<SEC-DOCUMENT>0001564590-19-010568-index.html : 20190402
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<ACCEPTANCE-DATETIME>20190402150938
ACCESSION NUMBER:		0001564590-19-010568
CONFORMED SUBMISSION TYPE:	DEFA14A
PUBLIC DOCUMENT COUNT:		3
FILED AS OF DATE:		20190402
DATE AS OF CHANGE:		20190402
EFFECTIVENESS DATE:		20190402

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			RUDOLPH TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001094392
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				223531208
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		DEFA14A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-36226
		FILM NUMBER:		19724171

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		978-253-6200

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
</SEC-HEADER>
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<TYPE>DEFA14A
<SEQUENCE>1
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<DESCRIPTION>DEFA14A
<TEXT>
Document 1 - file: rtec-defa14a_20190515.htm

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<SEQUENCE>2
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<DESCRIPTION>GRAPHIC
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Document 2 - file: gyhww0l0hvv2000002.jpg

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<DOCUMENT>
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<SEQUENCE>3
<FILENAME>gyhww0l0hvv2000001.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 3 - file: gyhww0l0hvv2000001.jpg

</DOCUMENT>
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