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Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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MIC-Info: RSA-MD5,RSA,
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<SEC-DOCUMENT>0001407682-09-000028.txt : 20090212
<SEC-HEADER>0001407682-09-000028.hdr.sgml : 20090212
<ACCEPTANCE-DATETIME>20090212135517
ACCESSION NUMBER:		0001407682-09-000028
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20090210
FILED AS OF DATE:		20090212
DATE AS OF CHANGE:		20090212

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			KHANNA AJAY
		CENTRAL INDEX KEY:			0001196446

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-27965
		FILM NUMBER:		09593670

	BUSINESS ADDRESS:	
		STREET 1:		ONE RUDOLPH RD.
		STREET 2:		P.O. BOX 1000
		CITY:			FLANDERS
		STATE:			NJ
		ZIP:			07836

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			RUDOLPH TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001094392
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				223531208
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		PO BOX 1000
		STREET 2:		ONE RUDOLPH RD
		CITY:			FLANDERS
		STATE:			NJ
		ZIP:			07836
		BUSINESS PHONE:		9736911300

	MAIL ADDRESS:	
		STREET 1:		PO BOX 1000
		STREET 2:		ONE RUDOLPH RD
		CITY:			FLANDERS
		STATE:			NJ
		ZIP:			07836
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>edgardoc.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0303</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2009-02-10</periodOfReport>

    <notSubjectToSection16>0</notSubjectToSection16>

    <issuer>
        <issuerCik>0001094392</issuerCik>
        <issuerName>RUDOLPH TECHNOLOGIES INC</issuerName>
        <issuerTradingSymbol>RTEC</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001196446</rptOwnerCik>
            <rptOwnerName>KHANNA AJAY</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>C/O RUDOLPH TECHNOLOGIES, INC.</rptOwnerStreet1>
            <rptOwnerStreet2>ONE RUDOLPH ROAD, PO BOX 1000</rptOwnerStreet2>
            <rptOwnerCity>FLANDERS</rptOwnerCity>
            <rptOwnerState>NJ</rptOwnerState>
            <rptOwnerZipCode>07836</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>1</isOther>
            <otherText>VP, International Accounts</otherText>
        </reportingOwnerRelationship>
    </reportingOwner>

    <nonDerivativeTable>
        <nonDerivativeTransaction>
            <securityTitle>
                <value>Common Stock - Performance-based Restricted Stock Unit</value>
                <footnoteId id="F1"/>
            </securityTitle>
            <transactionDate>
                <value>2009-02-10</value>
            </transactionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>A</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionAmounts>
                <transactionShares>
                    <value>4000</value>
                    <footnoteId id="F2"/>
                </transactionShares>
                <transactionPricePerShare>
                    <value>0</value>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>A</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>4152</value>
                    <footnoteId id="F3"/>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </nonDerivativeTransaction>
        <nonDerivativeTransaction>
            <securityTitle>
                <value>Common Stock - Restricted Stock Unit</value>
                <footnoteId id="F4"/>
            </securityTitle>
            <transactionDate>
                <value>2009-02-10</value>
            </transactionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>A</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionAmounts>
                <transactionShares>
                    <value>4000</value>
                    <footnoteId id="F5"/>
                </transactionShares>
                <transactionPricePerShare>
                    <value>0</value>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>A</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>11600</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </nonDerivativeTransaction>
    </nonDerivativeTable>

    <footnotes>
        <footnote id="F1">Each Performance-based Restricted Stock Unit represents a contingent right to receive one (1) share of RTEC Common Stock.</footnote>
        <footnote id="F2">20% of the shares of Common Stock subject to the Performance - based Restricted Stock Unit vest each year on the grant date; contingent upon the reporting person's having satisfied certain performance criteria approved by the Compensation Committee of the registrant's Board of Directors, and contingent upon the reporting person's continued employment with the registrant.  Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.</footnote>
        <footnote id="F3">The amount of shares indicated in direct beneficial ownership include an adjustment to the shares granted on May 27th, 2008 to reflect 9.5% of the performance criteria being met.</footnote>
        <footnote id="F4">Each Restricted Stock Unit represents a contingent right to receive one (1) share of RTEC Common Stock.</footnote>
        <footnote id="F5">20% of the shares of Common Stock subject to the Restricted Stock Unit vest each year on the grant date.  Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.</footnote>
    </footnotes>

    <ownerSignature>
        <signatureName>/s/ Ajay Khanna</signatureName>
        <signatureDate>2009-02-12</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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