<SEC-DOCUMENT>0001564590-19-010567-index.html : 20190402
<SEC-HEADER>0001564590-19-010567.hdr.sgml : 20190402
<ACCEPTANCE-DATETIME>20190402150604
ACCESSION NUMBER:		0001564590-19-010567
CONFORMED SUBMISSION TYPE:	DEF 14A
PUBLIC DOCUMENT COUNT:		20
CONFORMED PERIOD OF REPORT:	20190515
FILED AS OF DATE:		20190402
DATE AS OF CHANGE:		20190402
EFFECTIVENESS DATE:		20190402

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			RUDOLPH TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001094392
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				223531208
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		DEF 14A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-36226
		FILM NUMBER:		19724140

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		978-253-6200

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
</SEC-HEADER>
<DOCUMENT>
<TYPE>DEF 14A
<SEQUENCE>1
<FILENAME>rtec-def14a_20190515.htm
<DESCRIPTION>DEF 14A
<TEXT>
Document 1 - file: rtec-def14a_20190515.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>2
<FILENAME>gqny1evmtiw5000003.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 2 - file: gqny1evmtiw5000003.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>3
<FILENAME>gqny1evmtiw5000011.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 3 - file: gqny1evmtiw5000011.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>4
<FILENAME>gqny1evmtiw5000014.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 4 - file: gqny1evmtiw5000014.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>5
<FILENAME>gqny1evmtiw5000008.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 5 - file: gqny1evmtiw5000008.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>6
<FILENAME>gqny1evmtiw5000005.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 6 - file: gqny1evmtiw5000005.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>7
<FILENAME>gqny1evmtiw5000002.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 7 - file: gqny1evmtiw5000002.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>8
<FILENAME>gqny1evmtiw5000009.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 8 - file: gqny1evmtiw5000009.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>9
<FILENAME>gqny1evmtiw5000007.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 9 - file: gqny1evmtiw5000007.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>10
<FILENAME>gqny1evmtiw5000012.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 10 - file: gqny1evmtiw5000012.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>11
<FILENAME>gqny1evmtiw5000013.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 11 - file: gqny1evmtiw5000013.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>12
<FILENAME>gqny1evmtiw5000015.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 12 - file: gqny1evmtiw5000015.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>13
<FILENAME>gqny1evmtiw5000006.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 13 - file: gqny1evmtiw5000006.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>14
<FILENAME>gqny1evmtiw5000017.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 14 - file: gqny1evmtiw5000017.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>15
<FILENAME>gqny1evmtiw5000004.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 15 - file: gqny1evmtiw5000004.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>16
<FILENAME>gqny1evmtiw5000010.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 16 - file: gqny1evmtiw5000010.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>17
<FILENAME>gqny1evmtiw5000001.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 17 - file: gqny1evmtiw5000001.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>18
<FILENAME>gqny1evmtiw5000019.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 18 - file: gqny1evmtiw5000019.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>19
<FILENAME>gqny1evmtiw5000018.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 19 - file: gqny1evmtiw5000018.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>20
<FILENAME>gqny1evmtiw5000016.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 20 - file: gqny1evmtiw5000016.jpg

</DOCUMENT>
</SEC-DOCUMENT>