EXHIBIT 99.1

Entegris Acquires Silicon Wafer and Reticle Carrier Product Lines from Asyst
Technologies

Entegris Strengthens Position in Materials Integrity Management with Strategic
Transaction; Asyst Sharpens Focus on Key Automation Technologies and Products

CHASKA, Minn, and FREMONT, Calif., February 11, 2003--Entegris, Inc. (Nasdaq:
ENTG), the materials integrity management company, and Asyst Technologies, Inc.
(Nasdaq NM: ASYT), a leading provider of integrated automation systems that
maximize semiconductor manufacturing productivity, today jointly announced that
Entegris has purchased Asyst's silicon wafer and reticle carrier product lines.
This transaction is designed to provide both companies with the opportunity to
leverage their core competencies and accelerate new product development within
the semiconductor industry.

Entegris enhances its comprehensive product and service offerings to customers
including: leading technologies and intellectual property; a best-in-class
engineering team; efficient and reliable manufacturing capabilities through
Entegris' world-class manufacturing operations; and a worldwide service and
support system enabled by a global infrastructure. In addition, Entegris and
Asyst will work on technological enhancements to bring next-generation wafer
carriers -- that interface with Asyst's and others' automation systems-- to the
semiconductor market.

Under terms of the agreement, Entegris will pay $38.75 million for all assets
associated with Asyst's wafer and reticle carrier product lines and intellectual
property. Entegris intends to hire key Asyst employees involved with these
product lines.

"Entegris has a long history of working closely with automation companies and
semiconductor manufacturers to both anticipate and meet the changing demands of
the industry," said Jim Dauwalter, Entegris' president and chief executive
officer. "After a series of working meetings with Asyst, we have come to an
agreement that will enable Entegris to provide even stronger support to the
semiconductor industry. We feel this accretive transaction will also lead to the
accelerated development of our next-generation products and allows Entegris to
continue to pursue our growth strategy. Adding this talent and technology to our
own creates a truly exciting opportunity to bring to market the kinds of
products that will improve our customers' efficiencies and capabilities."

"We are continuing to sharpen our focus, both by outsourcing to superior
manufacturing partners and by channeling our resources toward the key automation
technologies and markets that provide us with the greatest competitive
advantages," said Steve Schwartz, Asyst's chairman and chief executive officer.
"This agreement will ensure superior on-going support of our wafer and reticle
carrier customers, from a company that is not only an expert in manufacturing
but also has the capability to extend product design for the future. Entegris
knows these products and understands industry requirements, making this
transaction the best approach for our mutual customers."

Entegris and Asyst will host a conference call to provide additional details of
the agreement today at 5:30 p.m. EST. The call will be accessible by phone at
913-981-5582, access code 427770 or via webcast at www.entegris.com/investors.
For those who cannot listen to the live broadcast, a replay will be available
shortly after the call at the website or by dialing 888-203-1112, access code
427770 until Feb. 17, 2003.



ABOUT ENTEGRIS

Entegris products and services protect and transport the critical materials that
enable the world's leading technologies. Entegris is a leading materials
integrity management company providing products and services used from
production to consumption in the semiconductor, data storage, chemical
processing, pharmaceutical, fuel cell and other key technology-driven industries
worldwide.

Entegris is headquartered in Chaska, Minnesota, USA and has manufacturing
facilities in the United States, Germany, Japan and Malaysia and is ISO 9001
certified. Directly and through alliances with Metron Technology and other
distributors, Entegris provides customer support on six continents. Additional
information can be found at www.entegris.com


ABOUT ASYST

Asyst Technologies, Inc. is a leading provider of integrated automation systems
for the semiconductor manufacturing industry, which enable semiconductor
manufacturers to increase their manufacturing productivity and protect their
investment in silicon wafers during the manufacture of integrated circuits, or
ICs. Encompassing isolation systems, work-in-process materials management,
substrate-handling robotics, automated transport and loading systems, and
connectivity automation software, Asyst's modular, interoperable solutions allow
chipmakers and original equipment manufacturers, or OEMs, to select and employ
the value-assured, hands-off manufacturing capabilities that best suit their
needs. Asyst's homepage is http://www.asyst.com.


FORWARD-LOOKING STATEMENTS

Certain information in this news release does not relate to historical financial
information and may be deemed to constitute forward-looking statements within
the meaning of the Private Securities Litigation Reform Act of 1995. Such
statements are subject to certain risks and uncertainties that could cause the
company's actual results in the future to differ materially from its historical
results and those presently anticipated or projected.

Among these risks and uncertainties are general economic conditions, the
cyclical nature of the semiconductor industry, and the successful transition and
integration of the acquired product lines. Other factors that could cause the
Entegris' or Asyst's results to differ materially from those contained in its
forward-looking statements are included in the Form 10K filed for Entegris in
November 2002 and Asyst in June 2002 or in other documents filed by either
company with the Securities and Exchange Commission.