repurchase program, which expired on February 7, 2014, the Company repurchased $15.5 million and $0.4 million shares for the years ended December 31, 2013 and 2012, respectively.

2010 Stock Plan

At December 31, 2009, the Company had outstanding stock awards under five stock incentive plans: the Entegris, Inc. 1999 Long-Term Incentive and Stock Option Plan; the Entegris, Inc. Outside Directors’ Option Plan and three former Mykrolis stock option plans assumed by the Company on August 10, 2005; the 2001 Equity Incentive Plan; the 2003 Employment Inducement and Acquisition Stock Option Plan; and the 2001 Non-Employee Director Stock Option Plan. On December 17, 2009, the Company’s Board of Directors approved the 2010 Stock Plan, subject to the approval of the Company’s stockholders. On May 5, 2010, the stockholders approved the 2010 Stock Plan. The 2010 Stock Plan replaced the above existing plans for future stock awards and stock option grants. Subsequent to the replacement of the prior plans on May 5, 2010, no awards were or will be made under the prior plans.

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Subsequent to the acquisition of ATMI, the Company's Board of Directors approved the absorption of the ATMI, Inc. 2010 Stock Plan (ATMI Plan) into the Company's 2010 Stock Plan for the remainder of the term of the ATMI Plan. 5.7 million additional shares became available for grant by the Company upon absorption of the ATMI Plan.

The 2010 Stock Plan provides for the issuance of stock options and other share-based awards to selected employees, directors, and other individuals or entities that provide services to the Company or its affiliates. The 2010 Stock Plan has a term of ten years. Under the 2010 Stock Plan, the Board of Directors or a committee selected by the Board of Directors will determine for each award, the term, price, number of shares, rate at which each award is exercisable and whether restrictions are imposed on the shares subject to the awards. The exercise price for option awards generally may not be less than the fair market value per share of the underlying common stock on the date granted. The 2010 Stock Plan allows that after December 31, 2009 any stock awards that were awarded from the expired plans mentioned above that are forfeited, expired or otherwise terminated without issuance of such stock award again be available for issuance under the 2010 Stock Plan.

General Option Information

Stock option activity for the 2010 Stock Plan and predecessor plans for the years ended December 31, 2014, 2013 and 2012 is summarized as follows:

	2014				2013				2012
(Shares in thousands)	Number of shares		Weighted average exercise price		Number of shares		Weighted average exercise price		Number of shares		Weighted average exercise price
Options outstanding, beginning of year	1,961		$	8.20	2,565		$	8.20	3,561		$	6.53
Granted	651		11.71		553		9.88		470		9.27
Exercised	(546	)	6.56		(786	)	7.54		(1,293	)	3.76
Expired or Forfeited	(32	)	14.06		(371	)	12.10		(173	)	9.83
Options outstanding, end of year	2,034		$	9.67	1,961		$	8.20	2,565		$	8.20
Options exercisable, end of year	728		$	7.92	1,001		$	6.92	1,828		$	8.18

Options outstanding for the Company’s stock plans at December 31, 2014 are summarized as follows:

(Shares in thousands)	Options outstanding				Options exercisable
Range of exercise prices	Number outstanding	Weighted average remaining life in years	Weighted- average exercise price		Number exercisable	Weighted average exercise price
$0.00 to $9.40	842	3.0 years	$	7.96	602	$	7.50
$9.88 to $9.88	541	5.1 years	9.88		126	9.88
$11.71 to $11.71	651	6.1 years	11.71		—	—
	2,034	4.6 years	9.67		728	7.92

The weighted average remaining contractual term for options outstanding and exercisable for all plans at December 31, 2014 was 4.6 years and 3.1 years, respectively.

For all plans, the Company had shares available for future grants of 11.6 million shares, 6.8 million shares, and 7.7 million shares at December 31, 2014, 2013 and 2012, respectively.

For all plans, the total pre-tax intrinsic value of stock options exercised during the years ended December 31, 2014 and 2013 was $3.3 million and $1.8 million, respectively. The aggregate intrinsic value, which represents the total pre-tax intrinsic value based on the Company’s closing stock price of $13.21 at December 31, 2014, which theoretically could have been received by the option holders had all option holders exercised their options as of that date, was $7.2 million and $3.9 million for options outstanding and options exercisable, respectively.

Employee Stock Purchase Plan

The Company maintains the Entegris, Inc. Employee Stock Purchase Plan (ESPP). A total of 4.0 million common shares are reserved for issuance under the ESPP. The ESPP allows employees to elect, at six-month intervals, to contribute up to 10% of their compensation, subject to certain limitations, to purchase shares of common stock at a discount of 15% from the fair

F-25

market value on the first day or last day of each six-month period. The Company treats the ESPP as a compensatory plan. As of December 31, 2014, 3.8 million shares had been issued under the ESPP. At December 31, 2014, 0.2 million shares remained available for issuance under the ESPP. Employees purchased 0.2 million shares, 0.2 million shares, and 0.3 million shares, at a weighted-average price of $10.57, $8.00, and $7.34 during the years ended December 31, 2014, 2013 and 2012, respectively.

The table below sets forth the amount of cash received by the Company from the exercise of stock options and employee contributions to the ESPP during the years ended December 31, 2014, 2013 and 2012:

(In thousands)	2014		2013		2012
Exercise of stock options and employee contributions to the ESPP	$	3,117	$	7,685	$	7,431

Restricted Stock Awards

Restricted stock awards are awards of common stock made under the 2010 Stock Plan that are subject to restrictions on transfer and to a risk of forfeiture if the awardee terminates employment with the Company prior to the lapse of the restrictions. The value of such stock is determined using the market price on the grant date. Compensation expense for restricted stock awards is generally recognized using the straight-line single-option method. A summary of the Company’s restricted stock activity for the years ended December 31, 2014, 2013 and 2012 is presented in the following table:

	2014				2013				2012
(Shares inthousands)	Number of shares		Weighted average grant date fair value		Number of shares		Weighted average grant date fair value		Number of shares		Weighted average grant date fair value
Unvested, beginning of year	1,570		$	8.98	1,802		$	7.02	2,298		$	5.49
Granted	834		11.59		717		9.85		744		9.21
Vested	(686	)	8.32		(871	)	5.67		(1,132	)	5.42
Forfeited	(105	)	10.14		(78	)	8.66		(108	)	6.22
Unvested, end of year	1,613		10.53		1,570		8.98		1,802		7.02

The weighted average remaining contractual term for unvested restricted shares at December 31, 2014 and 2013 was 2.3 years and 2.0 years, respectively.

As of December 31, 2014, the total compensation cost related to unvested stock options and restricted stock awards not yet recognized was $3.7 million and $11.8 million, respectively, and is expected to be recognized over the next 2.6 years on a weighted-average basis.

Valuation and Expense Information

The Company recognizes compensation expense for all share-based payment awards made to employees and directors based on their estimated fair values on the date of grant. Share-based compensation expense is based on the value of the portion of share-based payment awards that is ultimately expected to vest during the period.The following table summarizes the allocation of share-based compensation expense related to employee stock options, restricted stock awards and grants under the employee stock purchase plan for the years ended December 31, 2014, 2013 and 2012:

(In thousands)	2014		2013		2012
Cost of sales	$	809	$	690	$	575
Engineering, research and development expenses	705		502		500
Selling, general and administrative expenses	7,373		6,736		8,806
Share-based compensation expense	8,887		7,928		9,881
Tax benefit	2,746		2,643		3,686
Share-based compensation expense, net of tax	$	6,141	$	5,285	$	6,195

Stock Options

Share-based payment awards in the form of stock option awards for 0.7 million, 0.6 million and 0.5 million options were granted to employees during the years ended December 31, 2014, 2013, and 2012. Compensation expense is based on the grant date fair value. The awards vest annually over a three-year or four-year period and have a contractual term of seven years. The

F-26

Company estimates the fair value of stock options using the Black-Scholes valuation model. Key inputs and assumptions used to estimate the fair value of stock options include the grant price of the award, the expected option term, volatility of the Company’s stock, the risk-free rate and the Company’s dividend yield. Estimates of fair value are not intended to predict actual future events or the value ultimately realized by employees who receive equity awards, and subsequent events are not indicative of reasonableness of the original estimates of fair value made by the Company.

The fair value of each stock option grant was estimated at the date of grant using a Black-Scholes option pricing model. The following table presents the weighted-average assumptions used in the valuation and the resulting weighted-average fair value per option granted for the years ended December 31, 2014, 2013 and 2012:

Employee stock options:	2014			2013			2012
Volatility	43.3		%	51.7		%	82.4		%
Risk-free interest rate	1.1		%	0.7		%	0.6		%
Dividend yield	—		%	—		%	—		%
Expected life (years)	3.8			3.6			3.8
Weighted average fair value per option	$	3.99		$	3.80		$	5.42

A historical daily measurement of volatility is determined based on the expected life of the option granted. The risk-free interest rate is determined by reference to the yield on an outstanding U.S. Treasury note with a term equal to the expected life of the option granted. Expected life is determined by reference to the Company’s historical experience. The Company determines the dividend yield by dividing the expected annual dividend on the Company’s stock by the option exercise price.

Shareholder Rights Plan On July 27, 2005, the Company’s Board of Directors adopted a shareholder rights plan (the Rights Plan) pursuant to which Entegris declared a dividend on August 8, 2005 to its shareholders of record on that date of one preferred share purchase right (a Right) for each share of Entegris common stock owned on August 8, 2005 and authorized the issuance of Rights in connection with future issuances of Entegris common stock. Each Right entitles the holder to purchase one-hundredth of a share of a series of preferred stock at an exercise price of $50, subject to adjustment as provided in the Rights Plan. The Rights Plan is designed to protect Entegris’ shareholders from attempts by others to acquire Entegris on terms or by using tactics that could deny all shareholders the opportunity to realize the full value of their investment. The Rights are attached to the shares of the Company’s common stock until certain triggering events specified in the Rights Agreement occur, including, unless approved by the Company’s Board of Directors, an acquisition by a person or group of specified levels of beneficial ownership of Entegris common stock or a tender offer for Entegris common stock. Upon the occurrence of any of these triggering events, the Rights authorize the holders to purchase at the then-current exercise price for the Rights, that number of shares of the Company’s common stock having a value equal to twice the exercise price. The Rights are redeemable by the Company for $0.01 and will expire on August 8, 2015. One of the events which will trigger the Rights is the acquisition, or commencement of a tender offer, by a person (an Acquiring Person, as defined in the shareholder rights plan), other than Entegris or any of its subsidiaries or employee benefit plans, of 15% or more of the outstanding shares of the Company’s common stock. An Acquiring Person may not exercise a Right.

(12)    BENEFIT PLANS

401(k) Plan The Company maintains the Entegris, Inc. 401(k) Savings and Profit Sharing Plan (the 401(k) Plan) that qualifies as a deferred salary arrangement under Section 401(k) of the Internal Revenue Code. Under the Plan, eligible employees may defer a portion of their pre-tax wages, up to the Internal Revenue Service annual contribution limit. Entegris matches employees’ contributions to a maximum match of 4% of the employee’s eligible wages. The employer matching contribution expense under the Plan was $4.4 million, $3.2 million and $3.0 million in the fiscal years ended December 31, 2014, 2013 and 2012, respectively.

Defined Benefit Plans The employees of the Company’s subsidiaries in Japan, Taiwan and Germany are covered in defined benefit pension plans. The Company uses a December 31 measurement date for its pension plans.

The tables below set forth the Company’s estimated funded status as of December 31, 2014 and 2013:

F-27

(In thousands)	2014			2013
Change in benefit obligation:
Benefit obligation at beginning of year	$	9,855		$	12,607
Service cost	64			98
Interest cost	111			122
Actuarial loss (gain)	336			(158		)
Benefits paid	(922		)	(1,072		)
Foreign exchange impact	(962		)	(1,742		)
Benefit obligation at end of year	8,482			9,855
Change in plan assets:
Fair value of plan assets at beginning of year	384			382
Return on plan assets	9			5
Employer contributions	9			9
Foreign exchange impact	(22		)	(12		)
Fair value of plan assets at end of year	380			384
Funded status:
Plan assets less than benefit obligation - Net amount recognized	$	(8,102	)	$	(9,471	)

Amounts recognized in the consolidated balance sheets consist of:

(In thousands)	2014			2013
Noncurrent liability	$	(8,102	)	$	(9,471	)
Accumulated other comprehensive loss, net of taxes	1,007			857

Amounts recognized in accumulated other comprehensive loss, net of tax consist of:

(In thousands)	2014			2013
Net actuarial loss	$	1,043		$	811
Prior service cost	227			259
Unrecognized transition obligation	(9		)	(11		)
Gross amount recognized	1,261			1,059
Deferred income taxes	(254		)	(202		)
Net amount recognized	$	1,007		$	857

Information for pension plans with an accumulated benefit obligation in excess of plan assets:

(In thousands)	2014		2013
Projected benefit obligation	$	8,482	$	9,855
Accumulated benefit obligation	7,180		8,651
Fair value of plan assets	380		384

The components of the net periodic benefit cost for the years ended December 31, 2014, 2013 and 2012 were as follows:

F-28

(In thousands)	2014			2013			2012
Pension benefits:
Service cost	$	64		$	98		$	89
Interest cost	111			122			163
Expected return on plan assets	(8		)	(7		)	(7		)
Amortization of prior service cost	18			19			19
Amortization of net transition obligation	(1		)	(1		)	(1		)
Amortization of plan loss	22			219			20
Recognized actuarial net loss	7			8			1
Acquisition	—			—			—
Curtailments	—			—			—
Net periodic pension benefit cost	$	213		$	458		$	284

The estimated amount that will be amortized from accumulated other comprehensive income into net periodic benefit cost in 2015 is as follows:

(In thousands)
Transition obligation	$	(1	)
Prior service cost	17
Net actuarial loss	44
	$	60

Assumptions used in determining the benefit obligation and net periodic benefit cost for the Company’s pension plans for the years ended December 31, 2014, 2013 and 2012 are presented in the following table as weighted-averages:

	2014		2013		2012
Benefit obligations:
Discount rate	1.13	%	1.23	%	1.19	%
Rate of compensation increase	4.41	%	4.10	%	4.18	%
Net periodic benefit cost:
Discount rate	1.83	%	1.41	%	1.80	%
Rate of compensation increase	3.38	%	2.01	%	2.84	%
Expected return on plan assets	1.35	%	0.70	%	1.14	%

The plans’ expected return on assets as shown above is based on management’s expectations of long-term average rates of return to be achieved by the underlying investment portfolios. In establishing this assumption, management considers historical and expected returns for the asset classes in which the plans are invested, as well as current economic and capital market conditions. The discount rate primarily used by the Company is based on market yields at the valuation date on government bonds as well as the estimated maturity of benefit payments.

Plan Assets

At December 31, 2014 and 2013, the Company’s pension plan assets are deposited in Bank of Taiwan in the form of money market funds, where the Bank of Taiwan is the assigned funding vehicle for the statutory retirement benefit.

The fair value measurements of the Company’s pension plan assets at December 31, 2014, by asset category are as follows:

(In thousands)			Quoted prices in active markets for identical assets		Significant observable inputs	Significant unobservable inputs
Asset category	Total		(Level 1)		(Level 2)	(Level 3)
Taiwan plan assets (a)	$	380	$	380	—	—
	$	380	$	380	—	—

F-29

(a) This category includes investments in the government of Taiwan’s pension fund. The government of Taiwan is responsible for the strategy and allocation of the investment contributions.

The fair value measurements of the Company’s pension plan assets at December 31, 2013, by asset category are as follows:

(In thousands)			Quoted prices in active markets for identical assets		Significant observable inputs	Significant unobservable inputs
Asset category	Total		(Level 1)		(Level 2)	(Level 3)
Taiwan plan assets (a)	$	384	$	384	—	—
	$	384	$	384	—	—

(a) This category includes investments in the government of Taiwan’s pension fund. The government of Taiwan is responsible for the strategy and allocation of the investment contributions.

Cash Flows

The Company expects to make the following contributions and benefit payments:

(In thousands)	Contributions		Payments
2015	$	9	$	195
2016	—		129
2017	—		239
2018	—		264
2019	—		216
Years 2019-2023	—		2,297

(13)    FAIR VALUE MEASUREMENTS

Generally accepted accounting principles establish a fair value hierarchy that prioritizes the inputs used to measure fair value. The three levels of the fair value hierarchy are as follows:

Level 1—Quoted prices in active markets accessible at the reporting date for identical assets and liabilities.

Level 2—Quoted prices for similar assets or liabilities in active markets. Quoted prices for identical or similar assets and liabilities in markets that are not considered active or financial instruments for which all significant inputs are observable, either directly or indirectly.

Level 3—Prices or valuations that require inputs that are significant to the valuation and are unobservable.

A financial instrument’s level within the fair value hierarchy is based on the lowest level of any input that is significant to the fair value measurement.

Financial Assets Measured at Fair Value on a Recurring Basis

The following table presents the Company’s financial assets and liabilities that are measured at fair value on a recurring basis at December 31, 2014 and 2013.

F-30

	December 31, 2014								December 31, 2013
(In thousands)	Level 1		Level 2		Level 3		Total		Level 1		Level 2		Level 3		Total
Assets:
Cash equivalents
Commercial paper	$	—	$	—	$	—	$	—	$	—	$	49,988	$	—	$	49,988
Money market fund deposits	—		—		—		—		118,090		—		—		118,090
Short-term investments
Common stock	4,601		—		—		4,601		—		—		—		—
Total assets measured and recorded at fair value	$	4,601	$	—	$	—	$	4,601	$	118,090	$	49,988	$	—	$	168,078
Liabilities:
Foreign exchange forward contracts	$	—	$	1,851	$	—	$	1,851	$	—	$	514	$	—	$	514
Contingent consideration	$	—	$	—	$	—	$	—	$	—	$	—	$	1,282	$	1,282
Total liabilities measured and recorded at fair value	$	—	$	1,851	$	—	$	1,851	$	—	$	514	$	1,282	$	1,796

The following table provides information about derivative positions held by the Company as of December 31, 2014 and 2013:

	December 31, 2014			December 31, 2013
(In thousands)	Gross amounts of recognized liabilities	Gross amounts offset in the consolidated balance sheet	Net amount of liabilities in the consolidated balance sheet	Gross amounts of recognized liabilities	Gross amounts offset in the consolidated balance sheet	Net amount of liabilities in the consolidated balance sheet
Foreign exchange forward contracts	$4,336	$2,485	$1,851	$620	$106	$514

Gains and losses associated with derivatives are recorded in other expense (income), net, in the consolidated statements of operations. Losses associated with derivative instruments not designated as hedging instruments for the years ended December 31, 2014 and 2013 were as follows:

(In thousands)	2014	2013
Losses on foreign currency forward contracts	$1,456	$5,726

Items Measured at Fair Value on a Nonrecurring Basis

In the fourth quarter of 2014, the Company recorded a gain of $0.3 million on the sale of an equity investment that was classified within other expense (income), net in the consolidated statements of operations. The carrying value of the investment at the time of the sale was $2.3 million. The Company received cash proceeds of $2.6 million resulting in the aforementioned gain.

In the fourth quarter of 2014, the Company recorded an other-than-temporary impairment of $1.9 million related to an available-for-sale common stock investment classified in short-term investments in the consolidated balance sheet. The fair value of the investment after impairment was $4.6 million at December 31, 2014 and is classified as a Level 1 investment in the fair value hierarchy. The fair value measurement of the common stock investment was based on a quoted market price in an active market. The Company determined that it was an other-than-temporary impairment due to the significant decline in fair value compared to the acquisition cost for an extended period of time and the financial condition of the issuer.

F-31

(14)    EARNINGS PER SHARE (EPS)

Basic EPS is computed by dividing net income attributable to Entegris, Inc. by the weighted average number of shares of common stock outstanding during each period. The following table presents a reconciliation of the share amounts used in the computation of basic and diluted earnings per share:

(In thousands)	2014	2013	2012
Basic earnings per share—Weighted common shares outstanding	139,311	138,950	137,306
Weighted common shares assumed upon exercise of options and vesting of restricted stock units	751	668	1,106
Diluted earnings per share—Weighted common shares outstanding	140,062	139,618	138,412

The Company excluded the following shares underlying stock-based awards from the calculations of diluted EPS because their inclusion would have been anti-dilutive for the years ended December 31, 2014, 2013 and 2012:

(In thousands)	2014	2013	2012
Shares excluded from calculations of diluted EPS	1,183	1,248	1,431

(15)    SEGMENT INFORMATION

In 2014 the Company changed its financial segment reporting to reflect management and organizational changes made by the Company. Under the new structure, the manager of two primary segments is accountable for results at the segment profit level and reports directly to the Company’s Chief Executive Officer, who is responsible for evaluating companywide performance and resource allocation decisions between the segments, and is the chief operating decision maker. Accordingly, the Company will report its financial performance based on two reportable segments: Critical Materials Handling (CMH) and Electronic Materials (EM). The Company's two reportable segments are business divisions that provide unique products and services.

• CMH: provides a broad range of products that filter, handle, dispense, and protect critical materials used in the semiconductor manufacturing process and in other high-technology manufacturing. CMH’s products and subsystems include high-purity materials packaging, fluid handling and dispensing systems and liquid filters as well as microenvironment products that protect critical substrates such as wafers during shipping and manufacturing. CMH also provides specialized graphite components and specialty coatings for high-temperature applications.

• EM: provides high performance materials, materials packaging and materials delivery systems that enable high yield, cost effective semiconductor manufacturing. EM’s products consist of specialized chemistries and performance materials, gas microcontamination control systems and components, and sub-atmospheric pressure gas delivery systems for the safe and efficient handling of hazardous gases to semiconductor process equipment.

Inter-segment sales are not significant. Segment profit is defined as net sales less direct segment operating expenses, excluding certain unallocated expenses, consisting mainly of general and administrative costs for the Company’s human resources, finance and information technology functions as well as interest expense, amortization of intangible assets, charges for the fair value write-up of acquired inventory sold, contingent consideration fair value adjustments, income taxes and equity in net income of affiliates.

Corporate assets consist primarily of cash and cash equivalents, short-term investments, assets held for sale, investments, deferred tax assets and deferred tax charges.

Summarized financial information for the Company’s reportable segments is shown in the following tables.

F-32

(In thousands)	2014		2013		2012
Net sales:
CMH	$	653,964	$	609,826	$	630,929
EM	308,105		83,633		84,974
Total net sales	$	962,069	$	693,459	$	715,903
(In thousands)	2014		2013		2012
Segment profit:
CMH	$	138,379	$	128,910	$	144,758
EM	90,121		20,034		21,051
Total segment profit	$	228,500	$	148,944	$	165,809
(In thousands)	2014		2013		2012
Total assets:
CMH	$	500,575	$	395,291	$	362,672
EM	804,889		46,831		41,348
Corporate	456,627		433,172		407,524
Total assets	$	1,762,091	$	875,294	$	811,544

(In thousands)	2014		2013		2012
Depreciation and amortization:
CMH	$	37,455	$	32,797	$	31,612
EM	41,671		4,238		4,358
Corporate	4,578		1,780		1,637
Total depreciation and amortization	$	83,704	$	38,815	$	37,607
(In thousands)	2014		2013		2012
Capital expenditures:
CMH	$	33,619	$	49,893	$	40,683
EM	19,450		6,842		5,579
Corporate	4,664		3,625		3,667
Total capital expenditures	$	57,733	$	60,360	$	49,929

The following table reconciles total segment profit to income before income taxes and equity in net loss (income) of affiliates:

(In thousands)	2014			2013			2012
Total segment profit	$	228,500		$	148,944		$	165,809
Less:
Charge for fair value write-up of acquired inventory sold	48,586			—			—
Amortization of intangibles	37,067			9,347			9,594
Contingent consideration fair value adjustment	(1,282		)	(1,813		)	—
Unallocated general and administrative expenses	122,775			47,173			56,771
Operating income	21,354			94,237			99,444
Interest expense	33,355			153			271
Interest income	(1,336		)	(317		)	(281		)
Other expense (income), net	2,727			(1,794		)	(249		)
(Loss) income before income tax (benefit) expense and equity in net loss (income) of affiliates	$	(13,392	)	$	96,195		$	99,703

The following table presents amortization of intangibles for each of the Company’s segments for the years ended December 31, 2014, 2013 and 2012:

F-33

(In thousands)	2014		2013		2012
Amortization of intangibles:
CMH	$	10,180	$	8,620	$	8,772
EM	26,887		727		822
	$	37,067	$	9,347	$	9,594

The following table summarizes total net sales, based upon the country to which sales to external customers were made for the years ended December 31, 2014, 2013 and 2012:

(In thousands)	2014		2013		2012
Net sales:
United States	$	239,040	$	201,380	$	218,903
Japan	121,452		101,529		131,521
Germany	27,867		23,240		24,437
Taiwan	230,824		128,194		126,732
Singapore	46,051		30,942		25,607
South Korea	122,328		76,353		70,763
China	66,186		36,299		31,499
Other	108,321		95,522		86,441
	$	962,069	$	693,459	$	715,903

The following table summarizes property, plant and equipment, net, attributed to significant countries for the years ended December 31, 2014, 2013 and 2012:

(In thousands)	2014		2013		2012
Property, plant and equipment:
United States	$	222,125	$	123,846	$	86,476
Korea	32,163		4,422		4,946
Japan	22,261		24,007		27,024
Malaysia	20,607		23,801		28,398
Other	16,413		10,364		10,177
	$	313,569	$	186,440	$	157,021

In the year ended December 31, 2014, one individual customer accounted for 13.6% of net sales, which includes sales from both of the Company's segments. In the years ended December 31, 2013 and 2012, no single customer accounted for ten percent or more of net sales.

(16)    COMMITMENTS AND CONTINGENT LIABILITIES

The Company is subject to various claims, legal actions, and complaints arising in the ordinary course of business. The Company believes the final outcome of these matters will not have a material adverse effect on its consolidated financial statements. The Company expenses legal costs as incurred.

(17)    QUARTERLY INFORMATION-UNAUDITED

	Fiscal quarter ended
(In thousands, except per share data)	March 29, 2014		June 28, 2014			September 27, 2014			December 31, 2014
Net sales	$	165,804	$	251,578		$	273,054		$	271,633
Gross profit	71,352		88,668			98,743			117,920
Net income	14,312		(14,669		)	(1,068		)	9,312
Basic income per share	0.10		(0.11		)	(0.01		)	0.07
Diluted income per share	0.10		(0.11		)	(0.01		)	0.07

F-34

	Fiscal quarter ended
(In thousands, except per share data)	March 30, 2013		June 29, 2013		September 28, 2013		December 31, 2013
Net sales	$	165,070	$	177,544	$	164,585	$	186,260
Gross profit	67,128		77,570		70,132		79,384
Net income	16,397		19,781		17,807		20,541
Basic income per share	0.12		0.14		0.13		0.15
Diluted income per share	0.12		0.14		0.13		0.15

F-35

EX-10.1

EXHIBIT 10.1

ENTEGRIS, INC.

2013 RSU Unit Award Agreement

In consideration of services rendered to Entegris, Inc. (the “Company”), the Company periodically makes equity incentive awards consisting of restricted stock units with respect to the Company’s Common Stock $0.01 par value (“Stock”) to certain key employees, non-employee directors, consultants or advisors of the Company under the Company’s 2010 Stock Plan or a predecessor plan (the “Plan”). Any key employee, non-employee director, consultant or advisor (a ”Participant”) who receives a restricted stock unit award (the “Award”) is notified either in writing or via email and the Award is credited to the Participant’s account as reflected on the Participant’s Account Summary page (“My Awards” section under the Restricted Stock Plan tab) for Entegris equity awards on the Morgan Stanley Smith Barney Benefit Access web page found at https://www.benefitaccess.com. By clicking on the “accept award” button on the My Awards tab on your Restricted Stock Plan page or by otherwise receiving the benefits of the Award, Participant: (i) acknowledges that Participant has received a copy of the Plan, of the related prospectus providing information concerning awards under the Plan and of the Company’s most recent Annual Report on Form 10-K; and (ii) accepts the Award and agrees with the Company that the Award is subject to the terms of the Plan and to the following terms and conditions:

Article I - RSU Award

1.1. Award Date. This Agreement shall take effect as of the date specified with respect to the Award in the Award Summary provided to you online at www.benefitaccess.com (the “Award Date”).

1.2. Restricted Stock Units Subject to Award. The Award consists of that number of restricted stock units (the “RSU”) with respect to the Stock that has been approved for the Award to Participant by the Plan Administrator. Each RSU is equivalent to one share of the Stock. The Participant’s rights to the RSU are subject to the restrictions described in this Agreement and in the Plan (which is incorporated herein by reference with the same effect as if set forth herein in full) in addition to such other restrictions, if any, as may be imposed by law.

1.3. Meaning of Certain Terms. The term "vest" as used herein with respect to any RSU means the lapsing of the restrictions described herein with respect to such RSU.

1.4. Nontransferability of RSUs. The RSU acquired by the Participant pursuant to this Agreement shall not be sold, transferred, pledged, assigned or otherwise encumbered or disposed of except as provided below and in the Plan.

1.5. Forfeiture Risk. If the Participant ceases to be employed or retained by the Company and/or its subsidiaries for any reason any then outstanding and unvested RSU acquired by the Participant hereunder shall be automatically and immediately forfeited. The Participant hereby appoints the Company as the attorney-in-fact of the Participant to take such actions as may be necessary or appropriate to effectuate the cancellation of a forfeited RSU.

1.6. Vesting of RSUs. The RSU acquired hereunder shall vest in accordance with the provisions of this Article I, Section 1.6 and applicable provisions of the Plan, as follows:

• 25% of the RSUs vest on and after February 19, 2014;

• an additional 25% of the RSUs vest on and after February 19, 2015;

• an additional 25% of the RSUs vest on and after February 19, 2016; and

• the final 25% of the RSUs vest on and after February 19, 2017.

Notwithstanding the foregoing, no RSU shall vest on any vesting date specified above unless: (A) the Participant is then, and since the Award Date has continuously been, employed or retained by the Company or its subsidiaries; and (B) the Participant has fulfilled the obligations specified in Section 1.9 below. Upon vesting each RSU shall entitle Participant to receive one share of Stock.

1.7. No Dividends, etc.. The Participant shall not be entitled: (i) to receive any dividends or other distributions paid with respect to the Stock to which the RSU relates, or (ii) to vote any Stock with respect to which the RSU relates.

1.8. Sale of Vested Shares. The Participant understands that Participant will be free to sell any Stock with respect to which the RSU relates once the RSU has vested, subject to (i) satisfaction of any applicable tax withholding requirements with respect to the vesting of such RSU; (ii) the completion of any administrative steps (for example, but without limitation, the transfer of certificates) that the Company may reasonably impose; and (iii) applicable requirements of federal and state securities laws.

1.9. Certain Tax Matters. The Participant expressly acknowledges that the award or vesting of the RSU acquired hereunder, may give rise to "wages" subject to withholding. The Participant expressly acknowledges and agrees that Participant’s rights hereunder are subject to Participant promptly paying to the Company in cash (or by such other means as may be acceptable to the Company in its discretion, including, if the Administrator so determines, by the delivery of previously acquired Stock or shares of Stock acquired hereunder in accordance with the Plan or by the withholding of amounts from any payment hereunder) all taxes required to be withheld in connection with such award, vesting or payment.

Article II - GENERAL PROVISIONS

2.1. Definitions. Except as otherwise expressly provided, all terms used herein shall have the same meaning as in the Plan. The term “Administrator” means the Management Development & Compensation Committee of the Company’s Board of Directors.

2.2. Mergers, etc. In the event of any of (i) a consolidation or merger in which the Company is not the surviving corporation or which results in the acquisition of all or substantially all of the Company's then outstanding common stock by a single person or entity or by a group of persons and/or entities acting in concert, (ii) a sale or transfer of all or substantially all the Company's assets, or (iii) a dissolution or liquidation of the Company (a “Covered Transaction”), all outstanding Awards pursuant to Article I above shall vest and if relevant become exercisable and all deferrals, other than deferrals of amounts that are neither measured by reference to nor payable in shares of Stock, shall be accelerated, immediately prior to the Covered Transaction and upon consummation of such Covered Transaction all Awards then outstanding and requiring exercise shall be forfeited unless assumed by an acquiring or surviving entity or its affiliate as provided in the following sentence. In the event of a Covered Transaction, unless otherwise determined by the Administrator, all Awards that are payable in shares of Stock and that have not been exercised, exchanged or converted, as applicable, shall be converted into and represent the right to receive the consideration to be paid in such Covered Transaction for each share of Stock into which such Award is exercisable, exchangeable or convertible, less the applicable exercise price or purchase price for such Award. In connection with any Covered Transaction in which there is an acquiring or surviving entity, the Administrator may provide for substitute or replacement Awards from, or the assumption of Awards by, the acquiring or surviving entity or its affiliates, any such substitution, replacement or assumption to be on such terms as the Administrator determines, provided that no such replacement or substitution shall diminish in any way the acceleration of Awards provided for in this section.

2.3. Retirement, etc. If Participant is an employee of the Company and ceases to be an employee due to retirement with the consent of the Administrator, Participant will be entitled to immediate Vesting of all unvested RSUs awarded pursuant to this Agreement. As used herein the term “retirement with the consent of the Administrator” means that Participant’s retirement must be with the consent of the Administrator, which consent may be granted or withheld in the discretion of the Administrator. In the event that Participant ceases to be an employee under circumstances that would otherwise qualify for retirement but the consent of the Administrator has not been granted, then Participant shall not be entitled to the benefits of this Section 2.3.

2.4. No Understandings as to Employment etc. The Participant further expressly acknowledges that nothing in the Planor any modification thereto, in the Award or in this Agreement shall constitute or be evidence of any understanding, express or implied, on the part of the Company to employ or retain the Participant for any period or with respect to the terms of the Participant’s employment or to give rise to any right to remain in the service of the Company or of any subsidiary or affiliate of the Company, and the Participant shall remain

subject to discharge to the same extent as if the Plan had never been adopted or the Award had never been made.

2.5. Data Protection Waiver. Participant understands and agrees that in order to process and administer the Award and the Plan, the Company and the Administrator may process personal data and/or sensitive personal information concerning the Participant. Such data and information includes, but is not limited to, the information provided in the Award grant package and any changes thereto, other appropriate personal and financial data about Participant, and information about Participant’s participation in the Plan and transactions under the Plan from time to time. Participant hereby gives his or her explicit consent to the Company and the Administrator to process any such personal data and/or sensitive personal information. Participant also hereby gives his or her explicit consent to the Company and the Administrator to transfer any such personal data and/or sensitive personal data outside the country, in which Participant works or is employed, and to the United States. The legal persons granted access to such Participant personal data are intended to include the Company, the Administrator, the outside plan administrator as selected by the Company from time to time, and any other compensation consultant or person that the Company or the Administrator may deem appropriate for the administration of the Plan or the Award. Participant has been informed of his or her right of access and correction to Participant’s personal data by contacting the Company. Participant also understands that the transfer of the information outlined herein is important to the administration of the Award and the Plan and failure to consent to the transmission of such information may limit or prohibit Participant’s participation under the Plan and/or void the Award.

2.6. Savings Clause. In the event that Participant is employed or provides services in a jurisdiction where the performance of any term or provision of this Agreement by the Company: (i) will result in a breach or violation of any statute, law, ordinance, regulation, rule, judgment, decree, order or statement of public policy of any court or governmental agency, board, bureau, body, department or authority, or (ii) will result in the creation or imposition of any penalty, charge, restriction, or material adverse effect upon the Company, then any such term or provision shall be null, void and of no effect.

2.7. Amendment. This Agreement may be amended only by an instrument in writing executed and delivered by the Participant and the Company.

EX-10.2

EXHIBIT 10.2

ENTEGRIS, INC.

2013 Stock Option Grant Agreement

In consideration of services rendered to Entegris, Inc. (the “Company”), the Company periodically makes equity incentive grants consisting of stock options with respect to the Company’s Common Stock $0.01 par value (“Stock”) to certain key employees, non-employee directors, consultants or advisors of the Company under the Company’s 2010 Stock Plan or a predecessor plan (the “Plan”). Any key employee, non-employee director, consultant or advisor (a “Participant”) who receives a stock option grant (the “Grant”) is notified in writing or via email and the Grant is credited to the Participant’s account as reflected on the Participant’s Accounts Summary page (“My Grants” section under the Stock Options Plan tab) for Entegris equity awards on the Morgan Stanley Smith Barney Benefit Access web page found at https://www.benefitaccess.com. By clicking on the “accept grant” button on the My Grants tab on your Stock Option Plan page or by otherwise receiving the benefits of the Grant, Participant: (i) acknowledges that Participant has received a copy of the Plan, of the related prospectus providing information concerning awards under the Plan and of the Company’s most recent Annual Report on Form 10-K; and (ii) accepts the Award and agrees with the Company that the Award is subject to the terms of the Plan and to the following terms and conditions:

Article I -Stock Option Grant

1.1. Option Grant. Effective as of the date specified in the Grant Summary provided to you online (the “Grant Date”), the Company hereby grants Participant a non-qualified option to purchase that number of shares of Stock that has been approved for the Grant to the Participant by the Plan Administrator (“Option”). The shares of Stock granted are specified in the individual Award Summary provided to Participant online at www.benefitaccess.com. The Option is not intended to be an incentive stock option under Section 422 of the Internal Revenue Code of 1986, as amended (the “Code”) and will be interpreted accordingly.

1.2. Option Exercise Price. The exercise (grant) price of the Option shall be 100% of the closing price of the Stock on the NASDAQ stock market on the Grant Date. The exercise price is provided to Participant online at www.benefitaccess.com.

1.3. Option Vesting Schedule. This Option shall vest and become exercisable, except as hereinafter provided, in whole or in part, at any time and from time to time as follows:

• 1/4 on and after February 19, 2014;

• an additional 1/4 on and after February 19, 2015;

• an additional 1/4 on and after February 19, 2016;

• the final 1/4 on and after February 19, 2017.

In the event that any of the above vesting dates falls on a day that the Company is not open for business, then vesting of the applicable portion shall occur on the next succeeding day that the Company is open for business.

1.4. Expiration of Option. To the extent that the Option shall not have been exercised, this Option shall expire at 5:00 p.m. local time at the Company’s headquarters on February 19, 2020 and no part of the Option may be exercised thereafter. If an expiration, termination or forfeiture date described herein falls on a weekday, Participant must exercise the Option before 5:00 p.m. local time at the Company’s headquarters on that date. If an expiration, termination or forfeiture date described herein falls on a weekend or any other day on which the NASDAQ stock market is not open, Participant must exercise the Options before 5:00 p.m. local time at the Company’s headquarters on the last NASDAQ business day prior to the expiration, termination or forfeiture date.

1.5. Exercise of Option. When and as vested, this Option may be exercised up to the number of shares of Stock specified in Section 1.1 above only by serving written notice on the designated stock plan administrator. Payment of the Option exercise price specified in Section 1.2 above may be made by: (a) payment in cash;

(b) arrangement with the Company’s stock plan administrator which is acceptable to the Company where payment of the Option exercise price is made pursuant to an irrevocable direction to the broker to deliver all or part of the proceeds from the sale of the shares of the Stock issueable under the Option to the Company; (c) exchange of previously ownedsharesof Stock, valued at fair market value on the day of exercise as provided in the Plan;(d) delivery of any other lawful consideration approved in advance by the Administrator specified in the Plan or its delegate, or (e) any combination of the foregoing. Fractional shares may not be exercised. Participant will have the rights of a stockholder only after the shares of Stock have been issued to the Participant in accordance with this Agreement.

1.6. No Assignment of Option. This Option may not be assigned or transferred except as may otherwise be provided by the terms of this Agreement.

1.7. BasicAdjustments for Changes in Capital Structure. The Administrator shall make adjustments from time to time in the number of shares of Stock covered by the Option in such reasonable manner as the Administrator may determine to reflect any increase or decrease in the number of issued shares of Stock of the Company resulting from a subdivision or consolidation of shares or any other capital adjustment, the payment of stock dividends or other increases or decreases in such Stock effected without receipt of consideration by the Company.

1.8. Termination of Employment or Service with the Company. All exercisable Options granted herein must be exercised within ninety (90) days following the date on which the employment or services of Participant with the Company or one of its subsidiaries terminates (i.e., last day worked, excluding any severance period) (“Termination Date”), or be forfeited, except as provided in Section 2.3 below and as follows:

(a) In the event of Participant’s death during employment/services, each Option granted hereunder will be exercisable, whether or not vested on the date of Participant’s death, until the earlier of: (1) the first anniversary of Participant’s date of death; or (2) the original expiration date of the option. In the event of Participant’s death during a Special Exercise Period as specified in Section 2.3 below, each Option will continue to be exercisable in accordance with the provisions of that Section.

(b) In the event of the termination of employment/services of Participant due to Disablement, Participant may exercise the Option, to the extent not previously exercised and whether or not the option had vested on or prior to the date of employment or service termination, at any time prior to 365 days following the later of the date of Participant’s separation from service due to Participant’s Disablement or the date of determination of Participant’s Disablement, provided, however, that while the claim of Disablement is pending, Options that were unvested at termination of services may not be exercised and Options that were vested at termination of services may be exercised only during the period set forth in the introductory clause to this Section 1.8. The Option shall terminate on the 365th day from the date of determination of Disablement, to the extent that it is unexercised. For these purposes “Disablement” shall be determined in accordance with the standards and procedures of the then-current Long Term Disability policies maintained by the Company, which is generally a physical condition arising from an illness or injury, which renders an individual incapable of performing work in any occupation, as determined by the Company.

(c) If Participant’s employment/services is terminated for “Cause”, all granted but unexercised stock Options shall be forfeited on Participant’s Termination Date.

1.9. Suspension of Option Exercises. For administrative or other reasons, the Company may, from time to time, suspend the ability of Participants to exercise options for limited periods of time. Notwithstanding the above, the Company shall not be obligated to deliver any shares of Stock during any period when the Company determines that the exerciseability of the Option or the delivery of shares hereunder would violate any federal, state or other applicable laws.

1.10. Withholding of Income Taxes. Nonqualified stock options are taxable upon exercise. To the extent required by applicable federal, state or other law, Participant shall make arrangements satisfactory to the Company for the satisfaction of any withholding tax obligations that arise by reason of an Option exercise and, if applicable,

any sale of shares of the Stock. The Company shall not be required to issue shares of the Stock or to recognize any purported transfer of shares of the Stock until such obligations are satisfied. The Administrator designated in the Plan may permit these obligations to be satisfied by having the Company withhold a portion of the shares of the Stock that otherwise would be issued to Participant upon exercise of the Option, or to the extent permitted by the Administrator, by tendering shares of the Stock previously acquired.

Article II - GENERAL PROVISIONS

2.1. Definitions. Except as otherwise expressly provided, all terms used herein shall have the same meaning as in the Plan. The term “Administrator” means the Management Development & Compensation Committee of the Company’s Board of Directors.

2.2. Mergers, etc. In the event of any of (i) a consolidation or merger in which the Company is not the surviving corporation or which results in the acquisition of all or substantially all of the Company's then outstanding common stock by a single person or entity or by a group of persons and/or entities acting in concert, (ii) a sale or transfer of all or substantially all the Company's assets, or (iii) a dissolution or liquidation of the Company (a “Covered Transaction”), the vesting of all Options under each outstanding Award pursuant to Article I above will be accelerated and such shares will become fully exercisable prior to the Covered Transaction on a basis that gives the Participant a reasonable opportunity, as determined by the Administrator, following delivery of the shares, to participate as a stockholder in the Covered Transaction. In connection with any Covered Transaction in which there is an acquiring or surviving entity, the Administrator may provide for substitute or replacement Awards from, or the assumption of Awards by, the acquiring or surviving entity or its affiliates, any such substitution, replacement or assumption to be on such terms as the Administrator determines, provided that no such replacement or substitution shall diminish in any way the acceleration of Options provided for in this section.

2.3. Retirement, etc. If Participant is an employee of the Company and ceases to be an employee due to retirement with the consent of the Administrator, Participant will be entitled to a special exercise period with respect to the Option (the “Special Exercise Period”) which will begin on Participant’s Retirement Date and will end on the earlier of the 4^th anniversary of Participant’s Retirement Date or the expiration date specified in Section 1.4 above. During the Special Exercise Period, the Option will continue to vest in accordance with the schedule specified in Section 1.3 above and will be exercisable to the same extent that it would have been exercisable had Participant remained in service with the Company or one of its subsidiaries. As used herein the term “retirement with the consent of the Administrator” means that Participant’s retirement must be with the consent of the Administrator, which consent may be granted or withheld in the discretion of the Administrator. In the event that Participant ceases to be an employee under circumstances that would otherwise qualify for retirement but the consent of the Administrator has not been granted, then Participant shall not be entitled to the benefits of this Section 2.3.

2.4. No Understandings as to Employment, etc. The Participant further expressly acknowledges that nothing in the Planor any modification thereto, in the Award or in this Agreement shall constitute or be evidence of any understanding, express or implied, on the part of the Company to continue the employment or services of the Participant for any period or to give rise to any right to remain in the service of the Company or of any subsidiary or affiliate of the Company, and the Participant shall remain subject to discharge to the same extent as if the Plan had never been adopted or the Award had never been made.

2.5. Acts of Misconduct. If Participant has allegedly committed an act of serious misconduct, including, but not limited to, embezzlement, fraud, dishonesty, unauthorized disclosure of trade secrets or confidential information, breach of fiduciary duty or nonpayment of an obligation owed to the Company, an Executive Officer of the Company may suspend Participant’s rights under the Award, including the vesting of Options and the exercise of vested Options, pending a decision by the Administrator or an Executive Officer of the Company to terminate the Award. No rights under the Award may be exercised during such suspension or after such termination.

2.6. Data Protection Waiver. Participant understands and agrees that in order to process and administer the Award and the Plan, the Company and the Administrator may process personal data and/or sensitive personal

information concerning the Participant. Such data and information includes, but is not limited to, the information provided in the Award grant package and any changes thereto, other appropriate personal and financial data about Participant, and information about Participant’s participation in the Plan and transactions under the Plan from time to time. Participant hereby gives his or her explicit consent to the Company and the Administrator to process any such personal data and/or sensitive personal information. Participant also hereby gives his or her explicit consent to the Company and the Administrator to transfer any such personal data and/or sensitive personal data outside the country, in which Participant works, is employed, or provides services, and to the United States. The legal persons granted access to such Participant personal data are intended to include the Company, the Administrator, the outside plan administrator as selected by the Company from time to time, and any other compensation consultant or person that the Company or the Administrator may deem appropriate for the administration of the Plan or the Award. Participant has been informed of his or her right of access and correction to Participant’s personal data by contacting the Company. Participant also understands that the transfer of the information outlined herein is important to the administration of the Award and the Plan and failure to consent to the transmission of such information may limit or prohibit Participant’s participation under the Plan and/or void the Award.

2.7. Disputes. The Administrator designated in the Plan or its delegate shall finally and conclusively determine any disagreement concerning the Award.

2.8. Savings Clause. In the event that Participant is employed or provides services, in a jurisdiction where the performance of any term or provision of this Agreement by the Company: (i) will result in a breach or violation of any statute, law, ordinance, regulation, rule, judgment, decree, order or statement of public policy of any court or governmental agency, board, bureau, body, department or authority, or (ii) will result in the creation or imposition of any penalty, charge, restriction, or material adverse effect upon the Company, then any such term or provision shall be null, void and of no effect.

2.9. Amendment. This Agreement may be amended only by an instrument in writing executed and delivered by the Participant and the Company.

EX-10.3

EXHIBIT 10.3

ENTEGRIS, INC.

2014 RSU Award Agreement

In consideration of services rendered to Entegris, Inc. (the “Company”), the Company periodically makes equity incentive awards consisting of restricted stock units with respect to the Company’s Common Stock $0.01 par value (“Stock”) to certain key employees, non-employee directors, consultants or advisors of the Company under the Company’s 2010 Stock Plan or a predecessor plan (the “Plan”). Any key employee, non-employee director, consultant or advisor (a ”Participant”) who receives a restricted stock unit award (the “Award”) is notified either in writing or via email and the Award is credited to the Participant’s account as reflected on the Participant’s Account Summary page (“My Awards” section under the Restricted Stock Plan tab) for Entegris equity awards on the Morgan Stanley Benefit Access web page found at https://www.benefitaccess.com. By clicking on the “accept award” button on the My Awards tab on the Restricted Stock Plan page or by otherwise receiving the benefits of the Award, Participant: (i) acknowledges that Participant has received a copy of the Plan, of the related prospectus providing information concerning awards under the Plan and of the Company’s most recent Annual Report on Form 10-K; and (ii) accepts the Award and agrees with the Company that the Award is subject to the terms of the Plan and to the following terms and conditions:

Article I - RSU Award

1.1. Award Date. This Agreement shall take effect as of the date specified with respect to the Award in the Award Summary provided to you online at www.benefitaccess.com (the “Award Date”).

1.2. Restricted Stock Units Subject to Award. The Award consists of that number of restricted stock units (the “RSU”) with respect to the Stock that has been approved for the Award to Participant by the Plan Administrator. Each RSU is equivalent to one share of the Stock. The Participant’s rights to the RSU are subject to the restrictions described in this Agreement and in the Plan (which is incorporated herein by reference with the same effect as if set forth herein in full) in addition to such other restrictions, if any, as may be imposed by law.

1.3. Meaning of Certain Terms. The term "vest" as used herein with respect to any RSU means the lapsing of the restrictions described herein with respect to such RSU.

1.4. Nontransferability of RSUs. The RSU acquired by the Participant pursuant to this Agreement shall not be sold, transferred, pledged, assigned or otherwise encumbered or disposed of except as provided below and in the Plan.

1.5. Forfeiture Risk. If the Participant ceases to be employed or retained by the Company and/or its subsidiaries for any reason any then outstanding and unvested RSU acquired by the Participant hereunder shall be automatically and immediately forfeited. The Participant hereby appoints the Company as the attorney-in-fact of the Participant to take such actions as may be necessary or appropriate to effectuate the cancellation of a forfeited RSU.

1.6. Vesting of RSUs. The RSU acquired hereunder shall vest in accordance with the provisions of this Article I, Section 1.6 and applicable provisions of the Plan, as follows:

• 25% of the RSUs vest on and after February 19, 2015;

• an additional 25% of the RSUs vest on and after February 19, 2016;

• an additional 25% of the RSUs vest on and after February 19, 2017; and

• the final 25% of the RSUs vest on and after February 19, 2018.

Notwithstanding the foregoing, no RSU shall vest on any vesting date specified above unless: (A) the Participant is then, and since the Award Date has continuously been, employed or retained by the Company or its subsidiaries; and (B) the Participant has fulfilled the obligations specified in Section 1.9 below. Upon vesting each RSU shall entitle Participant to receive one share of Stock.

1.7. No Dividends, etc.. The Participant shall not be entitled: (i) to receive any dividends or other distributions paid with respect to the Stock to which the RSU relates, or (ii) to vote any Stock with respect to which the RSU relates.

1.8. Sale of Vested Shares. The Participant understands that Participant will be free to sell any Stock with respect to which the RSU relates once the RSU has vested, subject to (i) satisfaction of any applicable tax withholding requirements with respect to the vesting of such RSU; (ii) the completion of any administrative steps (for example, but without limitation, the transfer of certificates) that the Company may reasonably impose; and (iii) applicable requirements of federal and state securities laws.

1.9. Certain Tax Matters. The Participant expressly acknowledges that the award or vesting of the RSU acquired hereunder, may give rise to "wages" subject to withholding. The Participant expressly acknowledges and agrees that Participant’s rights hereunder are subject to Participant promptly paying to the Company all taxes required to be withheld in connection with such award, vesting or payment. Until the Administrator determines otherwise, such payment of Participant’s withholding tax obligations shall be made through net share settlement procedures whereby that number of the vesting shares needed to cover the withholding tax obligation (calculated using the Fair Market Value of the Company’s stock on the date of vest) shall be cancelled to fund the Company’s payment of the withholding tax obligation and the net shares remaining after such cancellation shall be credited to Participant’s account.

Article II - GENERAL PROVISIONS

2.1. Definitions. Except as otherwise expressly provided, all terms used herein shall have the same meaning as in the Plan. The term “Administrator” means the Management Development & Compensation Committee of the Company’s Board of Directors.

2.2. Mergers, etc. In the event of any of (i) a consolidation or merger in which the Company is not the surviving corporation or which results in the acquisition of all or substantially all of the Company's then outstanding common stock by a single person or entity or by a group of persons and/or entities acting in concert, (ii) a sale or transfer of all or substantially all the Company's assets, or (iii) a dissolution or liquidation of the Company (a “Covered Transaction”), all outstanding Awards pursuant to Article I above shall vest and if relevant become exercisable and all deferrals, other than deferrals of amounts that are neither measured by reference to nor payable in shares of Stock, shall be accelerated, immediately prior to the Covered Transaction and upon consummation of such Covered Transaction all Awards then outstanding and requiring exercise shall be forfeited unless assumed by an acquiring or surviving entity or its affiliate as provided in the following sentence. In the event of a Covered Transaction, unless otherwise determined by the Administrator, all Awards that are payable in shares of Stock and that have not been exercised, exchanged or converted, as applicable, shall be converted into and represent the right to receive the consideration to be paid in such Covered Transaction for each share of Stock into which such Award is exercisable, exchangeable or convertible, less the applicable exercise price or purchase price for such Award. In connection with any Covered Transaction in which there is an acquiring or surviving entity, the Administrator may provide for substitute or replacement Awards from, or the assumption of Awards by, the acquiring or surviving entity or its affiliates, any such substitution, replacement or assumption to be on such terms as the Administrator determines, provided that no such replacement or substitution shall diminish in any way the acceleration of Awards provided for in this section.

2.3. Retirement, etc. If Participant is an employee of the Company and ceases to be an employee due to retirement with the consent of the Administrator, Participant will be entitled to immediate Vesting of all unvested RSUs awarded pursuant to this Agreement. As used herein the term “retirement with the consent of the Administrator” means that Participant’s retirement must be with the consent of the Administrator, which consent may be granted or withheld in the discretion of the Administrator. In the event that Participant ceases to be an employee under circumstances that would otherwise qualify for retirement but the consent of the Administrator has not been granted, then Participant shall not be entitled to the benefits of this Section 2.3.

2.4. No Understandings as to Employment etc. The Participant further expressly acknowledges that nothing in the Planor any modification thereto, in the Award or in this Agreement shall constitute or be evidence of any understanding, express or implied, on the part of the Company to employ or retain the Participant for any period or with respect to the terms of the Participant’s employment or to give rise to any right to remain in the service of the Company or of any subsidiary or affiliate of the Company, and the Participant shall remain subject to discharge to the same extent as if the Plan had never been adopted or the Award had never been made.

2.5. Data Protection Waiver. Participant understands and agrees that in order to process and administer the Award and the Plan, the Company and the Administrator may process personal data and/or sensitive personal information concerning the Participant. Such data and information includes, but is not limited to, the information provided in the Award grant package and any changes thereto, other appropriate personal and financial data about Participant, and information about Participant’s participation in the Plan and transactions under the Plan from time to time. Participant hereby gives his or her explicit consent to the Company and the Administrator to process any such personal data and/or sensitive personal information. Participant also hereby gives his or her explicit consent to the Company and the Administrator to transfer any such personal data and/or sensitive personal data outside the country, in which Participant works or is employed, and to the United States. The legal persons granted access to such Participant personal data are intended to include the Company, the Administrator, the outside plan administrator as selected by the Company from time to time, and any other compensation consultant or person that the Company or the Administrator may deem appropriate for the administration of the Plan or the Award. Participant has been informed of his or her right of access and correction to Participant’s personal data by contacting the Company. Participant also understands that the transfer of the information outlined herein is important to the administration of the Award and the Plan and failure to consent to the transmission of such information may limit or prohibit Participant’s participation under the Plan and/or void the Award.

2.6. Savings Clause. In the event that Participant is employed or provides services in a jurisdiction where the performance of any term or provision of this Agreement by the Company: (i) will result in a breach or violation of any statute, law, ordinance, regulation, rule, judgment, decree, order or statement of public policy of any court or governmental agency, board, bureau, body, department or authority, or (ii) will result in the creation or imposition of any penalty, charge, restriction, or material adverse effect upon the Company, then any such term or provision shall be null, void and of no effect.

2.7. Amendment. This Agreement may be amended only by an instrument in writing executed and delivered by the Participant and the Company.

EX-10.4

EXHIBIT 10.4

ENTEGRIS, INC.

2014 Stock Option Award Agreement

In consideration of services rendered to Entegris, Inc. (the “Company”), the Company periodically makes equity incentive awards consisting of stock options with respect to the Company’s Common Stock $0.01 par value (“Stock”) to certain key employees, non-employee directors, consultants or advisors of the Company under the Company’s 2010 Stock Plan or a predecessor plan (the “Plan”). Any key employee, non-employee director, consultant or advisor (a “Participant”) who receives a stock option award (the “Award”) is notified in writing or via email and the Award is credited to the Participant’s account as reflected on the Participant’s Accounts Summary page (“My Grants” section under the Stock Options Plan tab) for Entegris equity awards on the Morgan Stanley Benefit Access web page found at https://www.benefitaccess.com. By clicking on the “accept award” button on the Participant’s Award Summary page or by otherwise receiving the benefits of the Award, Participant: (i) acknowledges that Participant has received a copy of the Plan, of the related prospectus providing information concerning awards under the Plan and of the Company’s most recent Annual Report on Form 10-K; and (ii) accepts the Award and agrees with the Company that the Award is subject to the terms of the Plan and to the following terms and conditions:

Article I -Stock Option Grant

1.1. Option Grant. Effective as of the date specified in the Accounts Summary provided to you online (the “Grant Date”), the Company hereby grants Participant a non-qualified option to purchase that number of shares of Stock that has been approved for the Award to the Participant by the Plan Administrator (“Option”). The shares of Stock awarded are specified in the individual Award Summary provided to Participant online at www.benefitaccess.com. The Option is not intended to be an incentive stock option under Section 422 of the Internal Revenue Code of 1986, as amended (the “Code”) and will be interpreted accordingly.

1.2. Option Exercise Price. The exercise (grant) price of the Option shall be 100% of the closing price of the Stock on the NASDAQ stock market on the Grant Date. The exercise price is provided to Participant online at www.benefitaccess.com.

1.3. Option Vesting Schedule. This Option shall vest and become exercisable, except as hereinafter provided, in whole or in part, at any time and from time to time as follows:

• 1/4 on and after February 19, 2015;

• an additional 1/4 on and after February 19, 2016;

• an additional 1/4 on and after February 19, 2017;

• the final 1/4 on and after February 19, 2018.

In the event that any of the above vesting dates falls on a day that the Company is not open for business, then vesting of the applicable portion shall occur on the next succeeding day that the Company is open for business.

1.4. Expiration of Option. To the extent that the Option shall not have been exercised, this Option shall expire at 5:00 p.m. local time at the Company’s headquarters on February 19, 2021 and no part of the Option may be exercised thereafter. If an expiration, termination or forfeiture date described herein falls on a weekday, Participant must exercise the Option before 5:00 p.m. local time at the Company’s headquarters on that date. If an expiration, termination or forfeiture date described herein falls on a weekend or any other day on which the NASDAQ stock market is not open, Participant must exercise the Options before 5:00 p.m. local time at the Company’s headquarters on the last NASDAQ business day prior to the expiration, termination or forfeiture date.

1.5. Exercise of Option. When and as vested, this Option may be exercised up to the number of shares of Stock specified in Section 1.1 above only by serving written notice on the designated stock plan administrator. Until the Administrator determines otherwise, payment of the Option exercise price specified in Section 1.2 above shall be made through net share settlement procedures whereby that number of the Option shares being exercised

that are needed to cover the payment of the Option exercise price (calculated using the Fair Market Value of the Company’s stock on the date of exercise) shall be cancelled to fund the payment of the Option Exercise price and the net shares remaining after such cancellation shall be credited to Participant’s account. Participant will have the rights of a stockholder only after the shares of Stock have been issued to the Participant in accordance with this Agreement.

1.6. No Assignment of Option. This Option may not be assigned or transferred except as may otherwise be provided by the terms of this Agreement.

1.7. BasicAdjustments for Changes in Capital Structure. The Administrator shall make adjustments from time to time in the number of shares of Stock covered by the Option in such reasonable manner as the Administrator may determine to reflect any increase or decrease in the number of issued shares of Stock of the Company resulting from a subdivision or consolidation of shares or any other capital adjustment, the payment of stock dividends or other increases or decreases in such Stock effected without receipt of consideration by the Company.

1.8. Termination of Employment or Service with the Company. All exercisable Options granted herein must be exercised within ninety (90) days following the date on which the employment or services of Participant with the Company or one of its subsidiaries terminates (i.e., last day worked, excluding any severance period) (“Termination Date”), or be forfeited, except as provided in Section 2.3 below and as follows:

(a) In the event of Participant’s death during employment/services, each Option granted hereunder will be exercisable, whether or not vested on the date of Participant’s death, until the earlier of: (1) the first anniversary of Participant’s date of death; or (2) the original expiration date of the option. In the event of Participant’s death during a Special Exercise Period as specified in Section 2.3 below, each Option will continue to be exercisable in accordance with the provisions of that Section.

(b) In the event of the termination of employment/services of Participant due to Disablement, Participant may exercise the Option, to the extent not previously exercised and whether or not the option had vested on or prior to the date of employment or service termination, at any time prior to 365 days following the later of the date of Participant’s separation from service due to Participant’s Disablement or the date of determination of Participant’s Disablement, provided, however, that while the claim of Disablement is pending, Options that were unvested at termination of services may not be exercised and Options that were vested at termination of services may be exercised only during the period set forth in the introductory clause to this Section 1.8. The Option shall terminate on the 365th day from the date of determination of Disablement, to the extent that it is unexercised. For these purposes “Disablement” shall be determined in accordance with the standards and procedures of the then-current Long Term Disability policies maintained by the Company, which is generally a physical condition arising from an illness or injury, which renders an individual incapable of performing work in any occupation, as determined by the Company.

(c) If Participant’s employment/services is terminated for “Cause”, all granted but unexercised stock Options shall be forfeited on Participant’s Termination Date.

1.9. Suspension of Option Exercises. For administrative or other reasons, the Company may, from time to time, suspend the ability of Participants to exercise options for limited periods of time. Notwithstanding the above, the Company shall not be obligated to deliver any shares of Stock during any period when the Company determines that the exerciseability of the Option or the delivery of shares hereunder would violate any federal, state or other applicable laws.

1.10. Withholding of Income Taxes. Nonqualified stock options are subject to withholding tax upon exercise. Until the Administrator determines otherwise, such payment of Participant’s withholding tax obligations shall be made through net share settlement procedures whereby that number of the Option shares being exercised needed to cover the withholding tax obligation (calculated using the Fair Market Value of the Company’s stock

on the date of exercise) shall be cancelled to fund the Company’s payment of the withholding tax obligation and the net shares remaining after such cancellation shall be credited to Participant’s account.

Article II - GENERAL PROVISIONS

2.1. Definitions. Except as otherwise expressly provided, all terms used herein shall have the same meaning as in the Plan. The term “Administrator” means the Management Development & Compensation Committee of the Company’s Board of Directors.

2.2. Mergers, etc. In the event of any of (i) a consolidation or merger in which the Company is not the surviving corporation or which results in the acquisition of all or substantially all of the Company's then outstanding common stock by a single person or entity or by a group of persons and/or entities acting in concert, (ii) a sale or transfer of all or substantially all the Company's assets, or (iii) a dissolution or liquidation of the Company (a “Covered Transaction”), the vesting of all Options under each outstanding Award pursuant to Article I above will be accelerated and such shares will become fully exercisable prior to the Covered Transaction on a basis that gives the Participant a reasonable opportunity, as determined by the Administrator, following delivery of the shares, to participate as a stockholder in the Covered Transaction. In connection with any Covered Transaction in which there is an acquiring or surviving entity, the Administrator may provide for substitute or replacement Awards from, or the assumption of Awards by, the acquiring or surviving entity or its affiliates, any such substitution, replacement or assumption to be on such terms as the Administrator determines, provided that no such replacement or substitution shall diminish in any way the acceleration of Options provided for in this section.

2.3. Retirement, etc. If Participant is an employee of the Company and ceases to be an employee due to retirement with the consent of the Administrator, Participant will be entitled to a special exercise period with respect to the Option (the “Special Exercise Period”) which will begin on Participant’s Retirement Date and will end on the earlier of the 4^th anniversary of Participant’s Retirement Date or the expiration date specified in Section 1.4 above. During the Special Exercise Period, the Option will continue to vest in accordance with the schedule specified in Section 1.3 above and will be exercisable to the same extent that it would have been exercisable had Participant remained in service with the Company or one of its subsidiaries. As used herein the term “retirement with the consent of the Administrator” means that Participant’s retirement must be with the consent of the Administrator, which consent may be granted or withheld in the discretion of the Administrator. In the event that Participant ceases to be an employee under circumstances that would otherwise qualify for retirement but the consent of the Administrator has not been granted, then Participant shall not be entitled to the benefits of this Section 2.3.

2.4. No Understandings as to Employment, etc. The Participant further expressly acknowledges that nothing in the Planor any modification thereto, in the Award or in this Agreement shall constitute or be evidence of any understanding, express or implied, on the part of the Company to continue the employment or services of the Participant for any period or to give rise to any right to remain in the service of the Company or of any subsidiary or affiliate of the Company, and the Participant shall remain subject to discharge to the same extent as if the Plan had never been adopted or the Award had never been made.

2.5. Acts of Misconduct. If Participant has allegedly committed an act of serious misconduct, including, but not limited to, embezzlement, fraud, dishonesty, unauthorized disclosure of trade secrets or confidential information, breach of fiduciary duty or nonpayment of an obligation owed to the Company, an Executive Officer of the Company may suspend Participant’s rights under the Award, including the vesting of Options and the exercise of vested Options, pending a decision by the Administrator or an Executive Officer of the Company to terminate the Award. No rights under the Award may be exercised during such suspension or after such termination.

2.6. Data Protection Waiver. Participant understands and agrees that in order to process and administer the Award and the Plan, the Company and the Administrator may process personal data and/or sensitive personal information concerning the Participant. Such data and information includes, but is not limited to, the information provided in the Award grant package and any changes thereto, other appropriate personal and

financial data about Participant, and information about Participant’s participation in the Plan and transactions under the Plan from time to time. Participant hereby gives his or her explicit consent to the Company and the Administrator to process any such personal data and/or sensitive personal information. Participant also hereby gives his or her explicit consent to the Company and the Administrator to transfer any such personal data and/or sensitive personal data outside the country, in which Participant works, is employed, or provides services, and to the United States. The legal persons granted access to such Participant personal data are intended to include the Company, the Administrator, the outside plan administrator as selected by the Company from time to time, and any other compensation consultant or person that the Company or the Administrator may deem appropriate for the administration of the Plan or the Award. Participant has been informed of his or her right of access and correction to Participant’s personal data by contacting the Company. Participant also understands that the transfer of the information outlined herein is important to the administration of the Award and the Plan and failure to consent to the transmission of such information may limit or prohibit Participant’s participation under the Plan and/or void the Award.

2.7. Disputes. The Administrator designated in the Plan or its delegate shall finally and conclusively determine any disagreement concerning the Award.

2.8. Savings Clause. In the event that Participant is employed or provides services, in a jurisdiction where the performance of any term or provision of this Agreement by the Company: (i) will result in a breach or violation of any statute, law, ordinance, regulation, rule, judgment, decree, order or statement of public policy of any court or governmental agency, board, bureau, body, department or authority, or (ii) will result in the creation or imposition of any penalty, charge, restriction, or material adverse effect upon the Company, then any such term or provision shall be null, void and of no effect.

2.9. Amendment. This Agreement may be amended only by an instrument in writing executed and delivered by the Participant and the Company.

EX-10.5

EXHIBIT 10.5

November 13, 2014

Delivered in Person

Mr. Gregory Morris

22330 Wybenga Lane

Nuevo, CA 92567

Dear Greg:

The purpose of this letter agreement (“Agreement”) is to set forth the severance compensation and benefits being offered to you and to specify the other severance arrangements as the result of the termination of your employment with Entegris, Inc. (the “Company”).

1.Resignation. At the request of the Company you hereby resign from all positions and offices held by you with the Company and its subsidiaries effective February 20, 2015 (the “Separation Date”). You agree to provide the Company with reasonable assistance in transitioning your responsibilities to others. Other than providing such transition assistance, you are relieved of your duties effective the date of this letter but, subject to the terms of paragraph 3 below, you will continue to receive the payments specified in subparagraph 3(a) below until the Separation Date as. You further agree to execute all such other documents and forms in connection with your resignation as may be requested by the Company.

2.Payment of Accrued Rights. Whether or not you sign this Agreement, you will receive pay for the following: (A) your base salary in effect through the above date of this letter, to the extent not previously paid; (B) reimbursement for any unreimbursed business expenses properly incurred by you in accordance with Company policy prior to the above date of this letter and properly submitted for reimbursement within sixty (60) days following the date of this letter; and (C) such reimbursements and benefits under the Company’s Benefit Plans, if any, to which you became entitled prior to or on the above date of this letter, including, but not limited to, any vacation accrued but unused through the date set forth above, as determined in accordance with Company policies.

3.Severance Benefits. In consideration of your acceptance of this Agreement and subject to: (i) the expiration of the seven (7) day revocation/rescission period as provided in paragraph 16 below; and (ii) full compliance with your obligations under this Agreement, the Company will provide you or, in the event of your death, your estate, with the following severance pay and benefits:

(a) The Company will continue to pay you: (A) your base salary in effect on the above date of this letter; and (B) reimbursement for any necessary business expenses properly incurred by you after the date of this letter through the Separation Date in connection with your providing the transition assistance referred to in paragraph 1 above.

(b) The Company will provide severance pay for a period of twenty-one (21) months following the Separation Date (the “Severance Pay Period”) at your current base salary at a rate of Three Hundred Ten Thousand and No/100 Dollars ($310,000) per year. Payments of separation pay hereunder will be made in the form of salary continuation and will begin on the next regular Company payday following the Separation Date, and in no event later than sixty (60) days following the Separation Date. The first payment would be retroactive to the day following the Separation Date.

(c) If you are enrolled in the Company's medical and dental plans, subject to receipt of any required consent by any health maintenance organization, health insurance provider or dental insurance provider with which you are enrolled, the Company will continue to pay the premium for benefit coverage on the same basis as you are enrolled on the date hereof through the earlier of (i) the expiration of twenty-one (21) months following the Separation Date; or (ii) the date you become eligible for coverage under the health plan of another employer; (iii) loss of coverage due to your separation and failure of the applicable health maintenance organization, health insurance provider or dental insurance provider to consent to continued coverage. Upon termination of medical and dental benefits pursuant to clause (i) or (ii) above you may, at your own expense, elect to continue your participation and that of your eligible dependents in those plans for a period of time

under the federal law known as "COBRA." In the event that any required consent by any health maintenance organization, health insurance provider or dental insurance provider with which you are enrolled is denied, and you elect to continue participation under “COBRA”, then the Company will pay the premium for benefit coverage under COBRA on the same basis as you are enrolled on the date hereof through the earlier of (i) the expiration of twenty-one (21) months following the Separation Date; or (ii) the date you become eligible for coverage under the health plan of another employer, provided, however, that in the event that the Company determines that it is unable to continue any such participation, it shall pay the cost, on an after-tax basis, of comparable coverage.

(d) The Company will pay you the variable incentive compensation for which you may be eligible and which is payable under the Entegris Incentive Plan for the first half and second half of fiscal year 2014 at the levels as determined by the Management Compensation and Development Committee of the Company’s Board of Directors in its sole discretion in accordance with the terms of the 2014 Entegris Incentive Plan. This variable incentive compensation, if any, will be paid to you in early 2015 at the same time as variable incentive compensation is paid under the Entegris Incentive Plan to other executives but in any event, such payment will be made no later than March 15, 2015. You will not be eligible to participate in the Entegris Incentive Plan for any period subsequent to December 31, 2014.

(e) If you are enrolled in the Company's group life insurance plan on the Separation Date, subject to receipt of any required consent by any group life insurance provider, the Company shall pay the premium in order for you to continue your participation in the Company's group life insurance plan until the expiration of twenty-one (21) months following the Separation Date. In the event that the group life insurance provider refuses to so consent, then the Company shall provide you with reasonable assistance should you wish to convert such group policy into an individual policy. If you convert such policy, the Company will reimburse you for the premiums thereon for such twenty-one month period following the Separation Date.

(f) All unvested portions of outstanding equity awards scheduled to vest prior to the Separation Date shall vest in accordance with the terms of the award. All other unvested portions of outstanding equity awards shall be cancelled as of the Separation Date and shall be of no further force or effect. In addition, you shall have a period of one (1) year following the Separation Date to exercise all stock options that are vested and outstanding as of the Separation Date or which vest in accordance with this paragraph 3(f), or until the date such stock options would have expired in the absence of a termination of employment, if earlier.

(g) The Company will reimburse you for the expense of outplacement services provided by an outplacement firm reasonably selected by you up to an aggregate of Fifteen Thousand and No/100 Dollars ($15,000) provided that you submit appropriate documentation evidencing that such expense was incurred no later than December 31, 2015. If timely submitted, such expenses will be paid no later than March 31, 2016.

(h) Your contributions and the Company’s matching contributions to the Entegris Inc. 401(k) Savings and Profit Sharing Plan (2012 Restatement) shall terminate as of the Separation Date. The balances in your accounts under the Entegris Inc. 401(k) Savings and Profit Sharing Plan (2012 Restatement) and in the Entegris, Inc. Supplemental Executive Retirement Plan For Key Salaried Employeeswill be paid out to you in accordance with the terms of those plans and the requirements of law. You acknowledge that, pending such pay outs, such balances shall continue to be subject to investment risk in accordance with the investment choices under those plans that you have selected.

4.Certain Tax Matters. Payments and benefits under this Agreement shall be made and provided without regard to whether the deductibility of such payments (or any other payments or benefits to or for your benefit) would be limited or precluded by Section 280G ("Section 280G") of the U.S. Internal Revenue Code of 1986, as amended (the "Code") and without regard to whether such payments (or any other payments or benefits) would subject you to the federal excise tax applicable to certain "excess parachute payments" under Section 4999 of the Code (the "Excise Tax"). If any portion of the payments or benefits to or for your benefit (including, but not limited to, payments and benefits under this Agreement but determined without regard to this paragraph) constitutes an "excess parachute payment" within the meaning of Section 280G (the aggregate of such payments being hereinafter referred to as the "Excess Parachute Payments"), the Company shall promptly pay to you an additional amount (the "gross-up payment") that after reduction for all taxes (including but not limited to the Excise Tax) with respect to such gross-up payment

equals the Excise Tax with respect to the Excess Parachute Payments; providedthat to the extent any gross-up payment would be considered "deferred compensation" for purposes of Section 409A of the Code, the manner and time of payment, and the provisions of this Agreement, shall be adjusted to the extent necessary (but only to the extent necessary) to comply with the requirements of Section 409A with respect to such payment so that the payment does not give rise to the interest or additional tax amounts described at Section 409A(a)(1)(B) or Section 409A(b)(4) of the Code (the "Section 409A penalties"); andfurtherprovidedthat if, notwithstanding the immediately preceding proviso, the gross-up payment cannot be made to conform to the requirements of Section 409A of the Code, the amount of the gross-up payment shall be determined without regard to any gross-up for the Section 409A penalties. The determination as to whether your payments and benefits include Excess Parachute Payments and, if so, the amount of such payments, the amount of any Excise Tax owed with respect thereto, and the amount of any gross-up payment shall be made at the Company's expense by Ernst & Young or by such other certified public accounting firm as the Company’s Board of Directors may designate (the "accounting firm"). Notwithstanding the foregoing, if the U.S. Internal Revenue Service shall assert an Excise Tax liability that is higher than the Excise Tax (if any) determined by the accounting firm, the Company shall promptly augment the gross-up payment to address such higher Excise Tax liability.

The payments provided under this Agreement are intended to fall within either the separation pay exception or the short-term deferral exception to the application of Section 409A of the Code and the applicable guidance issued thereunder. To the extent the benefits provided under the Agreement become subject to Code Section 409A and applicable guidance issued thereunder, the Agreement and Release shall be construed, and benefits paid hereunder, as necessary to comply with Code Section 409A and such guidance. Notwithstanding the foregoing, to the extent any payments hereunder are not made in compliance with Code Section 409A or an exception thereto, any and all tax liability and penalties resulting from non-compliance with Code Section 409A shall remain Employee’s sole responsibility.

5.Withholding. All payments made by the Company under this Agreement shall be reduced by any tax or other amounts required to be withheld by the Company under applicable law and all other deductions authorized by you.

6.Acknowledgement of Full Payment. You acknowledge and agree that the payments provided under paragraph 2 of this Agreement are in complete satisfaction of any and all compensation due to you from the Company, whether for services provided to the Company or otherwise, through the above date of this letter and that, except as expressly provided under this Agreement, no further compensation is owed to you. Without limiting the generality of the foregoing, except as provided in paragraph 3 above, you expressly waive and relinquish any and all rights you have, or might have, to any bonus or other incentive compensation or other compensation, of any kind or description, under any plan or program of the Company.

7.Status of Employee Benefits and Paid Time Off. Except as otherwise expressly provided in paragraph 3 of this Agreement, your participation in all employee benefit plans of the Company shall end as of the Separation Date, in accordance with the terms of those plans. You will not continue to earn vacation or other paid time off after the Separation Date.

8.Confidentiality and Non-Disparagement. You agree that you will continue to protect Confidential Information, as defined below, and that you will not, directly or indirectly, use or disclose it. You also agree that you will not disclose this Agreement or any of its terms or provisions, directly or by implication, except to members of your immediate family and to your legal and tax advisors, and then only on condition that they agree not to further disclose this Agreement or any of its terms or provisions to others. Further, you agree that, during the Severance Pay Period and thereafter, you will not disparage or criticize the Company or its Affiliates, their business, management or products, and that you will not otherwise do or say anything that could disrupt the good morale of Company employees or harm the interests or reputation of the Company, its directors, officers or employees, or any of its Affiliates and their respective directors, officers and employees. Nothing in this Agreement, however, will prevent you from cooperating with or participating in any investigation or proceeding by the Equal Employment Opportunity Commission (“EEOC”), the California Department of Fair Employment and Housing (DFEH) the Massachusetts Commission Against Discrimination (MCAD) or any other federal, state or local governmental agency.

9.Return of Company Documents and Other Property. In signing this Agreement, you represent and warrant that, except as provided in paragraph 3 above, you have returned to the Company any and all documents, materials and information (whether in hardcopy, on electronic media or otherwise) related to the business of the Company or any of its Affiliates and all keys, access cards, credit cards, computer hardware and software, Blackberries, telephones and telephone-related equipment and all other property of the Company and its Affiliates in your possession or control. Further, you represent and warrant that you have not retained any copy of any documents, materials or information of the Company or any of its Affiliates (whether in hardcopy, on electronic media or otherwise). Recognizing that your performance of your duties for the Company is ending as of the above date of this letter, you agree that, except as necessary to provide the Company with transition assistance as provided in paragraph 1 above, you will not thereafter, for any purpose, attempt to access or use any Company computer or computer network or system. Further, you acknowledge that you have disclosed to the Company all passwords necessary or desirable to enable the Company to access all information which you have password-protected on any of its computer equipment or on its computer network or system.

10.Restricted Activities. You acknowledge that during your employment with the Company you have had access to Confidential Information which, if disclosed, would assist in competition against the Company and you agree that the following restrictions on your activities are necessary to protect the goodwill, Confidential Information and other legitimate interests of the Company:

(a)Trade Secrets and Unfair Competition. You acknowledge and agree that information, including but not limited to pricing information, customer buying and selling habits and special needs, customer credit information as well as the Company’s proprietary software, accounting records, marketing strategies, unique methods and procedures regarding pricing and advertising, employee personnel information, collection procedures, and payment histories, information relating to the Company’s Customers such as contract terms, products purchased from the Company and any other information relating to the Company or the Company’s Customers that has been obtained or made known to you solely as the result of your performing services for the Company, as well as the Company’s business plans, pending transactions, business strategy plans, sales figures, sales reports, internal memoranda, software developed by or for the benefit of the Company and related data source code and programming information (whether or not patentable or registered under copyright or similar statutes), copyrighted software and/or other copyrighted materials created by or for the benefit of the Company, personnel policies, the Company’s marketing methods, plans and related data, accounting/financial records (including, but not limited to, balance sheets, profit and loss statements, tax returns, payable and receivable information, bank account information and other financial reporting information), the names of any of the Company’s vendors and/or suppliers, information relating to costs, sales or services provided to the Company by such vendors and suppliers, the prices the Company obtains or has obtained for the Company’s products or services, compensation paid to the Company’s employees and other terms of employment, information regarding the Company’s relations with its employees, and/or other confidential information regarding the manner of business operations and actual or demonstrably anticipated business, research or development of the Company or any other information that has or could have commercial value or other utility in the business in which the Company is engaged or in which the Company contemplates engaging and information, that, if disclosed without authorization, could be detrimental to the interests of the Company or its Customers, whether or not such information is identified as confidential information by the Company or its Customers, constitutes Confidential Information/Trade Secrets of the Company. You agree that the sale or unauthorized use or disclosure of any of the Company’s Confidential Information/Trade Secrets obtained by you during your employment with the Company constitutes unfair competition. You hereby promise not to engage in any unfair competition with the Company.

(b)Covenant Not to Disclose The Company’s Trade Secrets or Confidential Information After Separation of Employment. You hereby agree that you will not publish or disclose, subsequent to the date of this Agreement, any Confidential Information/Trade Secret as defined herein, or other confidential information including information or any other matter relating to the Company’s business that you may in any way have acquired through your employment with the Company. All records, files, plans, documents and the like (whether in hard copy or electronic format of any nature) relating to the business of the Company

which you have prepared, used, or come in contact with are and shall remain the sole property of the Company and shall not be copied without written permission of the Company and shall, as of the date of your execution of this Agreement, be returned to the Company as set forth in paragraph 9 above.

(c)Covenant Not to Compete by Use of the Company’s Confidential Information/Trade Secrets After Separation of Employment. You will not engage in competition with the Company, at any time after the above date of this Agreement, while making use of the Company’s Confidential Information/Trade Secrets or any other confidential matter relating to the Company’s business that you may have previously in any way acquired by reason of your employment with the Company.

(d)Non-Recruiting Covenant. You hereby agree that the Company has invested substantial time and effort in assembling its present personnel. You agree that for a period of twenty-four (24) months following the above date of this Agreement, you will not directly or indirectly recruit, or attempt to recruit, any other employee of the Company or its Affiliates, or induce or attempt to induce any employee of the Company to terminate or cease employment with the Company.

(e)Tolling and Suspension. In the event that you breach any restrictive covenant contained in this Agreement, the running of the period of restriction shall automatically be tolled and suspended for the amount of time the breach continues, and shall automatically re-commence when the breach is remedied so that the Company shall receive the benefit of your compliance with the terms and conditions of this Agreement.

(f)Restraints Necessary and Reasonable. In signing this Agreement, you give the Company assurance that you have carefully read and considered all the terms and conditions of this Agreement, including the restraints imposed on you under this paragraph 10. You agree without reservation that these restraints are necessary for the reasonable and proper protection of the Company and that each and every one of the restraints is reasonable in respect to subject matter, length of time and geographic area. You further agree that, were you to breach any of the covenants contained in paragraph 8 or 9 above or of this paragraph 10, the damage to the Company would be irreparable. You therefore agree that the Company, in addition to any other remedies available to it, shall be entitled to preliminary and permanent injunctive relief against any breach or threatened breach by you of any of those covenants, without having to post bond. You also agree that in the event that Company prevails, in whole or in part, in any action to enforce this Agreement (whether for equitable relief, damages or both), you shall be liable to the Company for its reasonable attorneys’ fees and costs incurred in such action. You and the Company further agree that, in the event that any provision of paragraph 8 or 9 above or of this paragraph 10 is determined by any court of competent jurisdiction to be unenforceable by reason of its being extended over too great a time, too large a geographic area or too great a range of activities, that provision shall be deemed to be modified to permit its enforcement to the maximum extent permitted by law.

(g)Claw Back Provisions. You acknowledge and agree that any remedy at law that the Company has for your breach of this Agreement would be inadequate and that the Company would be irreparably harmed by any actual or threatened breach thereof. Therefore, you expressly agree and understand that in the event of your material breach of this Agreement, including, but not limited to this paragraph 10, the Company will be entitled, in addition to all actual and compensatory damages and relief (incurred by it in any action against you to enforce or remedy breach of any of the terms or conditions of this Agreement), to liquidated damages in the amount of all the consideration paid to you under this Agreement other than the Accrued Rights. Accordingly, in the event of such a material breach you must immediately return to the Company any such consideration that you may have received under this Agreement, and the Company shall be entitled to cease payment of any promised consideration not yet paid. You further acknowledge that your release of claims shall remain effective.

11.Employee Cooperation. You agree to cooperate with the Company hereafter with respect to all matters arising during or related to your employment, including but not limited to all matters in connection with any transition of duties to others, governmental investigation, litigation, or regulatory registrations, qualifications or proceedings or any other proceeding which may have arisen or which may arise following the signing of this Agreement. The Company will reimburse you for your out-of-pocket expenses incurred in complying with Company requests

hereunder, provided such expenses are authorized by the Company in advance. In the event that such cooperation requires that you devote working time after the expiration of twenty-one (21) months following the Separation Date, the Company agrees to provide you with reasonable compensation for your services.

12.Release of Claims.

(a) In exchange for the severance pay and other benefits provided you under this Agreement, to which you acknowledge that you would not otherwise be entitled, on your own behalf and that of your heirs, executors, administrators, beneficiaries, personal representatives and assigns, you agree that this Agreement shall be in complete and final settlement of any and all causes of action, rights or claims that you have had in the past, now have, or might now have, whether known or unknown, of any kind or description, including without limitation any causes of action, rights or claims in any way related to, connected with or arising out of your employment or its termination or pursuant to Title VII of the Civil Rights Act, the Americans with Disabilities Act, the Age Discrimination in Employment Act, the California Fair Employment and Housing Act, the Minnesota Human Rights Act, the Massachusetts Fair Employment Act, the Massachusetts Wage Act, M.G.L. ch. 149 §§ 148, 150 et seq.; the Massachusetts Minimum Fair Wage Law, M.G.L. ch. 151; any claims that may be released under Massachusetts labor statutes, M.G.L. c. 149, or any other federal, state or local law, regulation or other requirement and you hereby release and forever discharge the Company and its Affiliates and all of their respective past and present directors, shareholders, officers, employees, general and limited partners, members, managers, agents and representatives, their successors and assigns, and all others connected with them, and all employee benefit plans maintained by the Company and all trustees and plan administrators of such plans, both individually and in the official capacities of each of the foregoing individually, from any and all such causes of action, rights or claims. This release shall not apply to any claim for breach by the Company of its obligations under this Agreement.

(b) This Agreement, including the release of claims set forth in the paragraph directly above, creates legally binding obligations and the Company has advised you to consult an attorney before signing this Agreement. In signing this Agreement, you give the Company assurance that you have signed it voluntarily and with a full understanding of its terms; that you have had sufficient opportunity, before signing this Agreement, to consider its terms and to consult with any of those persons to whom reference in made in the second sentence of paragraph 8 above; that you have consulted with an attorney of your choosing; and that, in signing this Agreement, you have not relied on any promises or representations, express or implied, that are not set forth expressly in this Agreement.

(a) You hereby acknowledge and understand that this is a General Release and by signing this Agreement you are giving up your rights to file any claim in any court and to seek and/or receive any form of compensation arising from your employment or separation from employment. You acknowledge that this Agreement does not act as a waiver or release of any complaints or charges that you cannot by law waive or release and that it does not waive any rights that arise after you sign this Agreement.

(b) You further acknowledge that this Agreement does not prohibit you from: (i) filing a charge or complaint with the EEOC, DFEH, MCAD or any other state or federal agency, or (ii) participating in or cooperating with any investigation or proceeding conducted by the, EEOC, DFEH, MCAD or any other federal, state or local governmental agency.

13.Waiver of Section 1542. You hereby state that it is your intention in executing this Agreement that the same shall be effective as a bar to each and every claim, demand, cause of action, obligation, damage, liability, charge, attorneys’ fees and costs hereinabove released. You hereby expressly waive and relinquish all rights and benefits, if any, arising under the provisions of Section 1542 of the Civil Code of the State of California, which provides:

“Section 1542 Certain Claims Not Affected By General Release. A general release does not extend to claims which the creditor does not know or suspect to exist in his or her favor at the time of executing the release, which if known by him or her must have materially affected his or her settlement with the debtor.”

14.Definitions. As used in this Agreement:

“Affiliates” means any and all persons and entities controlling, controlled by or under common control with the Company, where control may be by management authority or equity interest.

"Confidential Information" means any and all information of the Company and its Affiliates that is not generally known to the public including, without limitation, all strategic business plans, marketing and sales data and information, all financial, technical personnel, manufacturing, operations, product and systems information. Confidential Information also includes all information received by the Company or any of its Affiliates from customers or other third parties with any understanding, express or implied, that the information would not be disclosed.

“Person” means an individual, a corporation, a limited liability company, an association, a partnership, an estate, a trust or any other entity or organization, other than the Company or any of its Affiliates.

15.Miscellaneous.

(a) This Agreement constitutes the entire agreement between you and the Company relating to the termination of your employment by the Company and supersedes all prior and contemporaneous communications, agreements and understandings whether written or oral, with respect to your employment, its termination and all related matters, excluding only your obligations with respect to the securities of the Company and for compliance with federal securities laws, all of which shall remain in full force and effect in accordance with their terms.

(b) This Agreement may not be modified or amended, and no breach shall be deemed to be waived, unless agreed to in writing by you and the Chief Executive Officer of the Company or his expressly authorized designee. The captions and headings in this Agreement are for convenience of reference only and in no way define or describe the scope or content of any provision of this Agreement. This is a California contract and shall be governed and construed in accordance with the laws of the State of California, without regard to the conflict-of-law principles thereof.

(c) If the duration of, scope of, or any business activity covered by this Agreement is in excess of what is valid and enforceable under applicable law, such provision will be construed to cover only that duration, scope, or activity that is valid and enforceable. You acknowledge that this paragraph 15(c) will be given the construction which renders its provisions valid and enforceable to the maximum extent, not exceeding its express terms, possible under applicable laws.

(d) The obligations of the Company under paragraph 3 of this Agreement are expressly conditioned upon your continued full performance of your obligations under this Agreement.

(e) There shall be no right of set-off or counterclaim in respect of any claim, debt or obligation against any payments to you, your dependents, beneficiaries or estate, provided for in this Agreement.

(f) No right, benefit or interest hereunder shall be subject to anticipation, alienation, sale, assignment, encumbrance, charge, pledge, hypothecation, or set-off in respect of any claim, debt or obligation, or to execution, attachment, levy or similar process, or assignment by operation of law. Any attempt, voluntary or involuntary, to effect any action specified in the immediately preceding sentence shall, to the full extent permitted by law, be null, void and of no effect.

(g) No right or interest to or in any payments shall be assignable by you; provided, however, that this provision shall not preclude you from designating one or more beneficiaries to receive any amount that may be payable after your death and shall not preclude the legal representative of your estate from assigning any right hereunder to the person or persons entitled thereto under your will or, in the case of intestacy, to the person or persons entitled thereto under the laws of intestacy applicable to your estate.

(h) The Company agrees that to the extent that its obligations hereunder remain unfulfilled, it shall require that any entity with which it merges or consolidates or to which it agrees to transfer substantially all of its assets expressly assume the obligations of the Company under this Agreement (including exercise of options vested pursuant to paragraph 3(f) above by a successor or award of substituted options by such) and that any successor or successors of such an entity, whether by merger, consolidation or transfer of assets, also expressly

assume all such obligations. Notwithstanding the foregoing, the Company shall not be deemed to have breached its obligations under this subparagraph 15(h) if it negotiates with any successor entity to provide a substitute agreement on terms (which may be different than the terms herein) that are reasonably acceptable to you.

16.Review, Rescission and Revocation. You understand that you have twenty-one (21) days from the above date of this letter to consider whether you wish to sign this Agreement. After signing this Agreement, you may rescind/revoke this Agreement within seven (7) days of signing. Any rescission or revocation must be in writing, and must be delivered by hand or sent by certified mail, return receipt requested, and postmarked within the fifteen-day period to Peter Walcott, Senior Vice President and General Counsel, Entegris, Inc., 129 Concord Road, Building 2, Billerica, MA 01821.If you do not execute this Agreement within the twenty one (21) day consideration period, or if you rescind/revoke it, then this Agreement is null and void and no consideration under this Agreement will be provided to you.

If the terms of this Agreement are acceptable to you, please sign, date and return it to me within twenty one (21) days following the above date of this letter. The enclosed copy of this letter, which you should also sign and date, is for your records.

Sincerely,

ENTEGRIS, INC.

/s/ Bertrand Loy

Bertrand Loy

President & Chief Executive Officer

Accepted and agreed:

Signature: /s/ Gregory C. Morris

Date: November 20, 2014

EX-21

Exhibit 21

Subsidiaries of Entegris, Inc.

Name of Subsidiary	Jurisdiction
Entegris-Jetalon Solutions, Inc.	Delaware
Entegris Korea Ltd.	South Korea
Pureline Co. Ltd. (1)	South Korea
Entegris Korea II Ltd.	South Korea
Entegris International Holdings IV LLC	Delaware
Entegris Pacific Ltd.	Delaware
Entegris (Shanghai) Microelectronics Trading Company Ltd.	Peoples Republic of China
Entegris Malaysia Sdn. Bhd.	Malaysia
ATMI Malaysia Sdn. Bhd.	Malaysia
Entegris International Holdings B.V.	The Netherlands
Entegris International Holdings II B.V.	The Netherlands
Entegris Asia Pte. Ltd.	Singapore
Entegris GmbH (2)	Germany
ATMI GmbH	Germany
Entegris Ireland Ltd.	Ireland
ATMI Ecosys LLC	California
ATMI Korea Co. Ltd.	South Korea
ATMI Pte. Ltd.	Singapore
Entegris Singapore Pte. Ltd.	Singapore
Entegris Pte. Ltd.	Singapore
Entegris SAS	France
Entegris Israel Ltd.	Israel
Entegris Cleaning Process SAS	France
Entegris International Holdings III B.V.	The Netherlands
Entegris Taiwan Enterprise Partnership (3)	Taiwan
Entegris Asia LLC	Delaware
Entegris Taiwan Technologies Co. Ltd.	Taiwan
Nihon Entegris K.K.	Japan
Entegris Japan Co. Ltd.	Japan
Entegris Specialty Materials, LLC	Delaware
Poco Graphite, Inc.	Delaware
Poco Graphite International, Inc.	Delaware
Poco Graphite SARL (4)	France
ATMI Inc.	Delaware
Advanced Technology Materials, Inc.	Delaware
ATMI Packaging LLC	Delaware
ATMI Materials LLC	Delaware
Entegris International Holdings V LLC	Delaware
ATMI International Holdings, Inc.	Delaware
ATMI Belgium Holdings, Inc.	Delaware
Entegris International Holdings VI LLC	Delaware
ATMI Sarl	Luxembourg
ATMI Belgium LLC	Delaware

ATMI Taiwan Holdings, Inc.	Delaware
ATMI Taiwan Co., Ltd.	Taiwan
ATMI Semiconductor New Materials Xi'an Co., Ltd.	China
ATMI International Trading Co. Ltd.	China
ATMI Clean Technologies (Shanghai) Company Limited	China
ATMI Japan K.K.	Japan

(1) Owned 37.5% by Entegris Korea Ltd. and 62.5% by registrant

(2) Owned 90% by Entegris International Holdings B.V. and 10% by registrant

(3) Owned 99% by Entegris International Holdings B.V. and 1% by registrant

(4) Owned 90% by Poco Graphite, Inc. and 10% by Poco Graphite International, Inc.

EX-23

EXHIBIT 23

Consent of Independent Registered Public Accounting Firm

The Board of Directors

Entegris, Inc.:

We consent to the incorporation by reference in the registration statement (No. 333‑160212 and 333-105962) on Form S-3 and (Nos. 33-167178, 333-127599, and 333-53382) on Form S-8 of Entegris, Inc. of our reports dated February 26, 2015, with respect to the consolidated balance sheets of Entegris, Inc. and subsidiaries as of December 31, 2014 and 2013, and the related consolidated statements of operations, comprehensive (loss) income, equity, and cash flows for each of the years in the three-year period ended December 31, 2014 and the effectiveness of internal control over financial reporting as of December 31, 2014, which reports appears in the December 31, 2014 Annual Report on Form 10‑K of Entegris, Inc. and subsidiaries.

Our report dated February 26, 2015 on internal control over financial reporting as of December 31, 2014, contains an explanatory paragraph that states management excluded from its assessment of the effectiveness of internal control over financial reporting as of December 31, 2014, ATMI, Inc.’s internal control over financial reporting associated with total assets of $1.0 billion (of which $602 million represents goodwill and intangibles included within the scope of the assessment) and total revenues of $245 million, included in the consolidated financial statements of Entegris, Inc. and subsidiaries as of and for the year ended December 31, 2014. Our audit of internal control over financial reporting of Entegris, Inc. also excluded an evaluation of the internal control over financial reporting of ATMI, Inc.

/s/ KPMG LLP

Minneapolis, Minnesota

February 26, 2015

EX-24

Exhibit 24

POWER OF ATTORNEY

KNOW ALL MEN BY THESE PRESENTS, that the undersigned Directors and Officers of Entegris, Inc. (the “Corporation”), do hereby constitute and appoint Bertrand Loy, Gregory B. Graves and Peter W. Walcott and each of them individually, their true and lawful attorneys and agents to execute on behalf of the Corporation the Form 10-K Annual Report of the Corporation for the fiscal year ended December 31, 2014, together with all such amendments thereto on Form 10-K/A as well as additional instruments related thereto which such attorneys and agents may deem to be necessary and desirable to enable the Corporation to comply with the requirements of the Securities Exchange Act of 1934, as amended, and any regulations, orders, or other requirements of the United States Securities and Exchange Commission thereunder in connection with the preparation and filing of said documents, including specifically, but without limitation of the foregoing, power and authority to sign the names of each of such Directors and Officers on his behalf, as such Director or Officer, as indicated below to the said Form 10-K Annual Report or documents filed or to be filed as a part of or in connection with such Form 10-K Annual Report; and each of the undersigned hereby ratifies and confirms all that said attorneys and agents shall do or cause to be done by virtue thereof.

SIGNATURE	TITLE	DATE
/s/ Bertrand Loy	President, Chief Executive Officer	February 11, 2015
Bertrand Loy	and Director
/s/ Paul L. H. Olson	Chairman of the Board, Director	February 11, 2015
Paul L. H. Olson
/s/ Michael A. Bradley	Director	February 11, 2015
Michael A. Bradley
/s/ Marvin D. Burkett	Director	February 11, 2015
Marvin D. Burkett
/s/ R. Nicholas Burns	Director	February 11, 2015
Nicholas Burns
/s/ Daniel W. Christman	Director	February 11, 2015
Daniel W. Christman
/s/ James F. Gentilcore	Director	February 11, 2015
James F. Gentilcore
/s/ Brian F. Sullivan	Director	February 11, 2015
Brian F. Sullivan

EX-31.1

Exhibit 31.1

CERTIFICATIONS

I, Bertrand Loy, certify that:

1. I have reviewed this Annual Report on Form 10-K of Entegris, Inc.;

2. Based on my knowledge, this annual report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in light of the circumstances under which such statements were made, not misleading with respect to the period covered by this report;

3. Based on my knowledge, the financial statements, and other financial information included in this annual report, fairly present in all material respects, the financial condition, results of operations and cash flows of the registrant as of, and for, the periods presented in this report;

4. The registrant’s other certifying officer and I are responsible for establishing and maintaining disclosure controls and procedures (as
defined in Exchange Act Rules 13a-15(e) and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules 13a-15(f) and 15d-15(f)) for the registrant and have:

(a) Designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that material information relating to the registrant, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is being prepared;

(b) Designed such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles;

(c) Evaluated the effectiveness of the registrant’s disclosure controls and procedures and presented in this annual report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and

(d) Disclosed in this report any change in the registrant’s internal control over financial reporting that occurred during the registrant’s most recent fiscal quarter (the registrant’s fourth fiscal quarter in the case of an annual report) that has materially affected, or is reasonably likely to materially affect, the registrant’s internal control over financial reporting; and

5. The registrant’s other certifying officer and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the registrant’s auditors and the audit committee of the registrant’s board of directors (or persons performing the equivalent functions):

(a) All significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to adversely affect the registrant’s ability to record, process, summarize and report financial information; and

(b) Any fraud, whether or not material, that involves management or other employees who have a significant role in the registrant’s internal control over financial reporting.

Date: February 26, 2015	/s/ Bertrand Loy
	Bertrand Loy
	Chief Executive Officer
	(Principal Executive Officer)

EX-31.2

Exhibit 31.2

CERTIFICATIONS

I, Gregory B. Graves, certify that:

1. I have reviewed this Annual Report on Form 10-K of Entegris, Inc.;

2. Based on my knowledge, this annual report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in light of the circumstances under which such statements were made, not misleading with respect to the period covered by this report;

3. Based on my knowledge, the financial statements, and other financial information included in this annual report, fairly present in all material respects, the financial condition, results of operations and cash flows of the registrant as of, and for, the periods presented in this report;

4. The registrant’s other certifying officer and I are responsible for establishing and maintaining disclosure controls and procedures (as
defined in Exchange Act Rules 13a-15(e) and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules 13a-15(f) and 15d-15(f)) for the registrant and have:

(a) Designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that material information relating to the registrant, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is being prepared;

(b) Designed such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles;

(c) Evaluated the effectiveness of the registrant’s disclosure controls and procedures and presented in this annual report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and

(d) Disclosed in this report any change in the registrant’s internal control over financial reporting that occurred during the registrant’s most recent fiscal quarter (the registrant’s fourth fiscal quarter in the case of an annual report) that has materially affected, or is reasonably likely to materially affect, the registrant’s internal control over financial reporting; and

5. The registrant’s other certifying officer and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the registrant’s auditors and the audit committee of the registrant’s board of directors (or persons performing the equivalent functions):

(a) All significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to adversely affect the registrant’s ability to record, process, summarize and report financial information; and

(b) Any fraud, whether or not material, that involves management or other employees who have a significant role in the registrant’s internal control over financial reporting.

Date: February 26, 2015	/s/ Gregory B. Graves
	Gregory B. Graves
	Chief Financial Officer
	(Principal Financial Officer)

EX-32.1

EXHIBIT 32.1

CERTIFICATION PURSUANT TO 18 U.S.C. SECTION 1350, AS ADOPTED PURSUANT TO SECTION 906

OF THE SARBANES-OXLEY ACT OF 2002

In connection with the Annual Report on Form 10-K (the “Report”) of Entegris, Inc, a Delaware corporation (the “Company”), for the period ended December 31, 2014 as filed with the Securities and Exchange Commission on the date hereof, I, Bertrand Loy, President and Chief Executive Officer of the Company, hereby certify pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002 that:

(1) The Report fully complies with the requirements of Section 13(a) or 15(d) of the Securities Exchange Act of 1934, as amended; and

(2) The information contained in the Report fairly presents, in all material respects, the financial condition and results of operations of the Company.

Date: February 26, 2015	/s/ Bertrand Loy
	Bertrand Loy
	Chief Executive Officer

EX-32.2

EXHIBIT 32.2

CERTIFICATION PURSUANT TO 18 U.S.C. SECTION 1350, AS ADOPTED PURSUANT TO SECTION 906

OF THE SARBANES-OXLEY ACT OF 2002

In connection with the Annual Report on Form 10-K (the “Report”) of Entegris, Inc, a Delaware corporation (the “Company”), for the period ended December 31, 2014 as filed with the Securities and Exchange Commission on the date hereof, I, Gregory B. Graves, Chief Financial Officer of the Company, hereby certify pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002 that:

(1) The Report fully complies with the requirements of Section 13(a) or 15(d) of the Securities Exchange Act of 1934, as amended; and

(2) The information contained in the Report fairly presents, in all material respects, the financial condition and results of operations of the Company.

Date: February 26, 2015	/s/ Gregory B. Graves
	Gregory B. Graves
	Chief Financial Officer

XML

Earning Per Share (EPS) (Tables)

12 Months Ended

Dec. 31, 2014

Reconcilation of Share Amount Used in Computaion of Basic and Diluted Earnings Per Share

Basic EPS is computed by dividing net income attributable to Entegris, Inc. by the weighted average number of shares of common stock outstanding during each period. The following table presents a reconciliation of the share amounts used in the computation of basic and diluted earnings per share:

(In thousands)	2014	2013	2012
Basic earnings per share—Weighted common shares outstanding	139,311	138,950	137,306
Weighted common shares assumed upon exercise of options and vesting of restricted stock units	751	668	1,106
Diluted earnings per share—Weighted common shares outstanding	140,062	139,618	138,412

Shares Excluded Underlying Stock Based Awards from Calculations of Diluted EPS

excluded the following shares underlying stock-based awards from the calculations of diluted EPS because their inclusion would have been anti-dilutive for the years ended December 31, 2014, 2013 and 2012:

(In thousands)	2014	2013	2012
Shares excluded from calculations of diluted EPS	1,183	1,248	1,431

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Amortization Expense (Detail) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Finite-Lived Intangible Assets [Line Items]
Amortization expense	$ 37,067	$ 9,347	$ 9,594

XML

Inventories (Detail) (USD $) In Thousands, unless otherwise specified	Dec. 31, 2014	Dec. 31, 2013
Inventory Net
Raw materials	$ 41,015	$ 26,012
Work-in-process	14,190	10,512
Finished goods	107,431	56,998
Supplies	489	552
Total inventories	$ 163,125	$ 94,074

XML

Summary of Option Activity (Detail) (USD $) In Thousands, except Per Share data, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Number of shares
Number of shares, Options outstanding, beginning of year	1,961	2,565	3,561
Number of shares, Granted	651	553	470
Number of shares, Exercised	(546)	(786)	(1,293)
Number of shares, Expired or Forfeited	(32)	(371)	(173)
Number of shares, Options outstanding, end of year	2,034	1,961	2,565
Number of shares, Options exercisable, end of year	728	1,001	1,828
Weighted average exercise price
Weighted average exercise price, Options outstanding, beginning of year	$ 8.20	$ 8.20	$ 6.53
Weighted average exercise price, Granted	$ 11.71	$ 9.88	$ 9.27
Weighted average exercise price, Exercised	$ 6.56	$ 7.54	$ 3.76
Weighted average exercise price, Expired or Forfeited	$ 14.06	$ 12.10	$ 9.83
Weighted average exercise price, Options outstanding, end of year	$ 9.67	$ 8.20	$ 8.20
Weighted average exercise price, Options exercisable, end of year	$ 7.92	$ 6.92	$ 8.18

XML

Estimated Future Amortization Expense (Detail) (USD $) In Thousands, unless otherwise specified	Dec. 31, 2014	Dec. 31, 2013
Finite-Lived Intangible Assets [Line Items]
2014	$ 47,835
2015	45,401
2016	43,977
2017	42,725
2018	40,472
Thereafter	88,144
Intangible assets, net	$ 308,554	$ 43,509

XML

Amounts Recognized in Consolidated Balance Sheet (Detail) (USD $) In Thousands, unless otherwise specified	Dec. 31, 2014	Dec. 31, 2013
Defined Benefit Plan Disclosure [Line Items]
Noncurrent liability	$ (8,102)	$ (9,471)
Accumulated Other Comprehensive Income (Loss), Pension and Other Postretirement Benefit Plans, Net of Tax	$ 1,007	$ 857

XML

Acquisitions (Details) (USD $)	12 Months Ended			3 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012	Jun. 30, 2012	Apr. 30, 2014	Apr. 01, 2013	Apr. 02, 2012	Apr. 01, 2014
Acquisitions [Line Items]
Charge for fair value write-up of acquired inventory sold	$ 48,586,000	$ 0	$ 0
Goodwill	340,743,000	12,274,000	2,209,000
Payments to Acquire Businesses, Net of Cash Acquired	809,390,000	13,358,000	2,961,000
Contingent consideration obligation	0	1,282,000
Contingent consideration fair value adjustment	(1,282,000)	(1,813,000)	0
Long-term Debt	766,796,000				820,000,000
ATMI [Member]
Acquisitions [Line Items]
Inventory					115,507,000
Identifiable intangible assets					297,040,000
Sale of Stock, Price Per Share					$ 34
Inventory fair value step-up					48,600,000
Charge for fair value write-up of acquired inventory sold	48,600,000
Property, Plant, and Equipment					126,302,000
Acquired Finite-lived Intangible Assets, Weighted Average Useful Life	8 years 3 months
Goodwill					332,124,000
Payments to Acquire Businesses, Gross	1,130,484,000
Direct costs associated with the transaction	13,300,000
Business Acquisition, Revenue Reported by Acquired Entity for Last Annual Period		361,000,000
Total purchase price, net of cash acquired					809,390,000
Pre-combination payment of unvested portion of awards	21,300,000
Jetalon [Member]
Acquisitions [Line Items]
Identifiable intangible assets						5,634,000
Acquired Finite-lived Intangible Assets, Weighted Average Useful Life		10 years
Goodwill						10,090,000
Payments to Acquire Businesses, Net of Cash Acquired		13,358,000
Contingent Consideration Arrangements, Range of Outcomes, Value, High						14,500,000
Contingent consideration obligation						3,094,000
Total purchase price, net of cash acquired						16,452,000
Contingent consideration fair value adjustment		(1,800,000)
Business Combination, Contingent Consideration Arrangements, Change in Amount of Contingent Consideration, Asset	(1,300,000)
EPT [Member]
Acquisitions [Line Items]
Business Combination, Step Acquisition, Equity Interest in Acquiree, Remeasurement Gain				1,300,000
Foreign currency transaction gain realized upon acquisition.				200,000
Goodwill							2,200,000
Business Acquisition, Percentage of Voting Interests Acquired							50.00%
Business Combination, Step Acquisition, Equity Interest in Acquiree, Fair Value				2,900,000
Equity Method Investment, Ownership Percentage			50.00%
Business Combination, Consideration Transferred				3,400,000
Customer Relationships | ATMI [Member]
Acquisitions [Line Items]
Finite-lived Intangible Assets Acquired	165,100,000
Acquired Finite-lived Intangible Assets, Weighted Average Useful Life	10 years
Trademarks and Trade names | ATMI [Member]
Acquisitions [Line Items]
Finite-lived Intangible Assets Acquired	120,800,000
Acquired Finite-lived Intangible Assets, Weighted Average Useful Life	6 years
Other Intangible Assets | ATMI [Member]
Acquisitions [Line Items]
Finite-lived Intangible Assets Acquired	11,100,000
Acquired Finite-lived Intangible Assets, Weighted Average Useful Life	7 years 5 months
Noncompete Agreements [Member]
Acquisitions [Line Items]
Acquired Finite-lived Intangible Assets, Weighted Average Useful Life	1 year 7 months
Noncompete Agreements [Member] | ATMI [Member]
Acquisitions [Line Items]
Finite-lived Intangible Assets Acquired	7,500,000
Senior secured term loan [Member]
Acquisitions [Line Items]
Long-term Debt	406,796,000
Senior secured term loan [Member] | ATMI [Member]
Acquisitions [Line Items]
Long-term Debt					460,000,000
Senior unsecured notes [Member]
Acquisitions [Line Items]
Long-term Debt	360,000,000
Senior unsecured notes [Member] | ATMI [Member]
Acquisitions [Line Items]
Long-term Debt								$ 360,000,000

XML

Lease Commitments (Tables)

12 Months Ended

Dec. 31, 2014

Future Minimum Lease Payments

As of December 31, 2014, the Company was obligated under noncancellable operating lease agreements for certain sales offices and manufacturing facilities, manufacturing equipment, vehicles, information technology equipment and warehouse space. Future minimum lease payments for noncancellable operating leases with initial or remaining terms in excess of one year are as follows:

Fiscal year ending December 31	(In thousands)
2015	$	10,708
2016	6,810
2017	4,596
2018	3,738
2019	948
Thereafter	292
Total minimum lease payments	$	27,092

XML

Amounts Recognized in Accumulated Other Comprehensive Loss Net of Tax (Detail) (USD $) In Thousands, unless otherwise specified	Dec. 31, 2014	Dec. 31, 2013
Defined Benefit Plan Disclosure [Line Items]
Net actuarial loss	$ 1,043	$ 811
Prior service cost	227	259
Unrecognized transition obligation	(9)	(11)
Gross amount recognized	1,261	1,059
Deferred income taxes	(254)	(202)
Net amount recognized	$ 1,007	$ 857

XML

Summary of Restricted Stock Activity (Detail) (USD $) In Thousands, except Per Share data, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Number of shares
Number of shares, Unvested, beginning of year	1,570	1,802	2,298
Number of shares, Granted	834	717	744
Number of shares, Vested	(686)	(871)	(1,132)
Number of shares, Forfeited	(105)	(78)	(108)
Number of shares, Unvested, end of year	1,613	1,570	1,802
Weighted average grant date fair value, Unvested
Weighted average grant date fair value, Unvested, beginning of year	$ 8.98	$ 7.02	$ 5.49
Weighted average grant date fair value, Granted	$ 11.59	$ 9.85	$ 9.21
Weighted average grant date fair value, Vested	$ 8.32	$ 5.67	$ 5.42
Weighted average grant date fair value, Forfeited	$ 10.14	$ 8.66	$ 6.22
Weighted average grant date fair value, Unvested, end of year	$ 10.53	$ 8.98	$ 7.02

XML

Fair Value Measurements - Additional Information (Detail) (USD $)	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012	Nov. 11, 2014
Fair Value, Assets and Liabilities Measured on Recurring Basis [Line Items]
Gain on the sale of an equity method investment	$ 300,000
Gain on cumulative translation reclassification adjustment associated with the equity method investee	0	(787,000)	0
Cash, fair value received	2,600,000
Equity Method Investments				2,300,000
Other than Temporary Impairment Losses, Investments	1,900,000
Available-for-sale Securities, Equity Securities	$ 4,600,000

XML

Maturity Schedule (Details) (USD $) In Thousands, unless otherwise specified	Dec. 31, 2014	Apr. 30, 2014
Debt [Abstract]
2015	$ 26,597
2016	0
2017	0
2018	0
2019	0
Thereafter	740,199
Long-term Debt	$ 766,796	$ 820,000

XML

Benefit Plans - Additional Information (Detail) (USD $) In Millions, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2011
Defined Benefit Plan Disclosure [Line Items]
Maximum matching contribution	4.00%
Employer profit sharing and matching contribution expense	$ 4.4	$ 3.2	$ 3.0

XML

Financial Assets Measured at Fair Value on Recurring Basis (Detail) (USD $) In Thousands, unless otherwise specified	Dec. 31, 2014	Dec. 31, 2013
Fair Value, Assets and Liabilities Measured on Recurring Basis [Line Items]
Short-term investments Commercial paper	$ 4,601	$ 0
Total assets measured and recorded at fair value	4,601	168,078
Foreign exchange forward contracts	1,851	514
Contingent consideration obligation	0	1,282
Total liabilities measured and recorded at fair value	1,851	1,796
Commercial Paper
Fair Value, Assets and Liabilities Measured on Recurring Basis [Line Items]
Cash equivalents	0	49,988
Money Market Funds [Member]
Fair Value, Assets and Liabilities Measured on Recurring Basis [Line Items]
Cash equivalents	0	118,090
Fair Value, Inputs, Level 1
Fair Value, Assets and Liabilities Measured on Recurring Basis [Line Items]
Short-term investments Commercial paper	4,601	0
Total assets measured and recorded at fair value	4,601	118,090
Foreign exchange forward contracts	0	0
Contingent consideration obligation	0	0
Total liabilities measured and recorded at fair value	0	0
Fair Value, Inputs, Level 1 | Commercial Paper
Fair Value, Assets and Liabilities Measured on Recurring Basis [Line Items]
Cash equivalents	0	0
Fair Value, Inputs, Level 1 | Money Market Funds [Member]
Fair Value, Assets and Liabilities Measured on Recurring Basis [Line Items]
Cash equivalents	0	118,090
Fair Value, Inputs, Level 2
Fair Value, Assets and Liabilities Measured on Recurring Basis [Line Items]
Short-term investments Commercial paper	0	0
Total assets measured and recorded at fair value	0	49,988
Foreign exchange forward contracts	1,851	514
Contingent consideration obligation	0	0
Total liabilities measured and recorded at fair value	1,851	514
Fair Value, Inputs, Level 2 | Commercial Paper
Fair Value, Assets and Liabilities Measured on Recurring Basis [Line Items]
Cash equivalents	0	49,988
Fair Value, Inputs, Level 2 | Money Market Funds [Member]
Fair Value, Assets and Liabilities Measured on Recurring Basis [Line Items]
Cash equivalents	0	0
Fair Value, Inputs, Level 3 [Member]
Fair Value, Assets and Liabilities Measured on Recurring Basis [Line Items]
Short-term investments Commercial paper	0	0
Total assets measured and recorded at fair value	0	0
Foreign exchange forward contracts	0	0
Contingent consideration obligation	0	1,282
Total liabilities measured and recorded at fair value	0	1,282
Fair Value, Inputs, Level 3 [Member] | Commercial Paper
Fair Value, Assets and Liabilities Measured on Recurring Basis [Line Items]
Cash equivalents	0	0
Fair Value, Inputs, Level 3 [Member] | Money Market Funds [Member]
Fair Value, Assets and Liabilities Measured on Recurring Basis [Line Items]
Cash equivalents	$ 0	$ 0

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Components of Net Periodic Benefit Cost (Detail) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Defined Benefit Plan Disclosure [Line Items]
Service cost	$ 64	$ 98	$ 89
Interest cost	111	122	163
Expected return on plan assets	(8)	(7)	(7)
Amortization of prior service cost	18	19	19
Amortization of net transition obligation	(1)	(1)	(1)
Amortization of plan loss	22	219	20
Recognized actuarial net loss	7	8	1
Acquisition	0	0	0
Curtailments	0	0	0
Net periodic pension benefit cost	$ 213	$ 458	$ 284

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Fair Value Measurements Information about derivative positions (Details) (USD $) In Thousands, unless otherwise specified	Dec. 31, 2014	Dec. 31, 2013
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Gross Derivative Liability	$ 4,336	$ 620
Gross Derivative Asset	2,485	106
Foreign exchange forward contracts	$ 1,851	$ 514

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Estimated Funded Status (Detail) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Defined Benefit Plan Disclosure [Line Items]
Benefit obligation at beginning of year	$ 9,855	$ 12,607
Service cost	64	98	89
Interest cost	111	122	163
Actuarial losses (gain)	336	(158)
Benefits paid	(922)	(1,072)
Foreign exchange impact	(962)	(1,742)
Benefit obligation at end of year	8,482	9,855	12,607
Fair value of plan assets at beginning of year	384	382
Return on plan assets	9	5
Employer contributions	9	9
Foreign exchange impact	(22)	(12)
Fair value of plan assets at end of year	380	384	382
Plan assets less than benefit obligation - Net amount recognized	$ (8,102)	$ (9,471)

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Summary of Options Outstanding (Detail) (USD $) In Thousands, except Per Share data, unless otherwise specified	12 Months Ended
	Dec. 31, 2014
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range [Line Items]
Number of Options outstanding	2,034
Options outstanding, Weighted average remaining life in years	4 years 7 months
Options outstanding, Weighted-average exercise price	$ 9.67
Number of Options exercisable	728
Options exercisable, Weighted average exercise price	$ 7.92
Range One
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range [Line Items]
Range of exercise prices, minimum	$ 0.00
Range of exercise prices, maximum	$ 9.40
Number of Options outstanding	842
Options outstanding, Weighted average remaining life in years	3 years 0 months
Options outstanding, Weighted-average exercise price	$ 7.96
Number of Options exercisable	602
Options exercisable, Weighted average exercise price	$ 7.50
Range Two
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range [Line Items]
Range of exercise prices, minimum	$ 9.88
Range of exercise prices, maximum	$ 9.88
Number of Options outstanding	541
Options outstanding, Weighted average remaining life in years	5 years 1 month
Options outstanding, Weighted-average exercise price	$ 9.88
Number of Options exercisable	126
Options exercisable, Weighted average exercise price	$ 9.88
Range Three
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range [Line Items]
Range of exercise prices, minimum	$ 11.71
Range of exercise prices, maximum	$ 11.71
Number of Options outstanding	651
Options outstanding, Weighted average remaining life in years	6 years 1 month
Options outstanding, Weighted-average exercise price	$ 11.71
Number of Options exercisable	0
Options exercisable, Weighted average exercise price	$ 0.00

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Quarterly Information-Unaudited

12 Months Ended

Dec. 31, 2014

Quarterly Information-Unaudited

QUARTERLY INFORMATION-UNAUDITED

	Fiscal quarter ended
(In thousands, except per share data)	March 29, 2014		June 28, 2014			September 27, 2014			December 31, 2014
Net sales	$	165,804	$	251,578		$	273,054		$	271,633
Gross profit	71,352		88,668			98,743			117,920
Net income	14,312		(14,669		)	(1,068		)	9,312
Basic income per share	0.10		(0.11		)	(0.01		)	0.07
Diluted income per share	0.10		(0.11		)	(0.01		)	0.07

	Fiscal quarter ended
(In thousands, except per share data)	March 30, 2013		June 29, 2013		September 28, 2013		December 31, 2013
Net sales	$	165,070	$	177,544	$	164,585	$	186,260
Gross profit	67,128		77,570		70,132		79,384
Net income	16,397		19,781		17,807		20,541
Basic income per share	0.12		0.14		0.13		0.15
Diluted income per share	0.12		0.14		0.13		0.15

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Property, Plant and Equipment (Detail) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Property, Plant and Equipment [Line Items]
Land	15,064	$ 12,866
Buildings and improvements	150,450	109,105
Manufacturing equipment	214,509	168,197
Canisters and cylinders	42,154	0
Molds	80,532	76,909
Office furniture and equipment	99,624	70,158
Construction in progress	27,185	33,021
Property, plant and equipment, gross	629,518	470,256
Less accumulated depreciation	315,949	283,816
Property, plant and equipment, net	313,569	$ 186,440	$ 157,021
Minimum | Building and Building Improvements
Property, Plant and Equipment [Line Items]
Estimated useful lives in years	5 years
Minimum | Manufacturing Equipment
Property, Plant and Equipment [Line Items]
Estimated useful lives in years	5 years
Minimum | Canisters and cylinders
Property, Plant and Equipment [Line Items]
Estimated useful lives in years	3 years
Minimum | Molds
Property, Plant and Equipment [Line Items]
Estimated useful lives in years	3 years
Minimum | Office Furniture and Equipment
Property, Plant and Equipment [Line Items]
Estimated useful lives in years	3 years
Maximum | Building and Building Improvements
Property, Plant and Equipment [Line Items]
Estimated useful lives in years	35 years
Maximum | Manufacturing Equipment
Property, Plant and Equipment [Line Items]
Estimated useful lives in years	10 years
Maximum | Canisters and cylinders
Property, Plant and Equipment [Line Items]
Estimated useful lives in years	12 years
Maximum | Molds
Property, Plant and Equipment [Line Items]
Estimated useful lives in years	5 years
Maximum | Office Furniture and Equipment
Property, Plant and Equipment [Line Items]
Estimated useful lives in years	8 years

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Summary of Significant Accounting Policies - Additional Information (Detail) (USD $)	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Apr. 30, 2014
Significant Accounting Policies [Line Items]
Long-term Debt, Fair Value	$ 764,000,000
Long-term Debt	$ 766,796,000		$ 820,000,000
Estimated useful life of amortizable intangible assets	8 years 6 months	9 years 4 months
Minimum
Significant Accounting Policies [Line Items]
Estimated useful life of amortizable intangible assets	3 years
Maximum
Significant Accounting Policies [Line Items]
Estimated useful life of amortizable intangible assets	15 years

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Weighted Average Assumptions Used in Valuation and Resulting Weighted Average Fair Value Per Option Granted (Detail) (USD $)	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Volatility	43.30%	51.70%	82.40%
Risk-free interest rate	1.10%	0.70%	0.60%
Dividend yield	0.00%	0.00%	0.00%
Expected life	3 years 9 months	3 years 7 months	3 years 9 months
Weighted average fair value per option	$ 3.99	$ 3.80	$ 5.42

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Segment Information Additional Segment Detail (Details)	12 Months Ended
	Dec. 31, 2014
Segment Reporting [Abstract]
Concentration Risk, Percentage	13.60%

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Benefit Plans (Tables)

12 Months Ended

Dec. 31, 2014

Estimated Funded Status

The tables below set forth the Company’s estimated funded status as of December 31, 2014 and 2013:

(In thousands)	2014			2013
Change in benefit obligation:
Benefit obligation at beginning of year	$	9,855		$	12,607
Service cost	64			98
Interest cost	111			122
Actuarial loss (gain)	336			(158		)
Benefits paid	(922		)	(1,072		)
Foreign exchange impact	(962		)	(1,742		)
Benefit obligation at end of year	8,482			9,855
Change in plan assets:
Fair value of plan assets at beginning of year	384			382
Return on plan assets	9			5
Employer contributions	9			9
Foreign exchange impact	(22		)	(12		)
Fair value of plan assets at end of year	380			384
Funded status:
Plan assets less than benefit obligation - Net amount recognized	$	(8,102	)	$	(9,471	)

Amounts Recognized in Consolidated Balance Sheet

Amounts recognized in the consolidated balance sheets consist of:

(In thousands)	2014			2013
Noncurrent liability	$	(8,102	)	$	(9,471	)
Accumulated other comprehensive loss, net of taxes	1,007			857

Amounts Recognized in Accumulated Other Comprehensive Loss Net of Tax

Amounts recognized in accumulated other comprehensive loss, net of tax consist of:

(In thousands)	2014			2013
Net actuarial loss	$	1,043		$	811
Prior service cost	227			259
Unrecognized transition obligation	(9		)	(11		)
Gross amount recognized	1,261			1,059
Deferred income taxes	(254		)	(202		)
Net amount recognized	$	1,007		$	857

Pension Plans Accumulated Benefit Obligation in Excess of Plan Assets

Information for pension plans with an accumulated benefit obligation in excess of plan assets:

(In thousands)	2014		2013
Projected benefit obligation	$	8,482	$	9,855
Accumulated benefit obligation	7,180		8,651
Fair value of plan assets	380		384

Components of Net Periodic Benefit Cost

The components of the net periodic benefit cost for the years ended December 31, 2014, 2013 and 2012 were as follows:

(In thousands)	2014			2013			2012
Pension benefits:
Service cost	$	64		$	98		$	89
Interest cost	111			122			163
Expected return on plan assets	(8		)	(7		)	(7		)
Amortization of prior service cost	18			19			19
Amortization of net transition obligation	(1		)	(1		)	(1		)
Amortization of plan loss	22			219			20
Recognized actuarial net loss	7			8			1
Acquisition	—			—			—
Curtailments	—			—			—
Net periodic pension benefit cost	$	213		$	458		$	284

Estimated Amount Amortized from Accumulated Other Comprehensive Income Into Net Periodic Benefit Cost

The estimated amount that will be amortized from accumulated other comprehensive income into net periodic benefit cost in 2015 is as follows:

(In thousands)
Transition obligation	$	(1	)
Prior service cost	17
Net actuarial loss	44
	$	60

Assumptions Used in Determining Benefit Obligation and Net Periodic Benefit Cost for Pension Plans

Assumptions used in determining the benefit obligation and net periodic benefit cost for the Company’s pension plans for the years ended December 31, 2014, 2013 and 2012 are presented in the following table as weighted-averages:

	2014		2013		2012
Benefit obligations:
Discount rate	1.13	%	1.23	%	1.19	%
Rate of compensation increase	4.41	%	4.10	%	4.18	%
Net periodic benefit cost:
Discount rate	1.83	%	1.41	%	1.80	%
Rate of compensation increase	3.38	%	2.01	%	2.84	%
Expected return on plan assets	1.35	%	0.70	%	1.14	%

Fair Value Measurements of Pension Plan Assets

The fair value measurements of the Company’s pension plan assets at December 31, 2014, by asset category are as follows:

(In thousands)			Quoted prices in active markets for identical assets		Significant observable inputs	Significant unobservable inputs
Asset category	Total		(Level 1)		(Level 2)	(Level 3)
Taiwan plan assets (a)	$	380	$	380	—	—
	$	380	$	380	—	—

(a) This category includes investments in the government of Taiwan’s pension fund. The government of Taiwan is responsible for the strategy and allocation of the investment contributions.

The fair value measurements of the Company’s pension plan assets at December 31, 2013, by asset category are as follows:

(In thousands)			Quoted prices in active markets for identical assets		Significant observable inputs	Significant unobservable inputs
Asset category	Total		(Level 1)		(Level 2)	(Level 3)
Taiwan plan assets (a)	$	384	$	384	—	—
	$	384	$	384	—	—

(a) This category includes investments in the government of Taiwan’s pension fund. The government of Taiwan is responsible for the strategy and allocation of the investment contributions.

Expected Contribution And Benefit Payments

The Company expects to make the following contributions and benefit payments:

(In thousands)	Contributions		Payments
2015	$	9	$	195
2016	—		129
2017	—		239
2018	—		264
2019	—		216
Years 2019-2023	—		2,297

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Intangible Assets Goodwill (Details) (USD $)	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Goodwill [Line Items]
Goodwill	$ 340,743,000	$ 12,274,000	$ 2,209,000
Goodwill, Acquired During Period	332,124,000	10,090,000
Goodwill, Translation Adjustments	(3,655,000)	(25,000)
Goodwill, Period Increase (Decrease)	328,500,000
CMH
Goodwill [Line Items]
Goodwill	47,483,000	12,274,000	2,209,000
Goodwill, Acquired During Period	35,329,000	10,090,000
Goodwill, Translation Adjustments	(120,000)	(25,000)
EM
Goodwill [Line Items]
Goodwill	293,260,000	0	0
Goodwill, Acquired During Period	296,795,000	0
Goodwill, Translation Adjustments	$ (3,535,000)	$ 0

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Income Taxes - Additional Information (Detail) (USD $)	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2011	Dec. 31, 2012
Income Tax [Line Items]
Deferred Tax Liabilities, Net	$ (36,720,000)
Net deferred tax assets		(18,810,000)
Deferred Tax Assets, Valuation Allowance	11,104,000	5,435,000
Undistributed foreign earnings	618,000,000
Withholding taxes to be incurred on distribution of retained earnings	12,000,000
Unrecognized tax benefits that would impact effective tax rate	4,300,000
Accrued interest and penalties related to unrecognized tax benefits	500,000	800,000
Interest and penalties recognized in the statement of operations	(400,000)	(100,000)	0
Gross unrecognized tax benefit decrease within next twelve months	200,000
Effective Income Tax Rate Reconciliation, Tax Credit, Foreign, Amount	2,600,000
Income to utilize credit carryforward	31,000,000
State
Income Tax [Line Items]
State operating loss carryforwards	42,400,000
Operating loss carryforwards, expiration date	Dec. 31, 2015
Year Which Prior Year's Tax Returns Are No Longer Subject to Tax Examination	Dec. 31, 2010
Foreign
Income Tax [Line Items]
Deferred Tax Liabilities, Net	(1,400,000)
Net deferred tax assets		8,200,000
Deferred Tax Assets, Valuation Allowance	500,000
Operating loss carryforwards, expiration date	Dec. 31, 2023
Foreign tax credit carryforwards	7,200,000
Tax credit carryforwards, expiration date	Dec. 31, 2019
Foreign operating loss carryforwards	2,700,000
Year Which Prior Year's Tax Returns Are No Longer Subject to Tax Examination	Dec. 31, 2008
U.S.
Income Tax [Line Items]
Deferred Tax Liabilities, Net	(24,800,000)
Net deferred tax assets		16,000,000
Deferred Tax Assets, Valuation Allowance	10,600,000	5,400,000
Year Which Prior Year's Tax Returns Are No Longer Subject to Tax Examination	Dec. 31, 2010
Malaysia
Income Tax [Line Items]
Income tax expense benefit per diluted share	$ 0.06	$ 0.04		$ 0.02
additional effective tax rate benefit	3,300,000
Income tax benefit estimate attributable to the tax status of subsidiary	8,000,000	5,400,000		2,400,000
Korea Tax Authority [Member]
Income Tax [Line Items]
Income tax expense benefit per diluted share	$ 0.0
additional effective tax rate benefit	200,000
Income tax benefit estimate attributable to the tax status of subsidiary	200,000
Inland Revenue, Singapore (IRAS) [Member]
Income Tax [Line Items]
Income tax expense benefit per diluted share	$ 0.00	$ 0.01		$ 0.00
additional effective tax rate benefit	3,700,000
Income tax benefit estimate attributable to the tax status of subsidiary	500,000	1,200,000		0
Research Tax Credit Carryforward [Member]
Income Tax [Line Items]
Tax Credit Carryforward, Amount	$ 3,600,000
Research Tax Credit Carryforward [Member] | U.S.
Income Tax [Line Items]
Tax credit carryforwards, expiration date	Dec. 31, 2033

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Asset Retirement Obligations (Details) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014
Asset Retirement Obligation [Abstract]
Asset Retirement Obligation Balanace at December 31, 2013	$ 2,167
Liabilities Assumed in ATMI acquisition	7,365
Liabilities Settled	(128)
Liabilities Incurred	248
Accretion Expense	195
Revision of Estimate	103
Asset Retirement Obligation at December 31, 2014	$ 9,950

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Trade Accounts and Notes Receivable (Detail) (USD $) In Thousands, unless otherwise specified	Dec. 31, 2014	Dec. 31, 2013
Accounts, Notes, Loans and Financing Receivable [Line Items]
Accounts receivable	$ 151,082	$ 94,613
Notes receivable	4,706	9,039
Trade accounts and notes receivable, gross	155,788	103,652
Less allowance for doubtful accounts	1,827	1,779
Trade accounts and notes receivable, net	$ 153,961	$ 101,873

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Summary of Significant Accounting Policies

12 Months Ended

Dec. 31, 2014

Summary of Significant Accounting Policies

SUMMARY OF SIGNIFICANT ACCOUNTING POLICIES

Nature of Operations Entegris, Inc. (Entegris or the Company) is a leading provider of yield-enhancing materials and solutions for advanced manufacturing processes in the semiconductor and other high-technology industries.

Principles of Consolidation The consolidated financial statements include the accounts of the Company and its majority-owned subsidiaries. Intercompany profits, transactions and balances have been eliminated in consolidation.

Use of Estimatesand Basis of Presentation The preparation of consolidated financial statements in conformity with accounting principles generally accepted in the United States requires management to make judgments, estimates and assumptions that affect the amounts reported in the consolidated financial statements and accompanying notes. On an ongoing basis, Entegris evaluates its estimates, including those related to receivables, inventories, property, plant and equipment, intangible assets, accrued liabilities, income taxes and share-based compensation, among others. Actual results could differ from those estimates.

Concentrations of Suppliers Certain materials included in the Company’s products are obtained from a single source or a limited group of suppliers. Although the Company seeks to reduce dependence on those sole and limited source suppliers, the partial or complete loss of these sources could have at least a temporary adverse effect on the Company’s results of operations. Furthermore, a significant increase in the price of one or more of these components could adversely affect the Company’s results of operations.

Cash and Cash Equivalents Cash and cash equivalents include cash on hand and highly liquid debt securities with original maturities of three months or less, which are valued at cost and approximates fair value.

Allowance for Doubtful Accounts An allowance for uncollectible trade receivables is estimated based on a combination of write-off history, aging analysis and any specific, known troubled accounts. The Company maintains an allowance for doubtful accounts that management believes is adequate to cover expected losses on trade receivables.

Inventories Inventories are stated at the lower of cost or market. Cost is determined by the first-in, first-out (FIFO) method.

Property, Plant, and Equipment Property, plant and equipment are carried at cost and are depreciated on the straight-line method over the estimated useful lives of the assets. When assets are retired or disposed of, the cost and related accumulated depreciation are removed from the accounts, and gains or losses are recognized in the same period. Maintenance and repairs are expensed as incurred; with significant additions and improvements are capitalized. Long-lived assets, including property, plant and equipment, are reviewed for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset or group of asset(s) may not be recoverable based on estimated future undiscounted cash flows. The amount of impairment, if any, is measured as the difference between the net book value and the estimated fair value of the asset(s).

Investments The Company’s nonmarketable investments are accounted for under either the cost or equity method of accounting, as appropriate. All nonmarketable investments are periodically reviewed to determine whether declines, if any, in fair value below cost basis are other-than-temporary. If the decline in fair value is determined to be other-than-temporary, an impairment loss is recorded and the investment is written down to a new cost basis.

Fair Value of Financial Instruments The carrying value of cash equivalents, accounts receivable, accounts payable, accrued payroll and related benefits, and other accrued liabilities approximates fair value due to the short maturity of those instruments.

The fair value of long-term debt, including current maturities, based upon models utilizing market observable (Level 2) inputs and credit risk, was $764 million at December 31, 2014 compared to the carrying amount of long-term debt, including current maturities, of $767 million.

Goodwill and Intangible Assets Goodwill represents the excess of acquisition costs over the fair value of the net assets of businesses acquired. Goodwill is not amortized, but instead tested at least annually for impairment. Goodwill is also tested for impairment as changes in circumstances occur indicating that the carrying value may not be recoverable. At August 31, 2014, the Company's annual testing date, it was determined there was no impairment of its goodwill.

Amortizable intangible assets include, among other items, patented, unpatented and other developed technology and customer-based intangibles, and are amortized using the straight-line method over their respective estimated useful lives of 3 to 15 years. The Company reviews intangible assets, along with other long-lived assets - primarily property, plant and equipment - for impairment if changes in circumstances or the occurrence of events suggest the remaining value may not be recoverable. At December 31, 2014, the Company concluded there was no impairment of its intangible assets.

Derivative Financial Instruments The Company records derivatives as assets or liabilities on the balance sheet and measures such instruments at fair value. Changes in fair value of derivatives are recorded each period in the Company’s consolidated statements of operations.

The Company periodically enters into forward foreign currency contracts to reduce exposures relating to rate changes in certain foreign currencies. Certain exposures to credit losses related to counterparty nonperformance exist. However, the Company does not anticipate nonperformance by the counterparties since they are large, well-established financial institutions. None of these derivatives is accounted for as a hedge transaction. Accordingly, changes in the fair value of forward foreign currency contracts are recorded as other expense (income), net, in the Company’s consolidated statements of operations. The fair values of the Company’s derivative financial instruments are based on prices quoted by financial institutions for these instruments.

Foreign Currency Translation Assets and liabilities of foreign subsidiaries are generally translated from foreign currencies into U.S. dollars at period-end exchange rates, and the resulting gains and losses arising from translation of net assets located outside the U.S. are recorded as a cumulative translation adjustment, a component of accumulated other comprehensive income in the consolidated balance sheets. Income statement amounts are translated at the weighted average exchange rates for the year. Translation adjustments are not adjusted for income taxes, as substantially all translation adjustments relate to permanent investments in non-U.S. subsidiaries. Gains and losses resulting from foreign currency transactions are included in other expense (income), net, in the Company's consolidated statements of operations.

Revenue Recognition Revenue and the related cost of sales are generally recognized upon shipment of the products. Revenue for product sales is recognized upon delivery, when persuasive evidence of an arrangement exists, when title and risk of loss have been transferred to the customer, collectability is reasonably assured, and pricing is fixed or determinable. Shipping and handling fees related to sales transactions are billed to customers and are recorded as revenue.

The Company sells its products throughout the world primarily to companies in the microelectronics industry. The Company performs continuing credit evaluations of its customers and generally does not require collateral. Letters of credit may be required from its customers in certain circumstances. The Company provides for estimated returns based on historical and current trends in both sales and product returns.

The Company collects various sales and value-added taxes on certain product and service sales that are accounted for on a net basis.

Shipping and Handling Costs Shipping and handling costs incurred are recorded in cost of sales in the Company's consolidated statements of operations.

Engineering, Research and Development Expenses Engineering, research and development costs are expensed as incurred.

Share-based Compensation The Company measures the cost of employee services received in exchange for the award of equity instruments based on the fair value of the award at the date of grant. The cost is recognized over the period during which an employee is required to provide services in exchange for the award. Compensation expense is based on the grant date fair value. Because share-based compensation expense recognized in the Company's consolidated statements of operations is based on awards ultimately expected to vest, it has been reduced for expected forfeitures, which are estimated at the time of grant with such estimates revised, if necessary, in subsequent periods if actual forfeitures differ from those estimates.

Income Taxes The Company accounts for income taxes under the asset and liability method, which requires the recognition of deferred tax assets and liabilities for the expected future tax consequences of events that have been included in the financial statements. Under this method, deferred tax assets and liabilities are determined on the basis of the differences between the financial statements and tax basis of assets and liabilities using enacted tax rates in effect for the year in which the differences are expected to reverse. The effect of a change in tax rates on deferred tax assets and liabilities is recognized in income tax expense in the period that includes the enactment date.

The Company recognizes deferred tax assets to the extent that it believes these assets are more likely than not to be realized. A valuation allowance is recorded to reduce deferred tax assets when it is more likely than not that the Company would not be able to realize all or part of its deferred tax assets. In making such a determination, the Company considers all available positive and negative evidence, including future reversals of existing temporary differences, projected future taxable income, tax-planning strategies, and results of recent operations. If the Company determines that it would be able to realize its deferred tax assets in the future in excess of their net recorded amount, the Company would make an adjustment to the deferred tax asset valuation allowance, which would reduce the provision for income taxes.

The Company’s policy for recording interest and penalties associated with audits and unrecognized tax benefits is to record such items as a component of income before taxes. Penalties and interest to be paid or received are recorded in other expense (income), net, in the statement of operations.

Comprehensive (Loss) Income Comprehensive income represents the change in equity resulting from items other than shareholder investments and distributions. The Company’s foreign currency translation adjustments, unrealized gains and losses on available-for-sale investments, and minimum pension liability adjustments are included in accumulated other comprehensive income. Comprehensive income and the components of accumulated other comprehensive income are presented in the accompanying consolidated statements of equity and comprehensive (loss) income.

Recent Accounting Pronouncements

Accounting Standards Updates issued but not effective for the Company until after December 31, 2014 are not expected to have a material effect on the Company’s consolidated financial statements.

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(Loss) Income Before Income Taxes (Detail) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Income Taxes [Line Items]
Domestic	$ (118,917)	$ 29,066	$ 49,056
Foreign	105,525	67,129	50,647
(Loss) income before income tax (benefit) expense and equity in net loss (income) of affiliates	$ (13,392)	$ 96,195	$ 99,703

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Purchase Price (Details) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012	Apr. 01, 2013	Apr. 30, 2014
Acquisitions [Line Items]
Payments to Acquire Businesses, Net of Cash Acquired	$ 809,390	$ 13,358	$ 2,961
Contingent consideration obligation	0	1,282
Jetalon [Member]
Acquisitions [Line Items]
Payments to Acquire Businesses, Net of Cash Acquired		13,358
Contingent consideration obligation				3,094
Total purchase price, net of cash acquired				16,452
ATMI [Member]
Acquisitions [Line Items]
Cash paid to ATMI shareholders	1,099,033
Cash paid in settlement of share based compensation awards	31,451
Total purchase price	1,130,484
Less cash and cash equivalents acquired					321,094
Total purchase price, net of cash acquired					$ 809,390

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Inventories (Tables)

12 Months Ended

Dec. 31, 2014

Inventories

Inventories at December 31, 2014 and 2013 consist of the following:

(In thousands)	2014		2013
Raw materials	$	41,015	$	26,012
Work-in-process	14,190		10,512
Finished goods (a)	107,431		56,998
Supplies	489		552
	$	163,125	$	94,074

(a) Includes consignment inventories held by customers for $11.0 million and $5.1 million at December 31, 2014 and 2013,

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Trade Accounts and Notes Receivable (Tables)

12 Months Ended

Dec. 31, 2014

Trade Accounts and Notes Receivable

Trade accounts and notes receivable from customers at December 31, 2014 and 2013 consist of the following:

(In thousands)	2014		2013
Accounts receivable	$	151,082	$	94,613
Notes receivable	4,706		9,039
	155,788		103,652
Less allowance for doubtful accounts	1,827		1,779
	$	153,961	$	101,873

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Long-term debt schedule (Details) (USD $) In Thousands, unless otherwise specified	Dec. 31, 2014	Apr. 30, 2014	Dec. 31, 2013
Debt Instrument [Line Items]
Long-term Debt	$ 766,796	$ 820,000
Long-term debt, current maturities	100,000		0
Long-term debt, excluding current maturities	666,796		0
Senior secured term loan [Member]
Debt Instrument [Line Items]
Long-term Debt	406,796
Senior unsecured notes [Member]
Debt Instrument [Line Items]
Long-term Debt	$ 360,000

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Acquisitions Purchase Price Allocations (Details) (USD $) In Thousands, unless otherwise specified	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012	Apr. 30, 2014	Apr. 01, 2013
Acquisitions [Line Items]
Goodwill	$ 340,743	$ 12,274	$ 2,209
ATMI [Member]
Acquisitions [Line Items]
Accounts receivable and other current assets				107,967
Inventory				115,507
Property, Plant, and Equipment				126,302
Identifiable intangible assets				297,040
Other Noncurrent Assets				13,216
Current liabilities				(60,056)
Deferred Tax Liabilities and other Noncurrent liabilities				(122,710)
Net assets acquired				477,266
Goodwill				332,124
Total purchase price, net of cash acquired				809,390
Jetalon [Member]
Acquisitions [Line Items]
Accounts receivable, inventory and other assets					944
Identifiable intangible assets					5,634
Current liabilities					(216)
Net assets acquired					6,362
Goodwill					10,090
Total purchase price, net of cash acquired					$ 16,452

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Property, Plant and Equipment (Tables)

12 Months Ended

Dec. 31, 2014

Property, Plant and Equipment

Property, plant, and equipment at December 31, 2014 and 2013 consists of the following:

(In thousands)	2014		2013		Estimated useful lives in years
Land	$	15,064	$	12,866
Buildings and improvements	150,450		109,105		5-35
Manufacturing equipment	214,509		168,197		5-10
Canisters and cylinders	42,154		—		3-12
Molds	80,532		76,909		3-5
Office furniture and equipment	99,624		70,158		3-8
Construction in progress	27,185		33,021
	629,518		470,256
Less accumulated depreciation	315,949		283,816
	$	313,569	$	186,440

Depreciation Expense

The table below sets forth the depreciation expense for the years ended December 31, 2014, 2013, and 2012:

(In thousands)	2014		2013		2012
Depreciation expense	$	46,637	$	29,468	$	28,013

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Intangible Assets (Tables)

12 Months Ended

Dec. 31, 2014

Schedule of Goodwill [Table Text Block]

Goodwill activity for each of the Company's two reportable segments, Critical Materials Handling (CMH) and Electronic Materials (EM), was as follows:

(In thousands)	CMH			EM			Total
December 31, 2012	$	2,209		$	—		$	2,209
Addition due to acquisition	10,090			—			10,090
Other, including foreign currency translation	(25		)	—			(25		)
December 31, 2013	12,274			—			12,274
Addition due to acquisition	35,329			296,795			332,124
Other, including foreign currency translation	(120		)	(3,535		)	(3,655		)
December 31, 2014	$	47,483		$	293,260		$	340,743

Schedule of Acquired Finite-Lived Intangible Assets by Major Class [Table Text Block]

ntangible assets at December 31, 2014 and 2013 consist of the following:

2014
(In thousands)	Gross  carrying Amount		Accumulated amortization		Net  carrying value		Weighted average life in years
Patents	$	1,347	$	779	$	568	9.8
Developed technology	199,402		78,785		120,617		6.6
Trademarks and trade names	17,152		8,883		8,269		9.8
Customer relationships	220,420		54,452		165,968		10.3
Other	16,768		3,636		13,132		6.6
	$	455,089	$	146,535	$	308,554	8.5

2013
(In thousands)	Gross  carrying amount		Accumulated amortization		Net  carrying value		Weighted average life in years
Patents	$	1,369	$	649	$	720	9.8
Developed technology	78,686		62,257		16,429		7.4
Trademarks and trade names	13,092		7,306		5,786		12.0
Customer relationships	57,617		39,146		18,471		11.0
Other	2,213		110		2,103		13.3
	$	152,977	$	109,468	$	43,509	9.3

Estimated Future Amortization Expense

The amortization expense for each of the five succeeding years and thereafter relating to intangible assets currently recorded in the Company's consolidated balance sheets is estimated to be the following at December 31, 2014:

Fiscal year ending December 31	(In thousands)
2015	$	47,835
2016	45,401
2017	43,977
2018	42,725
2019	40,472
Thereafter	88,144
	$	308,554

Schedule Of Amortization Of Intangibles Table [Text Block]

The table below sets forth the amortization expense for the years ended December 31, 2014, 2013, and 2012:

(In thousands)	2014		2013		2012
Amortization expense	$	37,067	$	9,347	$	9,594

The following table presents amortization of intangibles for each of the Company’s segments for the years ended December 31, 2014, 2013 and 2012:

(In thousands)	2014		2013		2012
Amortization of intangibles:
CMH	$	10,180	$	8,620	$	8,772
EM	26,887		727		822
	$	37,067	$	9,347	$	9,594

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Consolidated Statements Of Cash Flows (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Operating activities:
Net income	$ 7,887	$ 74,526	$ 68,825
Adjustments to reconcile net income to net cash provided by operating activities:
Depreciation	46,637	29,468	28,013
Amortization	37,067	9,347	9,594
Share-based compensation expense	8,887	7,928	9,881
Charge for fair value write-up of acquired inventory sold	48,586	0	0
Provision for deferred income taxes	(44,716)	8,232	11,940
Charge for excess and obsolete inventory	4,513	3,963	4,007
Excess tax benefit from share-based compensation plans	(842)	(3,914)	(3,805)
Amortization of debt issuance costs	5,848	0	0
Other	2,209	(765)	1,701
Changes in operating assets and liabilities, net of effects of acquisitions:
Trade accounts receivable and notes receivable	(4,845)	(13,363)	10,626
Inventories	(11,608)	(441)	(6,118)
Accounts payable and other accrued liabilities	14,348	(4,408)	6,265
Other current assets	(1,699)	(414)	(2,985)
Income taxes payable and refundable income taxes	10,975	2,731	(11,015)
Other	3,176	(3,488)	(11,767)
Net cash provided by operating activities	126,423	109,402	115,162
Investing activities:
Acquisition of property and equipment	(57,733)	(60,360)	(49,929)
Acquisition of business, net of cash acquired	(809,390)	(13,358)	(2,961)
Purchase of short-term investments	0	0	(27,990)
Proceeds from sale or maturities of short-term investments	13,778	20,000	8,000
Proceeds from sale of assets held for sale	0	6,500	0
Payments for non-compete agreements	(7,517)	0	0
Other	567	189	413
Net cash used in investing activities	(860,295)	(47,029)	(72,467)
Financing activities:
Proceeds from long-term debt	855,200	0	0
Payments of long-term debt	(88,650)	0	0
Payments for debt issuance costs	(20,747)	0	0
Issuance of common stock from employee stock plans	3,559	7,685	7,431
Taxes paid related to net share settlement of equity awards	(2,479)	0	0
Repurchase and retirement of common stock	0	(15,494)	(427)
Other	765	3,914	3,886
Net cash provided by (used in) financing activities	747,648	(3,895)	10,890
Effect of exchange rate changes on cash and cash equivalents	(8,503)	(4,471)	3,241
Increase in cash and cash equivalents	5,273	54,007	56,826
Cash and cash equivalents at beginning of year	384,426	330,419	273,593
Cash and cash equivalents at end of year	389,699	384,426	330,419
Supplemental Cash Flow Information
Equipment purchases in accounts payable	3,702	6,950	3,429
Schedule of interest and income taxes paid:
Interest paid	21,919	72	271
Income taxes, net of refunds received	$ 12,274	$ 10,208	$ 29,697

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Debt (Tables)

12 Months Ended

Dec. 31, 2014

Debt [Abstract]

Schedule of Debt [Table Text Block]

Long-term debt at December 31, 2014 consists of the following:

(In thousands)	December 31, 2014
Senior secured term loan facility due 2021	$	406,796
Senior unsecured notes due 2022	360,000
Total long-term debt	766,796
Less current maturities of long-term debt	100,000
Long-term debt less current maturities	$	666,796

Schedule of Maturities of Long-term Debt [Table Text Block]

Annual maturities of long-term debt contractually due as of December 31, 2014 are as follows:

Fiscal year ending	(In thousands)
2015	$	26,597
2016	—
2017	—
2018	—
2019	—
Thereafter	740,199
	$	766,796

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Assumptions Used in Determining Benefit Obligation and Net Periodic Benefit Cost for Pension Plans (Detail)	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Defined Benefit Plan Disclosure [Line Items]
Benefit obligations, Discount rate	1.13%	1.23%	1.19%
Benefit obligations, Rate of compensation increase	4.41%	4.10%	4.18%
Net periodic benefit cost, Discount rate	1.83%	1.41%	1.80%
Net periodic benefit cost, Rate of compensation increase	3.38%	2.01%	2.84%
Net periodic benefit cost, Expected return on plan assets	1.35%	0.70%	1.14%

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Segment Information (Tables)

12 Months Ended

Dec. 31, 2014

Summary of Financial Information for Reportable Segments

(In thousands)	2014		2013		2012
Net sales:
CMH	$	653,964	$	609,826	$	630,929
EM	308,105		83,633		84,974
Total net sales	$	962,069	$	693,459	$	715,903
(In thousands)	2014		2013		2012
Segment profit:
CMH	$	138,379	$	128,910	$	144,758
EM	90,121		20,034		21,051
Total segment profit	$	228,500	$	148,944	$	165,809
(In thousands)	2014		2013		2012
Total assets:
CMH	$	500,575	$	395,291	$	362,672
EM	804,889		46,831		41,348
Corporate	456,627		433,172		407,524
Total assets	$	1,762,091	$	875,294	$	811,544

(In thousands)	2014		2013		2012
Depreciation and amortization:
CMH	$	37,455	$	32,797	$	31,612
EM	41,671		4,238		4,358
Corporate	4,578		1,780		1,637
Total depreciation and amortization	$	83,704	$	38,815	$	37,607
(In thousands)	2014		2013		2012
Capital expenditures:
CMH	$	33,619	$	49,893	$	40,683
EM	19,450		6,842		5,579
Corporate	4,664		3,625		3,667
Total capital expenditures	$	57,733	$	60,360	$	49,929

Reconciliation of Total Segment Profit to Operating Income

The following table reconciles total segment profit to income before income taxes and equity in net loss (income) of affiliates:

(In thousands)	2014			2013			2012
Total segment profit	$	228,500		$	148,944		$	165,809
Less:
Charge for fair value write-up of acquired inventory sold	48,586			—			—
Amortization of intangibles	37,067			9,347			9,594
Contingent consideration fair value adjustment	(1,282		)	(1,813		)	—
Unallocated general and administrative expenses	122,775			47,173			56,771
Operating income	21,354			94,237			99,444
Interest expense	33,355			153			271
Interest income	(1,336		)	(317		)	(281		)
Other expense (income), net	2,727			(1,794		)	(249		)
(Loss) income before income tax (benefit) expense and equity in net loss (income) of affiliates	$	(13,392	)	$	96,195		$	99,703

Amortization of Intangibles

The table below sets forth the amortization expense for the years ended December 31, 2014, 2013, and 2012:

(In thousands)	2014		2013		2012
Amortization expense	$	37,067	$	9,347	$	9,594

The following table presents amortization of intangibles for each of the Company’s segments for the years ended December 31, 2014, 2013 and 2012:

(In thousands)	2014		2013		2012
Amortization of intangibles:
CMH	$	10,180	$	8,620	$	8,772
EM	26,887		727		822
	$	37,067	$	9,347	$	9,594

Summary of Total Net Sales to External Customers

The following table summarizes total net sales, based upon the country to which sales to external customers were made for the years ended December 31, 2014, 2013 and 2012:

(In thousands)	2014		2013		2012
Net sales:
United States	$	239,040	$	201,380	$	218,903
Japan	121,452		101,529		131,521
Germany	27,867		23,240		24,437
Taiwan	230,824		128,194		126,732
Singapore	46,051		30,942		25,607
South Korea	122,328		76,353		70,763
China	66,186		36,299		31,499
Other	108,321		95,522		86,441
	$	962,069	$	693,459	$	715,903

Summary of Property, Plant and Equipment Attributed to Significant Countries

The following table summarizes property, plant and equipment, net, attributed to significant countries for the years ended December 31, 2014, 2013 and 2012:

(In thousands)	2014		2013		2012
Property, plant and equipment:
United States	$	222,125	$	123,846	$	86,476
Korea	32,163		4,422		4,946
Japan	22,261		24,007		27,024
Malaysia	20,607		23,801		28,398
Other	16,413		10,364		10,177
	$	313,569	$	186,440	$	157,021

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Intangible Assets (Detail) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013
Finite-Lived Intangible Assets [Line Items]
Gross carrying Amount	$ 455,089	$ 152,977
Accumulated amortization	146,535	109,468
Net carrying value	308,554	43,509
Weighted average life in years	8 years 6 months	9 years 4 months
Patents
Finite-Lived Intangible Assets [Line Items]
Gross carrying Amount	1,347	1,369
Accumulated amortization	779	649
Net carrying value	568	720
Weighted average life in years	9 years 10 months	9 years 10 months
Developed Technology Rights
Finite-Lived Intangible Assets [Line Items]
Gross carrying Amount	199,402	78,686
Accumulated amortization	78,785	62,257
Net carrying value	120,617	16,429
Weighted average life in years	6 years 7 months	7 years 5 months
Trademarks and Trade names
Finite-Lived Intangible Assets [Line Items]
Gross carrying Amount	17,152	13,092
Accumulated amortization	8,883	7,306
Net carrying value	8,269	5,786
Weighted average life in years	9 years 10 months	12 years 0 months
Customer Relationships
Finite-Lived Intangible Assets [Line Items]
Gross carrying Amount	220,420	57,617
Accumulated amortization	54,452	39,146
Net carrying value	165,968	18,471
Weighted average life in years	10 years 4 months	11 years 0 months
Other Intangible Assets
Finite-Lived Intangible Assets [Line Items]
Gross carrying Amount	16,768	2,213
Accumulated amortization	3,636	110
Net carrying value	$ 13,132	$ 2,103
Weighted average life in years	6 years 7 months	13 years 4 months

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Cash Received from Exercise of Stock Options and Employee Contribution to ESPP (Detail) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Exercise of stock options and employee contributions to the ESPP	$ 3,117	$ 7,685	$ 7,431

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Consolidated Balance Sheets (USD $) In Thousands, unless otherwise specified	Dec. 31, 2014	Dec. 31, 2013
Current assets:
Cash and cash equivalents	$ 389,699	$ 384,426
Short-term investments	4,601	0
Trade accounts and notes receivable, net	153,961	101,873
Inventories, net	163,125	94,074
Deferred tax assets, deferred tax charges and refundable income taxes	30,556	20,844
Other current assets	23,713	11,088
Total current assets	765,655	612,305
Property, plant and equipment, net	313,569	186,440
Other assets:
Goodwill	340,743	12,274
Intangible assets, net	308,554	43,509
Deferred tax assets and other noncurrent tax assets	5,068	12,039
Other	28,502	8,727
Total assets	1,762,091	875,294
Current liabilities:
Long-term debt, current maturities	100,000	0
Accounts payable	57,417	38,396
Accrued payroll and related benefits	51,164	30,116
Other accrued liabilities	40,387	18,700
Deferred tax liabilities and income taxes payable	13,552	10,373
Total current liabilities	262,520	97,585
Long-term debt, excluding current maturities	666,796	0
Pension benefit obligations and other liabilities	25,373	15,411
Deferred tax liabilities and other noncurrent tax liabilities	58,961	5,455
Commitments and contingent liabilities	0	0
Equity:
Preferred stock, par value $.01; 5,000,000 shares authorized; none issued and outstanding as of December 31, 2014 and 2013	0	0
Common stock, par value $.01; 400,000,000 shares authorized; issued and outstanding shares: 139,792,583 and 138,734,442	1,398	1,387
Additional paid-in capital	830,430	819,632
Retained deficit	(80,712)	(88,599)
Accumulated other comprehensive income	(2,675)	24,423
Total equity	748,441	756,843
Total liabilities and equity	$ 1,762,091	$ 875,294

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Proforma Results (Details) (ATMI [Member], USD $) In Thousands, except Per Share data, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013
ATMI [Member]
Acquisitions [Line Items]
Business Acquisition, Pro Forma Revenue	$ 1,076,334	$ 1,051,175
Business Acquisition, Pro Forma Net Income (Loss)	$ 68,279	$ 60,324
Business Acquisition, Pro Forma Earnings Per Share, Basic	$ 0.49	$ 0.43
Business Acquisition, Pro Forma Earnings Per Share, Diluted	$ 0.49	$ 0.43

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Summary of Property, Plant and Equipment Attributed to Significant Countries (Detail) (USD $) In Thousands, unless otherwise specified	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Segment Reporting Information [Line Items]
Property, plant and equipment	$ 313,569	$ 186,440	$ 157,021
UNITED STATES
Segment Reporting Information [Line Items]
Property, plant and equipment	222,125	123,846	86,476
KOREA, REPUBLIC OF
Segment Reporting Information [Line Items]
Property, plant and equipment	32,163	4,422	4,946
JAPAN
Segment Reporting Information [Line Items]
Property, plant and equipment	22,261	24,007	27,024
Malaysia
Segment Reporting Information [Line Items]
Property, plant and equipment	20,607	23,801	28,398
All Other Segments
Segment Reporting Information [Line Items]
Property, plant and equipment	$ 16,413	$ 10,364	$ 10,177

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Consolidated Statements Of Comprehensive Income (Parenthetical) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2011
Pension liability adjustments, income tax expense (benefit)	$ 71	$ (37)	$ 74

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Amortization of Intangibles (Detail) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Segment Reporting Information [Line Items]
Amortization of intangibles	$ 37,067	$ 9,347	$ 9,594
CMH
Segment Reporting Information [Line Items]
Amortization of intangibles	10,180	8,620	8,772
EM
Segment Reporting Information [Line Items]
Amortization of intangibles	$ 26,887	$ 727	$ 822

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Future Minimum Lease Payments (Detail) (USD $) In Thousands, unless otherwise specified	Dec. 31, 2014
Operating Leased Assets [Line Items]
2014	$ 10,708
2015	6,810
2016	4,596
2017	3,738
2018	948
Thereafter	292
Total minimum lease payments	$ 27,092

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Income Taxes (Tables)

12 Months Ended

Dec. 31, 2014

Income (Loss) Before Income Taxes

ncome before income taxes for the years ended December 31, 2014, 2013 and 2012 was derived from the following sources:

(In thousands)	2014			2013		2012
Domestic	$	(118,917	)	$	29,066	$	49,056
Foreign	105,525			67,129		50,647
(Loss) income before income tax (benefit) expense and equity in net loss (income of affiliates	$	(13,392	)	$	96,195	$	99,703

Components of Income Tax (Benefit) Expense

Income tax (benefit) expense for the years ended December 31, 2014, 2013, and 2012 is summarized as follows:

(In thousands)	2014			2013			2012
Current:
Federal	$	1,574		$	854		$	5,797
State	111			772			654
Foreign	21,459			12,937			11,183
	23,144			14,563			17,634
Deferred (net of valuation allowance):
Federal	(41,484		)	6,003			11,165
State	(1,545		)	(650		)	168
Foreign	(1,687		)	1,753			1,914
	(44,716		)	7,106			13,247
Income tax (benefit) expense	$	(21,572	)	$	21,669		$	30,881

Reconciliation of Income Tax Expense With Expected Amounts Based Upon Statutory Federal Tax Rates

Income tax (benefit) expense differs from the expected amounts based upon the statutory federal tax rates for the years ended December 31, 2014, 2013, and 2012 as follows:

(In thousands)	2014			2013			2012
Expected federal income tax at statutory rate	$	(4,687	)	$	33,668		$	34,896
State income taxes before valuation allowance, net of federal tax effect	(2,115		)	(357		)	440
Income (losses) without tax expense (benefit)	(72		)	22			(40		)
Effect of foreign source income	(19,996		)	(10,583		)	(5,314		)
Tax contingencies	1,379			1,383			1,374
Valuation allowance	2,106			445			358
Non-deductible acquisition costs	2,176			—			—
U.S. federal research credit	(2,085		)	(3,233		)	(790		)
Other items, net	1,722			324			(43		)
Income tax (benefit) expense	$	(21,572	)	$	21,669		$	30,881

Deferred Tax Assets And Deferred Tax Liabilities

The significant components of the Company’s deferred tax assets and deferred tax liabilities at December 31, 2014 and 2013 are as follows:

(In thousands)	2014			2013
Deferred tax assets attributable to:
Accounts receivable	$	243		$	269
Inventory	5,663			2,853
Accruals not currently deductible for tax purposes	9,915			8,844
Net operating loss and credit carryforwards	12,183			3,972
Capital loss carryforward	3,088			2,779
Depreciation	10,498			1,070
Equity compensation	3,662			3,157
Asset impairments	732			732
Purchased intangible assets	—			1,439
Other, net	5,549			2,976
Gross deferred tax assets	51,533			28,091
Valuation allowance	(11,104		)	(5,435		)
Total deferred tax assets	40,429			22,656
Deferred tax liabilities attributable to:
Depreciation	—			(3,245		)
Purchased intangible assets	(77,149		)	(601		)
Total deferred tax liabilities	(77,149		)	(3,846		)
Net deferred tax (liabilities) assets	$	(36,720	)	$	18,810

Reconciliations of Total Amount of Gross Unrecognized Tax Benefits

Reconciliations of the beginning and ending balances of the total amounts of gross unrecognized tax benefits for the years ended December 31, 2014 and 2013 are as follows:

(In thousands)	2014			2013
Gross unrecognized tax benefits at beginning of year	$	4,277		$	5,419
Increase from acquisition	2,431			—
Increases in tax positions for prior years	—			28
Decreases in tax positions for prior years	(246		)	—
Increases in tax positions for current year	2,409			1,879
Settlements	(1,385		)	(2,298		)
Lapse in statute of limitations	(1,502		)	(751		)
Gross unrecognized tax benefits at end of year	$	5,984		$	4,277

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Deferred Tax Assets and Deferred Tax Liabilities (Detail) (USD $) In Thousands, unless otherwise specified	Dec. 31, 2014	Dec. 31, 2013
Schedule of Deferred Tax Assets and Liabilities [Line Items]
Accounts receivable	$ 243	$ 269
Inventory	5,663	2,853
Accruals not currently deductible for tax purposes	9,915	8,844
Net operating loss and credit carryforwards	12,183	3,972
Capital loss carryforward	3,088	2,779
Depreciation	10,498	1,070
Equity compensation	3,662	3,157
Asset impairments	732	732
Purchased intangibles assets	0	1,439
Other, net	5,549	2,976
Gross deferred tax assets	51,533	28,091
Valuation allowance	(11,104)	(5,435)
Total deferred tax assets	40,429	22,656
Depreciation	0	(3,245)
Purchased intangible assets	(77,149)	(601)
Gross deferred tax liabilities	(77,149)	(3,846)
Total deferred tax liabilities	(36,720)
Net deferred tax assets		$ 18,810

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Earning Per Share (EPS)

12 Months Ended

Dec. 31, 2014

Earning Per Share (EPS)

EARNINGS PER SHARE (EPS)

Basic EPS is computed by dividing net income attributable to Entegris, Inc. by the weighted average number of shares of common stock outstanding during each period. The following table presents a reconciliation of the share amounts used in the computation of basic and diluted earnings per share:

(In thousands)	2014	2013	2012
Basic earnings per share—Weighted common shares outstanding	139,311	138,950	137,306
Weighted common shares assumed upon exercise of options and vesting of restricted stock units	751	668	1,106
Diluted earnings per share—Weighted common shares outstanding	140,062	139,618	138,412

The Company excluded the following shares underlying stock-based awards from the calculations of diluted EPS because their inclusion would have been anti-dilutive for the years ended December 31, 2014, 2013 and 2012:

(In thousands)	2014	2013	2012
Shares excluded from calculations of diluted EPS	1,183	1,248	1,431

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Equity (Tables)

12 Months Ended

Dec. 31, 2014

Summary of Option Activity

Stock option activity for the 2010 Stock Plan and predecessor plans for the years ended December 31, 2014, 2013 and 2012 is summarized as follows:

	2014				2013				2012
(Shares in thousands)	Number of shares		Weighted average exercise price		Number of shares		Weighted average exercise price		Number of shares		Weighted average exercise price
Options outstanding, beginning of year	1,961		$	8.20	2,565		$	8.20	3,561		$	6.53
Granted	651		11.71		553		9.88		470		9.27
Exercised	(546	)	6.56		(786	)	7.54		(1,293	)	3.76
Expired or Forfeited	(32	)	14.06		(371	)	12.10		(173	)	9.83
Options outstanding, end of year	2,034		$	9.67	1,961		$	8.20	2,565		$	8.20
Options exercisable, end of year	728		$	7.92	1,001		$	6.92	1,828		$	8.18

Summary of Options Outstanding

Options outstanding for the Company’s stock plans at December 31, 2014 are summarized as follows:

(Shares in thousands)	Options outstanding				Options exercisable
Range of exercise prices	Number outstanding	Weighted average remaining life in years	Weighted- average exercise price		Number exercisable	Weighted average exercise price
$0.00 to $9.40	842	3.0 years	$	7.96	602	$	7.50
$9.88 to $9.88	541	5.1 years	9.88		126	9.88
$11.71 to $11.71	651	6.1 years	11.71		—	—
	2,034	4.6 years	9.67		728	7.92

Cash Received From Exercise Of Stock Options and Employee Contribution to ESPP

The table below sets forth the amount of cash received by the Company from the exercise of stock options and employee contributions to the ESPP during the years ended December 31, 2014, 2013 and 2012:

(In thousands)	2014		2013		2012
Exercise of stock options and employee contributions to the ESPP	$	3,117	$	7,685	$	7,431

Summary of Restricted Stock Activity

Restricted stock awards are awards of common stock made under the 2010 Stock Plan that are subject to restrictions on transfer and to a risk of forfeiture if the awardee terminates employment with the Company prior to the lapse of the restrictions. The value of such stock is determined using the market price on the grant date. Compensation expense for restricted stock awards is generally recognized using the straight-line single-option method. A summary of the Company’s restricted stock activity for the years ended December 31, 2014, 2013 and 2012 is presented in the following table:

	2014				2013				2012
(Shares inthousands)	Number of shares		Weighted average grant date fair value		Number of shares		Weighted average grant date fair value		Number of shares		Weighted average grant date fair value
Unvested, beginning of year	1,570		$	8.98	1,802		$	7.02	2,298		$	5.49
Granted	834		11.59		717		9.85		744		9.21
Vested	(686	)	8.32		(871	)	5.67		(1,132	)	5.42
Forfeited	(105	)	10.14		(78	)	8.66		(108	)	6.22
Unvested, end of year	1,613		10.53		1,570		8.98		1,802		7.02

Summary of Allocation of Share Based Compensation Expense

The following table summarizes the allocation of share-based compensation expense related to employee stock options, restricted stock awards and grants under the employee stock purchase plan for the years ended December 31, 2014, 2013 and 2012:

(In thousands)	2014		2013		2012
Cost of sales	$	809	$	690	$	575
Engineering, research and development expenses	705		502		500
Selling, general and administrative expenses	7,373		6,736		8,806
Share-based compensation expense	8,887		7,928		9,881
Tax benefit	2,746		2,643		3,686
Share-based compensation expense, net of tax	$	6,141	$	5,285	$	6,195

Weighted Average Assumptions Used In Valuation And Resulting Weighted Average Fair Value Per Option Granted

The fair value of each stock option grant was estimated at the date of grant using a Black-Scholes option pricing model. The following table presents the weighted-average assumptions used in the valuation and the resulting weighted-average fair value per option granted for the years ended December 31, 2014, 2013 and 2012:

Employee stock options:	2014			2013			2012
Volatility	43.3		%	51.7		%	82.4		%
Risk-free interest rate	1.1		%	0.7		%	0.6		%
Dividend yield	—		%	—		%	—		%
Expected life (years)	3.8			3.6			3.8
Weighted average fair value per option	$	3.99		$	3.80		$	5.42

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Quarterly Information (Detail) (USD $) In Thousands, except Per Share data, unless otherwise specified	3 Months Ended								12 Months Ended
	Dec. 31, 2014	Sep. 27, 2014	Jun. 28, 2014	Mar. 29, 2014	Dec. 31, 2013	Sep. 28, 2013	Jun. 29, 2013	Mar. 30, 2013	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Schedule Of Quarterly Financial Information [Line Items]
Net sales	$ 271,633	$ 273,054	$ 251,578	$ 165,804	$ 186,260	$ 164,585	$ 177,544	$ 165,070	$ 962,069	$ 693,459	$ 715,903
Gross profit	117,920	98,743	88,668	71,352	79,384	70,132	77,570	67,128	376,683	294,214	307,383
Net income	$ 9,312	$ (1,068)	$ (14,669)	$ 14,312	$ 20,541	$ 17,807	$ 19,781	$ 16,397	$ 7,887	$ 74,526	$ 68,825
Basic income per share attributable to Entegris, Inc.	$ 0.07	$ (0.01)	$ (0.11)	$ 0.10	$ 0.15	$ 0.13	$ 0.14	$ 0.12	$ 0.06	$ 0.54	$ 0.50
Diluted income per share attributable to Entegris, Inc.	$ 0.07	$ (0.01)	$ (0.11)	$ 0.10	$ 0.15	$ 0.13	$ 0.14	$ 0.12	$ 0.06	$ 0.53	$ 0.50

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Commitments and Contingent Liabilities

12 Months Ended

Dec. 31, 2014

Commitments and Contingent Liabilities

COMMITMENTS AND CONTINGENT LIABILITIES

The Company is subject to various claims, legal actions, and complaints arising in the ordinary course of business. The Company believes the final outcome of these matters will not have a material adverse effect on its consolidated financial statements. The Company expenses legal costs as incurred.

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Equity - Additional Information (Detail) (USD $)	12 Months Ended			0 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012	Feb. 08, 2014	Dec. 12, 2012
Equity [Line Items]
Payments for Repurchase of Common Stock	$ 0	$ 15,494,000	$ 427,000
Shares absorbed into plan	5,700,000
Term of plan, in years	10 years
Weighted average remaining contractual term option outstanding	4 years 7 months
Weighted average remaining contractual term option exercisable	3 years 1 month
Shares available for future grants	11,600,000	6,800,000	7,700,000
Total pre-tax intrinsic value of stock options exercised	3,300,000	1,800,000
Total pre-tax intrinsic value based on the closing stock price	$ 13.21
Intrinsic value of stock options outstanding	7,200,000
Intrinsic value of stock options exercisable	3,900,000
Percentage of employee contribution from compensation	10.00%
Weighted average remaining contractual term for unvested restricted shares, in years	2 years 4 months	2 years
Compensation cost expected to be recognized (in years)	2 years 7 months
Share-based payment awards in the form of stock option awards	651,000	553,000	470,000
Contractual term of stock options (in years)	7 years
Minimum
Equity [Line Items]
Vesting period, in years	3 years
Maximum
Equity [Line Items]
Vesting period, in years	4 years
Unvested Stock Options
Equity [Line Items]
Total compensation cost not yet recognized	3,700,000
Restricted Stock
Equity [Line Items]
Total compensation cost not yet recognized		11,800,000
BOD authorized plan
Equity [Line Items]
Authorized amount under share repurchase program					$ 50,000,000
Share repurchase plan commencement date					Dec. 12, 2012
Share repurchase plan expiration date				Feb. 07, 2014
Employee Stock Purchase Plan
Equity [Line Items]
Shares available for future grants	200,000
Common shares reserved for future issuance under the ESPP	4,000,000
Rate of discount from the fair market value	15.00%
Shares issued under the ESPP	3,800,000
Shares purchase by employees	200,000	200,000	300,000
Weighted-average price per share paid by the employees	$ 10.57	$ 8.00	$ 7.34
Shareholder Rights Plan
Equity [Line Items]
Shares entitled to be purchased of a series of preferred stock under each right	one-hundredth
Exercise price under the shareholder rights plan	$ 50
Redemption of rights	$ 0.01
Percentage of common shares outstanding	15.00%

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Consolidated Statements Of Equity (USD $) In Thousands	Total	Common stock	Additional paid-in capital	Retained deficit	Foreign currency translation adjustments	Defined benefit pension adjustments
Balance at Dec. 31, 2011	$ 608,238	$ 1,358	$ 788,673	$ (225,766)	$ 44,737	$ (764)
Balance (in shares) at Dec. 31, 2011		135,821
Shares issued under stock plans (in shares)		2,694
Shares issued under stock plans	7,431	28	7,403	0	0	0
Share-based compensation expense	9,881	0	9,881	0	0	0
Repurchase and retirement of common stock (in shares)		(57)
Repurchase and retirement of common stock	(427)	(1)	(329)	(97)	0	0
Tax benefit associated with stock plans	3,886	0	3,886	0	0	0
Pension liability adjustment	(295)	0	0	0	0	(295)
Reclassification of cumulative translation adjustment associated with acquisition of business	(216)	0	0	0	(216)	0
Foreign currency translation	(2,524)	0	0	0	(2,524)	0
Net income	68,825	0	0	68,825	0	0
Balance at Dec. 31, 2012	694,799	1,385	809,514	(157,038)	41,997	(1,059)
Balance (in shares) at Dec. 31, 2012		138,458
Shares issued under stock plans (in shares)		1,882
Shares issued under stock plans	7,685	18	7,667	0	0	0
Share-based compensation expense	7,928	0	7,928	0	0	0
Repurchase and retirement of common stock (in shares)		(1,606)
Repurchase and retirement of common stock	(15,494)	(16)	(9,391)	(6,087)	0	0
Tax benefit associated with stock plans	3,914	0	3,914	0	0	0
Pension liability adjustment	202	0	0	0	0	202
Reclassification of cumulative translation adjustment associated with liquidated subsidiaries	787	0	0	0	787	0
Reclassification of cumulative translation adjustment associated with acquisition of business	0
Foreign currency translation	(17,504)	0	0	0	(17,504)	0
Net income	74,526	0	0	74,526	0	0
Balance at Dec. 31, 2013	756,843	1,387	819,632	(88,599)	25,280	(857)
Balance (in shares) at Dec. 31, 2013		138,734
Shares issued under stock plans (in shares)		1,059
Shares issued under stock plans	1,080	11	1,069	0	0	0
Share-based compensation expense	8,887	0	8,887	0	0	0
Tax benefit associated with stock plans	842	0	842	0	0	0
Pension liability adjustment	(150)	0	0	0	0	(150)
Reclassification of cumulative translation adjustment associated with acquisition of business	0
Foreign currency translation	(26,948)	0	0	0	(26,948)	0
Net income	7,887	0	0	7,887	0	0
Balance at Dec. 31, 2014	$ 748,441	$ 1,398	$ 830,430	$ (80,712)	$ (1,668)	$ (1,007)
Balance (in shares) at Dec. 31, 2014		139,793

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Consolidated Balance Sheets (Parenthetical) (USD $)	Dec. 31, 2014	Dec. 31, 2013
Preferred stock, par value	$ 0.01	$ 0.01
Preferred stock, shares authorized	5,000,000	5,000,000
Preferred stock, shares issued	0	0
Preferred stock, shares outstanding	0	0
Common stock, par value	$ 0.01	$ 0.01
Common stock, shares authorized	400,000,000	400,000,000
Common stock, shares issued	139,792,583	138,734,442
Common stock, shares outstanding	139,792,583	138,734,442

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Asset Retirement Obligations (Notes)

12 Months Ended

Dec. 31, 2014

Asset Retirement Obligation [Abstract]

Asset Retirement Obligations

ASSET RETIREMENT OBLIGATIONS

In connection with the acquisition of ATMI described in note 2, the Company assumed asset retirement obligations (AROs) related to environmental disposal obligations associated with cylinders used to supply customers with ATMI's products, and certain restoration obligations associated with its leased facilities. Prior to the acquisition, the Company also had AROs related certain restoration obligations associated with its leased facilities.

Changes in the carrying amounts of the Company’s AROs at December 31, 2014 are shown below:

(In thousands)
Balance at December 31, 2013	$	2,167
Liabilities assumed in ATMI acquisition	7,365
Liabilities settled	(128		)
Liabilities incurred	248
Accretion expense	195
Revision of estimate	103
Balance at December 31, 2014	$	9,950

The ARO liability is included in the consolidated balance sheets in other accrued liabilities, and pension benefit obligations and other liabilities.

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Reconciliation of Total Segment Profit to Operating Income (Detail) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Segment Reporting, Reconciling Item for Operating Profit (Loss) from Segment to Consolidated [Line Items]
Total segment profit	$ 228,500	$ 148,944	$ 165,809
Charge for fair value write-up of acquired inventory sold	48,586	0	0
Amortization of intangibles	37,067	9,347	9,594
Contingent consideration fair value adjustment	(1,282)	(1,813)	0
Unallocated general and administrative expenses	122,775	47,173	56,771
Operating income	21,354	94,237	99,444
Other expense (income), net	2,727	(1,794)	(249)
(Loss) income before income tax (benefit) expense and equity in net loss (income) of affiliates	(13,392)	96,195	99,703
Interest expense	33,355	153	271
Interest income	$ 1,336	$ 317	$ 281

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Shares Excluded Underlying Stock Based Awards from Calculations of Diluted EPS (Detail) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Antidilutive Securities Excluded from Computation of Earnings Per Share [Line Items]
Shares excluded from calculations of diluted EPS	1,183	1,248	1,431

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Document and Entity Information (USD $)	12 Months Ended
	Dec. 31, 2014	Feb. 18, 2015	Jun. 28, 2014
Document Information [Line Items]
Document Type	10-K
Amendment Flag	false
Document Period End Date	Dec. 31, 2014
Document Fiscal Year Focus	2014
Document Fiscal Period Focus	FY
Trading Symbol	ENTG
Entity Registrant Name	ENTEGRIS INC
Entity Central Index Key	0001101302
Current Fiscal Year End Date	--12-31
Entity Well-known Seasoned Issuer	Yes
Entity Current Reporting Status	Yes
Entity Voluntary Filers	No
Entity Filer Category	Large Accelerated Filer
Entity Common Stock, Shares Outstanding		139,792,583
Entity Public Float			$ 1,683,447,163

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Income Taxes

12 Months Ended

Dec. 31, 2014

Income Taxes

INCOME TAXES

(Loss) income before income taxes for the years ended December 31, 2014, 2013 and 2012 was derived from the following sources:

(In thousands)	2014			2013		2012
Domestic	$	(118,917	)	$	29,066	$	49,056
Foreign	105,525			67,129		50,647
(Loss) income before income tax (benefit) expense and equity in net loss (income of affiliates	$	(13,392	)	$	96,195	$	99,703

Income tax (benefit) expense for the years ended December 31, 2014, 2013, and 2012 is summarized as follows:

(In thousands)	2014			2013			2012
Current:
Federal	$	1,574		$	854		$	5,797
State	111			772			654
Foreign	21,459			12,937			11,183
	23,144			14,563			17,634
Deferred (net of valuation allowance):
Federal	(41,484		)	6,003			11,165
State	(1,545		)	(650		)	168
Foreign	(1,687		)	1,753			1,914
	(44,716		)	7,106			13,247
Income tax (benefit) expense	$	(21,572	)	$	21,669		$	30,881

Income tax (benefit) expense differs from the expected amounts based upon the statutory federal tax rates for the years ended December 31, 2014, 2013, and 2012 as follows:

(In thousands)	2014			2013			2012
Expected federal income tax at statutory rate	$	(4,687	)	$	33,668		$	34,896
State income taxes before valuation allowance, net of federal tax effect	(2,115		)	(357		)	440
Income (losses) without tax expense (benefit)	(72		)	22			(40		)
Effect of foreign source income	(19,996		)	(10,583		)	(5,314		)
Tax contingencies	1,379			1,383			1,374
Valuation allowance	2,106			445			358
Non-deductible acquisition costs	2,176			—			—
U.S. federal research credit	(2,085		)	(3,233		)	(790		)
Other items, net	1,722			324			(43		)
Income tax (benefit) expense	$	(21,572	)	$	21,669		$	30,881

As a result of commitments made by the Company related to investments in tangible property and equipment, the establishment of a research and development center in 2006 and certain employment commitments, income from certain manufacturing activities in Malaysia is exempt from tax for years up through 2015. The income tax benefits attributable to the tax status of this subsidiary are estimated to be $8 million ($0.06 cents per diluted share), $5.4 million ($0.04 cents per diluted share), and $2.4 million ($0.02 cents per diluted share) for the years ended December 31, 2014, 2013, and 2012, respectively. The 2014 effective tax rate reflects an additional benefit of $3.3 million due to a lower tax rate than the U.S.

In 2012, ATMI's Korea subsidiary made commitments to produce a certain line of products. In return for this commitment, the Company has a tax holiday on income earned on sales of these products for five years and a partial holiday for two additional years. The income tax benefit attributable to this tax holiday are $0.2 million ($0.0 cents per diluted share) for the year ended December 31, 2014. The 2014 effective tax rate reflects an additional benefit of $0.2 million due to a lower tax rate than the U.S.

The Company also made employment and spending commitments to Singapore. In return for those commitments, the Company has been granted a partial tax holiday for five years and an additional partial tax holiday for an additional two years if the requirements are met. The income tax benefits attributable to the tax status are estimated to be $1.2 million ($0.01 cents per diluted share), $0.5 million ($0.00 cents per diluted share), $0 million ($0.00 cents per diluted share) for the years ending December 31, 2014, 2013, and 2012 respectively. The 2014 effective tax rate reflects an additional benefit of $3.7 million due to a lower tax rate than the U.S.

The 2014 effective tax rate reflects a $2.6 million benefit related to foreign tax credits.

The significant components of the Company’s deferred tax assets and deferred tax liabilities at December 31, 2014 and 2013 are as follows:

(In thousands)	2014			2013
Deferred tax assets attributable to:
Accounts receivable	$	243		$	269
Inventory	5,663			2,853
Accruals not currently deductible for tax purposes	9,915			8,844
Net operating loss and credit carryforwards	12,183			3,972
Capital loss carryforward	3,088			2,779
Depreciation	10,498			1,070
Equity compensation	3,662			3,157
Asset impairments	732			732
Purchased intangible assets	—			1,439
Other, net	5,549			2,976
Gross deferred tax assets	51,533			28,091
Valuation allowance	(11,104		)	(5,435		)
Total deferred tax assets	40,429			22,656
Deferred tax liabilities attributable to:
Depreciation	—			(3,245		)
Purchased intangible assets	(77,149		)	(601		)
Total deferred tax liabilities	(77,149		)	(3,846		)
Net deferred tax (liabilities) assets	$	(36,720	)	$	18,810

Deferred tax assets are generally required to be reduced by a valuation allowance if, based on the weight of available positive and negative evidence, it is more likely than not that some portion or all of the deferred tax assets will not be realized.

As of December 31, 2014 and 2013, the Company had a net U.S. deferred tax liability of $24.8 million and a net U.S. deferred tax asset of $16.0 million, respectively, which are composed of temporary differences and various tax credit carryforwards. Management believes that it is more likely than not that the benefit from certain state net operating loss carryforwards, state credits, and a federal capital loss carryforward will not be realized. In recognition of this risk, management has provided a valuation allowance of $10.6 million and $5.4 million as of December 31, 2014 and 2013, respectively, on the related deferred tax assets. If the assumptions change and management determines the assets will be realized, the tax benefits relating to any reversal of the valuation allowance on deferred tax assets at December 31, 2014 will be recognized as a reduction of income tax expense.

As of December 31, 2014 and 2013, the Company had a net non-U.S. deferred tax liability of $1.4 million and a net non-U.S. deferred tax asset of $8.2 million, respectively, for which management determined based upon the available evidence a valuation allowance of $0.5 million as of December 31, 2014 was required against the non-U.S. gross deferred tax assets. For other non-U.S. jurisdictions, management is relying upon projections of future taxable income to utilize deferred tax assets.

At December 31, 2014, there were approximately $618.0 million of accumulated undistributed earnings of subsidiaries outside the United States, all of which are considered to be reinvested indefinitely. Management has considered its future cash needs and affirms its intention to indefinitely invest such earnings overseas to be utilized for working capital purposes, expansion of existing operations, possible acquisitions and other international items. No U.S. tax has been provided on such earnings. If they were remitted to the Company, applicable U.S. federal and foreign withholding taxes may be partially offset by available foreign tax credits. Management has concluded that it is impracticable to compute the full actual tax impact, but it estimates that $12 million of withholding taxes would be incurred if the $618.0 million were distributed.

At December 31, 2014, the Company had state operating loss carryforwards of approximately $42.4 million, which begin to expire in 2015; foreign tax credit carryforwards of approximately $7.2 million, which begin to expire in 2019; federal research and development credit carryforwards of approximately $3.6 million, which begin to expire in 2033; and foreign operating loss carryforwards of $2.7 million, which begin to expire in 2023. The Company will need approximately $31.0 million of certain types of domestic income between 2015 and 2033 to fully utilize the credit carryforwards.

Benefits from tax positions should be recognized in the financial statements only when it is more likely than not that the tax positions will be sustained upon examination by the appropriate taxing authority that would have full knowledge of all relevant information. A tax position that meets the more-likely-than-not recognition threshold is measured at the largest amount of benefit that is greater than fifty percent likely of being realized upon ultimate settlement. Tax positions that fail to meet the more-likely-than-not recognition threshold should be recognized in the first subsequent financial reporting period in which that threshold is met. Previously recognized tax positions that no longer meet the more-likely-than-not recognition threshold should be derecognized in the first subsequent financial reporting period in which that threshold is no longer met. The provisions also provide guidance on the accounting for and disclosure of unrecognized tax benefits, interest and penalties.

Reconciliations of the beginning and ending balances of the total amounts of gross unrecognized tax benefits for the years ended December 31, 2014 and 2013 are as follows:

(In thousands)	2014			2013
Gross unrecognized tax benefits at beginning of year	$	4,277		$	5,419
Increase from acquisition	2,431			—
Increases in tax positions for prior years	—			28
Decreases in tax positions for prior years	(246		)	—
Increases in tax positions for current year	2,409			1,879
Settlements	(1,385		)	(2,298		)
Lapse in statute of limitations	(1,502		)	(751		)
Gross unrecognized tax benefits at end of year	$	5,984		$	4,277

The total amount of net unrecognized tax benefits that, if recognized, would affect the effective tax rate was $4.3 million at December 31, 2014.

Penalties and interest paid or received are recorded in other income, net, in the consolidated statements of operations. For the years ended December 31, 2014 and 2013, the Company has accrued interest and penalties related to unrecognized tax benefits of $0.5 million and $0.8 million, respectively. Benefits of $0.4 million, $0.1 million and $0.0 million were recognized as interest and penalties in the consolidated statements of operations for the years ended December 31, 2014, 2013 and 2012, respectively.

The Company files income tax returns in the U.S. and in various state, local and foreign jurisdictions. The statutes of limitations related to the consolidated Federal income tax return and state returns are closed for all years up to and including 2010 and 2010, respectively. With respect to foreign jurisdictions, the statute of limitations varies from country to country, with the earliest open year for the Company’s major foreign subsidiaries being 2008.

Due to the potential for resolution of a foreign examination and the expiration of various statutes of limitations, it is reasonably possible that the Company’s gross unrecognized tax benefit balance may decrease within the next twelve months by approximately $0.2 million.

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Pension Plans Accumulated Benefit Obligation in Excess of Plan Assets (Detail) (USD $) In Thousands, unless otherwise specified	Dec. 31, 2014	Dec. 31, 2013
Defined Benefit Plan Disclosure [Line Items]
Projected benefit obligation	$ 8,482	$ 9,855
Accumulated benefit obligation	7,180	8,651
Fair value of plan assets	$ 380	$ 384

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Reconciliation of Share Amount Used in Computation of Basic and Diluted Earnings Per Share (Detail) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Schedule of Earnings Per Share, Basic and Diluted, by Common Class [Line Items]
Basic earnings (loss) per share-Weighted common shares outstanding	139,311	138,950	137,306
Weighted common shares assumed upon exercise of options and vesting of restricted stock units	751	668	1,106
Diluted earnings (loss) per share-Weighted common shares outstanding	140,062	139,618	138,412

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Consolidated Statements Of Operations (USD $) In Thousands, except Per Share data, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Net sales	$ 962,069	$ 693,459	$ 715,903
Cost of sales	585,386	399,245	408,520
Gross profit	376,683	294,214	307,383
Selling, general and administrative expenses	231,833	137,123	147,405
Engineering, research and development expenses	87,711	55,320	50,940
Amortization of intangible assets	37,067	9,347	9,594
Contingent consideration fair value adjustment	(1,282)	(1,813)	0
Operating income	21,354	94,237	99,444
Interest expense	33,355	153	271
Interest income	(1,336)	(317)	(281)
Other expense (income), net	2,727	(1,794)	(249)
(Loss) income before income tax (benefit) expense and equity in net loss (income) of affiliates	(13,392)	96,195	99,703
Income tax (benefit) expense	(21,572)	21,669	30,881
Equity in net loss (income) of affiliates	293	0	(3)
Net income	$ 7,887	$ 74,526	$ 68,825
Earnings Per Share:
Basic net income per common share	$ 0.06	$ 0.54	$ 0.50
Diluted net income per common share	$ 0.06	$ 0.53	$ 0.50
Weighted shares outstanding
Basic	139,311	138,950	137,306
Diluted	140,062	139,618	138,412

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Inventories

12 Months Ended

Dec. 31, 2014

Inventories

INVENTORIES

Inventories at December 31, 2014 and 2013 consist of the following:

(In thousands)	2014		2013
Raw materials	$	41,015	$	26,012
Work-in-process	14,190		10,512
Finished goods (a)	107,431		56,998
Supplies	489		552
	$	163,125	$	94,074

(a) Includes consignment inventories held by customers for $11.0 million and $5.1 million at December 31, 2014 and 2013,

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Trade Accounts and Notes Receivable

12 Months Ended

Dec. 31, 2014

Accounts, Notes, Loans and Financing Receivable, Gross, Allowance, and Net [Abstract]

Trade Accounts and Notes Receivable

TRADE ACCOUNTS AND NOTES RECEIVABLE

Trade accounts and notes receivable from customers at December 31, 2014 and 2013 consist of the following:

(In thousands)	2014		2013
Accounts receivable	$	151,082	$	94,613
Notes receivable	4,706		9,039
	155,788		103,652
Less allowance for doubtful accounts	1,827		1,779
	$	153,961	$	101,873

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Segment Information

12 Months Ended

Dec. 31, 2014

Segment Information

SEGMENT INFORMATION

In 2014 the Company changed its financial segment reporting to reflect management and organizational changes made by the Company. Under the new structure, the manager of two primary segments is accountable for results at the segment profit level and reports directly to the Company’s Chief Executive Officer, who is responsible for evaluating companywide performance and resource allocation decisions between the segments, and is the chief operating decision maker. Accordingly, the Company will report its financial performance based on two reportable segments: Critical Materials Handling (CMH) and Electronic Materials (EM). The Company's two reportable segments are business divisions that provide unique products and services.

• CMH: provides a broad range of products that filter, handle, dispense, and protect critical materials used in the semiconductor manufacturing process and in other high-technology manufacturing. CMH’s products and subsystems include high-purity materials packaging, fluid handling and dispensing systems and liquid filters as well as microenvironment products that protect critical substrates such as wafers during shipping and manufacturing. CMH also provides specialized graphite components and specialty coatings for high-temperature applications.

• EM: provides high performance materials, materials packaging and materials delivery systems that enable high yield, cost effective semiconductor manufacturing. EM’s products consist of specialized chemistries and performance materials, gas microcontamination control systems and components, and sub-atmospheric pressure gas delivery systems for the safe and efficient handling of hazardous gases to semiconductor process equipment.

Inter-segment sales are not significant. Segment profit is defined as net sales less direct segment operating expenses, excluding certain unallocated expenses, consisting mainly of general and administrative costs for the Company’s human resources, finance and information technology functions as well as interest expense, amortization of intangible assets, charges for the fair value write-up of acquired inventory sold, contingent consideration fair value adjustments, income taxes and equity in net income of affiliates.

Corporate assets consist primarily of cash and cash equivalents, short-term investments, assets held for sale, investments, deferred tax assets and deferred tax charges.

Summarized financial information for the Company’s reportable segments is shown in the following tables.

(In thousands)	2014		2013		2012
Net sales:
CMH	$	653,964	$	609,826	$	630,929
EM	308,105		83,633		84,974
Total net sales	$	962,069	$	693,459	$	715,903
(In thousands)	2014		2013		2012
Segment profit:
CMH	$	138,379	$	128,910	$	144,758
EM	90,121		20,034		21,051
Total segment profit	$	228,500	$	148,944	$	165,809
(In thousands)	2014		2013		2012
Total assets:
CMH	$	500,575	$	395,291	$	362,672
EM	804,889		46,831		41,348
Corporate	456,627		433,172		407,524
Total assets	$	1,762,091	$	875,294	$	811,544

(In thousands)	2014		2013		2012
Depreciation and amortization:
CMH	$	37,455	$	32,797	$	31,612
EM	41,671		4,238		4,358
Corporate	4,578		1,780		1,637
Total depreciation and amortization	$	83,704	$	38,815	$	37,607
(In thousands)	2014		2013		2012
Capital expenditures:
CMH	$	33,619	$	49,893	$	40,683
EM	19,450		6,842		5,579
Corporate	4,664		3,625		3,667
Total capital expenditures	$	57,733	$	60,360	$	49,929

The following table reconciles total segment profit to income before income taxes and equity in net loss (income) of affiliates:

(In thousands)	2014			2013			2012
Total segment profit	$	228,500		$	148,944		$	165,809
Less:
Charge for fair value write-up of acquired inventory sold	48,586			—			—
Amortization of intangibles	37,067			9,347			9,594
Contingent consideration fair value adjustment	(1,282		)	(1,813		)	—
Unallocated general and administrative expenses	122,775			47,173			56,771
Operating income	21,354			94,237			99,444
Interest expense	33,355			153			271
Interest income	(1,336		)	(317		)	(281		)
Other expense (income), net	2,727			(1,794		)	(249		)
(Loss) income before income tax (benefit) expense and equity in net loss (income) of affiliates	$	(13,392	)	$	96,195		$	99,703

The following table presents amortization of intangibles for each of the Company’s segments for the years ended December 31, 2014, 2013 and 2012:

(In thousands)	2014		2013		2012
Amortization of intangibles:
CMH	$	10,180	$	8,620	$	8,772
EM	26,887		727		822
	$	37,067	$	9,347	$	9,594

The following table summarizes total net sales, based upon the country to which sales to external customers were made for the years ended December 31, 2014, 2013 and 2012:

(In thousands)	2014		2013		2012
Net sales:
United States	$	239,040	$	201,380	$	218,903
Japan	121,452		101,529		131,521
Germany	27,867		23,240		24,437
Taiwan	230,824		128,194		126,732
Singapore	46,051		30,942		25,607
South Korea	122,328		76,353		70,763
China	66,186		36,299		31,499
Other	108,321		95,522		86,441
	$	962,069	$	693,459	$	715,903

The following table summarizes property, plant and equipment, net, attributed to significant countries for the years ended December 31, 2014, 2013 and 2012:

(In thousands)	2014		2013		2012
Property, plant and equipment:
United States	$	222,125	$	123,846	$	86,476
Korea	32,163		4,422		4,946
Japan	22,261		24,007		27,024
Malaysia	20,607		23,801		28,398
Other	16,413		10,364		10,177
	$	313,569	$	186,440	$	157,021

In the year ended December 31, 2014, one individual customer accounted for 13.6% of net sales, which includes sales from both of the Company's segments. In the years ended December 31, 2013 and 2012, no single customer accounted for ten percent or more of net sales.

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Equity

12 Months Ended

Dec. 31, 2014

Equity

EQUITY

Share Repurchase Program

On December 12, 2012, the Board of Directors authorized a repurchase program covering up to an aggregate of $50.0 million of the Company’s common stock in open market transactions and in accordance with one or more pre-arranged stock trading plans established in accordance with Rule 10b5-1 under the Securities Exchange Act of 1934, as amended. Under the repurchase program, which expired on February 7, 2014, the Company repurchased $15.5 million and $0.4 million shares for the years ended December 31, 2013 and 2012, respectively.

2010 Stock Plan

At December 31, 2009, the Company had outstanding stock awards under five stock incentive plans: the Entegris, Inc. 1999 Long-Term Incentive and Stock Option Plan; the Entegris, Inc. Outside Directors’ Option Plan and three former Mykrolis stock option plans assumed by the Company on August 10, 2005; the 2001 Equity Incentive Plan; the 2003 Employment Inducement and Acquisition Stock Option Plan; and the 2001 Non-Employee Director Stock Option Plan. On December 17, 2009, the Company’s Board of Directors approved the 2010 Stock Plan, subject to the approval of the Company’s stockholders. On May 5, 2010, the stockholders approved the 2010 Stock Plan. The 2010 Stock Plan replaced the above existing plans for future stock awards and stock option grants. Subsequent to the replacement of the prior plans on May 5, 2010, no awards were or will be made under the prior plans.

Subsequent to the acquisition of ATMI, the Company's Board of Directors approved the absorption of the ATMI, Inc. 2010 Stock Plan (ATMI Plan) into the Company's 2010 Stock Plan for the remainder of the term of the ATMI Plan. 5.7 million additional shares became available for grant by the Company upon absorption of the ATMI Plan.

The 2010 Stock Plan provides for the issuance of stock options and other share-based awards to selected employees, directors, and other individuals or entities that provide services to the Company or its affiliates. The 2010 Stock Plan has a term of ten years. Under the 2010 Stock Plan, the Board of Directors or a committee selected by the Board of Directors will determine for each award, the term, price, number of shares, rate at which each award is exercisable and whether restrictions are imposed on the shares subject to the awards. The exercise price for option awards generally may not be less than the fair market value per share of the underlying common stock on the date granted. The 2010 Stock Plan allows that after December 31, 2009 any stock awards that were awarded from the expired plans mentioned above that are forfeited, expired or otherwise terminated without issuance of such stock award again be available for issuance under the 2010 Stock Plan.

General Option Information

Stock option activity for the 2010 Stock Plan and predecessor plans for the years ended December 31, 2014, 2013 and 2012 is summarized as follows:

	2014				2013				2012
(Shares in thousands)	Number of shares		Weighted average exercise price		Number of shares		Weighted average exercise price		Number of shares		Weighted average exercise price
Options outstanding, beginning of year	1,961		$	8.20	2,565		$	8.20	3,561		$	6.53
Granted	651		11.71		553		9.88		470		9.27
Exercised	(546	)	6.56		(786	)	7.54		(1,293	)	3.76
Expired or Forfeited	(32	)	14.06		(371	)	12.10		(173	)	9.83
Options outstanding, end of year	2,034		$	9.67	1,961		$	8.20	2,565		$	8.20
Options exercisable, end of year	728		$	7.92	1,001		$	6.92	1,828		$	8.18

Options outstanding for the Company’s stock plans at December 31, 2014 are summarized as follows:

(Shares in thousands)	Options outstanding				Options exercisable
Range of exercise prices	Number outstanding	Weighted average remaining life in years	Weighted- average exercise price		Number exercisable	Weighted average exercise price
$0.00 to $9.40	842	3.0 years	$	7.96	602	$	7.50
$9.88 to $9.88	541	5.1 years	9.88		126	9.88
$11.71 to $11.71	651	6.1 years	11.71		—	—
	2,034	4.6 years	9.67		728	7.92

The weighted average remaining contractual term for options outstanding and exercisable for all plans at December 31, 2014 was 4.6 years and 3.1 years, respectively.

For all plans, the Company had shares available for future grants of 11.6 million shares, 6.8 million shares, and 7.7 million shares at December 31, 2014, 2013 and 2012, respectively.

For all plans, the total pre-tax intrinsic value of stock options exercised during the years ended December 31, 2014 and 2013 was $3.3 million and $1.8 million, respectively. The aggregate intrinsic value, which represents the total pre-tax intrinsic value based on the Company’s closing stock price of $13.21 at December 31, 2014, which theoretically could have been received by the option holders had all option holders exercised their options as of that date, was $7.2 million and $3.9 million for options outstanding and options exercisable, respectively.

Employee Stock Purchase Plan

The Company maintains the Entegris, Inc. Employee Stock Purchase Plan (ESPP). A total of 4.0 million common shares are reserved for issuance under the ESPP. The ESPP allows employees to elect, at six-month intervals, to contribute up to 10% of their compensation, subject to certain limitations, to purchase shares of common stock at a discount of 15% from the fair market value on the first day or last day of each six-month period. The Company treats the ESPP as a compensatory plan. As of December 31, 2014, 3.8 million shares had been issued under the ESPP. At December 31, 2014, 0.2 million shares remained available for issuance under the ESPP. Employees purchased 0.2 million shares, 0.2 million shares, and 0.3 million shares, at a weighted-average price of $10.57, $8.00, and $7.34 during the years ended December 31, 2014, 2013 and 2012, respectively.

The table below sets forth the amount of cash received by the Company from the exercise of stock options and employee contributions to the ESPP during the years ended December 31, 2014, 2013 and 2012:

(In thousands)	2014		2013		2012
Exercise of stock options and employee contributions to the ESPP	$	3,117	$	7,685	$	7,431

Restricted Stock Awards

Restricted stock awards are awards of common stock made under the 2010 Stock Plan that are subject to restrictions on transfer and to a risk of forfeiture if the awardee terminates employment with the Company prior to the lapse of the restrictions. The value of such stock is determined using the market price on the grant date. Compensation expense for restricted stock awards is generally recognized using the straight-line single-option method. A summary of the Company’s restricted stock activity for the years ended December 31, 2014, 2013 and 2012 is presented in the following table:

	2014				2013				2012
(Shares inthousands)	Number of shares		Weighted average grant date fair value		Number of shares		Weighted average grant date fair value		Number of shares		Weighted average grant date fair value
Unvested, beginning of year	1,570		$	8.98	1,802		$	7.02	2,298		$	5.49
Granted	834		11.59		717		9.85		744		9.21
Vested	(686	)	8.32		(871	)	5.67		(1,132	)	5.42
Forfeited	(105	)	10.14		(78	)	8.66		(108	)	6.22
Unvested, end of year	1,613		10.53		1,570		8.98		1,802		7.02

The weighted average remaining contractual term for unvested restricted shares at December 31, 2014 and 2013 was 2.3 years and 2.0 years, respectively.

As of December 31, 2014, the total compensation cost related to unvested stock options and restricted stock awards not yet recognized was $3.7 million and $11.8 million, respectively, and is expected to be recognized over the next 2.6 years on a weighted-average basis.

Valuation and Expense Information

The Company recognizes compensation expense for all share-based payment awards made to employees and directors based on their estimated fair values on the date of grant. Share-based compensation expense is based on the value of the portion of share-based payment awards that is ultimately expected to vest during the period.The following table summarizes the allocation of share-based compensation expense related to employee stock options, restricted stock awards and grants under the employee stock purchase plan for the years ended December 31, 2014, 2013 and 2012:

(In thousands)	2014		2013		2012
Cost of sales	$	809	$	690	$	575
Engineering, research and development expenses	705		502		500
Selling, general and administrative expenses	7,373		6,736		8,806
Share-based compensation expense	8,887		7,928		9,881
Tax benefit	2,746		2,643		3,686
Share-based compensation expense, net of tax	$	6,141	$	5,285	$	6,195

Stock Options

Share-based payment awards in the form of stock option awards for 0.7 million, 0.6 million and 0.5 million options were granted to employees during the years ended December 31, 2014, 2013, and 2012. Compensation expense is based on the grant date fair value. The awards vest annually over a three-year or four-year period and have a contractual term of seven years. The Company estimates the fair value of stock options using the Black-Scholes valuation model. Key inputs and assumptions used to estimate the fair value of stock options include the grant price of the award, the expected option term, volatility of the Company’s stock, the risk-free rate and the Company’s dividend yield. Estimates of fair value are not intended to predict actual future events or the value ultimately realized by employees who receive equity awards, and subsequent events are not indicative of reasonableness of the original estimates of fair value made by the Company.

The fair value of each stock option grant was estimated at the date of grant using a Black-Scholes option pricing model. The following table presents the weighted-average assumptions used in the valuation and the resulting weighted-average fair value per option granted for the years ended December 31, 2014, 2013 and 2012:

Employee stock options:	2014			2013			2012
Volatility	43.3		%	51.7		%	82.4		%
Risk-free interest rate	1.1		%	0.7		%	0.6		%
Dividend yield	—		%	—		%	—		%
Expected life (years)	3.8			3.6			3.8
Weighted average fair value per option	$	3.99		$	3.80		$	5.42

A historical daily measurement of volatility is determined based on the expected life of the option granted. The risk-free interest rate is determined by reference to the yield on an outstanding U.S. Treasury note with a term equal to the expected life of the option granted. Expected life is determined by reference to the Company’s historical experience. The Company determines the dividend yield by dividing the expected annual dividend on the Company’s stock by the option exercise price.

Shareholder Rights Plan On July 27, 2005, the Company’s Board of Directors adopted a shareholder rights plan (the Rights Plan) pursuant to which Entegris declared a dividend on August 8, 2005 to its shareholders of record on that date of one preferred share purchase right (a Right) for each share of Entegris common stock owned on August 8, 2005 and authorized the issuance of Rights in connection with future issuances of Entegris common stock. Each Right entitles the holder to purchase one-hundredth of a share of a series of preferred stock at an exercise price of $50, subject to adjustment as provided in the Rights Plan. The Rights Plan is designed to protect Entegris’ shareholders from attempts by others to acquire Entegris on terms or by using tactics that could deny all shareholders the opportunity to realize the full value of their investment. The Rights are attached to the shares of the Company’s common stock until certain triggering events specified in the Rights Agreement occur, including, unless approved by the Company’s Board of Directors, an acquisition by a person or group of specified levels of beneficial ownership of Entegris common stock or a tender offer for Entegris common stock. Upon the occurrence of any of these triggering events, the Rights authorize the holders to purchase at the then-current exercise price for the Rights, that number of shares of the Company’s common stock having a value equal to twice the exercise price. The Rights are redeemable by the Company for $0.01 and will expire on August 8, 2015. One of the events which will trigger the Rights is the acquisition, or commencement of a tender offer, by a person (an Acquiring Person, as defined in the shareholder rights plan), other than Entegris or any of its subsidiaries or employee benefit plans, of 15% or more of the outstanding shares of the Company’s common stock. An Acquiring Person may not exercise a Right.

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Fair Value Measurements of Pension Plan Assets (Detail) (USD $) In Thousands, unless otherwise specified	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Defined Benefit Plan Disclosure [Line Items]
Fair value of plan assets	$ 380	$ 384	$ 382
Fair Value, Inputs, Level 1
Defined Benefit Plan Disclosure [Line Items]
Fair value of plan assets	$ 380	$ 384

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Debt

12 Months Ended

Dec. 31, 2014

Debt [Abstract]

Debt

DEBT

Long-term debt at December 31, 2014 consists of the following:

(In thousands)	December 31, 2014
Senior secured term loan facility due 2021	$	406,796
Senior unsecured notes due 2022	360,000
Total long-term debt	766,796
Less current maturities of long-term debt	100,000
Long-term debt less current maturities	$	666,796

Annual maturities of long-term debt contractually due as of December 31, 2014 are as follows:

Fiscal year ending	(In thousands)
2015	$	26,597
2016	—
2017	—
2018	—
2019	—
Thereafter	740,199
	$	766,796

Under the terms of the Term Loan Facility, the Company is obligated to remit payments of approximately $26.6 million on the Term Loan Facility in 2015. However, based on management's plans and intent, the Company reflects $100 million as the current maturity of long-term debt in its consolidated balance sheet as of December 31, 2014. During the year ended December 31, 2014, the Company made payments of $51.2 million on the Term Loan Facility, reducing the contractual principal payments otherwise due in 2015.

As described in note 2 to the consolidated financial statements, the Company issued debt with a principal amount of $820 million to supply the funding required to complete its acquisition of ATMI. Debt issuance costs of $2.3 million paid directly to lending institutions are recorded as a debt discount, while debt issuance costs of $20.7 million paid to third parties are capitalized as debt issuance costs, and reflected within other current and other noncurrent assets. These debt issuance costs are being amortized as interest expense over the term of the debt instrument using the effective-interest method for the senior secured term loan facility and senior unsecured notes, and the straight-line method for the senior secured asset-based revolving credit facility. In the year ended December 31, 2014, the Company expensed $5.8 million of the debt issuance costs, including $4.0 million for bridge financing fees paid for the availability of funding for the acquisition of ATMI. These amounts are included in interest expense in the Company's consolidated statements of operations.

Senior Secured Term Loan Facility and Security Agreement

On April 30, 2014, the Company entered into a term loan credit and guaranty agreement with Goldman Sachs Bank USA, as administrative agent, collateral agent, sole lead arranger, sole bookrunner and sole syndication agent (the Term Loan Facility), that provides senior secured financing of $460 million (which may be increased by up to $225 million in certain circumstances). Borrowings under the Term Loan Facility bear interest at a rate per annum equal to, at the Company’s option, a base rate (such as prime rate or LIBOR) plus, an applicable margin. The Company's interest rate is 3.5% at December 31, 2014. In addition to paying interest on outstanding principal under the Term Loan Facility, the Company is required to pay customary agency fees.

During the year ended December 31, 2014, the Company made payments of $51.2 million on the Term Loan Facility.

The credit agreement governing the Term Loan Facility requires the Company to prepay outstanding term loans, subject to certain exceptions, with (a) up to 50% of the Company’s annual Excess Cash Flow (as defined in the credit agreement governing the Term Loan Facility) and (b) 100% of the net cash proceeds of (i) certain asset sales and casualty and condemnation events, subject to reinvestment rights and certain other exceptions; and (ii) any incurrence or issuance of certain debt, other than debt permitted under the Term Loan Facility.

The Company may voluntarily prepay outstanding loans under the Term Loan Facility at any time without premium or penalty other than customary “breakage” costs with respect to LIBOR loans.

All obligations under the Term Loan Facility are unconditionally guaranteed by certain of the Company’s existing wholly owned domestic subsidiaries, and are secured, subject to certain exceptions, by substantially all of the Company’s assets and the assets of the Company's subsidiary guarantors.

The Term Loan Facility contains a number of negative covenants that, subject to certain exceptions, restrict the Company’s ability and each of the Company’s subsidiaries ability to incur additional indebtedness; pay dividends on its capital stock or redeem, repurchase or retire its capital stock or its other indebtedness; make investments, loans and acquisitions; create restrictions on the payment of dividends or other amounts to the Company from the Company’s restricted subsidiaries; engage in transactions with its affiliates; sell assets, including capital stock of its subsidiaries; materially alter the business it conducts; consolidate or merge; incur liens; and engage in sale-leaseback transactions. The credit agreement governing the Term Loan Facility additionally contains certain customary representations and warranties, affirmative covenants and provisions relating to events of default. The Company is in compliance with all of the above covenants at December 31, 2014.

2022 Senior Unsecured Notes

On April 1, 2014, the Company issued $360 million aggregate principal amount of 6% senior unsecured notes due April 1, 2022 (the 2022 Senior Unsecured Notes). The 2022 Senior Unsecured Notes were issued under an indenture dated as of April 1, 2014 (the 2022 Senior Unsecured Notes Indenture) by and among the Company and Wells Fargo Bank, National Association, as trustee (the 2022 Senior Unsecured Notes Trustee). Interest on the 2022 Senior Unsecured Notes is payable semi-annually in arrears on April 1 and October 1, commencing October 1, 2014.

The 2022 Senior Unsecured Notes are guaranteed, jointly and severally, fully and unconditionally, on an unsecured senior basis, by each of the Company’s domestic subsidiaries (the Guarantors) that guarantee indebtedness under the Company’s senior secured term loan facility and senior secured asset-based revolving credit facility (Senior Secured Credit Facilities).

As provided in the Senior Unsecured Notes Indenture, the Company may at its option on one or more occasions redeem all or a part of the 2022 Senior Unsecured Notes at a redemption price equal to (a) 100% of the principal amount of the 2022 Senior Unsecured Notes redeemed plusa make-whole premium if redeemed prior to April 1, 2017, or (b) a percentage of principal amount between a percentage from 100% and 104.5% of the aggregate principal amount of notes to be redeemed depending on the period of redemption, if redeemed on or after April 1, 2017, plus, in each case, accrued and unpaid interest thereto.

Upon a change in control, the Company is required to offer to purchase all of the 2022 Senior Unsecured Notes at a price in cash equal to 101% of the aggregate principal amount thereof, plus accrued and unpaid interest, if any, to, but not including, the date of purchase.

If the Company or its subsidiaries engage in asset sales, the Company generally must either invest the net cash proceeds from such sales in its business within a period of time, prepay debt under the Senior Secured Credit Facilities or make an offer to purchase a principal amount of the 2022 Senior Unsecured Notes equal to the excess net cash proceeds, subject to certain exceptions. 

The 2022 Senior Unsecured Notes Indenture contains covenants that, among other things, limit the Company’s ability and the ability of the Company’s restricted subsidiaries to pay dividends or distributions or redeem or repurchase equity; prepay subordinated debt or make certain investments, loans, advances and acquisitions; incur or guarantee additional debt, or issue certain disqualified stock and preferred stock; create liens; engage in a consolidation or merger, or sell, transfer or otherwise dispose of all or substantially all of their assets; enter into transactions with affiliates; and create restrictions on the payment of dividends or other amounts to the Company from its restricted subsidiaries. The Company is in compliance with all of the above covenants at December 31, 2014.

The 2022 Senior Unsecured Notes Indenture also provides for events of default which, if certain of them occur, would permit the 2022 Senior Unsecured Notes Trustee or the holders of at least 25% in aggregate principal amount of the then total outstanding 2022 Senior Unsecured Notes to declare the principal, premium, if any, interest and any other monetary obligations on all the then-outstanding 2022 Senior Unsecured Notes to be due and payable immediately.

Senior Secured Asset-Based Revolving Credit Facility and Security Agreement

On April 30, 2014, the Company entered into an asset-based credit agreement with Goldman Sachs Bank USA, as administrative agent, collateral agent, sole lead arranger, sole bookrunner and sole syndication agent (the ABL Facility), that provides senior secured financing of $75 million (which may be increased by up to $35 million in certain circumstances), subject to a borrowing base limitation. The borrowing base for the ABL Facility at any time equals the sum of certain percentages of various accounts and inventories and stood at $64.6 million at December 31, 2014. The ABL Facility includes borrowing capacity in the form of letters of credit up to $35 million of the facility, and up to $20 million in U.S. dollars for borrowings on same-day notice, referred to as swingline loans.

Borrowings under the ABL Facility bear interest at a rate per annum equal to, at the Company’s option, a base rate (prime rate or LIBOR), plus an applicable margin. Swingline loans shall bear interest at a rate per annum equal to the base rate plus the applicable margin.

In addition to paying interest on outstanding principal under the ABL Facility, the Company is required to pay a commitment fee of 0.33% per annum in respect of the unutilized commitments thereunder. The Company must also pay customary letter of credit fees and agency fees.

The Company may voluntarily reduce the unutilized portion of the commitment amount and repay outstanding loans at any time. Prepayments of the loans may be made without premium or penalty other than customary “breakage” costs with respect to LIBOR loans.

During the year ended December 31, 2014, the Company borrowed and repaid $37.5 million in borrowings under the ABL Facility. There is no outstanding balance under the ABL Facility at December 31, 2014.

There is no scheduled amortization under the Company’s ABL Facility. The principal amount outstanding under the ABL Facility is due and payable in full on April 30, 2019.

All obligations under the ABL Facility are unconditionally guaranteed by certain of the Company’s existing wholly owned domestic subsidiaries and are secured, subject to certain exceptions, by substantially all of the Company’s assets and the assets of the Company's subsidiaries that have guaranteed the ABL Facility.

The ABL Facility contains a number of negative covenants that, among other things, subject to certain exceptions, restrict the Company’s ability and the ability of each of the Company’s subsidiaries to incur additional indebtedness; pay dividends on its capital stock or redeem, repurchase or retire its capital stock or its other indebtedness; make investments, loans and acquisitions; create restrictions on the payment of dividends or other amounts to the Company from the Company’s restricted subsidiaries; engage in transactions with its affiliates; sell assets, including capital stock of its subsidiaries; materially alter the business it conducts; consolidate or merge; incur liens; and engage in sale-leaseback transactions. The credit agreement governing the ABL Facility additionally contains certain customary representations and warranties, affirmative covenants and provisions relating to events of default. The Company is in compliance with all of the above covenants at December 31, 2014.

Intercreditor Agreement

In connection with the closing of the ABL Facility and Term Loan Facility, on April 30, 2014, Goldman Sachs Bank USA, as collateral agent for the ABL Facility and as collateral agent for the Term Loan Facility, entered into an intercreditor agreement (the Intercreditor Agreement), acknowledged by the Company, which governs the relative priorities (and certain other rights) of the ABL Facility lenders and Term Loan Facility lenders pursuant the respective security agreements that each entered into with the Company and the guarantors.

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Lease Commitments - Additional Information (Detail) (USD $) In Millions, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Operating Leased Assets [Line Items]
Total rental expense for all equipment and building operating leases	$ 13.3	$ 9.5	$ 9.4

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Property, Plant and Equipment

12 Months Ended

Dec. 31, 2014

Property, Plant and Equipment

PROPERTY, PLANT AND EQUIPMENT

Property, plant, and equipment at December 31, 2014 and 2013 consists of the following:

(In thousands)	2014		2013		Estimated useful lives in years
Land	$	15,064	$	12,866
Buildings and improvements	150,450		109,105		5-35
Manufacturing equipment	214,509		168,197		5-10
Canisters and cylinders	42,154		—		3-12
Molds	80,532		76,909		3-5
Office furniture and equipment	99,624		70,158		3-8
Construction in progress	27,185		33,021
	629,518		470,256
Less accumulated depreciation	315,949		283,816
	$	313,569	$	186,440

The table below sets forth the depreciation expense for the years ended December 31, 2014, 2013, and 2012:

(In thousands)	2014		2013		2012
Depreciation expense	$	46,637	$	29,468	$	28,013

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Intangible Assets

12 Months Ended

Dec. 31, 2014

Intangible Assets

GOODWILL AND INTANGIBLE ASSETS

Goodwill activity for each of the Company's two reportable segments, Critical Materials Handling (CMH) and Electronic Materials (EM), was as follows:

(In thousands)	CMH			EM			Total
December 31, 2012	$	2,209		$	—		$	2,209
Addition due to acquisition	10,090			—			10,090
Other, including foreign currency translation	(25		)	—			(25		)
December 31, 2013	12,274			—			12,274
Addition due to acquisition	35,329			296,795			332,124
Other, including foreign currency translation	(120		)	(3,535		)	(3,655		)
December 31, 2014	$	47,483		$	293,260		$	340,743

As of December 31, 2014, goodwill amounted to approximately $340.7 million, an increase of $328.5 million from the balance at December 31, 2013. The increase in goodwill relates to the acquisition of ATMI completed in April 2014 as described in note 2 and is provisional subject to the Company's final valuation of assets acquired and liabilities assumed. The increase was partially offset by the foreign currency translation adjustments.

Identifiable intangible assets at December 31, 2014 and 2013 consist of the following:

2014
(In thousands)	Gross  carrying Amount		Accumulated amortization		Net  carrying value		Weighted average life in years
Patents	$	1,347	$	779	$	568	9.8
Developed technology	199,402		78,785		120,617		6.6
Trademarks and trade names	17,152		8,883		8,269		9.8
Customer relationships	220,420		54,452		165,968		10.3
Other	16,768		3,636		13,132		6.6
	$	455,089	$	146,535	$	308,554	8.5

2013
(In thousands)	Gross  carrying amount		Accumulated amortization		Net  carrying value		Weighted average life in years
Patents	$	1,369	$	649	$	720	9.8
Developed technology	78,686		62,257		16,429		7.4
Trademarks and trade names	13,092		7,306		5,786		12.0
Customer relationships	57,617		39,146		18,471		11.0
Other	2,213		110		2,103		13.3
	$	152,977	$	109,468	$	43,509	9.3

The table below sets forth the amortization expense for the years ended December 31, 2014, 2013, and 2012:

(In thousands)	2014		2013		2012
Amortization expense	$	37,067	$	9,347	$	9,594

The amortization expense for each of the five succeeding years and thereafter relating to intangible assets currently recorded in the Company's consolidated balance sheets is estimated to be the following at December 31, 2014:

Fiscal year ending December 31	(In thousands)
2015	$	47,835
2016	45,401
2017	43,977
2018	42,725
2019	40,472
Thereafter	88,144
	$	308,554

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Lease Commitments

12 Months Ended

Dec. 31, 2014

Lease Commitments

LEASE COMMITMENTS

As of December 31, 2014, the Company was obligated under noncancellable operating lease agreements for certain sales offices and manufacturing facilities, manufacturing equipment, vehicles, information technology equipment and warehouse space. Future minimum lease payments for noncancellable operating leases with initial or remaining terms in excess of one year are as follows:

Fiscal year ending December 31	(In thousands)
2015	$	10,708
2016	6,810
2017	4,596
2018	3,738
2019	948
Thereafter	292
Total minimum lease payments	$	27,092

Total rental expense for all equipment and building operating leases for the years ended December 31, 2014, 2013, and 2012, were $13.3 million, $9.5 million, and $9.4 million, respectively.

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Reconciliation of Income Tax Expense With Expected Amounts Based Upon Statutory Federal Tax Rates (Detail) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Investments, Owned, Federal Income Tax Note [Line Items]
Expected federal income tax at statutory rate	$ (4,687)	$ 33,668	$ 34,896
State income taxes before valuation allowance, net of federal tax effect	(2,115)	(357)	440
Income (losses) without tax expense (benefit)	(72)	22	(40)
Effect of foreign source income	(19,996)	(10,583)	(5,314)
Tax contingencies	1,379	1,383	1,374
Valuation allowance	2,106	445	358
Nondeductible acquisition costs	2,176	0	0
U.S. federal research credit	(2,085)	(3,233)	(790)
Other items, net	1,722	324	(43)
Income tax (benefit) expense	$ (21,572)	$ 21,669	$ 30,881

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Expected Contribution and Benefit Payments (Detail) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014
Defined Benefit Plan Disclosure [Line Items]
Contribution in year 2014	$ 9
Payments in year 2014	195
Payments in year 2015	129
Payments in year 2016	239
Payments in year 2017	264
Payments in year 2018	216
Payments in years 2019-2023	$ 2,297

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Reconciliations of Total Amount of Gross Unrecognized Tax Benefits (Detail) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013
Schedule of Unrecognized Tax Benefits [Line Items]
Unrecognized Tax Benefits, Increase Resulting from Acquisition	$ 2,431	$ 0
Gross unrecognized tax benefits at beginning of year	4,277	5,419
Increases in tax positions for prior years	0	28
Decreases in tax positions for prior years	(246)	0
Increases in tax positions for current year	2,409	1,879
Settlements	(1,385)	(2,298)
Lapse in statute of limitations	(1,502)	(751)
Gross unrecognized tax benefits at end of year	$ 5,984	$ 4,277

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Components of Income Tax (Benefit) Expense (Detail) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Components Of Income Tax Expense Benefit [Line Items]
Current, Federal	$ 1,574	$ 854	$ 5,797
Current, State	111	772	654
Current, Foreign	21,459	12,937	11,183
Current, Total	23,144	14,563	17,634
Deferred (net of valuation allowance), Federal	(41,484)	6,003	11,165
Deferred (net of valuation allowance), State	(1,545)	(650)	168
Deferred (net of valuation allowance), Foreign	(1,687)	1,753	1,914
Deferred (net of valuation allowance), Total	(44,716)	7,106	13,247
Income tax (benefit) expense	$ (21,572)	$ 21,669	$ 30,881

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Summary of Financial Information for Reportable Segments (Detail) (USD $) In Thousands, unless otherwise specified	3 Months Ended								12 Months Ended
	Dec. 31, 2014	Sep. 27, 2014	Jun. 28, 2014	Mar. 29, 2014	Dec. 31, 2013	Sep. 28, 2013	Jun. 29, 2013	Mar. 30, 2013	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Segment Reporting Information [Line Items]
Total net sales	$ 271,633	$ 273,054	$ 251,578	$ 165,804	$ 186,260	$ 164,585	$ 177,544	$ 165,070	$ 962,069	$ 693,459	$ 715,903
Total segment profit									228,500	148,944	165,809
Total assets	1,762,091				875,294				1,762,091	875,294	811,544
Total depreciation and amortization									83,704	38,815	37,607
Total capital expenditures									57,733	60,360	49,929
CMH
Segment Reporting Information [Line Items]
Total net sales									653,964	609,826	630,929
Total segment profit									138,379	128,910	144,758
Total assets	500,575				395,291				500,575	395,291	362,672
Total depreciation and amortization									37,455	32,797	31,612
Total capital expenditures									33,619	49,893	40,683
EM
Segment Reporting Information [Line Items]
Total net sales									308,105	83,633	84,974
Total segment profit									90,121	20,034	21,051
Total assets	804,889				46,831				804,889	46,831	41,348
Total depreciation and amortization									41,671	4,238	4,358
Total capital expenditures									19,450	6,842	5,579
Corporate
Segment Reporting Information [Line Items]
Total assets	456,627				433,172				456,627	433,172	407,524
Total depreciation and amortization									4,578	1,780	1,637
Total capital expenditures									$ 4,664	$ 3,625	$ 3,667

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Asset Retirement Obligations (Tables)

12 Months Ended

Dec. 31, 2014

Asset Retirement Obligation [Abstract]

Schedule of Asset Retirement Obligations [Table Text Block]

Changes in the carrying amounts of the Company’s AROs at December 31, 2014 are shown below:

(In thousands)
Balance at December 31, 2013	$	2,167
Liabilities assumed in ATMI acquisition	7,365
Liabilities settled	(128		)
Liabilities incurred	248
Accretion expense	195
Revision of estimate	103
Balance at December 31, 2014	$	9,950

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Depreciation Expense (Detail) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Property, Plant and Equipment [Line Items]
Depreciation expense	$ 46,637	$ 29,468	$ 28,013

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Fair Value Measurements

12 Months Ended

Dec. 31, 2014

Fair Value Measurements

 FAIR VALUE MEASUREMENTS

Generally accepted accounting principles establish a fair value hierarchy that prioritizes the inputs used to measure fair value. The three levels of the fair value hierarchy are as follows:

Level 1—Quoted prices in active markets accessible at the reporting date for identical assets and liabilities.

Level 2—Quoted prices for similar assets or liabilities in active markets. Quoted prices for identical or similar assets and liabilities in markets that are not considered active or financial instruments for which all significant inputs are observable, either directly or indirectly.

Level 3—Prices or valuations that require inputs that are significant to the valuation and are unobservable.

A financial instrument’s level within the fair value hierarchy is based on the lowest level of any input that is significant to the fair value measurement.

Financial Assets Measured at Fair Value on a Recurring Basis

The following table presents the Company’s financial assets and liabilities that are measured at fair value on a recurring basis at December 31, 2014 and 2013.

	December 31, 2014								December 31, 2013
(In thousands)	Level 1		Level 2		Level 3		Total		Level 1		Level 2		Level 3		Total
Assets:
Cash equivalents
Commercial paper	$	—	$	—	$	—	$	—	$	—	$	49,988	$	—	$	49,988
Money market fund deposits	—		—		—		—		118,090		—		—		118,090
Short-term investments
Common stock	4,601		—		—		4,601		—		—		—		—
Total assets measured and recorded at fair value	$	4,601	$	—	$	—	$	4,601	$	118,090	$	49,988	$	—	$	168,078
Liabilities:
Foreign exchange forward contracts	$	—	$	1,851	$	—	$	1,851	$	—	$	514	$	—	$	514
Contingent consideration	$	—	$	—	$	—	$	—	$	—	$	—	$	1,282	$	1,282
Total liabilities measured and recorded at fair value	$	—	$	1,851	$	—	$	1,851	$	—	$	514	$	1,282	$	1,796

The following table provides information about derivative positions held by the Company as of December 31, 2014 and 2013:

	December 31, 2014			December 31, 2013
(In thousands)	Gross amounts of recognized liabilities	Gross amounts offset in the consolidated balance sheet	Net amount of liabilities in the consolidated balance sheet	Gross amounts of recognized liabilities	Gross amounts offset in the consolidated balance sheet	Net amount of liabilities in the consolidated balance sheet
Foreign exchange forward contracts	$4,336	$2,485	$1,851	$620	$106	$514

Gains and losses associated with derivatives are recorded in other expense (income), net, in the consolidated statements of operations. Losses associated with derivative instruments not designated as hedging instruments for the years ended December 31, 2014 and 2013 were as follows:

(In thousands)	2014	2013
Losses on foreign currency forward contracts	$1,456	$5,726

Items Measured at Fair Value on a Nonrecurring Basis

In the fourth quarter of 2014, the Company recorded a gain of $0.3 million on the sale of an equity investment that was classified within other expense (income), net in the consolidated statements of operations. The carrying value of the investment at the time of the sale was $2.3 million. The Company received cash proceeds of $2.6 million resulting in the aforementioned gain.

In the fourth quarter of 2014, the Company recorded an other-than-temporary impairment of $1.9 million related to an available-for-sale common stock investment classified in short-term investments in the consolidated balance sheet. The fair value of the investment after impairment was $4.6 million at December 31, 2014 and is classified as a Level 1 investment in the fair value hierarchy. The fair value measurement of the common stock investment was based on a quoted market price in an active market. The Company determined that it was an other-than-temporary impairment due to the significant decline in fair value compared to the acquisition cost for an extended period of time and the financial condition of the issuer.

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Summary of Significant Accounting Policies (Policies)

12 Months Ended

Dec. 31, 2014

Nature of Operations

Nature of Operations Entegris, Inc. (Entegris or the Company) is a leading provider of yield-enhancing materials and solutions for advanced manufacturing processes in the semiconductor and other high-technology industries.

Principles of Consolidation

Principles of Consolidation The consolidated financial statements include the accounts of the Company and its majority-owned subsidiaries. Intercompany profits, transactions and balances have been eliminated in consolidation.

Use of Estimates

Use of Estimatesand Basis of Presentation The preparation of consolidated financial statements in conformity with accounting principles generally accepted in the United States requires management to make judgments, estimates and assumptions that affect the amounts reported in the consolidated financial statements and accompanying notes. On an ongoing basis, Entegris evaluates its estimates, including those related to receivables, inventories, property, plant and equipment, intangible assets, accrued liabilities, income taxes and share-based compensation, among others. Actual results could differ from those estimates.

Concentrations of Suppliers

Concentrations of Suppliers Certain materials included in the Company’s products are obtained from a single source or a limited group of suppliers. Although the Company seeks to reduce dependence on those sole and limited source suppliers, the partial or complete loss of these sources could have at least a temporary adverse effect on the Company’s results of operations. Furthermore, a significant increase in the price of one or more of these components could adversely affect the Company’s results of operations.

Cash and Cash Equivalents

Cash and Cash Equivalents Cash and cash equivalents include cash on hand and highly liquid debt securities with original maturities of three months or less, which are valued at cost and approximates fair value.

Allowance For Doubtful Accounts

Allowance for Doubtful Accounts An allowance for uncollectible trade receivables is estimated based on a combination of write-off history, aging analysis and any specific, known troubled accounts. The Company maintains an allowance for doubtful accounts that management believes is adequate to cover expected losses on trade receivables.

Inventories

Inventories Inventories are stated at the lower of cost or market. Cost is determined by the first-in, first-out (FIFO) method.

Property, Plant, And Equipment

Property, Plant, and Equipment Property, plant and equipment are carried at cost and are depreciated on the straight-line method over the estimated useful lives of the assets. When assets are retired or disposed of, the cost and related accumulated depreciation are removed from the accounts, and gains or losses are recognized in the same period. Maintenance and repairs are expensed as incurred; with significant additions and improvements are capitalized. Long-lived assets, including property, plant and equipment, are reviewed for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset or group of asset(s) may not be recoverable based on estimated future undiscounted cash flows. The amount of impairment, if any, is measured as the difference between the net book value and the estimated fair value of the asset(s).

Investments

Investments The Company’s nonmarketable investments are accounted for under either the cost or equity method of accounting, as appropriate. All nonmarketable investments are periodically reviewed to determine whether declines, if any, in fair value below cost basis are other-than-temporary. If the decline in fair value is determined to be other-than-temporary, an impairment loss is recorded and the investment is written down to a new cost basis.

Fair Value of Financial Instruments

Fair Value of Financial Instruments The carrying value of cash equivalents, accounts receivable, accounts payable, accrued payroll and related benefits, and other accrued liabilities approximates fair value due to the short maturity of those instruments.

Goodwill and Intangible Assets

Intangible Assets Goodwill represents the excess of acquisition costs over the fair value of the net assets of businesses acquired. Goodwill is not amortized, but instead tested at least annually for impairment. Goodwill is also tested for impairment as changes in circumstances occur indicating that the carrying value may not be recoverable. At August 31, 2014, the Company's annual testing date, it was determined there was no impairment of its goodwill.

Amortizable intangible assets include, among other items, patented, unpatented and other developed technology and customer-based intangibles, and are amortized using the straight-line method over their respective estimated useful lives of 3 to 15 years. The Company reviews intangible assets, along with other long-lived assets - primarily property, plant and equipment - for impairment if changes in circumstances or the occurrence of events suggest the remaining value may not be recoverable.

Derivative Financial Instruments

Derivative Financial Instruments The Company records derivatives as assets or liabilities on the balance sheet and measures such instruments at fair value. Changes in fair value of derivatives are recorded each period in the Company’s consolidated statements of operations.

The Company periodically enters into forward foreign currency contracts to reduce exposures relating to rate changes in certain foreign currencies. Certain exposures to credit losses related to counterparty nonperformance exist. However, the Company does not anticipate nonperformance by the counterparties since they are large, well-established financial institutions. None of these derivatives is accounted for as a hedge transaction. Accordingly, changes in the fair value of forward foreign currency contracts are recorded as other expense (income), net, in the Company’s consolidated statements of operations. The fair values of the Company’s derivative financial instruments are based on prices quoted by financial institutions for these instruments.

Foreign Currency Translation

Foreign Currency Translation Assets and liabilities of foreign subsidiaries are generally translated from foreign currencies into U.S. dollars at period-end exchange rates, and the resulting gains and losses arising from translation of net assets located outside the U.S. are recorded as a cumulative translation adjustment, a component of accumulated other comprehensive income in the consolidated balance sheets. Income statement amounts are translated at the weighted average exchange rates for the year. Translation adjustments are not adjusted for income taxes, as substantially all translation adjustments relate to permanent investments in non-U.S. subsidiaries. Gains and losses resulting from foreign currency transactions are included in other expense (income), net, in the Company's consolidated statements of operations.

Revenue Recognition

Revenue Recognition Revenue and the related cost of sales are generally recognized upon shipment of the products. Revenue for product sales is recognized upon delivery, when persuasive evidence of an arrangement exists, when title and risk of loss have been transferred to the customer, collectability is reasonably assured, and pricing is fixed or determinable. Shipping and handling fees related to sales transactions are billed to customers and are recorded as revenue.

The Company sells its products throughout the world primarily to companies in the microelectronics industry. The Company performs continuing credit evaluations of its customers and generally does not require collateral. Letters of credit may be required from its customers in certain circumstances. The Company provides for estimated returns based on historical and current trends in both sales and product returns.

The Company collects various sales and value-added taxes on certain product and service sales that are accounted for on a net basis.

Shipping and Handling Costs

Shipping and Handling Costs Shipping and handling costs incurred are recorded in cost of sales in the Company's consolidated statements of operations.

Engineering,Research and Development Expenses

Engineering, Research and Development Expenses Engineering, research and development costs are expensed as incurred.

Share-Based Compensation

Share-based Compensation The Company measures the cost of employee services received in exchange for the award of equity instruments based on the fair value of the award at the date of grant. The cost is recognized over the period during which an employee is required to provide services in exchange for the award. Compensation expense is based on the grant date fair value. Because share-based compensation expense recognized in the Company's consolidated statements of operations is based on awards ultimately expected to vest, it has been reduced for expected forfeitures, which are estimated at the time of grant with such estimates revised, if necessary, in subsequent periods if actual forfeitures differ from those estimates.

Income Taxes

Income Taxes The Company accounts for income taxes under the asset and liability method, which requires the recognition of deferred tax assets and liabilities for the expected future tax consequences of events that have been included in the financial statements. Under this method, deferred tax assets and liabilities are determined on the basis of the differences between the financial statements and tax basis of assets and liabilities using enacted tax rates in effect for the year in which the differences are expected to reverse. The effect of a change in tax rates on deferred tax assets and liabilities is recognized in income tax expense in the period that includes the enactment date.

The Company recognizes deferred tax assets to the extent that it believes these assets are more likely than not to be realized. A valuation allowance is recorded to reduce deferred tax assets when it is more likely than not that the Company would not be able to realize all or part of its deferred tax assets. In making such a determination, the Company considers all available positive and negative evidence, including future reversals of existing temporary differences, projected future taxable income, tax-planning strategies, and results of recent operations. If the Company determines that it would be able to realize its deferred tax assets in the future in excess of their net recorded amount, the Company would make an adjustment to the deferred tax asset valuation allowance, which would reduce the provision for income taxes.

The Company’s policy for recording interest and penalties associated with audits and unrecognized tax benefits is to record such items as a component of income before taxes. Penalties and interest to be paid or received are recorded in other expense (income), net, in the statement of operations.

Comprehensive (Loss) Income

Comprehensive (Loss) Income Comprehensive income represents the change in equity resulting from items other than shareholder investments and distributions. The Company’s foreign currency translation adjustments, unrealized gains and losses on available-for-sale investments, and minimum pension liability adjustments are included in accumulated other comprehensive income. Comprehensive income and the components of accumulated other comprehensive income are presented in the accompanying consolidated statements of equity and comprehensive (loss) income.

Recent Accounting Pronouncements

Recent Accounting Pronouncements

Accounting Standards Updates issued but not effective for the Company until after December 31, 2014 are not expected to have a material effect on the Company’s consolidated financial statements.

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Summary of Total Net Sales to External Customers (Detail) (USD $) In Thousands, unless otherwise specified	3 Months Ended								12 Months Ended
	Dec. 31, 2014	Sep. 27, 2014	Jun. 28, 2014	Mar. 29, 2014	Dec. 31, 2013	Sep. 28, 2013	Jun. 29, 2013	Mar. 30, 2013	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Segment Reporting Information [Line Items]
Net sales	$ 271,633	$ 273,054	$ 251,578	$ 165,804	$ 186,260	$ 164,585	$ 177,544	$ 165,070	$ 962,069	$ 693,459	$ 715,903
UNITED STATES
Segment Reporting Information [Line Items]
Net sales									239,040	201,380	218,903
JAPAN
Segment Reporting Information [Line Items]
Net sales									121,452	101,529	131,521
GERMANY
Segment Reporting Information [Line Items]
Net sales									27,867	23,240	24,437
TAIWAN, PROVINCE OF CHINA
Segment Reporting Information [Line Items]
Net sales									230,824	128,194	126,732
SINGAPORE
Segment Reporting Information [Line Items]
Net sales									46,051	30,942	25,607
KOREA, REPUBLIC OF
Segment Reporting Information [Line Items]
Net sales									122,328	76,353	70,763
CHINA
Segment Reporting Information [Line Items]
Net sales									66,186	36,299	31,499
All Other Segments
Segment Reporting Information [Line Items]
Net sales									$ 108,321	$ 95,522	$ 86,441

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Inventories Additional (Detail) (USD $) In Millions, unless otherwise specified	Dec. 31, 2014	Dec. 31, 2013
Inventory Net [Abstract]
Consignment inventories held by customers	$ 11.0	$ 5.1

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Quarterly Information-Unaudited (Tables)

12 Months Ended

Dec. 31, 2014

Quartely Information

	Fiscal quarter ended
(In thousands, except per share data)	March 29, 2014		June 28, 2014			September 27, 2014			December 31, 2014
Net sales	$	165,804	$	251,578		$	273,054		$	271,633
Gross profit	71,352		88,668			98,743			117,920
Net income	14,312		(14,669		)	(1,068		)	9,312
Basic income per share	0.10		(0.11		)	(0.01		)	0.07
Diluted income per share	0.10		(0.11		)	(0.01		)	0.07

	Fiscal quarter ended
(In thousands, except per share data)	March 30, 2013		June 29, 2013		September 28, 2013		December 31, 2013
Net sales	$	165,070	$	177,544	$	164,585	$	186,260
Gross profit	67,128		77,570		70,132		79,384
Net income	16,397		19,781		17,807		20,541
Basic income per share	0.12		0.14		0.13		0.15
Diluted income per share	0.12		0.14		0.13		0.15

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Consolidated Statements Of Comprehensive Income (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Net income	$ 7,887	$ 74,526	$ 68,825
Other comprehensive loss, net of tax
Foreign currency translation adjustments	(26,948)	(17,504)	(2,524)
Reclassification of cumulative translation adjustment associated with liquidated subsidiaries	0	787	0
Reclassification of cumulative translation adjustment associated with acquisition of business	0	0	(216)
Unrealized loss on available-for-sale investments	(1,884)	0	0
Reclassification adjustment associated with unrealized loss realized upon the write-down of available-for-sale investments	1,884	0	0
Pension liability adjustments, net of income tax expense (benefit) of $71,$(37), and $74 for year ended December 31, 2014, 2013, and 2012	(150)	202	(295)
Other comprehensive loss	(27,098)	(16,515)	(3,035)
Comprehensive (loss) income	$ (19,211)	$ 58,011	$ 65,790

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Fair Value Measurements (Losses) gains on forward currency contracts (Details) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Losses on foreign exchange forward contracts	$ 1,456	$ 5,726

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Acquisitions

12 Months Ended

Dec. 31, 2014

Acquisitions [Abstract]

Acquisitions

ACQUISITIONS

ATMI

On April 30, 2014, the Company acquired ATMI, Inc. (the Merger), a Delaware corporation (ATMI), for approximately $1.1 billion in cash pursuant to an Agreement and Plan of Merger (the Merger Agreement), dated as of February 4, 2014. As a result of the Merger, ATMI became a wholly-owned subsidiary of the Company. The Merger was accounted for under the acquisition method of accounting and the results of operations of ATMI are included in the Company's consolidated financial statements as of and since April 30, 2014. Direct costs of $13.3 million associated with the acquisition of ATMI, consisting of professional and consulting fees, and bridge financing costs, were expensed as incurred in the year ended December 31, 2014. These costs are included in selling, general and administrative expense and interest expense, respectively, in the Company's consolidated statements of operations.

ATMI is a leading supplier of high-performance materials, materials packaging and materials delivery systems used worldwide in the manufacture of microelectronic devices. These products consist of “front-end” semiconductor performance materials, sub-atmospheric pressure gas delivery systems for safe handling and delivery of toxic and hazardous gases, and high-purity materials packaging and dispensing systems that allow for the reliable introduction of low volatility liquids and solids to microelectronics processes. The acquisition was executed to expand the Company’s product offering base and technological base, and enhance the leverage of its selling and administrative functions. ATMI’s sales for the year ended December 31, 2013 were approximately $361 million.

The purchase price of ATMI consisted of the following:

(In thousands):
Cash paid to ATMI shareholders	$	1,099,033
Cash paid in settlement of share-based compensation awards	31,451
Total purchase price	1,130,484
Less cash and cash equivalents acquired	321,094
Total purchase price, net of cash acquired	$	809,390

Under the terms of the Merger Agreement, the Company paid $34 per share for all outstanding common shares of ATMI (excluding treasury shares). In addition, the Company settled all outstanding share-based compensation awards held by ATMI employees at the same per share price. The acquisition method of accounting requires the Company to include the amount associated with pre-combination service as consideration in the acquisition, reflected in the table immediately above, while the fair value of the unvested portion of the awards in the amount of $21.3 million is recorded as expense, classified as selling, general and administrative expense, in the Company's consolidated statement of operations.

The Merger was funded with existing cash balances as well as funds raised by the Company through the issuance of debt in the form of a senior secured term loan in an aggregate principal amount of $460 million and senior unsecured notes in an aggregate principal amount of $360 million as described in note 7 to the consolidated financial statements.

The following table summarizes the allocation of the purchase price to the fair values assigned to the assets acquired and liabilities assumed at the date of the ATMI acquisition:

(In thousands):
Accounts receivable and other current assets	$	107,967
Inventory	115,507
Property, plant and equipment	126,302
Identifiable intangible assets	297,040
Other noncurrent assets	13,216
Current liabilities	(60,056		)
Deferred tax liabilities and other noncurrent liabilities	(122,710		)
Net assets acquired	477,266
Goodwill	332,124
Total purchase price, net of cash acquired	$	809,390

The fair value write-up of acquired finished goods inventory was $48.6 million. This amount was recorded as an incremental cost of sales charge, amortized over the expected turn of the acquired inventory, during the year ended December 31, 2014.

The fair value of acquired property, plant and equipment of $126.3 million is valued at its value-in-use and is provisional pending the Company's completion of its valuation of certain assets, and its final review thereof.

The fair value of the acquired intangible assets is $297.0 million. The acquired intangible assets, all of which are finite-lived, have a weighted average useful life of approximately 8.3 years and are being amortized on a straight-line basis. The intangible assets that comprise the amount include customer relationships of $165.1 million (10-year weighted average useful life), developed technology and related trade names of $120.8 million (6-year weighted average useful life), and other intangible assets of $11.1 million (7.4-year weighted average useful life).

The fair value of acquired identifiable intangible assets was determined using the “income approach” on an individual project basis. In performing these valuations, the key underlying probability-adjusted assumptions of the discounted cash flows were projected revenues, gross margin expectations and operating cost estimates. The valuations were based on the information that was available as of the acquisition date and the expectations and assumptions that have been deemed reasonable by the Company’s management. There are inherent uncertainties and management judgment required in these determinations. The fair value measurements of the assets acquired and liabilities assumed were based on valuations involving significant unobservable inputs, or Level 3 in the fair value hierarchy.

The purchase price of ATMI exceeded the net of the acquisition-date amounts of the identifiable assets acquired and the liabilities assumed by $332.1 million, which reflects adjustments made during the fourth quarter by the Company to its preliminary allocations of the purchase price to the fair values assigned to the assets acquired and liabilities assumed recorded in prior quarters, primarily related to ATMI's property, plant and equipment, intangible assets and tax accounts. Cash flows used to determine the purchase price included strategic and synergistic benefits (investment value) specific to the Company, which resulted in a purchase price in excess of the fair value of identifiable net assets. The purchase price also included the fair values of other assets that were not identifiable, not separately recognizable under accounting rules (e.g., assembled workforce) or of immaterial value in addition to a going-concern element that represents the Company's ability to earn a higher rate of return on the group of assets than would be expected on the separate assets as determined during the valuation process. This additional investment value resulted in goodwill. No amount of goodwill is expected to be deductible for income tax purposes.

The final valuation of assets acquired and liabilities assumed is expected to be completed as soon as possible, but no later than one year from the acquisition date. Given the size and complexity of the acquisition, the valuation of certain assets and liabilities, is still being completed, and is subject to final review. Specifically, certain property, plant and equipment, as noted above, and ATMI's tax accounts are provisional pending the completion of and review of such assets and liabilities. To the extent that the Company's estimates require adjustment, the Company will modify the values.

Subsequent to the Merger, the Company agreed to make severance payments of $7.5 million to ATMI executives. Under the terms of various agreements, the executives are unable to compete with the Company for specified periods. Based on the Company's analysis, the payments associated with these noncompete clauses were capitalized as finite-lived intangible assets to be amortized over periods averaging 1.6 years. The fair value of these noncompete clauses was determined using the “income approach” on an individual executive basis, following a methodology similar to the one described above for acquired identifiable intangible assets.

Pro Forma Results (Unaudited)

The following unaudited pro forma financial information presents the combined results of operations of the Company as if the acquisition of ATMI had occurred as of the beginning of the years presented. The unaudited pro forma financial information is not necessarily indicative of what the Company’s consolidated results of operations actually would have been had the acquisition occurred at the beginning of each year. In addition, the unaudited pro forma financial information does not attempt to project the future results of operations of the combined company.

	Year ended
(In thousands, except per share data) (Unaudited)	December 31, 2014		December 31, 2013
Net sales	$	1,076,334	$	1,051,175
Net income	68,279		60,324
Per share amounts:
Net income per common share - basic	$	0.49	$	0.43
Net income per common share - diluted	0.49		0.43

The unaudited pro forma financial information above gives effect to the following:

a. The elimination of transactions between Entegris and ATMI, which upon completion of the merger would be considered intercompany. This reflects the elimination of intercompany sales and associated intercompany accounts.

b. Incremental amortization and depreciation expense related to the estimated fair value of identifiable intangible assets and property, plant and equipment from the purchase price allocation.

c. Removal of the operating results of ATMI's discontinued operations.

The unaudited pro forma financial information above for the year ended December 31, 2014 excludes the purchase accounting impact of the incremental charge reported in cost of salesfor the sale of acquired inventory that was written-up to fair value of $48.6 million.

The pro forma data does not include data for Jetalon Solutions, Inc. for the period prior to its acquisition due to the immaterial impact on the pro forma financial information for the year ended December 31, 2014.

Jetalon

On April 1, 2013, the Company acquired substantially all the operating assets and liabilities of Jetalon Solutions, Inc. (Jetalon), a California-based supplier of fluid metrology products. The transaction was accounted for under the acquisition method of accounting and the results of operations of the entity are included in the Company's consolidated financial statements as of and since April 1, 2013. The acquisition of Jetalon’s assets and liabilities did not constitute a material business combination.

The purchase price for Jetalon included cash consideration of $13.4 million, funded from the Company's then-existing cash on hand, and earnout-based contingent consideration of up to $14.5 million based on the operating performance of Jetalon in 2013, 2014 and 2015. Costs associated with the acquisition of Jetalon were not significant and were expensed as incurred.

Upon acquisition, the Company recorded a contingent consideration obligation of $3.1 million representing the fair value of the earnout-based contingent consideration. This amount was estimated through a valuation model that incorporates probability-adjusted assumptions relating to the achievement of possible operating results and the likelihood of the Company making payments. This fair value measurement is based upon significant inputs not observable in the market and therefore represents a Level 3 measurement.

The purchase price of Jetalon consisted of the following:

(In thousands):
Cash paid at closing	$	13,358
Contingent consideration obligation	3,094
Total purchase price	$	16,452

The following table summarizes the allocation of the purchase price to the fair values assigned to the assets acquired and liabilities assumed at the date of the Jetalon acquisition:

(In thousands):
Accounts receivable, inventory and other assets	$	944
Identifiable intangible assets	5,634
Current liabilities	(216		)
Net assets acquired	6,362
Goodwill	10,090
Total purchase price	$	16,452

The purchase price of Jetalon, including the Company's valuation of contingent consideration, exceeded the net of the acquisition-date amounts of the identifiable assets acquired and the liabilities assumed by $10.1 million. Cash flows used to determine the purchase price included strategic and synergistic benefits (investment value) specific to the Company, which resulted in a purchase price in excess of the fair value of identifiable net assets. The purchase price also included the fair values of other assets that were not identifiable, not separately recognizable under accounting rules (e.g., assembled workforce) or of immaterial value in addition to a going-concern element that represents the Company's ability to earn a higher rate of return on the group of assets than would be expected on the separate assets as determined during the valuation process. This additional investment value resulted in goodwill, which is expected to be deductible for income tax purposes. The goodwill has been assigned to the Company's fluid management reporting unit.

The Company completed its fair value determinations for all elements of the Jetalon acquisition in 2013. Intangible assets, consisting mostly of technology-related intellectual property, are being amortized on a straight-line basis over an estimated useful life of approximately 10 years.

Subsequent changes in the fair value of this obligation have been recognized as adjustments to the contingent consideration obligation and reflected in the Company's consolidated statements of operations. During the years ended December 31, 2014 and 2013, the Company updated its assessment of the contingent consideration based on the valuation methodology described above and recorded gains of $1.3 million and $1.8 million in the Company's consolidated statements of operations, resulting in the reversal of the contingent consideration obligation.

Entegris Precision Technologies Corporation (EPT)

On April 2, 2012, the Company acquired the remaining 50% of its Entegris Precision Technologies Corporation (EPT) joint venture in Taiwan, an equity method investee in which it had previously owned a 50% equity interest accounted for under the equity method. The Company paid $3.4 million in cash for the additional 50% equity interest in the entity. The transaction was accounted for under the acquisition method of accounting and the results of operations of the entity are included in the Company's consolidated financial statements as of and since April 2, 2012. EPT's sales and operating results were not material to the Company's consolidated financial statements.

The Company remeasured its previously held equity interest in the entity at its April 2, 2012 fair value of $2.9 million. Based on the carrying value of the Company's equity interest in EPT before the business combination, the Company recognized a gain of $1.3 million. In addition, in prior reporting periods the Company recognized changes in the value of its equity interest in EPT related to translation adjustments in other comprehensive income. As required under the acquisition method of accounting, the $0.2 million recognized previously in other comprehensive income was reclassified and added in the calculation of the gain noted above.

The purchase price was allocated based on the fair values of all of the assets acquired and liabilities assumed. The sum of the purchase price of the additional 50% equity interest and the fair value of the equity interest in the investee held by the Company at the acquisition date exceeded the net of the acquisition-date amounts of the identifiable assets acquired and the liabilities assumed by $2.2 million, resulting in goodwill, which is not deductible for income tax purposes. EPT is part of the Company’s liquid packaging reporting unit.

As described above, the Company acquired businesses in 2014, 2013 and 2012. As part of the accounting for these transactions, the Company allocated the purchase price of the acquired entities based on the fair value of all the assets acquired and liabilities assumed. The valuation of the assets acquired and liabilities assumed, as well as the Company's contingent consideration obligation in the case of Jetalon and the Company's previously held equity interest in the case of EPT, was based on the information that was available as of the acquisition date and the expectations and assumptions that have been deemed reasonable by the Company's management.

In performing these valuations, the Company used independent appraisals, discounted cash flows and other factors as the best evidence of fair value. The key underlying assumptions of the discounted cash flows were projected revenues, gross margin expectations and operating cost estimates. There are inherent uncertainties and management judgment required in these determinations. No assurance can be given that the underlying assumptions will occur as projected. The fair value measurements of the assets acquired and liabilities assumed were based on valuations involving significant unobservable inputs, or Level 3 in the fair value hierarchy.

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Additional Debt (Details) (USD $)	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012	Apr. 30, 2014	Apr. 01, 2014
Debt Instrument [Line Items]
Long-term Debt	$ 766,796,000			$ 820,000,000
Long-term debt, current maturities	100,000,000	0
Debt discount	2,300,000
Debt Issuance Cost	20,700,000
Amortization of debt issuance costs	5,848,000	0	0
Debt Instrument, Fee Amount	3,951,000
Senior unsecured notes [Member]
Debt Instrument [Line Items]
Long-term Debt	360,000,000
Debt Instrument, Interest Rate, Stated Percentage					6.00%
Debt Instrument, Redemption Price, Percentage	100.00%
Minimum redemption price on or after April 1, 2017	100.00%
Maximum redemption price on or after April 1, 2017	104.50%
Redemption price, change of control	101.00%
Event of default percentage	25.00%
ABL Facility [Member]
Debt Instrument [Line Items]
Repayments of Debt	37,500,000
Maximum Borrowing Capacity				75,000,000
Current Borrowing Capacity	64,600,000
Additional borrowing capacity that may be increased by under ABL				35,000,000
Letters of credit maximum borrowing capacity				35,000,000
Swingline loans available				20,000,000
Line of Credit Facility, Commitment Fee Percentage	0.33%
Senior secured term loan [Member]
Debt Instrument [Line Items]
Long-term Debt	406,796,000
Increased borrowing capacity under certain conditions	225,000,000
Debt Instrument, Interest Rate, Stated Percentage	3.50%
Repayments of Debt	51,150,000
Obligated payments to be remitted in 2015	$ 26,597,000
Prepayment % of annual excess cash flow	50.00%
Prepayment % for asset sales and casualty events	100.00%

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Estimated Amount Amortized from Accumulated Other Comprehensive Income Into Net Periodic Benefit Cost (Detail) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014
Defined Benefit Plan Disclosure [Line Items]
Transition obligation	$ (1)
Prior service cost	17
Net actuarial loss	44
Pension and Other Postretirement Benefit Plans, Amounts that Will be Amortized from Accumulated Other Comprehensive Income (Loss) in Next Fiscal Year, Total	$ 60

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Share Based Compensation Expense Recognized in Statement of Operations (Detail) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Share-based compensation expense	$ 8,887	$ 7,928	$ 9,881

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Acquisitions (Tables)

12 Months Ended

Dec. 31, 2014

Acquisitions [Abstract]

Schedule of Acquisition Purchase Price [Table Text Block]

The purchase price of Jetalon consisted of the following:

(In thousands):
Cash paid at closing	$	13,358
Contingent consideration obligation	3,094
Total purchase price	$	16,452

The purchase price of ATMI consisted of the following:

(In thousands):
Cash paid to ATMI shareholders	$	1,099,033
Cash paid in settlement of share-based compensation awards	31,451
Total purchase price	1,130,484
Less cash and cash equivalents acquired	321,094
Total purchase price, net of cash acquired	$	809,390

Schedule of Business Acquisitions, by Acquisition [Table Text Block]

The following table summarizes the allocation of the purchase price to the fair values assigned to the assets acquired and liabilities assumed at the date of the Jetalon acquisition:

(In thousands):
Accounts receivable, inventory and other assets	$	944
Identifiable intangible assets	5,634
Current liabilities	(216		)
Net assets acquired	6,362
Goodwill	10,090
Total purchase price	$	16,452

The following table summarizes the allocation of the purchase price to the fair values assigned to the assets acquired and liabilities assumed at the date of the ATMI acquisition:

(In thousands):
Accounts receivable and other current assets	$	107,967
Inventory	115,507
Property, plant and equipment	126,302
Identifiable intangible assets	297,040
Other noncurrent assets	13,216
Current liabilities	(60,056		)
Deferred tax liabilities and other noncurrent liabilities	(122,710		)
Net assets acquired	477,266
Goodwill	332,124
Total purchase price, net of cash acquired	$	809,390

Acquisition, Pro Forma Information [Table Text Block]

The following unaudited pro forma financial information presents the combined results of operations of the Company as if the acquisition of ATMI had occurred as of the beginning of the years presented. The unaudited pro forma financial information is not necessarily indicative of what the Company’s consolidated results of operations actually would have been had the acquisition occurred at the beginning of each year. In addition, the unaudited pro forma financial information does not attempt to project the future results of operations of the combined company.

	Year ended
(In thousands, except per share data) (Unaudited)	December 31, 2014		December 31, 2013
Net sales	$	1,076,334	$	1,051,175
Net income	68,279		60,324
Per share amounts:
Net income per common share - basic	$	0.49	$	0.43
Net income per common share - diluted	0.49		0.43

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Summary of Allocation of Share Based Compensation Expense (Detail) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items]
Share-based compensation expense	$ 8,887	$ 7,928	$ 9,881
Tax benefit	2,746	2,643	3,686
Share-based compensation expense, net of tax	6,141	5,285	6,195
Cost of Sales
Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items]
Share-based compensation expense	809	690	575
Engineering, Research and Development Expense
Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items]
Share-based compensation expense	705	502	500
Selling, General And Administrative Expenses
Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items]
Share-based compensation expense	$ 7,373	$ 6,736	$ 8,806

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Fair Value Measurements (Tables)

12 Months Ended

Dec. 31, 2014

Financial Assets Measured At Fair Value On Recurring Basis

The following table presents the Company’s financial assets and liabilities that are measured at fair value on a recurring basis at December 31, 2014 and 2013.

	December 31, 2014								December 31, 2013
(In thousands)	Level 1		Level 2		Level 3		Total		Level 1		Level 2		Level 3		Total
Assets:
Cash equivalents
Commercial paper	$	—	$	—	$	—	$	—	$	—	$	49,988	$	—	$	49,988
Money market fund deposits	—		—		—		—		118,090		—		—		118,090
Short-term investments
Common stock	4,601		—		—		4,601		—		—		—		—
Total assets measured and recorded at fair value	$	4,601	$	—	$	—	$	4,601	$	118,090	$	49,988	$	—	$	168,078
Liabilities:
Foreign exchange forward contracts	$	—	$	1,851	$	—	$	1,851	$	—	$	514	$	—	$	514
Contingent consideration	$	—	$	—	$	—	$	—	$	—	$	—	$	1,282	$	1,282
Total liabilities measured and recorded at fair value	$	—	$	1,851	$	—	$	1,851	$	—	$	514	$	1,282	$	1,796

Schedule of Derivative Instruments [Table Text Block]

The following table provides information about derivative positions held by the Company as of December 31, 2014 and 2013:

	December 31, 2014			December 31, 2013
(In thousands)	Gross amounts of recognized liabilities	Gross amounts offset in the consolidated balance sheet	Net amount of liabilities in the consolidated balance sheet	Gross amounts of recognized liabilities	Gross amounts offset in the consolidated balance sheet	Net amount of liabilities in the consolidated balance sheet
Foreign exchange forward contracts	$4,336	$2,485	$1,851	$620	$106	$514

Derivative Instruments, Gain (Loss) [Table Text Block]

Gains and losses associated with derivatives are recorded in other expense (income), net, in the consolidated statements of operations. Losses associated with derivative instruments not designated as hedging instruments for the years ended December 31, 2014 and 2013 were as follows:

(In thousands)	2014	2013
Losses on foreign currency forward contracts	$1,456	$5,726

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Benefit Plans

12 Months Ended

Dec. 31, 2014

Benefit Plans

BENEFIT PLANS

401(k) Plan The Company maintains the Entegris, Inc. 401(k) Savings and Profit Sharing Plan (the 401(k) Plan) that qualifies as a deferred salary arrangement under Section 401(k) of the Internal Revenue Code. Under the Plan, eligible employees may defer a portion of their pre-tax wages, up to the Internal Revenue Service annual contribution limit. Entegris matches employees’ contributions to a maximum match of 4% of the employee’s eligible wages. The employer matching contribution expense under the Plan was $4.4 million, $3.2 million and $3.0 million in the fiscal years ended December 31, 2014, 2013 and 2012, respectively.

Defined Benefit Plans The employees of the Company’s subsidiaries in Japan, Taiwan and Germany are covered in defined benefit pension plans. The Company uses a December 31 measurement date for its pension plans.

The tables below set forth the Company’s estimated funded status as of December 31, 2014 and 2013:

(In thousands)	2014			2013
Change in benefit obligation:
Benefit obligation at beginning of year	$	9,855		$	12,607
Service cost	64			98
Interest cost	111			122
Actuarial loss (gain)	336			(158		)
Benefits paid	(922		)	(1,072		)
Foreign exchange impact	(962		)	(1,742		)
Benefit obligation at end of year	8,482			9,855
Change in plan assets:
Fair value of plan assets at beginning of year	384			382
Return on plan assets	9			5
Employer contributions	9			9
Foreign exchange impact	(22		)	(12		)
Fair value of plan assets at end of year	380			384
Funded status:
Plan assets less than benefit obligation - Net amount recognized	$	(8,102	)	$	(9,471	)

Amounts recognized in the consolidated balance sheets consist of:

(In thousands)	2014			2013
Noncurrent liability	$	(8,102	)	$	(9,471	)
Accumulated other comprehensive loss, net of taxes	1,007			857

Amounts recognized in accumulated other comprehensive loss, net of tax consist of:

(In thousands)	2014			2013
Net actuarial loss	$	1,043		$	811
Prior service cost	227			259
Unrecognized transition obligation	(9		)	(11		)
Gross amount recognized	1,261			1,059
Deferred income taxes	(254		)	(202		)
Net amount recognized	$	1,007		$	857

Information for pension plans with an accumulated benefit obligation in excess of plan assets:

(In thousands)	2014		2013
Projected benefit obligation	$	8,482	$	9,855
Accumulated benefit obligation	7,180		8,651
Fair value of plan assets	380		384

The components of the net periodic benefit cost for the years ended December 31, 2014, 2013 and 2012 were as follows:

(In thousands)	2014			2013			2012
Pension benefits:
Service cost	$	64		$	98		$	89
Interest cost	111			122			163
Expected return on plan assets	(8		)	(7		)	(7		)
Amortization of prior service cost	18			19			19
Amortization of net transition obligation	(1		)	(1		)	(1		)
Amortization of plan loss	22			219			20
Recognized actuarial net loss	7			8			1
Acquisition	—			—			—
Curtailments	—			—			—
Net periodic pension benefit cost	$	213		$	458		$	284

The estimated amount that will be amortized from accumulated other comprehensive income into net periodic benefit cost in 2015 is as follows:

(In thousands)
Transition obligation	$	(1	)
Prior service cost	17
Net actuarial loss	44
	$	60

Assumptions used in determining the benefit obligation and net periodic benefit cost for the Company’s pension plans for the years ended December 31, 2014, 2013 and 2012 are presented in the following table as weighted-averages:

	2014		2013		2012
Benefit obligations:
Discount rate	1.13	%	1.23	%	1.19	%
Rate of compensation increase	4.41	%	4.10	%	4.18	%
Net periodic benefit cost:
Discount rate	1.83	%	1.41	%	1.80	%
Rate of compensation increase	3.38	%	2.01	%	2.84	%
Expected return on plan assets	1.35	%	0.70	%	1.14	%

The plans’ expected return on assets as shown above is based on management’s expectations of long-term average rates of return to be achieved by the underlying investment portfolios. In establishing this assumption, management considers historical and expected returns for the asset classes in which the plans are invested, as well as current economic and capital market conditions. The discount rate primarily used by the Company is based on market yields at the valuation date on government bonds as well as the estimated maturity of benefit payments.

Plan Assets

At December 31, 2014 and 2013, the Company’s pension plan assets are deposited in Bank of Taiwan in the form of money market funds, where the Bank of Taiwan is the assigned funding vehicle for the statutory retirement benefit.

The fair value measurements of the Company’s pension plan assets at December 31, 2014, by asset category are as follows:

(In thousands)			Quoted prices in active markets for identical assets		Significant observable inputs	Significant unobservable inputs
Asset category	Total		(Level 1)		(Level 2)	(Level 3)
Taiwan plan assets (a)	$	380	$	380	—	—
	$	380	$	380	—	—

(a) This category includes investments in the government of Taiwan’s pension fund. The government of Taiwan is responsible for the strategy and allocation of the investment contributions.

The fair value measurements of the Company’s pension plan assets at December 31, 2013, by asset category are as follows:

(In thousands)			Quoted prices in active markets for identical assets		Significant observable inputs	Significant unobservable inputs
Asset category	Total		(Level 1)		(Level 2)	(Level 3)
Taiwan plan assets (a)	$	384	$	384	—	—
	$	384	$	384	—	—

(a) This category includes investments in the government of Taiwan’s pension fund. The government of Taiwan is responsible for the strategy and allocation of the investment contributions.

Cash Flows

The Company expects to make the following contributions and benefit payments:

(In thousands)	Contributions		Payments
2015	$	9	$	195
2016	—		129
2017	—		239
2018	—		264
2019	—		216
Years 2019-2023	—		2,297