<SEC-DOCUMENT>0001564590-18-026065-index.html : 20181101
<SEC-HEADER>0001564590-18-026065.hdr.sgml : 20181101
<ACCEPTANCE-DATETIME>20181101112359
ACCESSION NUMBER:		0001564590-18-026065
CONFORMED SUBMISSION TYPE:	S-8 POS
PUBLIC DOCUMENT COUNT:		1
FILED AS OF DATE:		20181101
DATE AS OF CHANGE:		20181101
EFFECTIVENESS DATE:		20181101

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			RUDOLPH TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001094392
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				223531208
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		S-8 POS
		SEC ACT:		1933 Act
		SEC FILE NUMBER:	333-163240
		FILM NUMBER:		181152712

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		978-253-6200

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
</SEC-HEADER>
<DOCUMENT>
<TYPE>S-8 POS
<SEQUENCE>1
<FILENAME>rtec-s8pos.htm
<DESCRIPTION>S-8 POS
<TEXT>
Document 1 - file: rtec-s8pos.htm

</DOCUMENT>
</SEC-DOCUMENT>