Commitments and contingencies line items.

No definition available.

Name:	rtec_CommitmentsAndContingenciesLineItems
Namespace Prefix:	rtec_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Litigation suit not filed period subject to limited exceptions.

+ References

No definition available.

+ Details

Name:	rtec_LitigationSuitNotFiledPeriodSubjectToLimitedExceptions
Namespace Prefix:	rtec_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	duration

- Definition

Loss contingency settlement agreement entry date.

+ References

No definition available.

+ Details

Name:	rtec_LossContingencySettlementAgreementEntryDate
Namespace Prefix:	rtec_
Data Type:	xbrli:dateItemType
Balance Type:	na
Period Type:	duration

- Definition

Amount of damages awarded to the plaintiff in the legal matter plus interest.

+ References

No definition available.

+ Details

Name:	rtec_LossContingencydamagesAwardedValue2
Namespace Prefix:	rtec_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Definition

Maximum borrowing capacity percentage of eligible securities held at line of credit accessed.

+ References

No definition available.

+ Details

Name:	rtec_MaximumBorrowingCapacityPercentageOfEligibleSecuritiesHeldAtLineOfCreditAccessed
Namespace Prefix:	rtec_
Data Type:	num:percentItemType
Balance Type:	na
Period Type:	duration

- Definition

Number of litigations resolved.

+ References

No definition available.

+ Details

Name:	rtec_NumberOfLitigationsResolved
Namespace Prefix:	rtec_
Data Type:	xbrli:integerItemType
Balance Type:	na
Period Type:	duration

- Definition

Product warranty accrual warranty period.

+ References

No definition available.

+ Details

Name:	rtec_ProductWarrantyAccrualWarrantyPeriod
Namespace Prefix:	rtec_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	duration

- Definition

Withholding tax associated with settlement.

+ References

No definition available.

+ Details

Name:	rtec_WithholdingTaxAssociatedWithSettlement
Namespace Prefix:	rtec_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

The effective interest rate at the end of the reporting period.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 210
-SubTopic 10
-Section S99
-Paragraph 1
-Subparagraph (SX 210.5-02.19(b),22(b))
-URI http://asc.fasb.org/extlink&oid=6877327&loc=d3e13212-122682

+ Details

Name:	us-gaap_LineOfCreditFacilityInterestRateAtPeriodEnd
Namespace Prefix:	us-gaap_
Data Type:	num:percentItemType
Balance Type:	na
Period Type:	instant

- Definition

Amount of borrowing capacity currently available under the credit facility (current borrowing capacity less the amount of borrowings outstanding).

+ References

+ Details

Name:	us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Cash received for the settlement of litigation during the current period.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 45
-Paragraph 25
-Subparagraph (c)
-URI http://asc.fasb.org/extlink&oid=98514028&loc=d3e3536-108585

+ Details

Name:	us-gaap_ProceedsFromLegalSettlements
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Details

Name:	dei_LegalEntityAxis=rtec_CamtekLimitedMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_LitigationStatusAxis=us-gaap_SettledLitigationMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_SubsequentEventTypeAxis=us-gaap_SubsequentEventMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_IncomeTaxAuthorityNameAxis=us-gaap_IsraelTaxAuthorityMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_RangeAxis=us-gaap_MinimumMember
Namespace Prefix:
Data Type:	na
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- Details

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Commitments and Contingencies - Additional Information (Details) $ in Millions			3 Months Ended	9 Months Ended
	Oct. 31, 2017 USD ($)	Jul. 28, 2017 USD ($) Litigation	Sep. 30, 2017 USD ($)	Sep. 30, 2017 USD ($)
Commitments And Contingencies [Line Items]
Percentage of maximum borrowing capacity of value of eligible securities				70.00%
Available line of credit			$ 84.0	$ 84.0
Available interest rate on line of credit			2.80%	2.80%
Camtek [Member]
Commitments And Contingencies [Line Items]
Infringment and damages value		$ 14.6
Camtek [Member] \| Settlement Agreement [Member]
Commitments And Contingencies [Line Items]
Loss contingency settlement agreement entry date		Jul. 28, 2017
Number of litigations resolved \| Litigation		3
Number of periods agreed not to bring suit against each other			3 years
Camtek [Member] \| Settlement Agreement [Member] \| Subsequent Event
Commitments And Contingencies [Line Items]
Cash payment from Camtek	$ 13.0
Camtek [Member] \| Settlement Agreement [Member] \| Subsequent Event \| Israel Tax Authority [Member]
Commitments And Contingencies [Line Items]
Withholding tax associated with settlement	$ 2.3
Minimum [Member]
Commitments And Contingencies [Line Items]
Warranty period				12 months
Maximum [Member]
Commitments And Contingencies [Line Items]
Warranty period				15 months