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Form 4 - Statement of changes in beneficial ownership of securities:
SEC Accession No. 0001407682-10-000010
Filing Date
2010-02-16
Accepted
2010-02-16 16:40:44
Documents
1
Period of Report
2010-02-12

Document Format Files

Seq Description Document Type Size
1 PRIMARY DOCUMENT edgardoc.html 4  
1 PRIMARY DOCUMENT edgardoc.xml 4 10115
  Complete submission text file 0001407682-10-000010.txt   11934
Mailing Address PO BOX 1000 ONE RUDOLPH RD FLANDERS NJ 07836
Business Address PO BOX 1000 ONE RUDOLPH RD FLANDERS NJ 07836 9736911300
RUDOLPH TECHNOLOGIES INC (Issuer) CIK: 0001094392 (see all company filings)

IRS No.: 223531208 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3823 Industrial Instruments For Measurement, Display, and Control

Mailing Address MKS INSTRUMENTS, INC SIX SHATTUCK ROAD ANDOVER MA 01810
Business Address
BERLINGHIERI LEO (Reporting) CIK: 0001202738 (see all company filings)

Type: 4 | Act: 34 | File No.: 000-27965 | Film No.: 10608755