EX-21.1 3 0003.txt SUBSIDIARIES OF THE COMPANY EXHIBIT 21.1 LIST OF SUBSIDIARIES
--------------------------------------------------------------------------------------------------- Name of Subsidiary Jurisdiction of Incorporation Ownership --------------------------------------------------------------------------------------------------- Fluoroware, Inc. Minnesota 100% --------------------------------------------------------------------------------------------------- Empak, Inc. Minnesota 100% --------------------------------------------------------------------------------------------------- Empak (Entegris) Malaysia SDN BHD Malaysia 100% --------------------------------------------------------------------------------------------------- Empak Korea Yohan Hoesa Korea 100% --------------------------------------------------------------------------------------------------- Empak Hanbal Korea Korea 100% --------------------------------------------------------------------------------------------------- Entegris Europa, GmbH Germany 100% --------------------------------------------------------------------------------------------------- Nippon Fluoroware, K.K. Japan 51% --------------------------------------------------------------------------------------------------- Fluoroware PEI, Inc. Minnesota 100% --------------------------------------------------------------------------------------------------- Fluoroware Jamaica, FSC Jamaica 100% --------------------------------------------------------------------------------------------------- Fluoroware South East Asia, Ltd Pte Singapore 100% --------------------------------------------------------------------------------------------------- Fluoroware Valqua Japan, K.K. Japan 51% --------------------------------------------------------------------------------------------------- Entegris Upland, Inc. California 100% --------------------------------------------------------------------------------------------------- Oregon Labs, Inc. Oregon 96% ---------------------------------------------------------------------------------------------------