Business Combinations - Additional Information (Details) - USD ($) $ in Millions	Jun. 23, 2019	Jun. 30, 2019
Business Acquisition [Line Items]
Business acquisition number of shares receivable by shareholders	0.8042
Business acquisition, percentage of voting interests acquired	50.00%
Business combination termination fee payable by terminating party	$ 26.0
Business combination accrued direct costs associated with merger		$ 2.5
Nanometrics [Member]
Business Acquisition [Line Items]
Business acquisition, percentage of voting interests acquired	50.00%

Business acquisition equity interests received or receivable number of shares receivable.

No definition available.

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- Definition

Business combination accrued direct costs associated with merger.

+ References

No definition available.

+ Details

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- Definition

Business combination, termination fee payable.

+ References

No definition available.

+ Details

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Data Type:	xbrli:monetaryItemType
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- Definition

Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

+ References

No definition available.

+ Details

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- Definition

Percentage of voting equity interests acquired at the acquisition date in the business combination.

+ References

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 805
-SubTopic 10
-Section 50
-Paragraph 2
-Subparagraph (c)
-URI http://asc.fasb.org/extlink&oid=79982066&loc=d3e1392-128463

+ Details

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- Details

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