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Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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<SEC-DOCUMENT>0001407682-10-000012.txt : 20100218
<SEC-HEADER>0001407682-10-000012.hdr.sgml : 20100218
<ACCEPTANCE-DATETIME>20100218085507
ACCESSION NUMBER:		0001407682-10-000012
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20100217
FILED AS OF DATE:		20100218
DATE AS OF CHANGE:		20100218

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			LITTLE NATHAN H
		CENTRAL INDEX KEY:			0001196447

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-27965
		FILM NUMBER:		10614795

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			RUDOLPH TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001094392
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				223531208
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		PO BOX 1000
		STREET 2:		ONE RUDOLPH RD
		CITY:			FLANDERS
		STATE:			NJ
		ZIP:			07836
		BUSINESS PHONE:		9736911300

	MAIL ADDRESS:	
		STREET 1:		PO BOX 1000
		STREET 2:		ONE RUDOLPH RD
		CITY:			FLANDERS
		STATE:			NJ
		ZIP:			07836
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>edgardoc.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0303</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2010-02-17</periodOfReport>

    <notSubjectToSection16>0</notSubjectToSection16>

    <issuer>
        <issuerCik>0001094392</issuerCik>
        <issuerName>RUDOLPH TECHNOLOGIES INC</issuerName>
        <issuerTradingSymbol>RTEC</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001196447</rptOwnerCik>
            <rptOwnerName>LITTLE NATHAN H</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>C/O RUDOLPH TECHNOLOGIES, INC.</rptOwnerStreet1>
            <rptOwnerStreet2>ONE RUDOLPH ROAD, PO BOX 1000</rptOwnerStreet2>
            <rptOwnerCity>FLANDERS</rptOwnerCity>
            <rptOwnerState>NJ</rptOwnerState>
            <rptOwnerZipCode>07836</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>1</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle>Exec. VP &amp; GM Inspection BU</officerTitle>
        </reportingOwnerRelationship>
    </reportingOwner>

    <nonDerivativeTable>
        <nonDerivativeTransaction>
            <securityTitle>
                <value>Common Stock</value>
                <footnoteId id="F1"/>
            </securityTitle>
            <transactionDate>
                <value>2010-02-17</value>
            </transactionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>S</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionAmounts>
                <transactionShares>
                    <value>22400</value>
                </transactionShares>
                <transactionPricePerShare>
                    <value>8.22</value>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>D</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>32594</value>
                    <footnoteId id="F2"/>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </nonDerivativeTransaction>
    </nonDerivativeTable>

    <footnotes>
        <footnote id="F1">The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on Aug 26, 2009.</footnote>
        <footnote id="F2">48,780 restricted stock units vested and are included in the amount of shares of common stock beneficially owned.</footnote>
    </footnotes>

    <ownerSignature>
        <signatureName>/s/ Nathan H. Little</signatureName>
        <signatureDate>2010-02-17</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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